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"Novel Guiding Template and Mask Assignment for DSA-MP Hybrid Lithography ..."

Yi-Ting Lin, Iris Hui-Ru Jiang (2021)

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DOI: 10.1109/TCAD.2020.3033745

access: closed

type: Journal Article

metadata version: 2021-09-01

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Yi-Ting Lin, Iris Hui-Ru Jiang:
Novel Guiding Template and Mask Assignment for DSA-MP Hybrid Lithography Using Multiple BCP Materials. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 40(9): 1909-1919 (2021)

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