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"Cut Mask Optimization With Wire Planning in Self-Aligned Multiple ..."

Shao-Yun Fang, Kuo-Hao Wu (2017)

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DOI: 10.1109/TVLSI.2016.2600681

access: closed

type: Journal Article

metadata version: 2020-03-11

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Shao-Yun Fang, Kuo-Hao Wu:
Cut Mask Optimization With Wire Planning in Self-Aligned Multiple Patterning Full-Chip Routing. IEEE Trans. Very Large Scale Integr. Syst. 25(2): 581-593 (2017)

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