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"Graph-Based Subfield Scheduling for Electron-Beam Photomask Fabrication."

Shao-Yun Fang, Wei-Yu Chen, Yao-Wen Chang (2013)

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DOI: 10.1109/TCAD.2013.2237947

access: closed

type: Journal Article

metadata version: 2020-09-24

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  - journals/tcad/FangCC13
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  - https://dblp.org/rec/journals/tcad/FangCC13
Shao-Yun Fang, Wei-Yu Chen, Yao-Wen Chang:
Graph-Based Subfield Scheduling for Electron-Beam Photomask Fabrication. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 32(2): 189-201 (2013)

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