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"Achieving Optimal Cycle Time Improvement in a 300-mm Semiconductor Fab ..."

Dominique Mercier, Olivier Bonnin, Philippe Vialletelle (2003)

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DOI: 10.1177/0037549703256040

access: closed

type: Journal Article

metadata version: 2020-06-08

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Dominique Mercier, Olivier Bonnin, Philippe Vialletelle:
Achieving Optimal Cycle Time Improvement in a 300-mm Semiconductor Fab Using Dynamic Simulation and Design of Experiments. Simul. 79(3): 171-179 (2003)

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