"Control of rapid thermal processing: a system theoretic approach."

Young Man Cho, Paul Gyugyi (1997)

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DOI: 10.1109/87.641407

access: closed

type: Journal Article

metadata version: 2020-06-08

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Young Man Cho, Paul Gyugyi:
Control of rapid thermal processing: a system theoretic approach. IEEE Trans. Control. Syst. Technol. 5(6): 644-653 (1997)

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