"Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type ..."

Genki Yoshikawa et al. (2012)

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DOI: 10.3390/S121115873

access: open

type: Journal Article

metadata version: 2024-05-31

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Genki Yoshikawa, Terunobu Akiyama, Frédéric Loizeau, Kota Shiba, Sebastian Gautsch, Tomonobu Nakayama, Peter Vettiger, Nico F. de Rooij, Masakazu Aono:
Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity. Sensors 12(11): 15873-15887 (2012)

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