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"A Performance Tradeoff Function for Evaluating Suggested Parameters in the ..."

Henry C. W. Lau et al. (2009)

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DOI: 10.1109/TSMCA.2009.2019877

access: closed

type: Journal Article

metadata version: 2020-05-25

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Henry C. W. Lau, Cassandra X. H. Tang, B. P. K. Leung, Carman K. M. Lee, George T. S. Ho:
A Performance Tradeoff Function for Evaluating Suggested Parameters in the Reactive Ion Etching Process. IEEE Trans. Syst. Man Cybern. Part A 39(4): 933-938 (2009)

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