"Real-Time Control of Photoresist Extinction Coefficient Uniformity in the ..."

Arthur Tay, Weng Khuen Ho, Xiaodong Wu (2007)

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DOI: 10.1109/TCST.2006.883244

access: closed

type: Journal Article

metadata version: 2020-10-26

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Arthur Tay, Weng Khuen Ho, Xiaodong Wu:
Real-Time Control of Photoresist Extinction Coefficient Uniformity in the Microlithography Process. IEEE Trans. Control. Syst. Technol. 15(1): 99-105 (2007)

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