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"A simulation system for diffusive oxidation of silicon: a two-dimensional ..."

Ernst Rank, Ulrich Weinert (1990)

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DOI: 10.1109/43.55174

access: closed

type: Journal Article

metadata version: 2020-09-24

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Ernst Rank, Ulrich Weinert:
A simulation system for diffusive oxidation of silicon: a two-dimensional finite element approach. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 9(5): 543-550 (1990)

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