"Chamber Matching of Semiconductor Manufacturing Process Using Statistical ..."

Tian-Hong Pan, David Shan-Hill Wong, Shi-Shang Jang (2012)

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DOI: 10.1109/TSMCC.2011.2161669

access: closed

type: Journal Article

metadata version: 2020-05-21

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Tian-Hong Pan, David Shan-Hill Wong, Shi-Shang Jang:
Chamber Matching of Semiconductor Manufacturing Process Using Statistical Analysis. IEEE Trans. Syst. Man Cybern. Part C 42(4): 571-576 (2012)

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