"Frequency domain thickness measurement approach for microscale ..."

Chen Li, Cetin Cetinkaya (2006)

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DOI: 10.1109/TIM.2005.860866

access: closed

type: Journal Article

metadata version: 2020-06-08

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Chen Li, Cetin Cetinkaya:
Frequency domain thickness measurement approach for microscale multilayered structures. IEEE Trans. Instrum. Meas. 55(1): 206-211 (2006)

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