"Fast Pixelated Lithographic Source and Mask Joint Optimization Based on ..."

Zhiqiang Wang et al. (2020)

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DOI: 10.1109/TCI.2020.3000010

access: closed

type: Journal Article

metadata version: 2020-10-06

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Zhiqiang Wang, Xu Ma, Rui Chen, Shengen Zhang, Gonzalo R. Arce:
Fast Pixelated Lithographic Source and Mask Joint Optimization Based on Compressive Sensing. IEEE Trans. Computational Imaging 6: 981-992 (2020)

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