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"Cut Mask Optimization With Wire Planning in Self-Aligned Multiple ..."
Shao-Yun Fang, Kuo-Hao Wu (2017)
- Shao-Yun Fang, Kuo-Hao Wu:
Cut Mask Optimization With Wire Planning in Self-Aligned Multiple Patterning Full-Chip Routing. IEEE Trans. Very Large Scale Integr. Syst. 25(2): 581-593 (2017)
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