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"A hierarchical approach to production control of reentrant semiconductor ..."

Felipe D. Vargas-Villamil, Daniel E. Rivera, Karl G. Kempf (2003)

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DOI: 10.1109/TCST.2003.813368

access: closed

type: Journal Article

metadata version: 2020-06-08

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Felipe D. Vargas-Villamil, Daniel E. Rivera, Karl G. Kempf:
A hierarchical approach to production control of reentrant semiconductor manufacturing lines. IEEE Trans. Control. Syst. Technol. 11(4): 578-587 (2003)

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