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"Minimax Optimization for Recipe Management in High-Mixed Semiconductor ..."

Marzieh Khakifirooz et al. (2020)

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DOI: 10.1109/TII.2019.2957145

access: closed

type: Journal Article

metadata version: 2023-04-17

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Marzieh Khakifirooz, Chen Fu Chien, Mahdi Fathi, Panos M. Pardalos:
Minimax Optimization for Recipe Management in High-Mixed Semiconductor Lithography Process. IEEE Trans. Ind. Informatics 16(8): 4975-4985 (2020)

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