"Bringing the Lab to the Fab: Robot-Based Inline Measurement System for ..."

Daniel Wertjanz et al. (2022)

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DOI: 10.1109/TIE.2022.3151959

access: closed

type: Journal Article

metadata version: 2022-05-18

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Daniel Wertjanz, Ernst Csencsics, Thomas Kern, Georg Schitter:
Bringing the Lab to the Fab: Robot-Based Inline Measurement System for Precise 3-D Surface Inspection in Vibrational Environments. IEEE Trans. Ind. Electron. 69(10): 10666-10673 (2022)

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