"Dynamic Support Vector Regression Control System for Overlay Error ..."

Marzieh Khakifirooz, Chen Fu Chien, Ying-Jen Chen (2020)

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DOI: 10.1109/TASE.2019.2935179

access: closed

type: Journal Article

metadata version: 2020-04-02

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Marzieh Khakifirooz, Chen Fu Chien, Ying-Jen Chen:
Dynamic Support Vector Regression Control System for Overlay Error Compensation With Stochastic Metrology Delay. IEEE Trans Autom. Sci. Eng. 17(1): 502-512 (2020)

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