"Discrete Relaxation Method for Triple Patterning Lithography Layout ..."

Xingquan Li, Ziran Zhu, Wenxing Zhu (2017)

Details and statistics

DOI: 10.1109/TC.2016.2582154

access: closed

type: Journal Article

metadata version: 2017-05-20

a service of  Schloss Dagstuhl - Leibniz Center for Informatics