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"Design and Development of a Compact Flexure-Based $XY$ Precision ..."

Qingsong Xu (2014)

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DOI: 10.1109/TIE.2013.2257139

access: closed

type: Journal Article

metadata version: 2020-05-22

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Qingsong Xu:
Design and Development of a Compact Flexure-Based $XY$ Precision Positioning System With Centimeter Range. IEEE Trans. Ind. Electron. 61(2): 893-903 (2014)

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