"Microelectromechanical and Microfluidic Systems for Scanning Probe Lithography"

Xuefeng Wang (2005)

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DOI: —

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type: Book or Thesis

metadata version: 2023-09-18

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Xuefeng Wang:
Microelectromechanical and Microfluidic Systems for Scanning Probe Lithography. University of Illinois Urbana-Champaign, USA, 2005

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