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"Study on the Hierarchical Predictive Control of Semiconductor Silicon ..."

Yin Wan et al. (2023)

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DOI: 10.3390/S23052830

access: open

type: Journal Article

metadata version: 2023-03-28

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Yin Wan, Ding Liu, Jun-Chao Ren, Shi-Hai Wu:
Study on the Hierarchical Predictive Control of Semiconductor Silicon Single Crystal Quality Based on the Soft Sensor Model. Sensors 23(5): 2830 (2023)

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