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"Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for ..."

Liping Bai et al. (2016)

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DOI: 10.1109/TSMC.2015.2501232

access: closed

type: Journal Article

metadata version: 2022-04-29

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Liping Bai, Naiqi Wu, Zhiwu Li, MengChu Zhou:
Optimal One-Wafer Cyclic Scheduling and Buffer Space Configuration for Single-Arm Multicluster Tools With Linear Topology. IEEE Trans. Syst. Man Cybern. Syst. 46(10): 1456-1467 (2016)

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