"Image-Guided Nanopositioning Scheme for SEM."

Naresh Marturi et al. (2018)

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DOI: 10.1109/TASE.2016.2580660

access: closed

type: Journal Article

metadata version: 2020-04-02

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Naresh Marturi, Brahim Tamadazte, Sounkalo Dembélé, Nadine Piat:
Image-Guided Nanopositioning Scheme for SEM. IEEE Trans Autom. Sci. Eng. 15(1): 45-56 (2018)

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