"DAMO: Deep Agile Mask Optimization for Full-Chip Scale."

Guojin Chen et al. (2022)

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DOI: 10.1109/TCAD.2021.3116511

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type: Journal Article

metadata version: 2024-03-12

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Guojin Chen, Wanli Chen, Qi Sun, Yuzhe Ma, Haoyu Yang, Bei Yu:
DAMO: Deep Agile Mask Optimization for Full-Chip Scale. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 41(9): 3118-3131 (2022)

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