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"Development of a six-component miniature force sensor using silicon ..."

W. L. Jin, C. D. Mote (1998)

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DOI: 10.1109/19.744335

access: closed

type: Journal Article

metadata version: 2020-06-08

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W. L. Jin, C. D. Mote:
Development of a six-component miniature force sensor using silicon micromachining and conventional machining technologies [for microrobotics application]. IEEE Trans. Instrum. Meas. 47(3): 715-719 (1998)

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