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"High-Precision Incremental Capacitive Angle Encoder Developed by Micro ..."
Bo Hou et al. (2021)
- Bo Hou
, Bin Zhou
, Luying Yi
, Bowen Xing
, Xiang Li
, Qi Wei
, Rong Zhang
:
High-Precision Incremental Capacitive Angle Encoder Developed by Micro Fabrication Technology. IEEE Trans. Ind. Electron. 68(7): 6318-6327 (2021)

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