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"Dynamic neural control for a plasma etch process."

Jill P. Card, Debbie L. Sniderman, Casimir C. Klimasauskas (1997)

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DOI: 10.1109/72.595886

access: closed

type: Journal Article

metadata version: 2018-11-14

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Jill P. Card, Debbie L. Sniderman, Casimir C. Klimasauskas:
Dynamic neural control for a plasma etch process. IEEE Trans. Neural Networks 8(4): 883-901 (1997)

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