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"Hf-Based High-k Dielectrics: Process Development, Performance ..."
Young-Hee Kim, Jack C. Lee (2006)
- Young-Hee Kim, Jack C. Lee:
Hf-Based High-k Dielectrics: Process Development, Performance Characterization, and Reliability. Synthesis Lectures on Solid State Materials and Devices, Morgan & Claypool Publishers 2006, ISBN 978-3-031-01424-6
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