"Plasma Process Uniformity Diagnosis Technique Using Optical Emission ..."

In Joong Kim, Ilgu Yun (2016)

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DOI: 10.1109/TIE.2016.2571261

access: closed

type: Journal Article

metadata version: 2020-05-22

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In Joong Kim, Ilgu Yun:
Plasma Process Uniformity Diagnosis Technique Using Optical Emission Spectroscopy With Spatially Resolved Ring Lens. IEEE Trans. Ind. Electron. 63(9): 5674-5681 (2016)

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