"Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure ..."

Zeyi Wu, Qingsong Xu (2019)

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DOI: 10.1109/TASE.2018.2875711

access: closed

type: Journal Article

metadata version: 2020-04-02

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Zeyi Wu, Qingsong Xu:
Design, Fabrication, and Testing of a New Compact Piezo-Driven Flexure Stage for Vertical Micro/Nanopositioning. IEEE Trans Autom. Sci. Eng. 16(2): 908-918 (2019)

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