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"An Efficient Binary Integer Programming Model for Residency ..."

Yan Qiao et al. (2022)

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DOI: 10.1109/TASE.2021.3122576

access: closed

type: Journal Article

metadata version: 2022-07-25

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  - journals/tase/QiaoLLZWL22
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  - https://dblp.org/rec/journals/tase/QiaoLLZWL22
Yan Qiao, Yanjun Lu, Jie Li, Siwei Zhang, Naiqi Wu, Bin Liu:
An Efficient Binary Integer Programming Model for Residency Time-Constrained Cluster Tools With Chamber Cleaning Requirements. IEEE Trans Autom. Sci. Eng. 19(3): 1757-1771 (2022)

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