"A Holistic Self-Calibration Algorithm for xy Precision Metrology Systems."

Chuxiong Hu et al. (2012)

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DOI: 10.1109/TIM.2012.2187250

access: closed

type: Journal Article

metadata version: 2020-09-02

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Chuxiong Hu, Yu Zhu, Jinchun Hu, Ming Zhang, Dengfeng Xu:
A Holistic Self-Calibration Algorithm for xy Precision Metrology Systems. IEEE Trans. Instrum. Meas. 61(9): 2492-2500 (2012)

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