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"A Rapid Vibration Reduction Method for Macro-Micro Composite Precision ..."

Lanyu Zhang et al. (2017)

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DOI: 10.1109/TIE.2016.2598812

access: closed

type: Journal Article

metadata version: 2023-09-30

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Lanyu Zhang, Jian Gao, Xin Chen, Hui Tang, Yun Chen, Yunbo He, Zhijun Yang:
A Rapid Vibration Reduction Method for Macro-Micro Composite Precision Positioning Stage. IEEE Trans. Ind. Electron. 64(1): 401-411 (2017)

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