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@inproceedings{DBLP:conf/nems/AbburiA19,
  author    = {Aditya Abburi and
               Visweswara Rao Abburi},
  title     = {Controlled synthesis of hydroxyapatite nanoparticles},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {300--303},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915677},
  doi       = {10.1109/NEMS.2019.8915677},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/AbburiA19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AbualsayedA19,
  author    = {Alsaeed Abualsayed and
               Mohamed Abdelgawad},
  title     = {Effect of Waveform of the Actuation Signal on Droplet Speed on Digital
               Microfluidic Devices},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {205--208},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915622},
  doi       = {10.1109/NEMS.2019.8915622},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/AbualsayedA19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AbualsayedAA19,
  author    = {Alsaeed Abualsayed and
               Sara Abouelmagd and
               Mohamed Abdelgawad},
  title     = {Nanoparticles Synthesis using Digital microfluidics},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {201--204},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915616},
  doi       = {10.1109/NEMS.2019.8915616},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/AbualsayedAA19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AkinsolaCHS19,
  author    = {Olaoluwa Akinsola and
               Ricardo Cardoza and
               Makayla Headley and
               Gymama Slaughter},
  title     = {Au-PET based Formaldehyde Vapor Sensor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {347--350},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915615},
  doi       = {10.1109/NEMS.2019.8915615},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/AkinsolaCHS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BadineBAHS19,
  author    = {Elie Badine and
               Mathieu Bardoux and
               Nadine Abboud and
               Ziad Herro and
               Abdelhak Hadj Sahraoui},
  title     = {Thermal Parameters Determination Through Thermoreflectance Measurements
               and Analysis},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {304--307},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915625},
  doi       = {10.1109/NEMS.2019.8915625},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/BadineBAHS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaingT19,
  author    = {Ya{-}Yu Chaing and
               Kai{-}Hong Tu},
  title     = {In Vitro Microfluidics-based Blood-brain Barrier Model},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {351--354},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915667},
  doi       = {10.1109/NEMS.2019.8915667},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChaingT19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenYCSF19,
  author    = {Donglei Chen and
               Zhan Yang and
               Tao Chen and
               Lining Sun and
               Toshio Fukuda},
  title     = {Cooperative Carbon Nanotube Nanomanipulation For Field Effect Transistor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {377--380},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915672},
  doi       = {10.1109/NEMS.2019.8915672},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChenYCSF19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Chongsuebsirikul19,
  author    = {Jidapa Chongsuebsirikul and
               Phichamon Sakdarat and
               Angkana Phongphut and
               Yoottapong Klinthingchai and
               Seeroong Prichanont and
               Chanchana Thanachayanont and
               Porpin Pungetmongkol},
  title     = {Copper Oxide Nanorods Electrodes For Organophosphate Pesticide Sensor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {520--523},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915604},
  doi       = {10.1109/NEMS.2019.8915604},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/Chongsuebsirikul19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuL19,
  author    = {Chenlei Chu and
               Xiaoping Liao},
  title     = {Analysis of {RF} {MEMS} Thermoelectric Power Sensors with Different
               Resistor Sizes},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {324--327},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915650},
  doi       = {10.1109/NEMS.2019.8915650},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChuL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuangLW19,
  author    = {Han{-}Sheng Chuang and
               Hsiao{-}Neng Lin and
               Jen{-}Yi Wang},
  title     = {Fluorescent Immunosensing Enhanced with a Bead-based Optoelectrokinetic
               Platform},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {130--134},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915631},
  doi       = {10.1109/NEMS.2019.8915631},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChuangLW19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CruzWC19,
  author    = {Michael T. Dela Cruz and
               Ling Wang and
               Hengky Chandrahalim},
  title     = {Free-spaced-coupled Liquid Crystalline Broadband Optoacoustic Sensors},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {80--83},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915630},
  doi       = {10.1109/NEMS.2019.8915630},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/CruzWC19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CruzWC19a,
  author    = {Michael T. Dela Cruz and
               Ling Wang and
               Hengky Chandrahalim},
  title     = {Statistically-designed Liquid Crystalline Molecular Cell Sensors},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {157--162},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915656},
  doi       = {10.1109/NEMS.2019.8915656},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/CruzWC19a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DarwishA19,
  author    = {Ahmed Darwish and
               Mohamed Abdelgawad},
  title     = {Numerical simulation of photothermally induced Marangoni flow around
               a microbubble},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {524--528},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915644},
  doi       = {10.1109/NEMS.2019.8915644},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/DarwishA19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Du0LYPX19,
  author    = {Panpan Du and
               Na Liu and
               Yuanyuan Liu and
               Tao Yue and
               Huayan Pu and
               Shaorong Xie},
  title     = {High-throughput Mechanical Phenotyping of Androgen-Sensitive and Nonsensitive
               Prostate Cancer Cells Using a Real-time Deformability Cytometry},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {427--431},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915635},
  doi       = {10.1109/NEMS.2019.8915635},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/Du0LYPX19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuLZZF19,
  author    = {Lidong Du and
               Jihang Liu and
               Yusi Zhu and
               Zhan Zhao and
               Zhen Fang},
  title     = {Optimization of the drive circuit for the sensitivity-enhanced film
               bulk acoustic resonator},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {76--79},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915663},
  doi       = {10.1109/NEMS.2019.8915663},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/DuLZZF19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FangWGZZJ19,
  author    = {Xudong Fang and
               Chen Wu and
               Xin Guo and
               Libo Zhao and
               Yulong Zhao and
               Zhuangde Jiang},
  title     = {Development of a 4H-SiC Piezoresistive Pressure Sensor for High Temperature
               Applications},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {105--109},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915652},
  doi       = {10.1109/NEMS.2019.8915652},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/FangWGZZJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FengCDCGF19,
  author    = {Yanmin Feng and
               Dixiao Chen and
               Yuguo Dai and
               Yunayuan Chen and
               De Gong and
               Lin Feng},
  title     = {The Design and Control of Magnetized Cell-Based Microrobot for Targeting
               Drug Delivery},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {273--276},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915608},
  doi       = {10.1109/NEMS.2019.8915608},
  timestamp = {Thu, 12 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/FengCDCGF19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FengLDZL19,
  author    = {Hengzhen Feng and
               Wenzhong Lou and
               Xuran Ding and
               Fuquan Zheng and
               Maohao Liao},
  title     = {Design and Testing of {MEMS} Metal Bridge Solid State Switch},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {122--127},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915643},
  doi       = {10.1109/NEMS.2019.8915643},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/FengLDZL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GaoM19,
  author    = {Xiang Gao and
               Xiaodan Miao},
  title     = {Dynamical modelling of the linear magnetic micro-actuator},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {4--9},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915682},
  doi       = {10.1109/NEMS.2019.8915682},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/GaoM19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GaoZCLOAW019,
  author    = {Qinwu Gao and
               Jinjie Zhang and
               Jing Chen and
               Zebang Luo and
               Olatunji Mumini Omisore and
               Yousef Al{-}Handarish and
               Lei Wang and
               Hui Li},
  title     = {Topological Design of Microchannel of EGaln based Super Stretchable
               Sensors},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {19--22},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915590},
  doi       = {10.1109/NEMS.2019.8915590},
  timestamp = {Tue, 07 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/GaoZCLOAW019.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GongZWNZ19,
  author    = {Huimin Gong and
               Changhui Zhao and
               Fei Wang and
               Gaoqiang Niu and
               Wei Zhang},
  title     = {Hierarchical Assembly of {\(\alpha\)}-Fe2O3 Nanorods on SnO2 Nanosheet
               Arrays for Acetone Detection at Sub-ppm Level},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {213--216},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915666},
  doi       = {10.1109/NEMS.2019.8915666},
  timestamp = {Tue, 10 Dec 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/GongZWNZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuY19,
  author    = {Chenyi Gu and
               Zhan Yang},
  title     = {Hundred body length velocity self-actuating platinum micromotor in
               {H2O2}},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {381--384},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915681},
  doi       = {10.1109/NEMS.2019.8915681},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/GuY19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HanZLYWJ19,
  author    = {Xiangguang Han and
               Libo Zhao and
               Xuejiao Li and
               Ping Yang and
               Hongyan Wang and
               Zhuangde Jiang},
  title     = {A High Accuracy Resonant Pressure Sensor with Lateral Driven and Piezoresistive
               Detection},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {167--171},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915599},
  doi       = {10.1109/NEMS.2019.8915599},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HanZLYWJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HansonDFSBS19,
  author    = {Brian D. Hanson and
               Adam Der and
               Morgan Freeman and
               Christopher Slaughter and
               Saikat Banerjee and
               Gymama Slaughter},
  title     = {Fabrication of a Wearable Temperature Sensing System for {CIPA} Patients},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {84--87},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915592},
  doi       = {10.1109/NEMS.2019.8915592},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HansonDFSBS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HouWWYYL19,
  author    = {Jing Hou and
               Chengdong Wu and
               Zhidong Wang and
               Shuai Yuan and
               Peng Yu and
               Tao Liu},
  title     = {{AFM} Nanomanipulation with Tip Morphology Estimation and Positioning
               Compensation},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {534--539},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915624},
  doi       = {10.1109/NEMS.2019.8915624},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HouWWYYL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuCLL19,
  author    = {Yu{-}Tang Hu and
               Kuo{-}Feng Chiu and
               Ting{-}Jeng Liu and
               Cheng{-}Yao Lo},
  title     = {Isotropic Nanophotonic Modulation with Hybrid Configuration for Surface
               Plasmon Resonance Application},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {52--55},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915606},
  doi       = {10.1109/NEMS.2019.8915606},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HuCLL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangH19,
  author    = {Hsiu{-}Kang Huang and
               Nien{-}Tsu Huang},
  title     = {A Microfluidic Microwell Device Integrating Surface-enhanced Raman
               Scattering for Rapid Antibiotic Susceptibility Test of Blood-Borne
               Pathogen},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {277--281},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915613},
  doi       = {10.1109/NEMS.2019.8915613},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HuangH19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLZ19,
  author    = {Yuan Huang and
               Lin Liu and
               Xin Zhao},
  title     = {A New Model for Simulating Spindle Asymmetric Division Mediated by
               Cortical Actin},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {342--346},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915676},
  doi       = {10.1109/NEMS.2019.8915676},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HuangLZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangZHZL19,
  author    = {Jiasheng Huang and
               Fengyi Zheng and
               Enqi He and
               Xing Zhang and
               Zhihong Li},
  title     = {A Flexible Chemical Battery Chip Activated by Finger Pressure},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {27--30},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915610},
  doi       = {10.1109/NEMS.2019.8915610},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HuangZHZL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangZLLZJ19,
  author    = {Linya Huang and
               Libo Zhao and
               Dejiang Lu and
               Zhikang Li and
               Yulong Zhao and
               Zhuangde Jiang},
  title     = {A Novel Resonator Based on In-plane Mode for Fluid Density and Viscosity
               Measurements},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {172--175},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915679},
  doi       = {10.1109/NEMS.2019.8915679},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/HuangZLLZJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuiWLXZ19,
  author    = {Dandan Hui and
               Yichuan Wu and
               Xin Li and
               Yuxiang Xiao and
               Min Zhang},
  title     = {Flexible Pressure Sensor Array with Tunable Measurement Range and
               High Sensitivity},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {196--200},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915651},
  doi       = {10.1109/NEMS.2019.8915651},
  timestamp = {Fri, 21 Aug 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuiWLXZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimHKLK19,
  author    = {Hanbi Kim and
               Joonki Hwang and
               Jin{-}Hwa Kim and
               Sangyeop Lee and
               Minhee Kang},
  title     = {Sensitive Detection of Multiple Fluoresence Probes based on Surface-enhanced
               Raman Scattering {(SERS)} for MERS-CoV},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {498--501},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915614},
  doi       = {10.1109/NEMS.2019.8915614},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/KimHKLK19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Kleist-RetzowBF19,
  author    = {Fabian T. von Kleist{-}Retzow and
               Malte Bartenwerfer and
               Sergej Fatikow},
  title     = {Liquid Metal-Based Manipulator for Microscale Handling Inside {SEM}},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {332--335},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915588},
  doi       = {10.1109/NEMS.2019.8915588},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/Kleist-RetzowBF19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KudoSTSE19,
  author    = {Hiroyuki Kudo and
               Yusuke Suzuki and
               Yoshiki Tojo and
               Haruna Saito and
               Keigo Enomoto},
  title     = {Sweat Lactic Acid Monitoring System using Adhesive Plaster-based Sweat
               Sampling Device},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {44--47},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915655},
  doi       = {10.1109/NEMS.2019.8915655},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/KudoSTSE19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LamLHLL19,
  author    = {Raymond H. W. Lam and
               Jiyu Li and
               Dinglong Hu and
               Chee Kent Lim and
               Patrick K. H. Lee},
  title     = {Single-Bacteria Isolation and Selective Extraction Based on Microfluidic
               Emulsion and Sequential Micro-Sieves},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {235--240},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915660},
  doi       = {10.1109/NEMS.2019.8915660},
  timestamp = {Sat, 05 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LamLHLL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LamYLH19,
  author    = {Raymond H. W. Lam and
               Chengpeng Yang and
               Vincent W. T. Li and
               Wei Huang},
  title     = {Micromixing-Enhanced Biosensing of Radioactivity Using Modified Deinococcus
               Radiodurans in Microfluidics},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {14--18},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915638},
  doi       = {10.1109/NEMS.2019.8915638},
  timestamp = {Sat, 05 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LamYLH19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiCGMSLLLJ19,
  author    = {Nan Li and
               Yihsiang Chiu and
               Dan Gong and
               Shenglin Ma and
               Yunheng Sun and
               Tingyu Li and
               Hungping Lee and
               Huguang Liu and
               Yufeng Jin},
  title     = {Thermal Effect of {PMUT} and Its Application to the Heat Dissipation
               of Power Electronics},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {540--544},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915654},
  doi       = {10.1109/NEMS.2019.8915654},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiCGMSLLLJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiGLCSMC19,
  author    = {Yunfei Li and
               Qiyu Guo and
               Huicong Liu and
               Tao Chen and
               Lining Sun and
               Xin Ma and
               Zhaohui Chen},
  title     = {Design and Experiment of an Ultra-Low Frequency Pendulum-Based Wave
               Energy Harvester},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {101--104},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915586},
  doi       = {10.1109/NEMS.2019.8915586},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiGLCSMC19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiJZLLZXGWZ19,
  author    = {Jie Li and
               Zhuangde Jiang and
               Libo Zhao and
               Dejiang Lu and
               Zhikang Li and
               Yihe Zhao and
               Tingzhong Xu and
               Shuaishuai Guo and
               Jiuhong Wang and
               Yulong Zhao},
  title     = {A Through-Hole Capacitive Micromachined Ultrasonic Transdcuer with
               High Perfromance},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {181--186},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915605},
  doi       = {10.1109/NEMS.2019.8915605},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiJZLLZXGWZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLZTBDX19,
  author    = {Yang Li and
               Ye Liu and
               Zhiqiang Zhang and
               Jianhua Tong and
               Chao Bian and
               Hanpeng Dong and
               Shanhong Xia},
  title     = {A Portable Sensor System for Detection of Copper Ions in Water Samples},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {385--388},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915637},
  doi       = {10.1109/NEMS.2019.8915637},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiLZTBDX19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCWWH19,
  author    = {Chi{-}Chen Lin and
               Jhih{-}Siang Chen and
               Chien{-}Lin Wu and
               Lon A. Wang and
               Nien{-}Tsu Huang},
  title     = {A Nanodisk Array Based Localized Surface Plasmon Resonance {(LSPR)}
               Sensor Fabricated by Laser Interference Lithography},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {217--220},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915617},
  doi       = {10.1109/NEMS.2019.8915617},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LinCWWH19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuDPZFZ19,
  author    = {Jihang Liu and
               Lidong Du and
               Yichen Pan and
               Yusi Zhu and
               Zhen Fang and
               Zhanzhao},
  title     = {Reducing the Effect of Parasitic Capacitance on the Micro-capacitive
               Humidity Sensor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {494--497},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915594},
  doi       = {10.1109/NEMS.2019.8915594},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiuDPZFZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuYD19,
  author    = {Qi Liu and
               Zhuoqing Yang and
               Guifu Ding},
  title     = {Palladium Sensitive Thin Film on Micro Hotplate for Fast Response/Recovery},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {462--465},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915670},
  doi       = {10.1109/NEMS.2019.8915670},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiuYD19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuZLXCWC19,
  author    = {Yulan Lu and
               Sen Zhang and
               Yadong Li and
               Bo Xie and
               Deyong Chen and
               Junbo Wang and
               Jian Chen},
  title     = {A High-sensitivity, Small-size Resonant Pressure Microsensor Based
               on Optimized Resonator-diaphragm Structure},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {488--491},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915640},
  doi       = {10.1109/NEMS.2019.8915640},
  timestamp = {Wed, 29 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LuZLXCWC19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LvSHZS19,
  author    = {Xiaoyong Lv and
               Xiaopeng Sha and
               Sheng Hu and
               Yuliang Zhao and
               Peng Shan},
  title     = {Principle Design and Analysis of {A} Novel Gyroscope Based on Charged
               Particle's Movement in Steady Uniform Magnetic Field},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {471--474},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915645},
  doi       = {10.1109/NEMS.2019.8915645},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LvSHZS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MopoungSOKWKS19,
  author    = {Kunpot Mopoung and
               Pattana Suwanyangyaun and
               Reiji Odanaka and
               Shohei Kosuga and
               Takeshi Watanabe and
               Shinji Koh and
               Sakuntam Sanorpim},
  title     = {A Real-Time Free Chlorine Monitoring by Graphene Field-Effect Transistor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {64--67},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915664},
  doi       = {10.1109/NEMS.2019.8915664},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/MopoungSOKWKS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MoussiAK19,
  author    = {Khalil Moussi and
               Mohammed AlDajani and
               J{\"{u}}rgen Kosel},
  title     = {Miniaturized Drug Delivery System for Biomedical Applications},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {97--100},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915621},
  doi       = {10.1109/NEMS.2019.8915621},
  timestamp = {Fri, 27 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/MoussiAK19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NguyenMEYBT19,
  author    = {Quoc Hung Nguyen and
               Christopher Mandla and
               Werner Emer and
               Feng Yu and
               Andrey Bakin and
               Marc Tornow},
  title     = {Organophosphonate Functionalization of Al2O3-Coated Nanopores},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {412--417},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915589},
  doi       = {10.1109/NEMS.2019.8915589},
  timestamp = {Sat, 05 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NguyenMEYBT19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiuLZH19,
  author    = {Jinchuan Niu and
               Zeyang Liu and
               Hongyong Zhang and
               Chengzhi Hu},
  title     = {Electrodeposition of Magnetic Alginate-poly-L-lysine Microcapsules
               for Targeted Drug Delivery},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {403--408},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915636},
  doi       = {10.1109/NEMS.2019.8915636},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/NiuLZH19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OmolewuSRMW19,
  author    = {Abayomi Omolewu and
               Guangyi Shi and
               Tian Ryan and
               Xiangbo Meng and
               Uchechukwu C. Wejinya},
  title     = {Optical and Atomic Force Microscopy Study of Noncovalently functionalized
               {CVD} Graphene},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {545--548},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915634},
  doi       = {10.1109/NEMS.2019.8915634},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/OmolewuSRMW19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OraonR19,
  author    = {Neha Oraon and
               Madhav Rao},
  title     = {Delay approximation for nanomagnetic logic based combinatorial circuits},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {68--71},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915607},
  doi       = {10.1109/NEMS.2019.8915607},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/OraonR19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OtaM19,
  author    = {Hiroki Ota and
               Ken Matsubara},
  title     = {Stretchable Helical Wire Made with Liquid Metal},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {48--51},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915633},
  doi       = {10.1109/NEMS.2019.8915633},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/OtaM19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PanT19,
  author    = {Meng{-}Ju Pan and
               Fan{-}Gang Tseng},
  title     = {Enhance Raman chip via nano-shield mechanism to form Nano-pillar array
               Structure Applied to liquid biopsy detection on oligonucleotide},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {88--92},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915623},
  doi       = {10.1109/NEMS.2019.8915623},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/PanT19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PanigrahiC19,
  author    = {Bivas Panigrahi and
               Chia{-}Yuan Chen},
  title     = {Enhanced Visible-Responsive Photodegradation Through SnFe2O4 Nanoparticles
               with Modified Magnetic Artificial Cilia Actuation},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {93--96},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915629},
  doi       = {10.1109/NEMS.2019.8915629},
  timestamp = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PanigrahiC19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PromwornPPP19,
  author    = {Yuttachon Promworn and
               Satjana Pattanasak and
               Chuchart Pintavirooj and
               Wibool Piyawattanametha},
  title     = {Comparisons of Pap Smear Classification with Deep Learning Models},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {282--285},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915600},
  doi       = {10.1109/NEMS.2019.8915600},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/PromwornPPP19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PulijalaA19,
  author    = {Vasu Pulijala and
               Syed Azeemuddin},
  title     = {Effects of Heating on the Performance of 70 nm Thick Domain Patterned
               Permalloy Incorporated {RF} Spiral Inductors},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {72--75},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915596},
  doi       = {10.1109/NEMS.2019.8915596},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/PulijalaA19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RameshAHKAM19,
  author    = {Salini Ramesh and
               Fadi Alnaimat and
               Ali Hilal{-}Alnaqbi and
               Saud Khashan and
               Anas Alazzam and
               Bobby Mathew},
  title     = {Mathematical Model of Microfluidic Devices Employing Dielectrophoresis
               for 3D-Focusing},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {187--191},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915593},
  doi       = {10.1109/NEMS.2019.8915593},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/RameshAHKAM19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShangWW19,
  author    = {Wanfeng Shang and
               Chunbao Wang and
               Zhengzhi Wu},
  title     = {Study of Hollow Nanoneedle's Mechanical Performance by Nanorobotic
               Manipulation System},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {366--369},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915671},
  doi       = {10.1109/NEMS.2019.8915671},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ShangWW19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SinghMDRS19,
  author    = {Mukta Singh and
               Rutusmita Mishra and
               Swati Dubey and
               Partha Roy and
               Rajesh P. Singh},
  title     = {Surface grafted core-shell chitosan-modified solid lipid nanoparticles:
               characterization and application in hydrophobic drug delivery},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {529--533},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915648},
  doi       = {10.1109/NEMS.2019.8915648},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/SinghMDRS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SongCZ19,
  author    = {Ziyang Song and
               Jian Cui and
               Qiancheng Zhao},
  title     = {A Silicon Resonant Accelerometer with Vibrating Beam Integrated with
               Comb Fingers Sensing Structure},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {477--481},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915674},
  doi       = {10.1109/NEMS.2019.8915674},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/SongCZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Sun0YXBC19,
  author    = {Zhiyong Sun and
               Ning Xi and
               Huiyang Yu and
               Yuxuan Xue and
               Sheng Bi and
               Liangliang Chen},
  title     = {Overcoming Positioning Uncertainty for AFM-based Nanorobots using
               Spiral Local Scan in Non-vector Space},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {447--450},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915662},
  doi       = {10.1109/NEMS.2019.8915662},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/Sun0YXBC19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TakeuchiYU19,
  author    = {Masaya Takeuchi and
               Akinobu Yamaguchi and
               Yuichi Utsumi},
  title     = {Anisotropic Pyrochemical Etching of {PTFE} by Synchrotron Radiation},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {418--422},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915627},
  doi       = {10.1109/NEMS.2019.8915627},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/TakeuchiYU19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TianLZHZLJ19,
  author    = {Bian Tian and
               Kaikai Li and
               Zhongkai Zhang and
               Feng Han and
               Na Zhao and
               Qijing Lin and
               Zhuangde Jiang},
  title     = {Optical Fiber {MEMS} Micro Pressure Sensor Based On Beam-membrane
               Structure},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {135--138},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915668},
  doi       = {10.1109/NEMS.2019.8915668},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/TianLZHZLJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TilegenSNBFX19,
  author    = {Madi Tilegen and
               Qinglei Sun and
               Ayan Nurkesh and
               Balnur Bazarbayeva and
               Haiyan Fan and
               Yingqiu Xie},
  title     = {Nanoscale pearl powder exhibits non-peroxidase activity, fluorescence
               and inhibits cell spreading of prostate cancer},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {269--272},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915658},
  doi       = {10.1109/NEMS.2019.8915658},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/TilegenSNBFX19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Torres-TorresSM19,
  author    = {C. Torres{-}Torres and
               M. A. Sanchez{-}Salazar and
               C. L. Mart{\'{\i}}nez{-}Gonz{\'{a}}lez and
               C. Mercado{-}Z{\'{u}}{\~{n}}iga},
  title     = {Nano-mechanic influence of the multi-photonic effects on metal decorated
               carbon nanostructures},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {221--224},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915583},
  doi       = {10.1109/NEMS.2019.8915583},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/Torres-TorresSM19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsaiLHLCHL19,
  author    = {Yi{-}Cheng Tsai and
               Wei{-}Ting Liu and
               Sheng{-}Po Haung and
               Wen{-}Bin Lee and
               Yuan{-}Jhe Chuang and
               Keng{-}Fu Hsu and
               Gwo{-}Bin Lee},
  title     = {Microfluidic Systems for Fast and Accurate Diagnosis of Ovarian Cancers},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {39--43},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915587},
  doi       = {10.1109/NEMS.2019.8915587},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/TsaiLHLCHL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Viveka19,
  author    = {B. R. Viveka},
  title     = {{SERS} Measurements On Platinum Nanoparticle Under Influence Of Oscillating
               Electric Dipole Field},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {328--331},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915632},
  doi       = {10.1109/NEMS.2019.8915632},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/Viveka19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WanWMGCCZ19,
  author    = {Ji Wan and
               Hao{-}Bin Wang and
               Li{-}Ming Miao and
               Hang Guo and
               Hao{-}Tian Chen and
               Xiao{-}Liang Cheng and
               Hai{-}Xia Zhang},
  title     = {An Active Temperature Sensor based on Encapsulated Flexible and Transparent
               Triboelectric Nanogenerator},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {229--232},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915649},
  doi       = {10.1109/NEMS.2019.8915649},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WanWMGCCZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCGMLLLJ19,
  author    = {Weili Wang and
               Yihsiang Chiu and
               Dan Gong and
               Shenglin Ma and
               Wen Lei and
               Hungping Lee and
               Huguang Liu and
               Yufeng Jin},
  title     = {Effect of Shared Cavity on Electromechanical Performance of Piezoelectric
               Based Micro-machined Ultrasonic Transducer Array},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {482--487},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915657},
  doi       = {10.1109/NEMS.2019.8915657},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangCGMLLLJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCGMYLLLJ19,
  author    = {Li Wang and
               Yihsiang Chiu and
               Dan Gong and
               Shenglin Ma and
               Yang Yang and
               Heng Li and
               Hungping Lee and
               Huguang Liu and
               Yufeng Jin},
  title     = {Fabrication Process and Performance Analysis of AlN based Piezoelectric
               Micromachined Ultrasonic Transducer with a Suspended Structure},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {514--519},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915602},
  doi       = {10.1109/NEMS.2019.8915602},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangCGMYLLLJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHLDZ19,
  author    = {Qinghua Wang and
               Qiuyue Huang and
               Zhiqiang Liao and
               Chunhui Du and
               Min Zhang},
  title     = {Asymmetric Langmuir-Blodgett and Hydrophilization Process to Realize
               Density-Controllable Carbon Nanotube Array on Flexible and Stretchable
               Substrates},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {23--26},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915601},
  doi       = {10.1109/NEMS.2019.8915601},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangHLDZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLLL19,
  author    = {Jinkui Wang and
               Wenzhong Lou and
               Weitong Liu and
               Peng Liu},
  title     = {Calibration of {MEMS} Based Inertial Measurement Unit Using Long Short-Term
               Memory Network},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {118--121},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915598},
  doi       = {10.1109/NEMS.2019.8915598},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangLLL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangXZY19,
  author    = {Lei Wang and
               Guangjun Xie and
               Renjun Zhu and
               Chen Yu},
  title     = {An Optimized Clocking Scheme for Nanoscale Quantum-dot Cellular Automata
               Circuit},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {336--341},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915595},
  doi       = {10.1109/NEMS.2019.8915595},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangXZY19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangYCSF19,
  author    = {Mingyu Wang and
               Zhan Yang and
               Tao Chen and
               Lining Sun and
               Toshio Fukuda},
  title     = {Motion control of nanomanipulation platform based on feedforward compensation
               inside {SEM}},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {370--374},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915647},
  doi       = {10.1109/NEMS.2019.8915647},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangYCSF19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZJLCM19,
  author    = {Lu Wang and
               Libo Zhao and
               Zhuangde Jiang and
               Xiang Li and
               Zihang Chen and
               Ryutaro Maeda},
  title     = {{MEMS} Piezoelectric Vibration Energy Harvester with In-Plane {PZT}
               Bimorph},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {355--359},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915611},
  doi       = {10.1109/NEMS.2019.8915611},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangZJLCM19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZLWLQ19,
  author    = {Fufu Wang and
               Lu Zhang and
               Wenzhong Lou and
               Dakui Wang and
               Long Li and
               Zhihong Qiao},
  title     = {Design and Parametric Analysis of the Threshold-Value Judging Mechanism
               in {MEMS} Security System},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {451--455},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915661},
  doi       = {10.1109/NEMS.2019.8915661},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangZLWLQ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeerasingheWDBT19,
  author    = {P. V. T. Weerasinghe and
               Nandula D. Wanasekara and
               D. G. K. Dissanayake and
               H. M. Ravindu T. Bandara and
               N. D. Tissera and
               R. N. Wijesena and
               K. M. N. de Silva and
               Anushanth Karalasingam},
  title     = {All Organic, Conductive Nanofibrous Twisted Yarns},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {308--311},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915591},
  doi       = {10.1109/NEMS.2019.8915591},
  timestamp = {Tue, 31 Mar 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeerasingheWDBT19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuLZXBSWZ19,
  author    = {Chenguang Wu and
               Genli Liu and
               Yuan Zhai and
               Yi Xiang and
               Junjie Bai and
               Jinliang Shi and
               Ying Wu and
               Fuzhong Zheng},
  title     = {Development of Gas Meter based on {MEMS} Thermal Flow Sensor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {192--195},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915641},
  doi       = {10.1109/NEMS.2019.8915641},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WuLZXBSWZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YamaguchiSOYIFS19,
  author    = {Akinobu Yamaguchi and
               Ikuya Sakurai and
               Ikuo Okada and
               Atsushi Yamaguchi and
               Mari Ishihara and
               Takao Fukuoka and
               Satoru Suzuki and
               Yuichi Utsumi},
  title     = {Study on three dimensional additive manufacturing process using X-ray
               radiolysis},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {139--142},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915620},
  doi       = {10.1109/NEMS.2019.8915620},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/YamaguchiSOYIFS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YongvanichJCP19,
  author    = {Niti Yongvanich and
               Tatpong Jitpagdee and
               Bussakorn Chukaew and
               Sunisa Papathe},
  title     = {Yellow ceramic pigments from amorphous nanosized oxides using rice
               husk and zircon},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {225--228},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915653},
  doi       = {10.1109/NEMS.2019.8915653},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/YongvanichJCP19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuSX019,
  author    = {Huiyang Yu and
               Zhiyong Sun and
               Yuxuan Xue and
               Ning Xi},
  title     = {Modeling and Analysis of Micro-bubble Stiffness Measured by Atomic
               Force Microscopy},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {209--212},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915642},
  doi       = {10.1109/NEMS.2019.8915642},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/YuSX019.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuZJWZJ19,
  author    = {Mingzhi Yu and
               Libo Zhao and
               Chen Jia and
               Hongyan Wang and
               Yulong Zhao and
               Zhuangde Jiang},
  title     = {A High-g Triaxial Piezoresistive Accelerometer with Sensing Beams
               in Pure Axial Deformation},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {176--180},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915619},
  doi       = {10.1109/NEMS.2019.8915619},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/YuZJWZJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuZZ19,
  author    = {Yewei Yu and
               Chen Zhang and
               Miaolei Zhou},
  title     = {{NARMAX} Modeling for Hysteresis of Magnetical Shape Memory Alloy
               Actuator},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {317--321},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915673},
  doi       = {10.1109/NEMS.2019.8915673},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/YuZZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangL19,
  author    = {Sen Zhang and
               Xiaoping Liao},
  title     = {The Test Structure to Measure Polysilicon Seebeck Coefficient for
               Thermoelectric-Photoelectric Integrated Generator},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {149--152},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915669},
  doi       = {10.1109/NEMS.2019.8915669},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangL19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangL19a,
  author    = {Sen Zhang and
               Xiaoping Liao},
  title     = {The Test Structures to Measure Resistivity and Contact Resistance
               of Poly-Si for Thermoelectric-Photoelectric Integrated Generator},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {443--446},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915618},
  doi       = {10.1109/NEMS.2019.8915618},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangL19a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLNH19,
  author    = {Hongyong Zhang and
               Zeyang Liu and
               Haochen Nan and
               Chengzhi Hu},
  title     = {Development of Retina Cell-laden Alginate Microbeads for Study of
               Glaucoma},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {143--148},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915628},
  doi       = {10.1109/NEMS.2019.8915628},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangLNH19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangTDLLZJ19,
  author    = {Zhongkai Zhang and
               Bian Tian and
               Zhe Du and
               Qijing Lin and
               Kaikai Li and
               Na Zhao and
               Zhuangde Jiang},
  title     = {Effect of Oxidation on Conductivity Characteristics of Tungsten-Rhenium
               Thin-Film Thermocouples Sensor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {114--117},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915680},
  doi       = {10.1109/NEMS.2019.8915680},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangTDLLZJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangTLNOIK19,
  author    = {Lan Zhang and
               Ryohei Takei and
               Jian Lu and
               Daiji Noda and
               Ryo Ohta and
               Toshihiro Itoh and
               Takeshi Kobayashi},
  title     = {Fabrication and Evaluation of {MEMS} Piezoelectric Vibration Sensor
               with Energy Harvesting Function},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {163--166},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915646},
  doi       = {10.1109/NEMS.2019.8915646},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangTLNOIK19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangWCYS19,
  author    = {Yunlin Zhang and
               Fengxia Wang and
               Tao Chen and
               Zhan Yang and
               Lining Sun},
  title     = {Flexible High-sensitive Pressure Sensor Based on Ionogels and Its
               Application In Monitoring The Human Motions},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {362--365},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915675},
  doi       = {10.1109/NEMS.2019.8915675},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangWCYS19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoJZHLLXGWZ19,
  author    = {Yihe Zhao and
               Zhuangde Jiang and
               Libo Zhao and
               Rahman Hebibul and
               Zhikang Li and
               Jie Li and
               Tingzhong Xu and
               Shuaishuai Guo and
               Jiuhong Wang and
               Yulong Zhao},
  title     = {Smith Matching for CMUTs-based Biochemical Resonant Sensor},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {312--316},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915626},
  doi       = {10.1109/NEMS.2019.8915626},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoJZHLLXGWZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLZZJ19,
  author    = {Man Zhao and
               Qijing Lin and
               Liangquan Zhu and
               Libo Zhao and
               Zhuangde Jiang},
  title     = {One kind of wide bandwidth and high radiation efficiency antenna for
               microwave manipulation of {NV} color centers},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {502--505},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915603},
  doi       = {10.1109/NEMS.2019.8915603},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoLZZJ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuangLHZZC19,
  author    = {J. H. Zhuang and
               Y. X. Liu and
               C. H. He and
               R. Z. Zhang and
               B. Zhou and
               X. Y. Cheng},
  title     = {Optimization Design Method of {MEMS-IMU} Structure},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {466--470},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915612},
  doi       = {10.1109/NEMS.2019.8915612},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuangLHZZC19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZimmermannH19,
  author    = {S{\"{o}}ren Zimmermann and
               Han Huang},
  title     = {Investigating the Effects of Electron Beam Irradiation on Nanoscale
               Adhesion},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {33--38},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915597},
  doi       = {10.1109/NEMS.2019.8915597},
  timestamp = {Mon, 09 Dec 2019 19:11:08 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZimmermannH19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/linZHZ19,
  author    = {Qijing Lin and
               Fuzheng Zhang and
               Feng Han and
               Man Zhao},
  title     = {Influence of surface roughness on the adhesion hysteresis of thin
               film},
  booktitle = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  pages     = {506--509},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://doi.org/10.1109/NEMS.2019.8915659},
  doi       = {10.1109/NEMS.2019.8915659},
  timestamp = {Tue, 10 Dec 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/linZHZ19.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/nems/2019,
  title     = {14th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2019, Bangkok, Thailand, April 11-14, 2019},
  publisher = {{IEEE}},
  year      = {2019},
  url       = {https://ieeexplore.ieee.org/xpl/conhome/8907345/proceeding},
  isbn      = {978-1-7281-1629-7},
  timestamp = {Mon, 09 Dec 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/2019.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BaiZ17,
  author    = {Minyu Bai and
               Yulong Zhao},
  title     = {Electrostatic force research concerning material property and electric
               condition by simulation and experiment},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {535--538},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017079},
  doi       = {10.1109/NEMS.2017.8017079},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BaiZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BartlSCT17,
  author    = {Johannes D. Bartl and
               Martin Stutzmann and
               Anna Cattani{-}Scholz and
               Marc Tornow},
  title     = {Synthesis and optimization of organic sensing platforms for label-free
               {DNA} detection},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {118--121},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016987},
  doi       = {10.1109/NEMS.2017.8016987},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BartlSCT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BerenschotSTTBE17,
  author    = {J. W. Berenschot and
               X. Sun and
               Hai Le The and
               R. M. Tiggelaar and
               M. J. de Boer and
               J. C. T. Eijkel and
               J. G. E. Gardeniers and
               N. R. Tas and
               Edin Sarajlic},
  title     = {Wafer-scale nanostructure formation inside vertical nano-pores},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {57--60},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016973},
  doi       = {10.1109/NEMS.2017.8016973},
  timestamp = {Sat, 16 Nov 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/BerenschotSTTBE17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BirolFCYT17,
  author    = {Semra Z. Birol and
               Rana Fucucuoglu and
               Sertac Cadirci and
               Ayca S. Yazgan and
               Levent Trabzon},
  title     = {Investigation on the effects of variable shear stress on monocyte
               cell morphology},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {239--242},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017015},
  doi       = {10.1109/NEMS.2017.8017015},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BirolFCYT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BroskiGKL17,
  author    = {Allison Broski and
               You Guo and
               Wasif A. Khan and
               Wen Li},
  title     = {Characteristics of {PEDOT:} {PSS} thin films spin-coated on {ITO}},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {243--247},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017016},
  doi       = {10.1109/NEMS.2017.8017016},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BroskiGKL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CaoCXSZ17,
  author    = {Xuan Cao and
               Yufeng Chen and
               Kaisi Xu and
               Weiguo Su and
               Wei Zhang},
  title     = {Research on a novel calibration method for high-g accelerometers},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {591--594},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017092},
  doi       = {10.1109/NEMS.2017.8017092},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CaoCXSZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangCC17,
  author    = {Yu{-}Lung Chang and
               Chen{-}Han Chuang and
               Ya{-}Yu Chiang},
  title     = {An adjustable liquid-liquid microfluidic extraction device},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {499--502},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017072},
  doi       = {10.1109/NEMS.2017.8017072},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangCC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaurasiaSB17,
  author    = {Saloni Chaurasia and
               Prosenjit Sen and
               Navakanta Bhat},
  title     = {Using dielectric droplets to improve sensitivity of capacitive sensors
               suitable for tactile sensing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {422--425},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017056},
  doi       = {10.1109/NEMS.2017.8017056},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChaurasiaSB17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenLLWZWNX17,
  author    = {Qi Chen and
               Cheng Li and
               Fei Lu and
               Chenkun Wang and
               Feilong Zhang and
               Albert Z. Wang and
               Jimmy Ng and
               Ya{-}Hong Xie},
  title     = {{TLP} measurement and analysis of graphene {NEMS} switches for on-chip
               {ESD} protection},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {370--374},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017044},
  doi       = {10.1109/NEMS.2017.8017044},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenLLWZWNX17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChoWCCCLJYT17,
  author    = {Wanying Cho and
               Yi Hsuan Weng and
               Hsin Ying Chen and
               Hsueh Yao Chu and
               Tzeon{-}Jye Chiou and
               Chien Ping Lin and
               Jeng{-}Kai Jiang and
               Chih{-}Yung Yang and
               Fan{-}Gang Tseng},
  title     = {CTCs detection by {SACA} chip and image analysis},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {360--363},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017042},
  doi       = {10.1109/NEMS.2017.8017042},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChoWCCCLJYT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChouWCCHCL17,
  author    = {Shan{-}Ying Chou and
               Jia{-}Han Wu and
               Shang{-}Ta Chou and
               Chia{-}Hui Chen and
               Wen{-}Yen Huang and
               Chen{-}Yu Chen and
               Gwo{-}Bin Lee},
  title     = {An integrated microfluidic system for automating multiplex allergy
               microarrays},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {434--437},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017059},
  doi       = {10.1109/NEMS.2017.8017059},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChouWCCHCL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuPZX17,
  author    = {Zhaozhi Chu and
               Chunrong Peng and
               Fengjie Zheng and
               Shanhong Xia},
  title     = {An electric field microsensor with metal-silicon structure},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {562--565},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017085},
  doi       = {10.1109/NEMS.2017.8017085},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChuPZX17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CostaTFCGF17,
  author    = {Margaret Costa and
               Mohammad Tarequzzaman and
               Ricardo Ferreira and
               Susana Cardoso and
               Jo{\~{a}}o Gaspar and
               Paulo P. Freitas},
  title     = {Towards high-resolution scanning magnetoresistance microscopy},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {73--76},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016977},
  doi       = {10.1109/NEMS.2017.8016977},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CostaTFCGF17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiDWZHWH17,
  author    = {Huanqing Cui and
               Xuemin Du and
               Juan Wang and
               Qilong Zhao and
               Yumei Hu and
               Tianzhun Wu and
               Mark S. Humayun},
  title     = {Thermal-induced three-dimensional shape transformations of hydrogel
               sheets},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {706--709},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017118},
  doi       = {10.1109/NEMS.2017.8017118},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CuiDWZHWH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DepaloSCIALCLFD17,
  author    = {N. Depalo and
               M. Striccoli and
               M. L. Curri and
               R. M. Iacobazzi and
               I. Arduino and
               V. Laquintana and
               A. Cutrignelli and
               A. Lopedota and
               M. Franco and
               N. Denora and
               L. Porcelli and
               A. Azzariti and
               G. Valente and
               E. Fanizza and
               S. Villa and
               F. Canepa},
  title     = {Drug delivery nanovectors based on {SPIONS} for targeted therapy of
               hepatocellular carcinoma},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {570--573},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017087},
  doi       = {10.1109/NEMS.2017.8017087},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DepaloSCIALCLFD17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DeviSS17,
  author    = {Lourembam Beloni Devi and
               Kundan Singh and
               Asutosh Srivastava},
  title     = {Study of substrate bias effect in Symmetric Lateral Bipolar Nano Scale
               Transistor on {SOI} for mixed signal applications},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {673--676},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017110},
  doi       = {10.1109/NEMS.2017.8017110},
  timestamp = {Fri, 17 Jul 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DeviSS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuGLZJ17,
  author    = {Jiehui Du and
               Yixuan Guo and
               Yiyu Lin and
               Xudong Zheng and
               Zhonghe Jin},
  title     = {A real-time temperature compensation algorithm for a force-rebalanced
               {MEMS} capacitive accelerometer based on resonant frequency},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {214--217},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017009},
  doi       = {10.1109/NEMS.2017.8017009},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DuGLZJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuLWLHNZ17,
  author    = {Songnan Du and
               Gongtan Li and
               Yan Wang and
               Chuan Liu and
               Pritesh Hiralal and
               Zanxiang Nie and
               Hang Zhou},
  title     = {Organolead trihalide perovskite as light absorber for {IGZO} phototransistor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {476--480},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017067},
  doi       = {10.1109/NEMS.2017.8017067},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DuLWLHNZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuWCZH17,
  author    = {Xuemin Du and
               Juan Wang and
               Huanqing Cui and
               Qilong Zhao and
               Yumei Hu},
  title     = {Fabrication of inverse opal beads based on biocompatible and biodegradable
               polymer},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {702--705},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017117},
  doi       = {10.1109/NEMS.2017.8017117},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DuWCZH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ErbYSLD17,
  author    = {Patrick D. Erb and
               Ashlyn T. Young and
               Shilpa Sivashankar and
               Frances S. Ligler and
               Michael A. Daniele},
  title     = {Uniform perfusion of fluid through microbores in a hydrogel scaffold
               using a microfluidic manifold device},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {607--610},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017096},
  doi       = {10.1109/NEMS.2017.8017096},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ErbYSLD17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/EsfahaniLA17,
  author    = {Mohammad Nasr Esfahani and
               Yusuf Leblebici and
               B. Erdem Alaca},
  title     = {Piezoresistivity characterization of silicon nanowires through monolithic
               {MEMS}},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {77--80},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016978},
  doi       = {10.1109/NEMS.2017.8016978},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/EsfahaniLA17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FanCYSWL17,
  author    = {Yanjun Fan and
               Can Cui and
               Huijun Yu and
               Wenjiang Shen and
               Zhi Wang and
               Jun Li},
  title     = {An electrostatic vertical comb-drive micromirror with self-aligned
               assembly},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {268--272},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017022},
  doi       = {10.1109/NEMS.2017.8017022},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FanCYSWL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FanWS17,
  author    = {Yu{-}Jui Fan and
               Yen{-}Ling Weng and
               Horn{-}Jiunn Sheen},
  title     = {High throughput and parallel flow cytometer using microball lens integrated
               3D microfluidic device},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {426--429},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017057},
  doi       = {10.1109/NEMS.2017.8017057},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FanWS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FangKSY17,
  author    = {Sheng{-}Po Fang and
               Kyoung{-}Tae Kim and
               Todd Schumann and
               Yong{-}Kyu Yoon},
  title     = {Fabrication of high-aspect-ratio nanoporous high-k MTiO3 (M= Ba, Sr,
               or BaxSr1-x) using anodization and hydrothermal processes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {235--238},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017014},
  doi       = {10.1109/NEMS.2017.8017014},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FangKSY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FengZHYL17,
  author    = {Yue Feng and
               Xinzhao Zhang and
               Yanhui Han and
               Zejie Yu and
               Wenzhong Lou},
  title     = {Airflow-driven rotary electret energy harvester},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {260--263},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017020},
  doi       = {10.1109/NEMS.2017.8017020},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FengZHYL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GaddamNRNN17,
  author    = {Venkateswarlu Gaddam and
               Nagarjuna Neella and
               K. Rajanna and
               Veera Pandi N and
               M. M. Nayak},
  title     = {Acoustic transducer based on ZnO nanorods},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {481--484},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017068},
  doi       = {10.1109/NEMS.2017.8017068},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GaddamNRNN17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GaoZJXGZZS17,
  author    = {Wendi Gao and
               Libo Zhao and
               Zhuangde Jiang and
               Yong Xia and
               Xin Guo and
               Zhiming Zhao and
               Yulong Zhao and
               Dong Sun},
  title     = {A novel {MEMS} force sensor based on Laterally Movable Gate Array
               Field Effect Transistor(LMGAFET)},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {723--727},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017122},
  doi       = {10.1109/NEMS.2017.8017122},
  timestamp = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GaoZJXGZZS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GhassemiS17,
  author    = {Zahra Ghassemi and
               Gymama Slaughter},
  title     = {Dynamic modeling of direct electron transfer {PQQ-GDH} MWCNTs bioanode
               function},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {383--387},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017047},
  doi       = {10.1109/NEMS.2017.8017047},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GhassemiS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GongGWTBX17,
  author    = {Shun Gong and
               Chengyao Gao and
               Jinfen Wang and
               Jianhua Tong and
               Chao Bian and
               Shanhong Xia},
  title     = {Electrochemical detection of toxic tetrabromobisphenol a with boron-doped
               diamond thin film electrode},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {579--582},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017089},
  doi       = {10.1109/NEMS.2017.8017089},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GongGWTBX17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuoHJZXZLXG17,
  author    = {Xin Guo and
               Rahman Hebibul and
               Zhuangde Jiang and
               Libo Zhao and
               Tingzhong Xu and
               Zhiming Zhao and
               Zhikang Li and
               Yu Xu and
               Wendi Gao},
  title     = {A novel piezoresistive sensitive structure for micromachined high-pressure
               sensors},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {728--731},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017123},
  doi       = {10.1109/NEMS.2017.8017123},
  timestamp = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuoHJZXZLXG17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HagiwaraNK17,
  author    = {Masaya Hagiwara and
               Rina Nobata and
               Tomohiro Kawahara},
  title     = {In vitro 3D culture platform for large-scale imaging by hybrid gel
               cube},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {467--470},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017066},
  doi       = {10.1109/NEMS.2017.8017066},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HagiwaraNK17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HanFYZL17,
  author    = {Yanhui Han and
               Yue Feng and
               Zejie Yu and
               Xinzhao Zhang and
               Wenzhong Lou},
  title     = {Electrical management circuit design in self-powered wireless sensor
               network},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {256--259},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017019},
  doi       = {10.1109/NEMS.2017.8017019},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HanFYZL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeBIL17,
  author    = {Yingning He and
               David Bourrier and
               Eric Imbernon and
               Thierry Leichle},
  title     = {Lateral porous silicon membranes with size and charge selectivity},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {770--773},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017132},
  doi       = {10.1109/NEMS.2017.8017132},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HeBIL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HerlambangSL17,
  author    = {Yusuf D. Herlambang and
               Jin{-}Cherng Shyu and
               Shun{-}Ching Lee},
  title     = {A numerical study on the performance of air-breathing microfluidic
               fuel cells},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {503--508},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017073},
  doi       = {10.1109/NEMS.2017.8017073},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HerlambangSL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiaoWLL17,
  author    = {Yu{-}Chun Hsiao and
               Chih{-}Hung Wang and
               Wen{-}Bin Lee and
               Gwo{-}Bin Lee},
  title     = {Automatic cell fusion using optically-induced dielectrophoresis and
               optically-induced localized electric field on a structure-free microfluidic
               chip},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {7--10},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016962},
  doi       = {10.1109/NEMS.2017.8016962},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiaoWLL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsuCLC17,
  author    = {ChingHung Hsu and
               Gui Chen and
               Yen{-}Heng Lin and
               Mark Ming{-}Cheng Cheng},
  title     = {Anodic bonding using Gorilla Glasses},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {566--569},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017086},
  doi       = {10.1109/NEMS.2017.8017086},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsuCLC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsuCW17,
  author    = {Chen{-}Pin Hsu and
               Pei{-}Chi Chen and
               Yu{-}Lin Wang},
  title     = {A novel packaging technology for disposable FET-based biosensors with
               microfluidic channels},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {375--378},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017045},
  doi       = {10.1109/NEMS.2017.8017045},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsuCW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuPHWWLW17,
  author    = {Yushen Hu and
               Zhuoteng Peng and
               Ziyu Huang and
               Yingchun Wu and
               Mingjiang Wang and
               Xinxin Li and
               Fei Wang},
  title     = {Event-driven wireless temperature sensor networks powered by air-flow
               based nanogenerator},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {410--413},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017053},
  doi       = {10.1109/NEMS.2017.8017053},
  timestamp = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuPHWWLW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuYHL17,
  author    = {Shuhuan Hu and
               Chengpeng Yang and
               Dinglong Hu and
               Raymond H. W. Lam},
  title     = {Microfluidic biosensing of viscoelastic properties of normal and cancerous
               human breast cells},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {90--95},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016981},
  doi       = {10.1109/NEMS.2017.8016981},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuYHL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangDP17,
  author    = {Haojie Huang and
               Vijay K. Dhir and
               Liang{-}ming Pan},
  title     = {Bubble profile reconstruction with miniaturized sensors in a microchannel},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {122--125},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016988},
  doi       = {10.1109/NEMS.2017.8016988},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangDP17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangHC17,
  author    = {Po{-}Wei Huang and
               Kuo{-}Yung Hung and
               Yun{-}Ju Chuang},
  title     = {Development of fully MEMS-compatible process on the flexible substrate},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {283--286},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017025},
  doi       = {10.1109/NEMS.2017.8017025},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangHC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangSCZMCZMBZ17,
  author    = {Jia{-}Huan Huang and
               Yu Song and
               Xue{-}Xian Chen and
               Xiao{-}Sheng Zhang and
               Li{-}Ming Miao and
               Hao{-}Tian Chen and
               Jin{-}Xin Zhang and
               Bo Meng and
               Juergen Brugger and
               Haixia Zhang},
  title     = {Flexible fabric-based wearable solid-state supercapacitor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {169--172},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016998},
  doi       = {10.1109/NEMS.2017.8016998},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangSCZMCZMBZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuiBTX17,
  author    = {Yun Hui and
               Chao Bian and
               Jianhua Tong and
               Shanhong Xia},
  title     = {Novel PEDOT-ionic liquid composite films modified Au microelectrodes
               for nitrite oxidation},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {627--630},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017101},
  doi       = {10.1109/NEMS.2017.8017101},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuiBTX17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HungLHEY17,
  author    = {Pei{-}Hsuan Hung and
               Wei{-}Chih Lin and
               Wan{-}Rou Huang and
               Mitsuhiro Ebara and
               I{-}Ting Yeh},
  title     = {Development and fabrication of imiquimod nanofiber mesh for melanoma
               treatment},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {202--205},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017006},
  doi       = {10.1109/NEMS.2017.8017006},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HungLHEY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/IngrossoPCASCBB17,
  author    = {C. Ingrosso and
               F. Petronella and
               R. Comparelli and
               A. Agostiano and
               M. Striccoli and
               M. L. Curri and
               G. V. Bianco and
               G. Bruno and
               V. Piffen and
               P. Guffanti and
               L. Falciola and
               I. Palchetti},
  title     = {TiO2 nanocrystals decorated {CVD} graphene for electroanalytical sensing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {603--606},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017095},
  doi       = {10.1109/NEMS.2017.8017095},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/IngrossoPCASCBB17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/IqbalSL17,
  author    = {Faisal Iqbal and
               Muhammad Ali Shah and
               Byeungleul Lee},
  title     = {Analysis of parasitic feed-through capacitance in {MEMS} gyroscope
               with push pull configuration},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {414--417},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017054},
  doi       = {10.1109/NEMS.2017.8017054},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/IqbalSL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JhangHYW17,
  author    = {Jin{-}Yu Jhang and
               Chin{-}Tsung Hsieh and
               Her{-}Terng Yau and
               Cheng{-}Chi Wang},
  title     = {Chaotic control and circuit implementation of the Atomic Force Microscope
               system},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {218--221},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017010},
  doi       = {10.1109/NEMS.2017.8017010},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JhangHYW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiaLWLZL17,
  author    = {Boliang Jia and
               Sam Hok Sum Lai and
               Feifei Wang and
               Lianqing Liu and
               Guanglie Zhang and
               Wen Jung Li},
  title     = {Fabrication of a probe-lens device for scanning super-resolution imaging
               platform},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {327--332},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017035},
  doi       = {10.1109/NEMS.2017.8017035},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiaLWLZL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangL17,
  author    = {Xue Jiang and
               Peter B. Lillehoj},
  title     = {Pneumatic microvalves fabricated by multi-material 3D printing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {38--41},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016969},
  doi       = {10.1109/NEMS.2017.8016969},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiangL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangWNYAD17,
  author    = {Huawei Jiang and
               Xinran Wang and
               Trevor M. Nolan and
               Yanhai Yin and
               Maneesha R. Aluru and
               L. Dong},
  title     = {Automated microfluidic plant chips-based plant phenotyping system},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {756--760},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017129},
  doi       = {10.1109/NEMS.2017.8017129},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiangWNYAD17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JoshiIS17,
  author    = {Shravanti Joshi and
               Samuel J. Ippolito and
               Manorama V. Sunkara},
  title     = {Hierarchical assembly of interleaved n-ZnO network and p-CuO for improved
               chemo-resistive {CO2} Gas sensing performance},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {137--142},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016991},
  doi       = {10.1109/NEMS.2017.8016991},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JoshiIS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JuknaSVMGSMSS17,
  author    = {Arturas Jukna and
               Jolanta Stupakova and
               Vaida Vasiliauskiene and
               Paulius Miskinis and
               Jonas Gradauskas and
               Algirdas Suziedelis and
               Andrius Maneikis and
               Kristina Sliuziene and
               Roman Sobolewski},
  title     = {Electric properties of Y-Ba-Cu-O micro-diodes based on asymmetrically
               narrowed mesas},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {155--159},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016995},
  doi       = {10.1109/NEMS.2017.8016995},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JuknaSVMGSMSS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KageyamaSZLTL17,
  author    = {Tomoaki Kageyama and
               Koichi Shinozaki and
               Lan Zhang and
               Jian Lu and
               Hideki Takaki and
               Sang{-}Seok Lee},
  title     = {An ohmic contact type {RF-MEMS} switch having Au-Au/CNTs contacts},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {287--290},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017026},
  doi       = {10.1109/NEMS.2017.8017026},
  timestamp = {Fri, 27 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/KageyamaSZLTL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KakatiD17,
  author    = {Abhijit Kakati and
               Soumen Das},
  title     = {Nano-structured gold strain gauge arrays on {PDMS} for highly sensitive
               nems pressure sensor skin},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {611--614},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017097},
  doi       = {10.1109/NEMS.2017.8017097},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KakatiD17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KalishLRBT17,
  author    = {Brent Kalish and
               James Luong and
               Jenna Roper and
               Chad Beaudette and
               Hideaki Tsutsui},
  title     = {Distance-based quantitative {DNA} detection in a paper-based microfluidic
               device},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {337--341},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017037},
  doi       = {10.1109/NEMS.2017.8017037},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KalishLRBT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangMYZRC17,
  author    = {Zhenye Kang and
               Jingke Mo and
               Gaoqiang Yang and
               Feng{-}Yuan Zhang and
               Scott T. Reterer and
               David A. Cullen},
  title     = {Micro/nano manufacturing of novel multifunctional layers for hydrogen
               production from water splitting},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {126--130},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016989},
  doi       = {10.1109/NEMS.2017.8016989},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KangMYZRC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KaoL17,
  author    = {Wei{-}Hsin Kao and
               Che{-}Hsin Lin},
  title     = {Low-cost pH, temperature and ion concentration sensors utilizing laser
               machined touch panel film},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {110--113},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016985},
  doi       = {10.1109/NEMS.2017.8016985},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KaoL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KazmiHCIHCY17,
  author    = {Syed N. R. Kazmi and
               Md Abdullah Al Hafiz and
               Karumbaiah N. Chappanda and
               Saad Ilyas and
               Jorge Holguin and
               Pedro M. F. J. Costa and
               Mohammad I. Younis},
  title     = {Nanoelectromechanical resonator for logic operations},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {11--15},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016963},
  doi       = {10.1109/NEMS.2017.8016963},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KazmiHCIHCY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KedambaimooleNG17,
  author    = {Vaishakh Kedambaimoole and
               Nagarjuna Neella and
               Venkateswarlu Gaddam and
               K. Rajanna and
               M. M. Nayak},
  title     = {Graphene-Nickel composite films on flexible {PCB} for temperature
               monitoring},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {173--176},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016999},
  doi       = {10.1109/NEMS.2017.8016999},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KedambaimooleNG17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KeelerJWZL17,
  author    = {Ethan G. Keeler and
               Peifeng Jing and
               Jingda Wu and
               Chen Zou and
               Lih Y. Lin},
  title     = {{MEMS} resonant mass sensor with enabled optical trapping},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {639--643},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017104},
  doi       = {10.1109/NEMS.2017.8017104},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KeelerJWZL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Kim17,
  author    = {Jungkwun Kim},
  title     = {Fabrication of highly-nanolaminated metal inductor core by pressing
               and punching},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {661--664},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017108},
  doi       = {10.1109/NEMS.2017.8017108},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Kim17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimODW17,
  author    = {Sungho Kim and
               Ece Isenbike Ozalp and
               Mohamed Darwish and
               Jeffrey A. Weldon},
  title     = {Electrically gated nanoporous membranes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {766--769},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017131},
  doi       = {10.1109/NEMS.2017.8017131},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KimODW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimY17,
  author    = {Ki{-}Hong Kim and
               Kwang{-}Seok Yun},
  title     = {Triboelectric energy harvester in hollow tube structure and its sensor
               property},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {25--28},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016966},
  doi       = {10.1109/NEMS.2017.8016966},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KimY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimYA17,
  author    = {Jungkwun Kim and
               Yong{-}Kyu Yoon and
               Mark G. Allen},
  title     = {Double-side exposure {UV-LED} {CNC} lithography for fine 3D microfabrication},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {463--466},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017065},
  doi       = {10.1109/NEMS.2017.8017065},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KimYA17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KleinRBC17,
  author    = {T. Klein and
               R. Rohlsberger and
               E. Burkel and
               O. Crisan},
  title     = {New concept for information storage in magnetic films exchange-coupled
               through non-magnetic layer},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {682--686},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017113},
  doi       = {10.1109/NEMS.2017.8017113},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KleinRBC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KucukalMSMG17,
  author    = {Erdem Kucukal and
               Debnath Maji and
               Michael A. Suster and
               Pedram Mohseni and
               Umut A. Gurkan},
  title     = {Monitoring blood coagulation using a surface-functionalized microfluidic
               dielectric sensor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {752--755},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017128},
  doi       = {10.1109/NEMS.2017.8017128},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KucukalMSMG17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KulkarniHSS17,
  author    = {Tanmay Kulkarni and
               Alex Holtschneider and
               Ressa Reneth Sarreal and
               Gymama Slaughter},
  title     = {Dynamic modeling of direct electron transfer {PQQ-GDH} MWCNTs bioanode
               function},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {379--382},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017046},
  doi       = {10.1109/NEMS.2017.8017046},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KulkarniHSS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KungMHCKC17,
  author    = {Yu{-}Chun Kung and
               Tianxing Man and
               Kuo{-}Wei Huang and
               William Chong and
               Jarett King and
               Pei{-}Yu Chiou},
  title     = {A high throughput electrorotation flow cytometer for single-cell analysis
               in continuous flows},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {355--359},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017041},
  doi       = {10.1109/NEMS.2017.8017041},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KungMHCKC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KuoWY17,
  author    = {Fang{-}Yu Kuo and
               Hua{-}Ling Wei and
               Da{-}Jeng Yao},
  title     = {{PM2.5} detection by cyclone separator combined with {SH-SAW} sensor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {248--251},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017017},
  doi       = {10.1109/NEMS.2017.8017017},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KuoWY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Lee17,
  author    = {Sang Heon Lee},
  title     = {Electrical and structural properties of YBaCuO oxides using melt growth
               process},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {808--811},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017141},
  doi       = {10.1109/NEMS.2017.8017141},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Lee17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeCFJY17,
  author    = {Choongyeop Lee and
               C{\'{e}}cile Cottin{-}Bizonne and
               Remy Fulcrand and
               Laurent Joly and
               Christophe Ybert},
  title     = {Influence of molecular-surface interactions on osmotic flow in nanochannels},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {252--255},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017018},
  doi       = {10.1109/NEMS.2017.8017018},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeCFJY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeCK17,
  author    = {Jin W. Lee and
               Min K. Cho and
               In H. Kim},
  title     = {Removal of 5nm contaminant particles using a supersonic {CO2} particle
               beam},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {181--184},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017001},
  doi       = {10.1109/NEMS.2017.8017001},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeCK17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeYL17,
  author    = {Wen{-}Bin Lee and
               Ju{-}Ching Yu and
               Gwo{-}Bin Lee},
  title     = {A new membrane-type microfluidic device for rapid bacteria isolation},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {430--433},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017058},
  doi       = {10.1109/NEMS.2017.8017058},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeYL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiBTBSXW17,
  author    = {Yang Li and
               Yin Bai and
               Jianhua Tong and
               Chao Bian and
               Jizhou Sun and
               Shanhong Xia and
               Jinfeng Wang},
  title     = {Microsensor integrated with ultramicroelectrode array for trace nitrate
               detection in potable water},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {515--520},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017075},
  doi       = {10.1109/NEMS.2017.8017075},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiBTBSXW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiHSZYM17,
  author    = {Fanya Li and
               Jiahui He and
               Wenjiang Shen and
               Peng Zhou and
               Huijun Yu and
               Fei Ma},
  title     = {A large size {MEMS} scanning mirror for speckle reduction application},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {539--543},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017080},
  doi       = {10.1109/NEMS.2017.8017080},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiHSZYM17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiHW17,
  author    = {Minglin Li and
               Haili Hu and
               Weidong Wang},
  title     = {Bending and vibration of monolayer MoS2 beams by molecular dynamics
               simulations},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {583--586},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017090},
  doi       = {10.1109/NEMS.2017.8017090},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiHW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiSWBTLX17,
  author    = {Yijin Li and
               Jizhou Sun and
               Jinfen Wang and
               Chao Bian and
               Jianhua Tong and
               Yang Li and
               Shanhong Xia},
  title     = {A rapid and sensitive {BOD} biosensor based on ultramicroelectrode
               array and carboxyl graphene},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {278--282},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017024},
  doi       = {10.1109/NEMS.2017.8017024},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiSWBTLX17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiSXZWH17,
  author    = {Tengyue Li and
               Bin Sun and
               Kai Xia and
               Qi Zeng and
               Tianzhun Wu and
               Mark S. Humayun},
  title     = {Design and fabrication of a high-density flexible microelectrode array},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {299--302},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017029},
  doi       = {10.1109/NEMS.2017.8017029},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiSXZWH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiWZFST17,
  author    = {Hui Li and
               Lei Wang and
               Jinyong Zhang and
               T. J. Flynn and
               Scott Stephens and
               Christine Trinkle},
  title     = {A simple creation of freestanding three-dimensional microstructures
               by aligned mask micromolding for biomedical applications},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {631--634},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017102},
  doi       = {10.1109/NEMS.2017.8017102},
  timestamp = {Tue, 07 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiWZFST17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZHLW17,
  author    = {Xiaodong Li and
               Di Zhou and
               Jiajun He and
               Xin Liu and
               Dong F. Wang},
  title     = {Mode-localized cantilever array for picogram order mass sensing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {587--590},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017091},
  doi       = {10.1109/NEMS.2017.8017091},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZHLW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZLC17,
  author    = {Enfu Li and
               Jiming Zhong and
               Boyang Li and
               Honglong Chang},
  title     = {A tilt sensor with a constant sensitivity output in the full measurement
               range},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {198--201},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017005},
  doi       = {10.1109/NEMS.2017.8017005},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZLC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZWLWC17,
  author    = {Wei Li and
               Xiaofeng Zhou and
               Jian Wu and
               Youling Lin and
               Ze Wang and
               Lu feng Che},
  title     = {A {MEMS} accelerometer with double-sided symmetrical folded-beams
               on single wafer},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {194--197},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017004},
  doi       = {10.1109/NEMS.2017.8017004},
  timestamp = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiZWLWC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCH17,
  author    = {Chih{-}Hung Lin and
               Shoou{-}Jinn Chang and
               Ting{-}Jen Hsueh},
  title     = {{WO3} nanoparticle with {MEMS} technology improve the sensing response
               by {HWCVD} system},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {190--193},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017003},
  doi       = {10.1109/NEMS.2017.8017003},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinCH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinMLZJ17,
  author    = {Yiyu Lin and
               Wei Ma and
               Siqi Liu and
               Xudong Zheng and
               Zhonghe Jin},
  title     = {A robust triangular-electrode based capacitive detection method for
               {MEMS} gyroscopes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {226--230},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017012},
  doi       = {10.1109/NEMS.2017.8017012},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinMLZJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinPTPMXL17,
  author    = {Tung{-}Yi Lin and
               Sina Parsnejad and
               Linlin Tu and
               Trey T. Pfeiffer and
               Andrew J. Mason and
               Guoliang Xing and
               Peter B. Lillehoj},
  title     = {Finger-powered microfluidic electrochemical assay for point-of-care
               testing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {313--317},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017032},
  doi       = {10.1109/NEMS.2017.8017032},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinPTPMXL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LingWPLCLX17,
  author    = {Biyun Ling and
               Yu Wang and
               Chunrong Peng and
               Bing Li and
               Zhaozhi Chu and
               Bin Li and
               Shanhong Xia},
  title     = {Design, fabrication and characterization of a single-chip three-dimensional
               electric field microsensor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {307--310},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017031},
  doi       = {10.1109/NEMS.2017.8017031},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LingWPLCLX17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiouL17,
  author    = {Jian{-}Chiun Liou and
               Wen{-}De Lin},
  title     = {Special chip designed and fabrication thermal bubble droplet generation
               of biological {DNA} gene},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {69--72},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016976},
  doi       = {10.1109/NEMS.2017.8016976},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiouL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiouL17a,
  author    = {Jian{-}Chiun Liou and
               Wen{-}De Lin},
  title     = {Micro-device array {LED} processes on {CMOS/MEMS} substrate},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {776--779},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017133},
  doi       = {10.1109/NEMS.2017.8017133},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiouL17a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCHL17,
  author    = {Ya Liu and
               Xin Cui and
               Dinglong Hu and
               Raymond H. W. Lam},
  title     = {Profiling multiple cytokine levels in a mixing-enhanced microfluidic
               immunoassay},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {442--447},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017061},
  doi       = {10.1109/NEMS.2017.8017061},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuCHL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCJCLSXL17,
  author    = {Chunxiu Liu and
               Haoyuan Cai and
               Jian Jia and
               Tianyang Cao and
               Yang Li and
               Jianhai Sun and
               Chenghua Xu and
               Chang Liu},
  title     = {A microfluidic three dimensional immunoassay biosensor for rapid detection
               of C-reaction protein},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {784--787},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017135},
  doi       = {10.1109/NEMS.2017.8017135},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuCJCLSXL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuHZYYJ17,
  author    = {Tong Liu and
               Chunhua He and
               Qiancheng Zhao and
               Zhenchuan Yang and
               Guizhen Yan and
               Yufeng Jin},
  title     = {Research on the Zero-Rate Output compensation for {MEMS} vibratory
               gyroscopes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {804--807},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017140},
  doi       = {10.1109/NEMS.2017.8017140},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuHZYYJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuJHCNNB17,
  author    = {Kun Liu and
               Yue Jiang and
               Ming Hao and
               Shulei Chen and
               Yingchao Ning and
               Jiuxin Ning and
               Dechun Ba},
  title     = {Study of cell-trap microfluidic chip for platinum drugs treating cancer
               cell tests},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {689--693},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017114},
  doi       = {10.1109/NEMS.2017.8017114},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuJHCNNB17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLW17,
  author    = {Meng Liu and
               Tie Li and
               Yuelin Wang},
  title     = {Low voltage field emission of Cu nanowire with nanogap in air},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {333--336},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017036},
  doi       = {10.1109/NEMS.2017.8017036},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuLW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuMLZJ17,
  author    = {Siqi Liu and
               Wei Ma and
               Yiyu Lin and
               Xudong Zheng and
               Zhonghe Jin},
  title     = {Comparison of {DSB} and {SSB} demodulation methods in general control
               system of {MEMS} gyroscopes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {222--225},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017011},
  doi       = {10.1109/NEMS.2017.8017011},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuMLZJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuT17,
  author    = {Tao{-}Chun Liu and
               Fan{-}Gang Tseng},
  title     = {Fabrication of PMMA-based mini-direct methanol fuel cell for portable
               devices},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {734--737},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017124},
  doi       = {10.1109/NEMS.2017.8017124},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuWYLLJCL17,
  author    = {Tse{-}Yen Liu and
               I{-}Shun Wang and
               Pei{-}Wen Yen and
               Shiang{-}Chi Lin and
               Kuan{-}Chou Lin and
               Jhu{-}Siang Jheng and
               Da{-}Yuan Chang and
               Chih{-}Ting Lin},
  title     = {CMOS-based biomolecular diagnosis platform},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {96--100},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016982},
  doi       = {10.1109/NEMS.2017.8016982},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuWYLLJCL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuXZWHXWCC17,
  author    = {Yulan Lu and
               Bo Xie and
               Lin Zhu and
               Qiuxu Wei and
               Chaochao He and
               Chao Xiang and
               Junbo Wang and
               Deyong Chen and
               Jian Chen},
  title     = {Reduction of the temperature sensitivity of anodic bonded resonant
               pressure micro sensors},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {816--819},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017143},
  doi       = {10.1109/NEMS.2017.8017143},
  timestamp = {Wed, 29 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LuXZWHXWCC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuoLGHJ17,
  author    = {Zhongliang Luo and
               Zhe Li and
               Chengchen Gao and
               Yilong Hao and
               Yufeng Jin},
  title     = {Anemometer for detection of very low speed air flow with three-dimensional
               directionality},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {615--618},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017098},
  doi       = {10.1109/NEMS.2017.8017098},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LuoLGHJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuoXLNHWZ17,
  author    = {Wen Luo and
               Xiaote Xu and
               Shiqiang Luo and
               Zanxiang Nie and
               Pritesh Hiralal and
               Yan Wang and
               Hang Zhou},
  title     = {The influence of fullerene-based interlayers on CH3NH3PbI3 Perovskite
               Photodetector},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {574--578},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017088},
  doi       = {10.1109/NEMS.2017.8017088},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LuoXLNHWZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaT17,
  author    = {Bo Ma and
               Steve Tung},
  title     = {{AFM} assisted {DNA} sequencing based on electronic tunneling},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {392--397},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017049},
  doi       = {10.1109/NEMS.2017.8017049},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MaT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MatthewsROG17,
  author    = {Kainalu Matthews and
               M. Arifur Rahman and
               Aaron T. Ohta and
               Maurice Garcia},
  title     = {Rapid measurement of impedance changes associated with developmental
               phases in Artemia cysts},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {346--350},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017039},
  doi       = {10.1109/NEMS.2017.8017039},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MatthewsROG17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MehboudiY17,
  author    = {Aryan Mehboudi and
               Junghoon Yeom},
  title     = {Numerical simulation of hybrid hydrodynamic-electrostatic ionic field-effect
               transistor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {761--765},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017130},
  doi       = {10.1109/NEMS.2017.8017130},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MehboudiY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MiaoCSCMZ17,
  author    = {Li{-}Ming Miao and
               Xiao{-}Liang Cheng and
               Yu Song and
               Hao{-}Tian Chen and
               Bo Meng and
               Haixia Zhang},
  title     = {A novel multi-functional self-powered pressure sensor with hierarchical
               wrinkle structure},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {114--117},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016986},
  doi       = {10.1109/NEMS.2017.8016986},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MiaoCSCMZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MoKYBZT17,
  author    = {Jingke Mo and
               Zhenye Kang and
               Gaoqiang Yang and
               William Barnhill and
               Feng{-}Yuan Zhang and
               Derrick Talley},
  title     = {Visualization on rapid and micro-scale dynamics of oxygen bubble evolution
               in PEMECs},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {101--105},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016983},
  doi       = {10.1109/NEMS.2017.8016983},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MoKYBZT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MoghimiLJ17,
  author    = {Mohammad J. Moghimi and
               Guangyun Lin and
               Hongrui Jiang},
  title     = {Highly absorptive nanophotonic structures on flexible substrates for
               infrared camouflage},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {21--24},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016965},
  doi       = {10.1109/NEMS.2017.8016965},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MoghimiLJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MohammadiC17,
  author    = {Ali Mohammadi and
               Bhaskar Choubey},
  title     = {Ultra high sensitivity in differential coupled micro/nano-resonator
               sensors},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {652--656},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017106},
  doi       = {10.1109/NEMS.2017.8017106},
  timestamp = {Thu, 13 Feb 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/MohammadiC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MohammadiCYK17,
  author    = {Ali Mohammadi and
               Bhaskar Choubey and
               Mehmet R. Yuce and
               Nemai C. Karmakar},
  title     = {An integrated magnetic programming technique for mechanical microresonators},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {485--488},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017069},
  doi       = {10.1109/NEMS.2017.8017069},
  timestamp = {Thu, 13 Feb 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/MohammadiCYK17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MurakamiIAHOI17,
  author    = {Sunao Murakami and
               Daisuke Ishihara and
               Masateru Araki and
               Tomoyoshi Horie and
               Naoto Ohira and
               Takahiro Ito},
  title     = {Microfabrication of hybrid structure composed of rigid silicon and
               flexible polyimide membranes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {840--843},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017145},
  doi       = {10.1109/NEMS.2017.8017145},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MurakamiIAHOI17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NaharMW17,
  author    = {Mun Mun Nahar and
               Hyejin Moon and
               Pavithra Wijethunga},
  title     = {Study of compound droplet dynamics and separation of immiscible liquids
               on {EWOD} {DMF}},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {694--697},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017115},
  doi       = {10.1109/NEMS.2017.8017115},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NaharMW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NaikRR17,
  author    = {Tejas R. Naik and
               M. Ravikanth and
               V. Ramgopal Rao},
  title     = {Vapor phase self-assembly of metal-porphyrins for controllable work
               function tuning},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {832--835},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017111},
  doi       = {10.1109/NEMS.2017.8017111},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NaikRR17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NakajimaCCKMTYM17,
  author    = {Hideaki Nakajima and
               Tso{-}Fu Mark Chang and
               Chun{-}Yi Chen and
               Toshifumi Konishi and
               Katsuyuki Machida and
               Hiroshi Toshiyoshi and
               Daisuke Yamane and
               Kazuya Masu and
               Masato Sone},
  title     = {A study on young's modulus of electroplated gold cantilevers for {MEMS}
               devices},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {264--267},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017021},
  doi       = {10.1109/NEMS.2017.8017021},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NakajimaCCKMTYM17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NeellaGRN17,
  author    = {Nagarjuna Neella and
               Venkateswarlu Gaddam and
               K. Rajanna and
               M. M. Nayak},
  title     = {Low cost, disposable and wearable body warmer using {RGO} sheets coated
               on cloth substrate as heating element},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {177--180},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017000},
  doi       = {10.1109/NEMS.2017.8017000},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NeellaGRN17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NgZXCMW17,
  author    = {Jimmy Ng and
               Wei Zhang and
               Ya{-}Hong Xie and
               Qi Chen and
               Rui Ma and
               Albert Z. Wang},
  title     = {Optimization of suspended graphene {NEMS} devices for electrostatic
               discharge applications},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {364--369},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017043},
  doi       = {10.1109/NEMS.2017.8017043},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NgZXCMW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OrenWWTJMNMSD17,
  author    = {Seval Oren and
               Zhaokui Wang and
               Xinran Wang and
               Shawana Tabassum and
               Yueyi Jiao and
               Byron J. Montgomery and
               Nathan M. Neihart and
               Colton M. McNinch and
               Patrick S. Schnable and
               Liang Dong},
  title     = {Tracking of water movement dynamics inside plants using leaf surface
               humidity sensors},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {402--405},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017051},
  doi       = {10.1109/NEMS.2017.8017051},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/OrenWWTJMNMSD17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PalapatiSBPS17,
  author    = {Naveen K. R. Palapati and
               Md. Ruhul A. Shikder and
               Bryan W. Byles and
               Ekaterina Pomerantseva and
               Arunkumar Subramanian},
  title     = {Electrochemically-correlated measurement of electronic transport in
               battery nanoelectrodes using single nanowire devices},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {143--146},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016992},
  doi       = {10.1109/NEMS.2017.8016992},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PalapatiSBPS17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PaulM17,
  author    = {Shubhodeep Paul and
               Hyejin Moon},
  title     = {Separation of binary solution by liquid-liquid microextraction on
               {EWOD} digital microfluidics},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {342--345},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017038},
  doi       = {10.1109/NEMS.2017.8017038},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PaulM17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QinZDDBB17,
  author    = {Feng Qin and
               Xiuyu Zhang and
               Yijia Du and
               Gang Dai and
               Leilei Bao and
               Jingfu Bao},
  title     = {High g-factor {MEMS} vibration platform for in-situ self-calibration
               of accelerometer},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {521--525},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017076},
  doi       = {10.1109/NEMS.2017.8017076},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/QinZDDBB17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RahmanO17,
  author    = {M. Arifur Rahman and
               Aaron T. Ohta},
  title     = {Parallel actuation of multiple bubble microrobots in saline solution
               in an open reservoir},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {738--741},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017125},
  doi       = {10.1109/NEMS.2017.8017125},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RahmanO17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RoddyHRH17,
  author    = {Morgan Roddy and
               Haden Hodges and
               Larry Roe and
               Adam Huang},
  title     = {Solid State Gas Generator for Small Satellite deorbiter},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {644--649},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017105},
  doi       = {10.1109/NEMS.2017.8017105},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RoddyHRH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RongioneHWH17,
  author    = {Nicolas Augustus Rongione and
               Huuduy Hguyen and
               Huan Wu and
               Yongjie Hu},
  title     = {Nanotechnology for lower grade waste heat recovery},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {826--831},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017146},
  doi       = {10.1109/NEMS.2017.8017146},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RongioneHWH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SKJ17,
  author    = {Krishnapriya S and
               Rama Komaragiri and
               Suja K. J},
  title     = {Non-spiral planar microcoils for biomedical applications},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {780--783},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017134},
  doi       = {10.1109/NEMS.2017.8017134},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SKJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SakamotoKKNSM17,
  author    = {Kosuke Sakamoto and
               Hiroyuki Kuwae and
               Naofumi Kobayashi and
               Atsuki Nobori and
               Shuichi Shoji and
               Jun Mizuno},
  title     = {Highly bendable transparent electrode using mesh patterned indium
               tin oxide for flexible electronic devices},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {323--326},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017034},
  doi       = {10.1109/NEMS.2017.8017034},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SakamotoKKNSM17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SalmanNT17,
  author    = {Zeina Salman and
               Arun Nair and
               Steve Tung},
  title     = {One-dimensional carbon chains as electrical sensors for single-stranded
               {DNA}},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {677--681},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017112},
  doi       = {10.1109/NEMS.2017.8017112},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SalmanNT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShaXYXC17,
  author    = {Jingjie Sha and
               Wei Xu and
               Zhishan Yuan and
               Bing Xu and
               Yunfei Chen},
  title     = {Fabrication of liquid-gated molybdenum disulfide field-effect transistor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {788--791},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017136},
  doi       = {10.1109/NEMS.2017.8017136},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShaXYXC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShenZCYCYSF17,
  author    = {Daming Shen and
               Yongde Zhang and
               Donglei Chen and
               Zhan Yang and
               Tao Chen and
               Lijun Yang and
               Lining Sun and
               Toshio Fukuda},
  title     = {Electron beam irradiation induced multi-walled carbon nanotubes fusion},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {61--64},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016974},
  doi       = {10.1109/NEMS.2017.8016974},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShenZCYCYSF17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiWL17,
  author    = {Qiongfeng Shi and
               Hao Wang and
               Chengkuo Lee},
  title     = {Using water as a self-generated triboelectric sensor for pressure
               and flow rate measurement},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {635--638},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017103},
  doi       = {10.1109/NEMS.2017.8017103},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShiWL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShinACW17,
  author    = {Dong Jin Shin and
               Pornpat Athamanolap and
               Liben Chen and
               Tza{-}Huei Wang},
  title     = {A mobile phone-operated droplet magnetofluidic assay platform for
               nucleic acid amplification testing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {494--498},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017071},
  doi       = {10.1109/NEMS.2017.8017071},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShinACW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SivashankarYELD17,
  author    = {Shilpa Sivashankar and
               Ashlyn T. Young and
               Patrick D. Erb and
               Frances S. Ligler and
               Michael A. Daniele},
  title     = {Characterizing the swelling of gelatin methacrylamide and effects
               on microscale tissue scaffold fabrication},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {554--557},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017083},
  doi       = {10.1109/NEMS.2017.8017083},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SivashankarYELD17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuTK17,
  author    = {Meng Su and
               Nobuyuki Takama and
               Beomjoon Kim},
  title     = {High-performance hybrid generator based on low frequency stochastic
               resonance},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {530--534},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017078},
  doi       = {10.1109/NEMS.2017.8017078},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SuTK17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunLCWCC17,
  author    = {Zhenyuan Sun and
               Guanglei Li and
               Lianhong Chen and
               Junbo Wang and
               Deyong Chen and
               Jian Chen},
  title     = {High-sensitivity electrochemical seismometers relying on parylene-based
               microelectrodes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {714--717},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017120},
  doi       = {10.1109/NEMS.2017.8017120},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunLCWCC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunMZLMQYWC17,
  author    = {Xilong Sun and
               Anjie Ming and
               Jing Zhang and
               Weibing Liu and
               Ying Meng and
               Dai Qin and
               Jun Yao and
               Weibing Wang and
               Dapeng Chen},
  title     = {Pyroelectric infrared detector based on LiTaO3 crystal with novelty
               nanostructured amorphous carbon film},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {623--626},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017100},
  doi       = {10.1109/NEMS.2017.8017100},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunMZLMQYWC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunTIT17,
  author    = {Tong Sun and
               Takashiro Tsukamoto and
               Tomohiro Ishikawa and
               Shuji Tanaka},
  title     = {System development of biosensing module using {CMOS} hall sensor array
               for disposable wireless diagnosis device},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {160--163},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016996},
  doi       = {10.1109/NEMS.2017.8016996},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunTIT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TaoC17,
  author    = {Guowei Tao and
               Bhaskar Choubey},
  title     = {On measuring variability and its effect on sensitivity of coupled
               nano/micro resonators},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {657--660},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017107},
  doi       = {10.1109/NEMS.2017.8017107},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TaoC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TianLBW17,
  author    = {Li Tian and
               Ling Li and
               Chuncheng Ban and
               Min Wu},
  title     = {Fabrication and characterization of TiO2 antireflection coatings with
               gradient-index},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {131--136},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016990},
  doi       = {10.1109/NEMS.2017.8016990},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TianLBW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TianLYLZ17,
  author    = {Bian Tian and
               Huafeng Li and
               Ning Yang and
               Hanyue Liu and
               Yulong Zhao},
  title     = {A MEMS-based flow sensor with membrane cantilever beam array structure},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {185--189},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017002},
  doi       = {10.1109/NEMS.2017.8017002},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TianLYLZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TianYZLZJJ17,
  author    = {Bian Tian and
               Qiuyue Yu and
               Zhongkai Zhang and
               Qijing Lin and
               Na Zhao and
               Weixuan Jing and
               Zhuangde Jiang},
  title     = {Measurement study of residual stress on tungsten-rhenium thin film
               thermocouples by nanoindentation technology},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {800--803},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017139},
  doi       = {10.1109/NEMS.2017.8017139},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TianYZLZJJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TingY17,
  author    = {Wan{-}Yu Ting and
               Tai{-}Fa Young},
  title     = {Characteristics of nano crystallite Te-Bi composited thermoelectrics
               for cooling by screen printing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {231--234},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017013},
  doi       = {10.1109/NEMS.2017.8017013},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TingY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TranGH17,
  author    = {Quochung Tran and
               Chengchen Gao and
               Yilong Hao},
  title     = {Design of an ultra-low pressure sensor based on the growth of graphene
               on silicon dioxide surface},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {526--529},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017077},
  doi       = {10.1109/NEMS.2017.8017077},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TranGH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsaiHHSHL17,
  author    = {Wei{-}Chun Tsai and
               Lien{-}Yu Hung and
               Teng{-}Yi Huang and
               Yen{-}Shen Shan and
               Shang{-}Cheng Hung and
               Gwo{-}Bin Lee},
  title     = {A microfluidic system for detection of cholangiocarcinoma cells by
               using heparan sulfate octasaccharides},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {489--493},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017070},
  doi       = {10.1109/NEMS.2017.8017070},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TsaiHHSHL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsengJHLHY17,
  author    = {Hsueh{-}Yang Tseng and
               Yi{-}Ting Jiang and
               Cheng{-}Yeh Huang and
               Meng{-}Shiue Lee and
               Wensyang Hsu and
               Da{-}Jeng Yao},
  title     = {Bead-based digital microfluidic immunoassay for IL-1{\(\beta\)} detection
               in embryo culture medium},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {295--298},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017028},
  doi       = {10.1109/NEMS.2017.8017028},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TsengJHLHY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsengLW17,
  author    = {Yu{-}Ting Tseng and
               Ching{-}Wen Li and
               Gou{-}Jen Wang},
  title     = {Fabrication of biocompatible ordered iron oxide nanopillars for the
               observation of cell behavior},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {47--52},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016971},
  doi       = {10.1109/NEMS.2017.8016971},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TsengLW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TuLLH17,
  author    = {Cheng Tu and
               Chin{-}Liang Liu and
               Meng{-}Shiue Lee and
               Wensyang Hsu},
  title     = {Passive and wireless strain sensor based on {LC} circuit with lamination
               fabrication},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {303--306},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017030},
  doi       = {10.1109/NEMS.2017.8017030},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TuLLH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TungL17,
  author    = {Steve Tung and
               Gwo{-}Bin Vincent Lee},
  title     = {Welcome message},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017151},
  doi       = {10.1109/NEMS.2017.8017151},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TungL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TungWJ17,
  author    = {Yen{-}Ting Tung and
               Gou{-}Jen Wang and
               Jyh{-}Cherng Ju},
  title     = {In vitro development of microvascular networks with a cylindrical
               fibrin scaffold},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {53--56},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016972},
  doi       = {10.1109/NEMS.2017.8016972},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TungWJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TzengCCPT17,
  author    = {Yung{-}Chin Tzeng and
               Yueh{-}Jen Chen and
               Chang Chuan and
               Li{-}Chen Pan and
               Fan{-}Gang Tseng},
  title     = {Microfluidic devices for aiding in-vitro fertilization technique},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {147--150},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016993},
  doi       = {10.1109/NEMS.2017.8016993},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TzengCCPT17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/VollenbroekBBON17,
  author    = {J. C. Vollenbroek and
               J. G. Bomer and
               A. van den Berg and
               M. Odijk and
               A. E. Nieuwelink and
               B. M. Weckhuysen and
               R. G. Geitenbeek and
               A. Meijerink and
               R. M. Tiggelaar},
  title     = {Design and characterization of a microreactor for monodisperse catalytic
               droplet generation at both elevated temperatures and pressures},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {746--751},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017127},
  doi       = {10.1109/NEMS.2017.8017127},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/VollenbroekBBON17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangBCW17,
  author    = {Hai Wang and
               Yang Biao and
               Yang Chunlai and
               Li Wen},
  title     = {Simulation of {AFM} indentation of soft biomaterials with hyperelasticity},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {550--553},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017082},
  doi       = {10.1109/NEMS.2017.8017082},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangBCW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangBCW17a,
  author    = {Hai Wang and
               Yan Biao and
               Yang Chunlai and
               Li Wen},
  title     = {Electrical and optical diagnostic of ferroelectric micro-plasma thruster},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {792--795},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017137},
  doi       = {10.1109/NEMS.2017.8017137},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangBCW17a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCLLWZWNXMWL17,
  author    = {Albert Z. Wang and
               Qi Chen and
               Cheng Li and
               Fei Lu and
               Chenkun Wang and
               Feilong Zhang and
               X. Shawn Wang and
               Jimmy Ng and
               Ya{-}Hong Xie and
               Rui Ma and
               Li Wang and
               Lin Lin},
  title     = {More-Than-Moore: 3D heterogeneous integration into {CMOS} technologies},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {1--4},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016961},
  doi       = {10.1109/NEMS.2017.8016961},
  timestamp = {Tue, 14 Jul 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangCLLWZWNXMWL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCYCKE17,
  author    = {Pang{-}Lun Wang and
               Jhih{-}Syuan Ciou and
               Lung{-}Jieh Yang and
               Yung{-}Chiang Chung and
               Niroj Kapri and
               Balasubramanian Esakki},
  title     = {A new vortex-based device using dragonfly wing to reduce the chip
               size},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {81--84},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016979},
  doi       = {10.1109/NEMS.2017.8016979},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangCYCKE17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangJWD17,
  author    = {Xinran Wang and
               Huawei Jiang and
               Yifei Wang and
               Liang Dong},
  title     = {Generation of temperature gradient on microfluidic plant chip for
               high-throughput plant phenotyping},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {398--401},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017050},
  doi       = {10.1109/NEMS.2017.8017050},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangJWD17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangL17,
  author    = {Li{-}Wen Wang and
               Cheng{-}Yao Lo},
  title     = {Morphology and conductivity enhancement of metal mesh in OLEDs by
               near infrared and intense pulse light},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {34--37},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016968},
  doi       = {10.1109/NEMS.2017.8016968},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLL17,
  author    = {Chun Min Wang and
               Yu{-}Ting Lin and
               Che Hsin Lin},
  title     = {Monitoring of micro-stamping procedures utilizing {MEMS} microphones
               under acoustic vibration transduction},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {106--109},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016984},
  doi       = {10.1109/NEMS.2017.8016984},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZZZW17,
  author    = {Peng Wang and
               Yulong Zhao and
               You Zhao and
               Qi Zhang and
               Zixi Wang},
  title     = {High performance piezoresistive accelerometer based on the slot etching
               in the EB(eight-beam) structure},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {406--409},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017052},
  doi       = {10.1109/NEMS.2017.8017052},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangZZZW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiHZYY17,
  author    = {Xianglei Wei and
               Chunhua He and
               Qiancheng Zhao and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {Research on the ring-diode based readout circuit for {MEMS} vibratory
               gyroscopes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {619--622},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017099},
  doi       = {10.1109/NEMS.2017.8017099},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeiHZYY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuGCL17,
  author    = {Ting{-}Wei Wu and
               Chia{-}Hong Gao and
               Fan{-}En Chen and
               Chih{-}Ting Lin},
  title     = {Impedance spectroscopy for microfluidic particle-analyzing device
               with spatial-coplanar electrode design},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {85--89},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016980},
  doi       = {10.1109/NEMS.2017.8016980},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuGCL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuLC17,
  author    = {Li{-}An Wu and
               Wei{-}En Li and
               Yih{-}Fan Chen},
  title     = {DNA-assisted assembly of plasmonic core-satellite nanostructures for
               surface-enhanced Raman spectroscopy {(SERS)}},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {206--209},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017007},
  doi       = {10.1109/NEMS.2017.8017007},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuLC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuMCL17,
  author    = {Jia{-}Han Wu and
               Yu{-}Dong Ma and
               Yi{-}Da Chung and
               Gwo{-}Bin Lee},
  title     = {An integrated microfluidic system for dual aptamer assay utilizing
               magnetic-composite-membranes},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {438--441},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017060},
  doi       = {10.1109/NEMS.2017.8017060},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuMCL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuTPKKJ17,
  author    = {Libo Wu and
               Nobuyuki Takama and
               Jongho Park and
               Beomjoon Kim and
               JungDong Kim and
               DoHyeon Jeong},
  title     = {Shadow mask assisted droplet-born air-blowing method for fabrication
               of dissoluble microneedle},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {456--459},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017064},
  doi       = {10.1109/NEMS.2017.8017064},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuTPKKJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuWCC17,
  author    = {Chia{-}Cheng Wu and
               Li{-}An Wu and
               Yih{-}Fan Chen and
               Lu{-}Ting Chou},
  title     = {Detection of tetracycline using isothermal amplification},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {210--213},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017008},
  doi       = {10.1109/NEMS.2017.8017008},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuWCC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuYHH17,
  author    = {Huei{-}Wen Wu and
               Wei{-}Yu Yao and
               Yi{-}Hsing Hsiao and
               Chia{-}Hsien Hsu},
  title     = {High-throughput formation and long-term culture of embryoid bodies
               using a microfluidic hanging drop chip},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {351--354},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017040},
  doi       = {10.1109/NEMS.2017.8017040},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuYHH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaQZSG17,
  author    = {Changfeng Xia and
               Dayong Qiao and
               Yalong Zhang and
               Xiaocao Su and
               Zhounan Guo},
  title     = {A position feedback solution based on the acoustic signal produced
               by electrostatically driven {MEMS} scanning mirror},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {558--561},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017084},
  doi       = {10.1109/NEMS.2017.8017084},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiaQZSG17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaSZWH17,
  author    = {Kai Xia and
               Bin Sun and
               Qi Zeng and
               Tianzhun Wu and
               Mark S. Humayun},
  title     = {Surface modification of neural stimulating/recording microelectrodes
               with high-performance platinum-pillar coatings},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {291--294},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017027},
  doi       = {10.1109/NEMS.2017.8017027},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiaSZWH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XianWWKMI17,
  author    = {Weikang Xian and
               Dong F. Wang and
               Dong F. Wang and
               Takeshi Kobayashi and
               Ryutaro Maeda and
               Toshihiro Itoh},
  title     = {A passive position- and pose-free current sensor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {29--33},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016967},
  doi       = {10.1109/NEMS.2017.8016967},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XianWWKMI17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XieBLBWL17,
  author    = {Tian Xie and
               Xiao{-}Peng Bi and
               Rui Luo and
               Fan Bin and
               Zhe Wang and
               Wen Li},
  title     = {Optical propagation of blue {LED} light in brain tissue and Parylene-C},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {599--602},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017094},
  doi       = {10.1109/NEMS.2017.8017094},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XieBLBWL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Xu17,
  author    = {Qingsong Xu},
  title     = {Design of a constant-force microgripper mechanism for biological micromanipulation},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {418--421},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017055},
  doi       = {10.1109/NEMS.2017.8017055},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Xu17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuDLWW17,
  author    = {Han Xu and
               Wangzhi Dai and
               Yaoping Liu and
               Wengang Wu and
               Wei Wang},
  title     = {An annealing process for mechanical strength improvement of Parylene
               micropore-arrayed membrane},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {665--668},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017109},
  doi       = {10.1109/NEMS.2017.8017109},
  timestamp = {Wed, 08 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/XuDLWW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuWWC17,
  author    = {Lijun Xu and
               Xuegen Wu and
               Zhenyu Wang and
               Jing Chen},
  title     = {Design and construct a micro beehive shape hydrophobic device with
               a rapid prototyping technique},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {511--514},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017074},
  doi       = {10.1109/NEMS.2017.8017074},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuWWC17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YamaguchiFU17,
  author    = {Akinobu Yamaguchi and
               Takao Fukuoka and
               Yuichi Utsumi},
  title     = {Fabrication of higher order nanostructure for molecular sensing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {388--391},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017048},
  doi       = {10.1109/NEMS.2017.8017048},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YamaguchiFU17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YamaguchiOFSU17,
  author    = {Akinobu Yamaguchi and
               Ikuo Okada and
               Takao Fukuoka and
               Ikuya Sakurai and
               Yuichi Utsumi},
  title     = {Synthesis and immobilization of cupric oxide particles using X-ray
               raiolysis},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {448--451},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017062},
  doi       = {10.1109/NEMS.2017.8017062},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YamaguchiOFSU17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YamashitaMPHTTK17,
  author    = {Naoki Yamashita and
               Zhipeng Ma and
               Seongsu Park and
               Yoshikazu Hirai and
               Toshiyuki Tsuchiya and
               Osamu Tabata and
               Kentaro Kawai},
  title     = {Formation of gold nanoparticle dimers on silicon by sacrificial {DNA}
               origami technique},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {710--713},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017119},
  doi       = {10.1109/NEMS.2017.8017119},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YamashitaMPHTTK17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangMKDZEFH17,
  author    = {Gaoqiang Yang and
               Jingke Mo and
               Zhenye Kang and
               Yeshi Dohrmann and
               Feng{-}Yuan Zhang and
               Shahnavaz Eilbeigi and
               Farnaz Farahanipad and
               Haiying Huang},
  title     = {Additive manufactured micro-sensor from silver nanoparticles for measuring
               shear stress and pressure},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {164--168},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016997},
  doi       = {10.1109/NEMS.2017.8016997},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangMKDZEFH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangMXJLMW17,
  author    = {Y. D. Yang and
               Haiyang Mao and
               Jijun Xiong and
               Y. C. Jia and
               R. R. Li and
               A. J. Ming and
               W. B. Wang},
  title     = {Optical features of nanowire forests generated using plasma repolymerization},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {452--455},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017063},
  doi       = {10.1109/NEMS.2017.8017063},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangMXJLMW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YeZLW17,
  author    = {Haiming Ye and
               Meiwen Zhao and
               Minglin Li and
               Weidong Wang},
  title     = {Influences of ambient temperature, charge density on wettability properties
               of monolayer MoS2 films},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {595--598},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017093},
  doi       = {10.1109/NEMS.2017.8017093},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YeZLW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YinBZWZYZW17,
  author    = {R. X. Yin and
               M. R. Bai and
               B. Zhang and
               K. M. Wang and
               H. B. Zhang and
               S. M. Yang and
               W. J. Zhang and
               J. W. Wang},
  title     = {Understanding drug delivery from a system perspective: Concept and
               demonstration},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {698--701},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017116},
  doi       = {10.1109/NEMS.2017.8017116},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YinBZWZYZW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuLWL17,
  author    = {Aisheng Yu and
               Wei Li and
               Yuelin Wang and
               Tie Li},
  title     = {Mid-infrared bandwidth reduction of {LSPR} by Rayleigh Anomalies},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {151--154},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016994},
  doi       = {10.1109/NEMS.2017.8016994},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuLWL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZengXSWH17,
  author    = {Qi Zeng and
               Kai Xia and
               Bin Sun and
               Tianzhun Wu and
               Mark S. Humayun},
  title     = {Iridium oxide/platinum gray composite coatings on microelectrodes
               for neural stimulation},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {273--277},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017023},
  doi       = {10.1109/NEMS.2017.8017023},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZengXSWH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangCZ17,
  author    = {Qiyuan Zhang and
               Xuan Cao and
               Wei Zhang},
  title     = {Multimodal design of a novel {MEMS} structure for piezoelectric energy
               harvester},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {820--823},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017144},
  doi       = {10.1109/NEMS.2017.8017144},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangCZ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangGWZB17,
  author    = {Xiao{-}Sheng Zhang and
               Yin{-}Ben Guo and
               Ya Wang and
               Haixia Zhang and
               Juergen Brugger},
  title     = {A transparent silk-fibroin-based triboelectric microgenerator for
               airflow energy harvesting},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {65--68},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016975},
  doi       = {10.1109/NEMS.2017.8016975},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangGWZB17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangHCLLH17,
  author    = {Leilei Zhang and
               Haibo Huang and
               Liguo Chen and
               Xiangpeng Li and
               Yadi Li and
               Jiaqi Huang},
  title     = {A magnetically controlled micro-robot with multiple side flagella},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {544--549},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017081},
  doi       = {10.1109/NEMS.2017.8017081},
  timestamp = {Mon, 08 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangHCLLH17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLZZW17,
  author    = {Haiyan Zhang and
               Cunhui Li and
               Meiwen Zhao and
               Yingmin Zhu and
               Weidong Wang},
  title     = {Influence of interface wettability on explosive boiling of ultra-thin
               liquid films on a heated substrate using molecular dynamics simulations},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {742--745},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017126},
  doi       = {10.1109/NEMS.2017.8017126},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangLZZW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangTYLZJJ17,
  author    = {Zhongkai Zhang and
               Bian Tian and
               Qiuyue Yu and
               Qijing Lin and
               Na Zhao and
               Weixuan Jing and
               Zhuangde Jiang},
  title     = {A protected tungsten-rhenium thin film thermocouples sensor},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {796--799},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017138},
  doi       = {10.1109/NEMS.2017.8017138},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangTYLZJJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangY17,
  author    = {Yaozhong Zhang and
               Junghoon Yeom},
  title     = {Pollutant-degrading multifunctional micromotors},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {16--20},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016964},
  doi       = {10.1109/NEMS.2017.8016964},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangY17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLJJWTZJ17,
  author    = {Na Zhao and
               Qijing Lin and
               Weixuan Jing and
               Weile Jiang and
               Zirong Wu and
               Bian Tian and
               Zhongkai Zhang and
               Zhuangde Jiang},
  title     = {A Fabry-Perot interferometer for high temperature measurement based
               on mode analysis},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {812--815},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017142},
  doi       = {10.1109/NEMS.2017.8017142},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoLJJWTZJ17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoWLBXL17,
  author    = {Changhui Zhao and
               Fei Wang and
               Sheng Liu and
               Jinglong Bai and
               Erqing Xie and
               Xinxin Li},
  title     = {Fabrication of MoOx-decorated In2O3 nanotubes by electron-beam irradiation},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {42--46},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8016970},
  doi       = {10.1109/NEMS.2017.8016970},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoWLBXL17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuLP17,
  author    = {Zijie Zhu and
               Ruya Li and
               Tingrui Pan},
  title     = {Photopatternable and moisture-stable {PEDOT:} {PSS/PEG} hybrid thin-film
               for flexible and wearable humidity sensing},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {318--322},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017033},
  doi       = {10.1109/NEMS.2017.8017033},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuLP17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuXFYW17,
  author    = {Yifan Zhu and
               Cao Xia and
               Yupeng Fu and
               Xu Yang and
               Dong F. Wang},
  title     = {A hybrid converter for scavenging low-frequency vibration energy},
  booktitle = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  pages     = {836--839},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://doi.org/10.1109/NEMS.2017.8017121},
  doi       = {10.1109/NEMS.2017.8017121},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuXFYW17.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/nems/2017,
  title     = {12th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2017, Los Angeles, CA, USA, April 9-12,
               2017},
  publisher = {{IEEE}},
  year      = {2017},
  url       = {https://ieeexplore.ieee.org/xpl/conhome/8012169/proceeding},
  isbn      = {978-1-5090-3059-0},
  timestamp = {Wed, 16 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/2017.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AhmedSCM15,
  author    = {Sheikh Ziauddin Ahmed and
               Mashiyat Sumaiya Shawkat and
               Md. Iramul Hoque Chowdhury and
               Sharif Mohammad Mominuzzaman},
  title     = {Current-voltage characteristics of ballistic schottky barrier {GNRFET}
               and {CNTFET:} Effect of relative dielectric constant},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {384--387},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147449},
  doi       = {10.1109/NEMS.2015.7147449},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AhmedSCM15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AhmedSCM15a,
  author    = {Sheikh Ziauddin Ahmed and
               Mashiyat Sumaiya Shawkat and
               Md. Iramul Hoque Chowdhury and
               Sharif Mohammad Mominuzzaman},
  title     = {Current-voltage characteristics of ballistic schottky barrier {GNRFET}
               and {CNTFET:} Effect of gate oxide thickness},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {388--390},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147450},
  doi       = {10.1109/NEMS.2015.7147450},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AhmedSCM15a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AltinagacOGKT15,
  author    = {Emre Altinagac and
               Safiye Selen Ozcan and
               Yavuz Genc and
               H{\"{u}}seyin Kizil and
               Levent Trabzon},
  title     = {Biological particle manipulation: An example of Jurkat enrichment},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {25--27},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147348},
  doi       = {10.1109/NEMS.2015.7147348},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AltinagacOGKT15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ArevaloBCCIF15,
  author    = {Arpys Arevalo and
               E. Byas and
               David Conchouso and
               David Castro and
               S. Ilyas and
               Ian G. Foulds},
  title     = {A versatile multi-user polyimide surface micromachinning process for
               {MEMS} applications},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {561--565},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147492},
  doi       = {10.1109/NEMS.2015.7147492},
  timestamp = {Fri, 19 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ArevaloBCCIF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ArevaloCCJYF15,
  author    = {Arpys Arevalo and
               David Conchouso and
               David Castro and
               Nizar Jaber and
               Mohammad I. Younis and
               Ian G. Foulds},
  title     = {Towards a digital sound reconstruction {MEMS} device: Characterization
               of a single {PZT} based piezoelectric actuator},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {290--295},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147429},
  doi       = {10.1109/NEMS.2015.7147429},
  timestamp = {Fri, 19 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ArevaloCCJYF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BaoLZLL15,
  author    = {Lei Bao and
               Bin Li and
               Hang Zhou and
               Hui Li and
               Xiangxin Liu},
  title     = {Graphene oxide doped single-walled carbon nanotube thin film as back
               electrode for CdTe solar cell},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {391--396},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147451},
  doi       = {10.1109/NEMS.2015.7147451},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BaoLZLL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaithanatkunCS15,
  author    = {Natpasit Chaithanatkun and
               Direklit Chantarawong and
               Potiyan Songkeaw and
               Korakot Onlaor and
               Thutiyaporn Thiwawong and
               Benchapol Tunhoo},
  title     = {Effect of ascorbic acid on structural properties of ZnO nanoparticles
               prepared by precipitation process},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {145--148},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147396},
  doi       = {10.1109/NEMS.2015.7147396},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChaithanatkunCS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaithanatkunCS15a,
  author    = {Natpasit Chaithanatkun and
               Direklit Chantarawong and
               Potiyan Songkeaw and
               Korakot Onlaor and
               Thutiyaporn Thiwawong and
               Benchapol Tunhoo},
  title     = {Electrical bistable properties of ZnO nanoparticles thin film prepared
               by electrostatic spray deposition technique},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {152--155},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147398},
  doi       = {10.1109/NEMS.2015.7147398},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChaithanatkunCS15a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangYHLHLKHHS15,
  author    = {Chun{-}Ming Chang and
               Chih{-}Sheng Yu and
               Fan{-}Chun Hsieh and
               Chun{-}Ting Lin and
               Tsung{-}Tao Huang and
               Ping{-}Hung Lin and
               Jiann{-}Shiun Kao and
               Chien{-}Nan Hsiao and
               Ming{-}Hua Shiao},
  title     = {A parametric study of {ICP-RIE} etching on a lithium niobate substrate},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {485--486},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147473},
  doi       = {10.1109/NEMS.2015.7147473},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangYHLHLKHHS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CheirsirikulJH15,
  author    = {S. Cheirsirikul and
               S. Jesen and
               C. Hruanun},
  title     = {The {MSM} diamond device for direct and indirect X-ray detection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {372--374},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147446},
  doi       = {10.1109/NEMS.2015.7147446},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CheirsirikulJH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenC15,
  author    = {Shan Chen and
               Ting{-}Hsuan Chen},
  title     = {AuNPs amplified magnetophoretic effect for colorimetric detection
               of nucleic acid},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {357--360},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147443},
  doi       = {10.1109/NEMS.2015.7147443},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCLY15,
  author    = {Kai Chen and
               Tao Chen and
               Huicong Liu and
               Zhan Yang},
  title     = {A Pt/Au hybrid self-actuating nanorobot towards to durg delivery system},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {286--289},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147428},
  doi       = {10.1109/NEMS.2015.7147428},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCLY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenLKW15,
  author    = {J. J. Chen and
               Y. C. Lien and
               C. L. Kuo and
               W. J. Wu},
  title     = {Self-powered wireless temperature sensor with piezoelectric energy
               harvester fabricated with metal-MEMS process},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {619--622},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147506},
  doi       = {10.1109/NEMS.2015.7147506},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenLKW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenPYJLW15,
  author    = {Y. C. Chen and
               C. T. Pan and
               T. L. Yang and
               Shin{-}Pon Ju and
               Y. R. Lin and
               I. C. Wu},
  title     = {Study of freeform lens for UV-LEDs exposure system with reflector
               for uniform irradiance},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {623--624},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147507},
  doi       = {10.1109/NEMS.2015.7147507},
  timestamp = {Fri, 22 Nov 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChenPYJLW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenYGXS15,
  author    = {Muyu Chen and
               Huijun Yu and
               Shuai Guo and
               Run Xu and
               Wenjiang Shen},
  title     = {An electromagnetically-driven {MEMS} micromirror for laser projection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {605--607},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147502},
  doi       = {10.1109/NEMS.2015.7147502},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenYGXS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenZW15,
  author    = {Jiangcheng Chen and
               Xiaodong Zhang and
               He Wang},
  title     = {Research on biomechanical model of muscle fiber based on four-state
               operating mechanism of molecular motors},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {529--532},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147484},
  doi       = {10.1109/NEMS.2015.7147484},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenZW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengCCL15,
  author    = {Ka Hing Cheng and
               Ching{-}Hsiang Cheng and
               Andy Kuo{-}An Chao and
               Dennis Kwong Chun Lo},
  title     = {{LASER} light scribe and microwave annealing reduction of graphene
               oxide for supercapacitor applications},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {380--383},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147448},
  doi       = {10.1109/NEMS.2015.7147448},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengCCL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengPLLW15,
  author    = {Qijia Cheng and
               Zhuoteng Peng and
               Jie Lin and
               Shanshan Li and
               Fei Wang},
  title     = {Energy harvesting from human motion for wearable devices},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {409--412},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147455},
  doi       = {10.1109/NEMS.2015.7147455},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengPLLW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengZLTL15,
  author    = {Rongjun Cheng and
               Yulong Zhao and
               Cun Li and
               Bian Tian and
               Bo Li},
  title     = {Research on slide-film damping effect to achieve a high-performance
               resonant pressure senor},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {99--102},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147383},
  doi       = {10.1109/NEMS.2015.7147383},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengZLTL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChiX15,
  author    = {Ziqiang Chi and
               Qingsong Xu},
  title     = {Precision control of piezoelectric actuator using fuzzy feedback control
               with inverse hysteresis compensation},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {219--224},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147414},
  doi       = {10.1109/NEMS.2015.7147414},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChiX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungCL15,
  author    = {Yung{-}Chiang Chung and
               Yi{-}Sheng Chen and
               Shih{-}Hao Lin},
  title     = {Effect of magnetic attraction on gene transfection of bacteria},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {126--127},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147390},
  doi       = {10.1109/NEMS.2015.7147390},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungCL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungTL15,
  author    = {Yung{-}Chiang Chung and
               Cheng{-}Wei Tsai and
               Shih{-}Hao Lin},
  title     = {The relationship between stretching and force of dsDNA molecules at
               various temperatures by using magnetic tweezers},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {124--125},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147389},
  doi       = {10.1109/NEMS.2015.7147389},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungTL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ConchousoACF15,
  author    = {David Conchouso and
               Arpys Arevalo and
               David Castro and
               Ian G. Foulds},
  title     = {Out-of-plane platforms with bi-directional thermal bimorph actuation
               for transducer applications},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {608--612},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147503},
  doi       = {10.1109/NEMS.2015.7147503},
  timestamp = {Fri, 19 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ConchousoACF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiLZHGH15,
  author    = {W. P. Cui and
               G. D. Liu and
               F. S. Zhang and
               H. Hu and
               C. C. Gao and
               Y. L. Hao},
  title     = {Silicon-silicon anodic bonding process with embedded glass},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {470--475},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147470},
  doi       = {10.1109/NEMS.2015.7147470},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CuiLZHGH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaiLG15,
  author    = {Ximing Dai and
               Wenzhong Lou and
               Mingru Guo},
  title     = {Ultrasonic attenuation based high concentration micron particle measurement},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {197--200},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147409},
  doi       = {10.1109/NEMS.2015.7147409},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DaiLG15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaiLZH15,
  author    = {Wei Dai and
               Jianjun Li and
               Zhizhen Zheng and
               Qiwen Huang},
  title     = {A micro scale oxidation film generated by gas discharge plasma at
               atmosphere},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {143--144},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147395},
  doi       = {10.1109/NEMS.2015.7147395},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DaiLZH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingFLG15,
  author    = {Xuran Ding and
               Yue Feng and
               Wenzhong Lou and
               Yunlong Guo},
  title     = {Failure of a {MEMS} switch after environmental test},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {417--420},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147457},
  doi       = {10.1109/NEMS.2015.7147457},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DingFLG15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingZX15,
  author    = {Hong Ding and
               Jiuxuan Zhao and
               Jin Xie},
  title     = {A novel biaxial resonant micro accelerometer with microleverage mechanism},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {50--53},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147355},
  doi       = {10.1109/NEMS.2015.7147355},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DingZX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuLLW15,
  author    = {Xuemin Du and
               Tengyue Li and
               Lijun Li and
               Tianzhun Wu},
  title     = {Rewritable hydrogel coatings using water as the ink},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {36--39},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147351},
  doi       = {10.1109/NEMS.2015.7147351},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DuLLW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DubourgZMC15,
  author    = {Georges Dubourg and
               Cedo Zlebic and
               Jovan Matovic and
               Vesna Crnojevic{-}Bengin},
  title     = {One-step patterning of a flexible piezoresistive {MEMS} sensor by
               3D direct laser writing},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {553--556},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147490},
  doi       = {10.1109/NEMS.2015.7147490},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DubourgZMC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FanLDMY15,
  author    = {Gang Fan and
               Dan{-}dan Liu and
               Xianting Ding and
               Zhi{-}jun Ma and
               Jian Yang},
  title     = {Synthesis of scalable micro-droplets with heat-driven effect in flow-focusing
               device},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {141--142},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147394},
  doi       = {10.1109/NEMS.2015.7147394},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FanLDMY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FuYWHHZGLZ15,
  author    = {Fengshan Fu and
               Fang Yang and
               Wei Wang and
               Xian Huang and
               Jun He and
               Li Zhang and
               Taotao Guan and
               Rui Li and
               Dacheng Zhang},
  title     = {Discussion and analysis of Au/a-Si contact resistance in {MEMS/NEMS}
               devices},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {593--596},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147499},
  doi       = {10.1109/NEMS.2015.7147499},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FuYWHHZGLZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GongW15,
  author    = {Xu Gong and
               Fei Wang},
  title     = {Line defect detection on 2D materials with micro four-point probe
               measurement},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {589--592},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147498},
  doi       = {10.1109/NEMS.2015.7147498},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GongW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuanHLZYY15,
  author    = {Rui Guan and
               Chunhua He and
               Dachuan Liu and
               Qiancheng Zhao and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {A temperature control system used for improving resonant frequency
               drift of {MEMS} gyroscopes},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {397--400},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147452},
  doi       = {10.1109/NEMS.2015.7147452},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuanHLZYY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuanYWHHZFLZ15,
  author    = {Taotao Guan and
               Fang Yang and
               Wei Wang and
               Xian Huang and
               Jun He and
               Li Zhang and
               Fengshan Fu and
               Rui Li and
               Dacheng Zhang},
  title     = {Investigation of stress rupture properties of micro beams using the
               piezoresistive effect},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {537--540},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147486},
  doi       = {10.1109/NEMS.2015.7147486},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuanYWHHZFLZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuoLD15,
  author    = {Yunlong Guo and
               Wenzhong Lou and
               Xuran Ding},
  title     = {Metal film bridge with TSV-based 3D wafer level packaging},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {430--434},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147460},
  doi       = {10.1109/NEMS.2015.7147460},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuoLD15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangBLWD15,
  author    = {Yulin Huang and
               Jingfu Bao and
               Xinyi Li and
               Yiling Wang and
               Yijia Du},
  title     = {A 4-bit switched-line phase shifter based on {MEMS} switches},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {405--408},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147454},
  doi       = {10.1109/NEMS.2015.7147454},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangBLWD15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLSC15,
  author    = {Defa Huang and
               Yan Li and
               Wenjiang Shen and
               Jinrong Cheng},
  title     = {Effect of {HTAC} on preparation of supercapacitors based on nanocomposites
               of MnO2 : {HTAC} by direct electrodeposition},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {521--524},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147482},
  doi       = {10.1109/NEMS.2015.7147482},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangLSC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangWTC15,
  author    = {Tsung{-}Tao Huang and
               Jun{-}Sheng Wang and
               Yu{-}Hsiang Tang and
               Chun{-}Ming Chang},
  title     = {Electrochemical real-time {DNA} amplification and detection on a microchip},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {132--135},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147392},
  doi       = {10.1109/NEMS.2015.7147392},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangWTC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HungS15,
  author    = {C. Y. Hung and
               C. K. Sung},
  title     = {Peeling condition analysis of biomimetic adhesive structure-A finite
               element study},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {476--480},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147471},
  doi       = {10.1109/NEMS.2015.7147471},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HungS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ImamAK15,
  author    = {Safayat{-}Al Imam and
               Sharmin Abdhullah and
               Nasheen Kalam},
  title     = {Parametric analysis of carbon nanotube field effect transistor under
               non-ballistic regime considering different dielectric materials},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {318--322},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147435},
  doi       = {10.1109/NEMS.2015.7147435},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ImamAK15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JinGY15,
  author    = {X. B. Jin and
               F. M. Guo and
               F. Y. Yue},
  title     = {The charge character in the double-barrier quantum dots in well hybrid
               structure},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {40--43},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147352},
  doi       = {10.1109/NEMS.2015.7147352},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JinGY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JinLWWGD15,
  author    = {Xin Jin and
               Wenzhong Lou and
               Fufu Wang and
               Dakui Wang and
               Mingru Guo and
               Ximing Dai},
  title     = {The {MEMS} experiment and numerical simulations based on the explosion
               protection of micro-scale vehicles model},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {331--336},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147438},
  doi       = {10.1109/NEMS.2015.7147438},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JinLWWGD15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JinMDM15,
  author    = {Xinhang Jin and
               Binghe Ma and
               Jinjun Deng and
               Chengyu Ma},
  title     = {High temperature thin film thermocouples on different ceramic substrates},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {183--186},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147406},
  doi       = {10.1109/NEMS.2015.7147406},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JinMDM15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JunK15,
  author    = {Ki{-}Wha Jun and
               Jung{-}Sik Kim},
  title     = {Silicon etching characteristics for the {TMAH} based solution with
               additives},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {507--510},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147479},
  doi       = {10.1109/NEMS.2015.7147479},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JunK15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangWLTH15,
  author    = {Dongyang Kang and
               Wei Wang and
               Juhyun Lee and
               Yu{-}Chong Tai and
               Tzung K. Hsiai},
  title     = {Measurement of viscosity of unadulterated human whole blood using
               a capillary pressure-driven viscometer},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {1--4},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147343},
  doi       = {10.1109/NEMS.2015.7147343},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KangWLTH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangXX15,
  author    = {Shuai Kang and
               Jianchun Xing and
               Liqiang Xie},
  title     = {A novel passive {SAW} temperature sensor with anti-collision},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {635--638},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147510},
  doi       = {10.1109/NEMS.2015.7147510},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KangXX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KondoMLM15,
  author    = {Masahiro Kondo and
               Hidetoshi Miyashita and
               Sang{-}Seok Lee and
               Nobuo Matsuoka},
  title     = {Tentative bonding effect for maintaining alignment accuracy in bonding
               utilizing thick {SU8} as an adhesive material},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {487--490},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147474},
  doi       = {10.1109/NEMS.2015.7147474},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KondoMLM15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LaiF15,
  author    = {Yi{-}Han Lai and
               Shih{-}Kang Fan},
  title     = {Electromolding for 3D cell culture},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {268--271},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147424},
  doi       = {10.1109/NEMS.2015.7147424},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LaiF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LamCC15,
  author    = {Miu{-}Ling Lam and
               Bin Chen and
               Ting{-}Hsuan Chen},
  title     = {Optimized topographical labeling for identification of unknown nucleic
               acids},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {205--208},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147411},
  doi       = {10.1109/NEMS.2015.7147411},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LamCC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLLSC15,
  author    = {Pengcheng Li and
               Xiaoying Li and
               Enfu Li and
               Qiang Shen and
               Honglong Chang},
  title     = {Design and fabrication of an in-plane {SOI} {MEMS} accelerometer with
               a high yield rate},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {511--514},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147480},
  doi       = {10.1109/NEMS.2015.7147480},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiLLSC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLZSW15,
  author    = {Congming Li and
               Yi Luo and
               Chuanpeng Zhou and
               Qing Shan and
               Xiaodong Wang},
  title     = {Using peristaltic pump to charge micro heat pipe for high-power {LED}},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {164--167},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147401},
  doi       = {10.1109/NEMS.2015.7147401},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiLZSW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLZWZK15,
  author    = {Lei Li and
               Jie Li and
               Zhao Zhao and
               Han Wang and
               Wei Zhang and
               Jinsong Kan},
  title     = {A novel test method of low leakage rate of {MEMS} vacuum packaging},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {175--178},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147404},
  doi       = {10.1109/NEMS.2015.7147404},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiLZWZK15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiRVL15,
  author    = {Yan Li and
               Willem Van Roy and
               Philippe M. Vereecken and
               Liesbet Lagae},
  title     = {An ELISA-based amperometric biosensor within a photo-patternable adhesive
               microfluidic channel},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {76--81},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147377},
  doi       = {10.1109/NEMS.2015.7147377},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiRVL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiSC15,
  author    = {Y. R. Li and
               C. C. Su and
               S. H. Chang},
  title     = {Thermoelectric property of vertically aligned carbon nanotube carpets},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {310--313},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147433},
  doi       = {10.1109/NEMS.2015.7147433},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiSC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZH15,
  author    = {Xiuyuan Li and
               Yulong Zhao and
               Tengjiang Hu},
  title     = {Design of a novel electrothermal actuator for integrated {MEMS} safety-and-arming
               devices},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {63--66},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147374},
  doi       = {10.1109/NEMS.2015.7147374},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZZW15,
  author    = {Yingxue Li and
               Yulong Zhao and
               Minghao Zhang and
               Peng Wang},
  title     = {Design of a three-component force sensor based on {MEMS} strain gauges},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {597--601},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147500},
  doi       = {10.1109/NEMS.2015.7147500},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZZW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZZZGC15,
  author    = {Nannan Li and
               Yangxi Zhang and
               Ningli Zhu and
               Yunhui Zhu and
               Chengchen Gao and
               Jing Chen},
  title     = {Low temperature multi-layer wafer level package for chip scale atomic
               clock {(CSAC)}},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {481--484},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147472},
  doi       = {10.1109/NEMS.2015.7147472},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZZZGC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiangLC15,
  author    = {B. T. Liang and
               C. C. Lai and
               C. K. Chung},
  title     = {Simulation and experiment of capillary driven passive planar baffle
               micro-mixer},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {120--123},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147388},
  doi       = {10.1109/NEMS.2015.7147388},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiangLC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCCHTCYHH15,
  author    = {Yu{-}Hsin Lin and
               Yuan{-}Chieh Cheng and
               Nien{-}Nan Chu and
               Wensyang Hsu and
               Yu{-}Hsiang Tang and
               Po{-}Li Chen and
               Chih{-}Chung Yang and
               Ming{-}Hua Hsiao and
               Chien{-}Nan Hsiao},
  title     = {The study of compensative structure assisted convex and concave corner
               structures etching by inductively coupled plasma-reactive ion etch
               {(ICP-RIE)}},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {491--493},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147475},
  doi       = {10.1109/NEMS.2015.7147475},
  timestamp = {Mon, 14 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinCCHTCYHH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCWHSC15,
  author    = {Chun{-}Ting Lin and
               Ching{-}Hao Chen and
               Chien{-}Ting Wu and
               Chien{-}Nan Hsiao and
               Ming{-}Hua Shiao and
               Mao{-}Nan Chang},
  title     = {A gold nano-dot modified silicon tip apex for scanning Kelvin probe
               microscopy},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {613--616},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147504},
  doi       = {10.1109/NEMS.2015.7147504},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinCWHSC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCHZZGH15,
  author    = {G. D. Liu and
               W. P. Cui and
               H. Hu and
               F. S. Zhang and
               Y. X. Zhang and
               C. C. Gao and
               Y. L. Hao},
  title     = {High temperature pressure sensor using a thermostable electrode},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {201--204},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147410},
  doi       = {10.1109/NEMS.2015.7147410},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuCHZZGH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuGLYWCS15,
  author    = {Huicong Liu and
               Sudeep Gulda and
               Chengkuo Lee and
               Zhan Yang and
               Pengbo Wang and
               Tao Chen and
               Lining Sun},
  title     = {ZnO-nanowires based power generation from low frequency vibration},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {225--228},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147415},
  doi       = {10.1109/NEMS.2015.7147415},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuGLYWCS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLXSJL15,
  author    = {Chunxiu Liu and
               Nansen Lin and
               Shengwei Xu and
               Yilin Song and
               Tingjun Jiang and
               Juntao Liu},
  title     = {Characterization and classification of pyramidal cells and interneurons
               in vitro cell network using extracellular recordings},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {168--171},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147402},
  doi       = {10.1109/NEMS.2015.7147402},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuLXSJL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuNL15,
  author    = {Guangwu Liu and
               Xingyuan Ni and
               Yangang Liu},
  title     = {Synthesis and characterization of silica aerogel and its composite
               materials},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {156--159},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147399},
  doi       = {10.1109/NEMS.2015.7147399},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuNL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuWLWP15,
  author    = {Jie Liu and
               Li Wen and
               Han Li and
               Hai Wang and
               Jinlan Peng},
  title     = {Fabrication of thin-wall inverted pyramid hollow tips array and nano-aperture
               for maskless nanoscaled plasma patterning},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {498--501},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147477},
  doi       = {10.1109/NEMS.2015.7147477},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuWLWP15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuX15,
  author    = {Yilin Liu and
               Qingsong Xu},
  title     = {Design of a novel integrated micromanipulator for cell gripping and
               injection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {281--285},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147427},
  doi       = {10.1109/NEMS.2015.7147427},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LongLC15,
  author    = {H. P. Long and
               C. C. Lai and
               C. K. Chung},
  title     = {Fabrication of microfluidic chip using foil-assisted {CO2} laser ablation
               for suspended particles separation},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {259--262},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147422},
  doi       = {10.1109/NEMS.2015.7147422},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LongLC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LothF15,
  author    = {Andreas Loth and
               Ralf Forster},
  title     = {Microfluidic high speed pinch valve},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {9--14},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147345},
  doi       = {10.1109/NEMS.2015.7147345},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LothF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LouSYL15,
  author    = {Kevin Lou and
               Gene Sheu and
               Shao{-}Ming Yang and
               Pradhana Jati Budhi Laksana},
  title     = {A study of thermoplastic properties of a novel photoresist},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {95--98},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147382},
  doi       = {10.1109/NEMS.2015.7147382},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LouSYL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuBLL15,
  author    = {Qianbo Lu and
               Jian Bai and
               Wenxiu Lian and
               Shuqi Lou},
  title     = {A novel scheme design of a high-g optical {NEMS} accelerometer based
               on a single chip grating with proper sensitivity and large bandwidth},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {248--253},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147420},
  doi       = {10.1109/NEMS.2015.7147420},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LuBLL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuLL15,
  author    = {Ming{-}Yu Lu and
               Zhihong Li and
               Gwo{-}Bin Lee},
  title     = {High-density distributed electrodes network for generation of murine
               induced pluripotent stem cells},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {32--35},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147350},
  doi       = {10.1109/NEMS.2015.7147350},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LuLL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaKPHTKT15,
  author    = {Zhipeng Ma and
               Young{-}Joo Kim and
               Seongsu Park and
               Yoshikazu Hirai and
               Toshiyuki Tsuchiya and
               Do{-}Nyum Kim and
               Osamu Tabata},
  title     = {Direct characterization of radial modulus of {DNA} nanotube by {AFM}
               nanoindentation},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {581--584},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147496},
  doi       = {10.1109/NEMS.2015.7147496},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MaKPHTKT15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaMDJ15,
  author    = {Chengyu Ma and
               Binghe Ma and
               Jinjun Deng and
               Xinhang Jin},
  title     = {A study of directional {MEMS} dual-fences gauge},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {449--452},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147465},
  doi       = {10.1109/NEMS.2015.7147465},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MaMDJ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ManiCC15,
  author    = {Karthick Mani and
               Tsung{-}Chun Chang Chien and
               Chia{-}Yuan Chen},
  title     = {Orientation control of zebrafish embryos using artificial cilia in
               a 3D flow-through microchannel},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {15--19},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147346},
  doi       = {10.1109/NEMS.2015.7147346},
  timestamp = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ManiCC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MiaoSCWHXX15,
  author    = {Jing Miao and
               Wenjiang Shen and
               Muyu Chen and
               Hui Wang and
               Changde He and
               Chenyang Xue and
               Jijun Xiong},
  title     = {Design and measurement of {MEMS} capacitive ultrasonic transducer},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {602--604},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147501},
  doi       = {10.1109/NEMS.2015.7147501},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MiaoSCWHXX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MoudgilS15,
  author    = {Akshay Moudgil and
               Sundaram Swaminathan},
  title     = {{MEMS} based piezoelectric sensor system for virus detection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {337--342},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147439},
  doi       = {10.1109/NEMS.2015.7147439},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MoudgilS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiuZ15,
  author    = {Hang Niu and
               Xiaodong Zhang},
  title     = {Design on a bending stress measurement system of micro-gear with fiber
               Bragg grating},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {575--580},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147495},
  doi       = {10.1109/NEMS.2015.7147495},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NiuZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NyenkeD15,
  author    = {Chinwe Nyenke and
               Lixin Dong},
  title     = {Sensing ambient oxygen using a W/CuxO/Cu memristor},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {254--258},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147421},
  doi       = {10.1109/NEMS.2015.7147421},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NyenkeD15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PakdelMBG15,
  author    = {Amir Pakdel and
               Takao Mori and
               Yoshio Bando and
               Dmitri Golberg},
  title     = {Interface engineering of bio-inspired Boron nitride nano-architectures
               toward controllable hydrophobicity/hydrophilicity},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {90--91},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147380},
  doi       = {10.1109/NEMS.2015.7147380},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PakdelMBG15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ParkYJCG15,
  author    = {Jaehyun Park and
               ChangKyu Yoon and
               Qianru Jin and
               Lei Chen and
               David H. Gracias},
  title     = {Rolled-up nanoporous membranes by nanoimprint lithography and strain
               engineering},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {233--237},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147417},
  doi       = {10.1109/NEMS.2015.7147417},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ParkYJCG15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PattanasakP15,
  author    = {Satjana Pattanasak and
               Wibool Piyawattanametha},
  title     = {Light microendoscopy with {MEMS} technology},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {550--552},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147489},
  doi       = {10.1109/NEMS.2015.7147489},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PattanasakP15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PengLDL15,
  author    = {Liu Peng and
               Wenzhong Lou and
               Ximing Dai and
               Yufei Lu},
  title     = {Verification and test system technology for {CMOS-MEMS} switches},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {585--588},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147497},
  doi       = {10.1109/NEMS.2015.7147497},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PengLDL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PitchappaDHQWL15,
  author    = {Prakash Pitchappa and
               Lokesh Dhakar and
               Chongpei Ho and
               You Qian and
               Tao Wang and
               Chengkuo Lee},
  title     = {Subwavelength {MEMS} cantilever array for dynamic manipulation of
               terahertz waves},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {533--536},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147485},
  doi       = {10.1109/NEMS.2015.7147485},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PitchappaDHQWL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QinSZLF15,
  author    = {Yanding Qin and
               Mingzhu Sun and
               Xin Zhao and
               Xiang Li and
               Xizeng Feng},
  title     = {A new method for characterizing the long-term behavior of zebrafish
               from the trajectory},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {272--275},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147425},
  doi       = {10.1109/NEMS.2015.7147425},
  timestamp = {Fri, 05 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/QinSZLF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QinZW15,
  author    = {Yafei Qin and
               Yulong Zhao and
               Weizhong Wang},
  title     = {Development and characterization of three-axis micro-force sensor
               series},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {103--106},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147384},
  doi       = {10.1109/NEMS.2015.7147384},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/QinZW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QiuLZ15,
  author    = {Guangdong Qiu and
               Zhijie Luo and
               Guofu Zhou},
  title     = {Design of a wireless data transmission system and display terminal
               based on {MEMS} sensors and Bluetooth 4.0},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {541--544},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147487},
  doi       = {10.1109/NEMS.2015.7147487},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/QiuLZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RMS15,
  author    = {Shyam Sumukh S. R and
               Akshay Moudgil and
               Sundaram Swaminathan},
  title     = {Modelling of Phosphorus and Gallium doped Nano-GNRFET based gas sensor},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {347--352},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147441},
  doi       = {10.1109/NEMS.2015.7147441},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RMS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RaeiniKJ15,
  author    = {Amin Ghasemi Nejad Raeini and
               Zoheir Kordrostami and
               Mojtaba Javaheri},
  title     = {High on/off current ratio in {SB-CNTFET} based on tuning the gate
               insulator parameters for different ambient temperatures},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {630--634},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147509},
  doi       = {10.1109/NEMS.2015.7147509},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RaeiniKJ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RiazLSFL15,
  author    = {K. Riaz and
               S.{-}F. Leung and
               H. Shagoshtasbi and
               Z. Fan and
               Y.{-}K. Lee},
  title     = {Optimization of multiple-pulse ultra-low voltage Nanospike electroporation
               chips using feedback system control for efficient delivery of molecules
               to cancer cells},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {263--267},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147423},
  doi       = {10.1109/NEMS.2015.7147423},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RiazLSFL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RiusMTLP15,
  author    = {Gemma Rius and
               Soichiro Matsui and
               Masaki Tanemura and
               Matteo Lorenzoni and
               Francesc P{\'{e}}rez{-}Murano},
  title     = {Properties and applications of carbon nanofibers for atomic force
               microscopy},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {571--574},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147494},
  doi       = {10.1109/NEMS.2015.7147494},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RiusMTLP15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShagoshtasbiRLT15,
  author    = {H. Shagoshtasbi and
               K. Riaz and
               Yi{-}Kuen Lee and
               K. Tse},
  title     = {Smartphone-based electroporator system for micro/nano electroporation
               chips},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {72--75},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147376},
  doi       = {10.1109/NEMS.2015.7147376},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShagoshtasbiRLT15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShakilKB15,
  author    = {Shifur Rahman Shakil and
               Saha Atanu Kumar and
               Md. Belal Hossain Bhuian},
  title     = {Transition in electronic transport properties of graphene nanoribbon
               due to the adsorption of atoms and molecules},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {375--379},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147447},
  doi       = {10.1109/NEMS.2015.7147447},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShakilKB15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShakilZPTKB15,
  author    = {Shifur Rahman Shakil and
               Fatema Tuz Zohra and
               Parna Pramanik and
               Raihanul Islam Tushar and
               Saha Atanu Kumar and
               Md. Belal Hossain Bhuian},
  title     = {Vapor adsorption limitation of graphene nanoribbons in quasi conductance
               increment: {A} {NEGF} approach},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {366--371},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147445},
  doi       = {10.1109/NEMS.2015.7147445},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShakilZPTKB15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Shoval15,
  author    = {Shraga Shoval},
  title     = {A mini actuator driven by hydraulic power supply},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {361--365},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147444},
  doi       = {10.1109/NEMS.2015.7147444},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Shoval15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuYXT15,
  author    = {Yufeng Su and
               Zhitong Ye and
               Zhiming Xiao and
               Kenichi Takahata},
  title     = {Analytical and experimental study of micromachined graphite rotor
               based on diamagnetic levitation},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {116--119},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147387},
  doi       = {10.1109/NEMS.2015.7147387},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SuYXT15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuZHCJYZ15,
  author    = {Zong{-}Ming Su and
               Xiao{-}Sheng Zhang and
               Mengdi Han and
               Xiao{-}Liang Cheng and
               Xia Jiang and
               Xiang{-}Zhi Yin and
               Haixia Zhang},
  title     = {Honeycomb-patterned {PDMS} membrane based on nanosphere lithography},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {566--570},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147493},
  doi       = {10.1109/NEMS.2015.7147493},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SuZHCJYZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunW15,
  author    = {Hao Sun and
               Xiang Wang},
  title     = {Numerical simulation of nickel electroforming process influenced by
               flow field},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {502--506},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147478},
  doi       = {10.1109/NEMS.2015.7147478},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SutthinetPLP15,
  author    = {Chalin Sutthinet and
               Toempong Phetchakul and
               Wittaya Luanatikomkul and
               Amporn Poyai},
  title     = {Multi-sensor diode for magnetic field and photo detection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {179--182},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147405},
  doi       = {10.1109/NEMS.2015.7147405},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SutthinetPLP15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TakebeHMLT15,
  author    = {Kozaburo Takebe and
               Takaya Higashira and
               Hidetoshi Miyashita and
               Sang{-}Seok Lee and
               Keisuke Takano},
  title     = {Characteristics of H-shaped fractal antenna having VOx absorber for
               multi-band microbolometer},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {466--469},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147469},
  doi       = {10.1109/NEMS.2015.7147469},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TakebeHMLT15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangLHWSY15,
  author    = {Yu{-}Hsiang Tang and
               Yu{-}Hsin Lin and
               Tsung{-}Tao Huang and
               Jun{-}Sheng Wang and
               Ming{-}Hua Shiao and
               Chih{-}Sheng Yu},
  title     = {Investigation of fabricated Through Glass Via {(TGV)} process by inductively
               coupled plasma reactive ion etching of quartz glass},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {401--404},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147453},
  doi       = {10.1109/NEMS.2015.7147453},
  timestamp = {Mon, 14 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TangLHWSY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangTBXMO15,
  author    = {L. C. Tang and
               Qiulin Tan and
               Aida Bao and
               Jijun Xiong and
               Haiyang Mao and
               Wen Ou},
  title     = {Fabrication of transparent {SERS} devices for pesticide detection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {343--346},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147440},
  doi       = {10.1109/NEMS.2015.7147440},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TangTBXMO15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TheTLKN15,
  author    = {Hai Le The and
               Bao Quoc Ta and
               Hoa Le{-}Thanh and
               Frank Karlsen and
               Trung Nguyen{-}Thoi},
  title     = {A novel design of passive split and recombination micromixer with
               trapezoidal zigzag channels},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {28--31},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147349},
  doi       = {10.1109/NEMS.2015.7147349},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TheTLKN15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ThimmarajuY15,
  author    = {Thimmaraju and
               Da{-}Jeng Yao},
  title     = {Analytical model for different geographic origin coffee beans aroma
               analysis using {TD-GC-MS}},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {353--356},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147442},
  doi       = {10.1109/NEMS.2015.7147442},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ThimmarajuY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TianWZJS15,
  author    = {Bian Tian and
               Peng Wang and
               Yulong Zhao and
               Zhuangde Jiang and
               Bo Shen},
  title     = {Piezoresistive micro-accelerometer with supplement structure},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {107--110},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147385},
  doi       = {10.1109/NEMS.2015.7147385},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TianWZJS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsaiSCCF15,
  author    = {Chieh{-}Wei Tsai and
               Sheng{-}Chih Shen and
               Shyang{-}Jye Chang and
               Yi{-}Cheng Chen and
               Mao{-}Ju Fang},
  title     = {A small elastic floating energy harvester for ocean ripple power using
               knitted {PVDF} thin film},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {461--465},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147468},
  doi       = {10.1109/NEMS.2015.7147468},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TsaiSCCF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TuC15,
  author    = {Kun{-}Tse Tu and
               Chen{-}Kuei Chung},
  title     = {Fabrication of biodegradable polymer microneedle array via {CO2} laser
               ablation},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {494--497},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147476},
  doi       = {10.1109/NEMS.2015.7147476},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TuC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WanS15,
  author    = {Wenfeng Wan and
               Yajing Shen},
  title     = {Patterning alginate hydrogel through optically induced electrodes},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {617--618},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147505},
  doi       = {10.1109/NEMS.2015.7147505},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WanS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WanX15,
  author    = {Sicong Wan and
               Qingsong Xu},
  title     = {Design of a new rotational micropositioning mechanism driven by limited-angle
               torque motor},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {209--213},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147412},
  doi       = {10.1109/NEMS.2015.7147412},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WanX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCL15,
  author    = {Yu{-}Shiang Wang and
               Chun{-}Yi Chen and
               Che{-}Hsin Lin},
  title     = {Microchip based ion source powered by a lighter piezo-generator for
               mass-spectrometry detection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {128--131},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147391},
  doi       = {10.1109/NEMS.2015.7147391},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangCL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangD15,
  author    = {Yong Wang and
               Jiahao Deng},
  title     = {Research on calculation method of MEMS-based safety and arming system},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {453--456},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147466},
  doi       = {10.1109/NEMS.2015.7147466},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangD15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangJG15,
  author    = {M. J. Wang and
               X. B. Jin and
               F. M. Guo},
  title     = {Less than 10-13W weak light response for quantum dots photodetector
               at room temprature},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {44--47},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147353},
  doi       = {10.1109/NEMS.2015.7147353},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangJG15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangKL15,
  author    = {Tao Wang and
               Takeshi Kobayashi and
               Chengkuo Lee},
  title     = {Broadband piezoelectric micromachined ultrasonic transducer (pMUT)
               using mode-merged design},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {238--242},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147418},
  doi       = {10.1109/NEMS.2015.7147418},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangKL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangL15,
  author    = {Chih{-}Hung Wang and
               Gwo{-}Bin Lee},
  title     = {Multiple influenza virulent diagnosis by utilizing a single-aptamer
               based microfluidic system},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {20--24},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147347},
  doi       = {10.1109/NEMS.2015.7147347},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangL15a,
  author    = {Yifan Wang and
               Zewen Liu},
  title     = {Realization of the microchannel with microisland arrays by one-step
               silicon wet etching process},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {557--560},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147491},
  doi       = {10.1109/NEMS.2015.7147491},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangL15a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLLWJLWGZ15,
  author    = {Fufu Wang and
               Wenzhong Lou and
               Fangyi Liu and
               Dakui Wang and
               Xin Jin and
               Jun Lu and
               Jian Wu and
               Xuhong Guo and
               Zhe Zhang},
  title     = {The calculation method of reliability based on {MEMS} Safety and Arming
               device},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {426--429},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147459},
  doi       = {10.1109/NEMS.2015.7147459},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLLWJLWGZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLPZKL15,
  author    = {Feng Wang and
               Wenzhong Lou and
               Liu Peng and
               Zhiyi Zheng and
               Pengfei Kang and
               Jun Lu},
  title     = {Visualization of real-time logistics monitoring microsystem based
               on {MEMS} sensors},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {438--440},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147462},
  doi       = {10.1109/NEMS.2015.7147462},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLPZKL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLQZ15,
  author    = {Yaling Wang and
               Zhijie Luo and
               Guangdong Qiu and
               Guofu Zhou},
  title     = {Design of Smart Watch system based on E-paper},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {327--330},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147437},
  doi       = {10.1109/NEMS.2015.7147437},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLQZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLW15,
  author    = {Hai Wang and
               Han Li and
               Li Wen},
  title     = {One dimensional simulation of microscale {DBD} plasma},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {515--520},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147481},
  doi       = {10.1109/NEMS.2015.7147481},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLW15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLXLWJZX15,
  author    = {Fufu Wang and
               Wenzhong Lou and
               Yongjia Xiong and
               Fangyi Liu and
               Dakui Wang and
               Xin Jin and
               Mingrong Zhang and
               Chenggang Xu},
  title     = {The parametric analysis of the centrifugal insurance mechanism in
               {MEMS} safety and arming device},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {457--460},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147467},
  doi       = {10.1109/NEMS.2015.7147467},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLXLWJZX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLXWLJL15,
  author    = {Dakui Wang and
               Wenzhong Lou and
               Yongjia Xiong and
               Fufu Wang and
               Fangyi Liu and
               Xin Jin and
               Jun Lu},
  title     = {The effect of micro-spring stiffness changes on the typical {MEMS}
               S{\&}A device},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {413--416},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147456},
  doi       = {10.1109/NEMS.2015.7147456},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLXWLJL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZTLL15,
  author    = {Peng Wang and
               Yulong Zhao and
               Bian Tian and
               Yingxue Li and
               Yan Liu},
  title     = {A {MEMS} accelerometer for spindle monitoring system},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {545--549},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147488},
  doi       = {10.1109/NEMS.2015.7147488},
  timestamp = {Wed, 19 Feb 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/WangZTLL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiLL15,
  author    = {Fanan Wei and
               Longhai Li and
               Lianqing Liu},
  title     = {Facile synthesis of copper nanostructures through simple replacement
               reaction},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {160--163},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147400},
  doi       = {10.1109/NEMS.2015.7147400},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeiLL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiZLL15,
  author    = {Fanan Wei and
               Peilin Zhou and
               Guangyong Li and
               Lianqing Liu},
  title     = {Finite element simulation of stress relaxation process in living cells},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {67--71},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147375},
  doi       = {10.1109/NEMS.2015.7147375},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeiZLL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XieJLT15,
  author    = {Shuangxi Xie and
               Niandong Jiao and
               Lianqing Liu and
               Steve Tung},
  title     = {Fabrication of graphene interdigitated electrodes and all-carbon electronic
               devices},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {314--317},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147434},
  doi       = {10.1109/NEMS.2015.7147434},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XieJLT15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XingLX15,
  author    = {Jianchun Xing and
               Weifeng Liu and
               Liqiang Xie},
  title     = {A novel identification method of multiple {OFC} {SAW} sensor tags},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {187--192},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147407},
  doi       = {10.1109/NEMS.2015.7147407},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XingLX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuZZSZH15,
  author    = {Kaisi Xu and
               Ningli Zhu and
               Qingying Zhan and
               Weiguo Su and
               Wei Zhang and
               Yilong Hao},
  title     = {Design and simulation of micro-platform for {MEMS} devices applied
               in shock environment},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {445--448},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147464},
  doi       = {10.1109/NEMS.2015.7147464},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuZZSZH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanWHZYY15,
  author    = {Ruixuan Yan and
               Xianglei Wei and
               Chunhua He and
               Qiancheng Zhao and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {Research on the resonant frequency of {MEMS} gyroscopes under varying
               tuning voltage},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {435--437},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147461},
  doi       = {10.1109/NEMS.2015.7147461},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YanWHZYY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangCLSY15,
  author    = {Chih{-}Chun Yang and
               Kuo{-}Wei Chang and
               Cheng{-}Hsien Liu and
               Claire R. Shen and
               Da{-}Jeng Yao},
  title     = {Using gradient micro-fluidics chips to optimize {BG-11} medium for
               the growth of cyanobacteria Synechococcus elongatus {PCC7942}},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {136--140},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147393},
  doi       = {10.1109/NEMS.2015.7147393},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangCLSY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangM15,
  author    = {Lung{-}Jieh Yang and
               Suseendar Marimuthu},
  title     = {Acoustic comparison of {PET} and Latex wings for flapping micro-air-vehicles},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {172--174},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147403},
  doi       = {10.1109/NEMS.2015.7147403},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangM15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangYWL15,
  author    = {Wenguang Yang and
               Haibo Yu and
               Yuechao Wang and
               Lianqing Liu},
  title     = {Fabrication of microstructures using the DMD-based modulating projection
               printing method},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {625--629},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147508},
  doi       = {10.1109/NEMS.2015.7147508},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangYWL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangZZL15,
  author    = {Mu Yang and
               Yushi Zhang and
               Hongze Zhang and
               Zhihong Li},
  title     = {Characterization of {PEDOT:} {PSS} as a biocompatible conductive material},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {149--151},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147397},
  doi       = {10.1109/NEMS.2015.7147397},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangZZL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YiZYBKF15,
  author    = {Ying Yi and
               Amir Zaher and
               Omar Yassine and
               Ulrich Buttner and
               J{\"{u}}rgen Kosel and
               Ian G. Foulds},
  title     = {Electromagnetically powered electrolytic pump and thermo-responsive
               valve for drug delivery},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {5--8},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147344},
  doi       = {10.1109/NEMS.2015.7147344},
  timestamp = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/YiZYBKF15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YouTHZYZY15,
  author    = {Jun You and
               Dayu Tian and
               Chunhua He and
               Qiancheng Zhao and
               Zhenchuan Yang and
               Dacheng Zhang and
               Guizhen Yan},
  title     = {A method to evaluate the influence of different substrate on stress
               mismatch induced deformation in {MEMS} accelerometer},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {421--425},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147458},
  doi       = {10.1109/NEMS.2015.7147458},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YouTHZYZY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuHJYZ15,
  author    = {Bocheng Yu and
               Mengdi Han and
               Xia Jiang and
               Xiangzhi Yin and
               Haixia Zhang},
  title     = {A novel discharge system based on jagged electrodes with controllable
               spacing},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {525--528},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147483},
  doi       = {10.1109/NEMS.2015.7147483},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuHJYZ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhanCLSLL15,
  author    = {Haoran Zhan and
               Fansheng Cheng and
               Ziyi Li and
               Lei Shi and
               Yu Liu and
               Woon{-}Ming Lau},
  title     = {Fabrication of flexible and low-cost {SERS} substrate by using Archimedes'
               Principle},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {48--49},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147354},
  doi       = {10.1109/NEMS.2015.7147354},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhanCLSLL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangHLLZYY15,
  author    = {Jimeng Zhang and
               Chunhua He and
               Yuxian Liu and
               Dachuan Liu and
               Qiancheng Zhao and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {A novel scale factor calibration method for a {MEMS} gyroscope based
               on virtual coriolis force},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {58--62},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147373},
  doi       = {10.1109/NEMS.2015.7147373},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangHLLZYY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangHZZYZY15,
  author    = {Pan Zhang and
               Chunhua He and
               Jimeng Zhang and
               Qiancheng Zhao and
               Zhenchuan Yang and
               Dacheng Zhang and
               Guizhen Yan},
  title     = {Investigation of reliability of {MEMS} gyroscopes under different
               shock conditions},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {441--444},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147463},
  doi       = {10.1109/NEMS.2015.7147463},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangHZZYZY15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLLLH15,
  author    = {Yu Zhang and
               Guiya Liu and
               MinQuan Li and
               Jun Luo and
               Chengjun Huang},
  title     = {Simulation analysis of nanopore performance in single-nanoparticle
               detection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {229--232},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147416},
  doi       = {10.1109/NEMS.2015.7147416},
  timestamp = {Fri, 17 Apr 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangLLLH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLYWZL15,
  author    = {Lingqian Zhang and
               Yaoping Liu and
               Fang Yang and
               Wei Wang and
               Dacheng Zhang and
               Zhihong Li},
  title     = {Parylene {C} autofluorescence for on-chip highest processing temperature
               sensing},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {302--305},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147431},
  doi       = {10.1109/NEMS.2015.7147431},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangLYWZL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangWRXJ15,
  author    = {Jingjing Zhang and
               Xueyong Wei and
               Juan Ren and
               Xiangdong Xue and
               Zhuangde Jiang},
  title     = {{SAW} assisted blood/plasma separation in microchannel with constriction-expansion
               transition},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {86--89},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147379},
  doi       = {10.1109/NEMS.2015.7147379},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangWRXJ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangWXWL15,
  author    = {Chuang Zhang and
               Wenxue Wang and
               Ning Xi and
               Yuechao Wang and
               Lianqing Liu},
  title     = {Characterization and modeling of living cell based actuation for bio-syncretic
               robot development},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {296--301},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147430},
  doi       = {10.1109/NEMS.2015.7147430},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangWXWL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangX15,
  author    = {Xiaozhi Zhang and
               Qingsong Xu},
  title     = {Design of a new 5-DOF flexure-based nanopositioning stage},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {276--280},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147426},
  doi       = {10.1109/NEMS.2015.7147426},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangXLLLSHT15,
  author    = {Xiaoxiao Zhang and
               Lei Xu and
               Juhyun Lee and
               Rongsong Li and
               Yang Liu and
               Aubrey Shapero and
               Tzung K. Hsiai and
               Yu{-}Chong Tai},
  title     = {Flexible micro sensor for intravascular vulnerable plaque diagnostic
               with electrical impedance spectroscopy},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {243--247},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147419},
  doi       = {10.1109/NEMS.2015.7147419},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangXLLLSHT15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoDX15,
  author    = {Jiuxuan Zhao and
               Hong Ding and
               Jin Xie},
  title     = {Micromechanical resonant electrostatic charge sensor with micro-leverage
               mechanisms},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {111--115},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147386},
  doi       = {10.1109/NEMS.2015.7147386},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoDX15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLHFL15,
  author    = {Yulong Zhao and
               Cun Li and
               Mengmeng Hao and
               Xiaole Fan and
               Keyin Liu},
  title     = {Design and analysis of a micro pressure sensor with optical fiber},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {54--57},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147356},
  doi       = {10.1109/NEMS.2015.7147356},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoLHFL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoPWSWJ15,
  author    = {Yao Zhao and
               Niancai Peng and
               Xueyong Wei and
               Manoj Sharma and
               Jiuhong Wang and
               Zhuangde Jiang},
  title     = {Mercaptopropionic acid capped ZnS: Mn/ZnS core/shell quantum dots
               as fluorescence probe for folic acid detection},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {306--309},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147432},
  doi       = {10.1109/NEMS.2015.7147432},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoPWSWJ15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoZL15,
  author    = {You Zhao and
               Yulong Zhao and
               Songbo Liang},
  title     = {Design and fabrication of a triaxial cutting force dynamometer based
               on {MEMS} technique},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {323--326},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147436},
  doi       = {10.1109/NEMS.2015.7147436},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoZL15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhongLJWSC15,
  author    = {Bowen Zhong and
               Zongwei Li and
               Ziqi Jin and
               Zhenhua Wang and
               Lining Sun and
               Linsen Chen},
  title     = {Research on precision position technology in micro-operation robot
               based on inertial stick-slip driving},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {214--218},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147413},
  doi       = {10.1109/NEMS.2015.7147413},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhongLJWSC15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouZGS15,
  author    = {Liang Zhou and
               Guitao Zhang and
               Richard Galos and
               Yong Shi},
  title     = {Fabrication and characterization of Barium Titanate nanofibers},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {92--94},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147381},
  doi       = {10.1109/NEMS.2015.7147381},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhouZGS15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Zhu15,
  author    = {Xiaolu Zhu},
  title     = {Electroosmotic flow assisted rotation of self-assembled microparticle
               chains using optoelectronic tweezers},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {82--85},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147378},
  doi       = {10.1109/NEMS.2015.7147378},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Zhu15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuCQHH15,
  author    = {Yanqing Zhu and
               Bei Chen and
               Ming Qin and
               Jian{-}Qiu Huang and
               Qing{-}An Huang},
  title     = {A self-packaged self-heated thermal wind sensor with high reliability
               and low power consumption},
  booktitle = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages     = {193--196},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://doi.org/10.1109/NEMS.2015.7147408},
  doi       = {10.1109/NEMS.2015.7147408},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuCQHH15.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/nems/2015,
  title     = {10th {IEEE} International Conference on Nano/Micro Engineered and
               Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  publisher = {{IEEE}},
  year      = {2015},
  url       = {https://ieeexplore.ieee.org/xpl/conhome/7132046/proceeding},
  isbn      = {978-1-4673-6695-3},
  timestamp = {Wed, 16 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/2015.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AfsharPSFS13,
  author    = {Maziar Afshar and
               E. Preiss and
               Tilman Sauerwald and
               Dara Feili and
               Helmut Seidel},
  title     = {{ITO} nanowires for gas-sensor applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1123--1126},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559919},
  doi       = {10.1109/NEMS.2013.6559919},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AfsharPSFS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Al-MumenRDL13,
  author    = {H. Al{-}Mumen and
               Fubo Rao and
               Lixin Dong and
               Wen Li},
  title     = {Tunable graphene nanomesh semiconductor: Design, fabrication, and
               characterization},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1127--1130},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559920},
  doi       = {10.1109/NEMS.2013.6559920},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Al-MumenRDL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Al-MumenRDL13a,
  author    = {H. Al{-}Mumen and
               Fubo Rao and
               Lixin Dong and
               Wen Li},
  title     = {Design, fabrication, and characterization of graphene thermistor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1135--1138},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559922},
  doi       = {10.1109/NEMS.2013.6559922},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Al-MumenRDL13a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ApoSP13,
  author    = {D. J. Apo and
               M. Sanghadasa and
               S. Priya},
  title     = {Low frequency arc-based {MEMS} structures for vibration energy harvesting},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {615--618},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559805},
  doi       = {10.1109/NEMS.2013.6559805},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ApoSP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AwP13,
  author    = {K. C. Aw and
               S. V. Praneeth},
  title     = {Low frequency vibration energy harvesting from human motion using
               {IPMC} cantilever with electromagnectic transduction},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {645--648},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559812},
  doi       = {10.1109/NEMS.2013.6559812},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AwP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BaekYSKPHOKCLEK13,
  author    = {Chul{-}Heum Baek and
               Litao Yao and
               Sung{-}Bo Seo and
               Hwa{-}Min Kim and
               Dae{-}Seung Pyo and
               Pyo{-}Hwan Hong and
               Jung{-}Hwa Oh and
               Dae{-}Young Kong and
               Chan{-}Seob Cho and
               Jong{-}Hyun Lee and
               In{-}Yong Eom and
               Bonghwan Kim},
  title     = {Superhydrophobic surface obtained using pyramidal {PTFE} film fabricated
               on {RIE} etched silicon},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {903--906},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559869},
  doi       = {10.1109/NEMS.2013.6559869},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BaekYSKPHOKCLEK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BaiTBX13,
  author    = {Yin Bai and
               Jianhua Tong and
               Chao Bian and
               Shanhong Xia},
  title     = {An electrochemical microsensor based on molybdophosphate complex for
               fast determination of total phosphorus in water},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {41--44},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559678},
  doi       = {10.1109/NEMS.2013.6559678},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BaiTBX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BartenwerferF13,
  author    = {Malte Bartenwerfer and
               Sergej Fatikow},
  title     = {Robotic nanowire handling for prototypic {NEMS} switching and resonator
               devices},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {787--790},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559845},
  doi       = {10.1109/NEMS.2013.6559845},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BartenwerferF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BausellsTBP13,
  author    = {Joan R. Bausells and
               G. Tosolini and
               Y. M. Birhane and
               Francesc P{\'{e}}rez{-}Murano},
  title     = {Piezoresistive probes for (biomolecular) force sensing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1112--1115},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559917},
  doi       = {10.1109/NEMS.2013.6559917},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BausellsTBP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BoodhooLCTHM13,
  author    = {Liam Boodhoo and
               Yun Peng Lin and
               Harold M. H. Chong and
               Yoshishige Tsuchiya and
               Tsuyoshi Hasegawa and
               Hiroshi Mizuta},
  title     = {Energy reversible Si-based {NEMS} Switch for nonvolatile logic systems},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {558--561},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559792},
  doi       = {10.1109/NEMS.2013.6559792},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BoodhooLCTHM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangCCT13,
  author    = {Jui{-}Chia Chang and
               Tsung{-}Ju Chen and
               Yu{-}Cheng Chang and
               Fan{-}Gang Tseng},
  title     = {In-parallel rare cells identification by high throughput cells self-assembly},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {448--451},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559768},
  doi       = {10.1109/NEMS.2013.6559768},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangCCT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangCHHK13,
  author    = {Y. J. Chang and
               C. H. Chang and
               C. C. Ho and
               J. C. Hsu and
               C. L. Kuo},
  title     = {Nanostructure fabricated by laser direct writing with water droplets},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1022--1025},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559896},
  doi       = {10.1109/NEMS.2013.6559896},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangCHHK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangSCHYH13,
  author    = {Chun{-}Ming Chang and
               Ming{-}Hua Shiao and
               Donyau Chiang and
               Mao{-}Jung Huang and
               Chin{-}Tien Yang and
               Wen{-}Jeng Hsueh},
  title     = {Surface property study of different patterning sapphire structures
               by {ICP-RIE}},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {372--375},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559754},
  doi       = {10.1109/NEMS.2013.6559754},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangSCHYH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCL13,
  author    = {Liguo Chen and
               Hai{-}hang Cui and
               Shaoqian Li},
  title     = {Study on trapping two particles with dielectrophoretic microfluidic
               chip},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {136--139},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559699},
  doi       = {10.1109/NEMS.2013.6559699},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenGZQL13,
  author    = {Hong Chen and
               Likai Ge and
               Zezhi Zheng and
               Xiangmeng Qu and
               Xiaoling Lan},
  title     = {Optimized capillary based microarray used for {DNA} analysis},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {308--311},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559738},
  doi       = {10.1109/NEMS.2013.6559738},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenGZQL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenLLLZL13,
  author    = {Xin Chen and
               Dongmei Li and
               Shengfa Liang and
               Xiaojing Li and
               Shuang Zhan and
               Ming Liu},
  title     = {Novel flexible room temperature {NO2} gas sensor based on polypyrrole
               coated SnO2 nanoparticles},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {266--269},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559729},
  doi       = {10.1109/NEMS.2013.6559729},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenLLLZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenPCZWG013,
  author    = {Yuanfang Chen and
               Weihua Pei and
               Sanyuan Chen and
               Shanshan Zhao and
               Huan Wang and
               Qiang Gui and
               Hongda Chen},
  title     = {Fabrication and characterization of surface-modified dry electrode
               for monitoring biopotential},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {474--477},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559773},
  doi       = {10.1109/NEMS.2013.6559773},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenPCZWG013.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenPGCZ013,
  author    = {Sanyuan Chen and
               Weihua Pei and
               Qiang Gui and
               Yuanfang Chen and
               Shanshan Zhao and
               Hongda Chen},
  title     = {Multi-channel microelectrode array for cortical recording and stimulation:
               Fabrication and modification},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {395--398},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559758},
  doi       = {10.1109/NEMS.2013.6559758},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenPGCZ013.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenPHYZ13,
  author    = {Linsen Chen and
               Donglin Pu and
               Jin Hu and
               Yan Ye and
               Pengfei Zhu},
  title     = {Hybrid lithography system for {MEMS/NEMS}},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {304--307},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559737},
  doi       = {10.1109/NEMS.2013.6559737},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenPHYZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenPWHW13,
  author    = {Y. C. Chen and
               C. T. Pan and
               H. C. Wu and
               F. T. Hsu and
               P. S. Wang},
  title     = {Design and fabrication of variable micropattern for flexible backlight},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {935--938},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559877},
  doi       = {10.1109/NEMS.2013.6559877},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenPWHW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenPZH13,
  author    = {Ting{-}Hsuan Chen and
               Leiting Pan and
               Xiaolu Zhu and
               Chih{-}Ming Ho},
  title     = {Tissue morphology controlled by micropatterning and self-assembly
               of vascular mesenchymal cells},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {328--331},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559743},
  doi       = {10.1109/NEMS.2013.6559743},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenPZH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenSCFZ13,
  author    = {Dajing Chen and
               T. Sharma and
               Yuquan Chen and
               Xin Fu and
               J. X. J. Zhang},
  title     = {Gold nanoparticles doped flexible PVDF-TrFE energy harvester},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {669--672},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559818},
  doi       = {10.1109/NEMS.2013.6559818},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenSCFZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenXCYWHW13,
  author    = {Peng Chen and
               Dingbang Xiao and
               Zhihua Chen and
               Ye Yuan and
               Xinghua Wang and
               Songqi Hu and
               Yulie Wu},
  title     = {A triaxial monolithic silicon accelerometer with improved temperature
               characteristics},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1006--1009},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559892},
  doi       = {10.1109/NEMS.2013.6559892},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenXCYWHW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenZL13,
  author    = {Pei Chen and
               Yulong Zhao and
               Yiyao Li},
  title     = {Design, simulation and fabrication of a micromachined cantilever-based
               flow sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {681--684},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559821},
  doi       = {10.1109/NEMS.2013.6559821},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenZZXX13,
  author    = {Qiao Chen and
               Hao Zhang and
               Xiaoyang Zhang and
               Dacheng Xu and
               Huikai Xie},
  title     = {Repeatability study of 2D {MEMS} mirrors based on S-shaped Al/SiO2
               bimorphs},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {817--820},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559850},
  doi       = {10.1109/NEMS.2013.6559850},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenZZXX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengYLZZWS13,
  author    = {Wei Cheng and
               Yugang Yin and
               Yipan Li and
               Haoer Zhang and
               Shiming Zhang and
               Lingyun Wang and
               Daoheng Sun},
  title     = {Discussion on the lapping and polishing process of 4H-SiC wafer},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {841--844},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559856},
  doi       = {10.1109/NEMS.2013.6559856},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengYLZZWS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChiouCTHC13,
  author    = {Jin{-}Chern Chiou and
               Lei{-}Chun Chou and
               Shang{-}Wei Tsai and
               Kuan{-}Chou Hou and
               Chih{-}Wei Chang},
  title     = {Cooling stimulation on cerebral cortex for epilepsy suppression with
               integration of micro-invasive electrodes and {TE} coolers},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1249--1252},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559945},
  doi       = {10.1109/NEMS.2013.6559945},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChiouCTHC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChiuLWHW13,
  author    = {Yi{-}Yuan Chiu and
               Wan{-}Ying Lin and
               Hsin{-}Yao Wang and
               Song{-}Bin Huang and
               Min{-}Hsien Wu},
  title     = {Development of a piezoelectric polyvinylidene fluoride polymer-based
               sensor patch for simultaneous heartbeat and respiration monitoring},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {45--48},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559679},
  doi       = {10.1109/NEMS.2013.6559679},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChiuLWHW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChongSC13,
  author    = {Po{-}Fat Chong and
               Xiaomei Shi and
               Ching{-}Hsiang Cheng},
  title     = {A novel flexible capacitive micromachined ultrasonic transducer {(CMUT)}
               array with isolated metallic islands riveted to a polymer film},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {923--926},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559874},
  doi       = {10.1109/NEMS.2013.6559874},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChongSC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChouWL13,
  author    = {Chen{-}Shiun Chou and
               Yung{-}Chen Wu and
               Che{-}Hsin Lin},
  title     = {High performance oxygen sensor utilizing ultraviolet irradiation assisted
               ZnO nanorods under low operation temperature},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {72--75},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559685},
  doi       = {10.1109/NEMS.2013.6559685},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChouWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuOWT13,
  author    = {Hung{-}Yao Chu and
               Judy M. Obliosca and
               Pen{-}Cheng Wang and
               Fan{-}Gang Tseng},
  title     = {Strong {SERS} from gold nanostructure sandwiched on single layer graphene
               for high sensitive biomolecule detection},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1062--1065},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559905},
  doi       = {10.1109/NEMS.2013.6559905},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChuOWT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuangCLC13,
  author    = {Yun{-}Ju Chuang and
               Pei{-}Ru Chen and
               Wei{-}Rui Lin and
               Fu{-}Ron Chen},
  title     = {Fabrication and characterization of a novel multi-annular type backscattered
               electron detector for {SEM}},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {494--497},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559778},
  doi       = {10.1109/NEMS.2013.6559778},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChuangCLC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuangJHJH13,
  author    = {Cheng{-}Hsin Chuang and
               Jing{-}Wei Ju and
               Yao{-}Wei Huang and
               Chun{-}Ping Jen and
               Fei{-}Bin Hsiao},
  title     = {Enhancing fluorescent response of immunosensing by a {DEP} chip with
               transparent electrodes and microcavities array},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {458--461},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559769},
  doi       = {10.1109/NEMS.2013.6559769},
  timestamp = {Fri, 27 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChuangJHJH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungLHWT13,
  author    = {Yung{-}Chiang Chung and
               Wei{-}Jie Liao and
               Yu{-}Tzu Huang and
               Cheng{-}Yuan Wu and
               Cheng{-}Wei Tsai},
  title     = {Study of gene transfection enhancement and Parameters Optimization
               using microfluidic electroporation chip},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {274--277},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559731},
  doi       = {10.1109/NEMS.2013.6559731},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungLHWT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungLSC13,
  author    = {C. K. Chung and
               C. C. Lai and
               T. R. Shih and
               E. C. Chang},
  title     = {Simulation and fabrication of capillary-driven meander micromixer
               for short-distance mixing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1279--1282},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559951},
  doi       = {10.1109/NEMS.2013.6559951},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungLSC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungYLL13,
  author    = {C. K. Chung and
               C. Y. Yang and
               M. W. Liao and
               S. L. Li},
  title     = {Fabrication of copper nanowires by eelectrodeposition uusing anodic
               aluminum oxide template},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1072--1075},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559907},
  doi       = {10.1109/NEMS.2013.6559907},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungYLL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CrumL13,
  author    = {Brian P. Crum and
               Wen Li},
  title     = {Parylene-based fold-and-bond wireless pressure sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1155--1158},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559926},
  doi       = {10.1109/NEMS.2013.6559926},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CrumL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiXLWWL13,
  author    = {Danfeng Cui and
               Chenyang Xue and
               Chao Liu and
               Liping Wei and
               Yonghua Wang and
               Jun Liu},
  title     = {Induced-transparency in silicon-on-insulator based novel resonator
               systems},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {582--585},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559798},
  doi       = {10.1109/NEMS.2013.6559798},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CuiXLWWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaiYP13,
  author    = {Ching{-}Liang Dai and
               Ming{-}Zhi Yang and
               Shih{-}Wen Peng},
  title     = {An energy harvesting device manufactured using the commercial 0.18
               {\(\mathrm{\mu}\)}m {CMOS} process},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {128--131},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559697},
  doi       = {10.1109/NEMS.2013.6559697},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DaiYP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaiZLWCF13,
  author    = {Pengfei Dai and
               Honglu Zhang and
               Tie Li and
               Yuelin Wang and
               Jie Chao and
               Chunhai Fan},
  title     = {Improvement of {DNA} Origami's adsorption on silicon substrate},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {701--704},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559826},
  doi       = {10.1109/NEMS.2013.6559826},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DaiZLWCF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DathbunC13,
  author    = {A. Dathbun and
               Sutichai Chaisitsak},
  title     = {Effects of three parameters on graphene synthesis by chemical vapor
               deposition},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1018--1021},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559895},
  doi       = {10.1109/NEMS.2013.6559895},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DathbunC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DeebaMI13,
  author    = {Farah Deeba and
               Shahed Khan Mohammed and
               Md. Shofiqul Islam},
  title     = {A complete analytical model for square diaphragm capacitive sensor
               with clamped edge},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1311--1314},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559956},
  doi       = {10.1109/NEMS.2013.6559956},
  timestamp = {Wed, 18 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/DeebaMI13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DengZCL13,
  author    = {T. Deng and
               C. Zhao and
               J. Chen and
               Zewen Liu},
  title     = {A novel method to fabricate silicon nanopore arrays},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {714--717},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559828},
  doi       = {10.1109/NEMS.2013.6559828},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DengZCL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DhakarLTL13,
  author    = {Lokesh Dhakar and
               Huicong Liu and
               Francis Eng Hock Tay and
               Chengkuo Lee},
  title     = {Low-frequency vibration-based energy harvester using a piezoelectric
               composite beam},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {939--942},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559878},
  doi       = {10.1109/NEMS.2013.6559878},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DhakarLTL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingLMSHZ13,
  author    = {Xianting Ding and
               Ningxia Liu and
               K. Matsuo and
               Mingzhu Sun and
               Chih{-}Ming Ho and
               Xin Zhao},
  title     = {Use of cell morphology as an early bio-sensor for viral infection},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1167--1170},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559928},
  doi       = {10.1109/NEMS.2013.6559928},
  timestamp = {Fri, 05 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DingLMSHZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingWLLSG13,
  author    = {L. Ding and
               M. J. Wang and
               Y. Q. Li and
               X. Y. Liu and
               J. H. Shen and
               F. M. Guo},
  title     = {Weak light characteristics of a new photoelectric sensor with potential
               biosensor application},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1261--1264},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559947},
  doi       = {10.1109/NEMS.2013.6559947},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DingWLLSG13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingYMLWYWB13,
  author    = {Xianting Ding and
               Jian Yang and
               Zhi{-}jun Ma and
               Dan{-}dan Liu and
               Weiping Wang and
               Jianjun Ye and
               Ieong Wong and
               Matt Barnes},
  title     = {Synthesis of scalable microdroplets with fluid instability of shearing
               flow in microfluidics},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {217--220},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559718},
  doi       = {10.1109/NEMS.2013.6559718},
  timestamp = {Sun, 03 May 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DingYMLWYWB13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DongTBSX13,
  author    = {Tian Dong and
               Jianhua Tong and
               Chao Bian and
               Jizhou Sun and
               Shanhong Xia},
  title     = {Photocatalytic digestion of total phosphorus in the presence of {H2O2}
               utilizing nano-TiO2 photocatalyst},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {771--774},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559842},
  doi       = {10.1109/NEMS.2013.6559842},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DongTBSX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DouYWLW13,
  author    = {C. Dou and
               Heng Yang and
               Y. Wu and
               X. Li and
               Y. Wang},
  title     = {A transfer technique of stress sensors for versatile applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {931--934},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559876},
  doi       = {10.1109/NEMS.2013.6559876},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DouYWLW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuBHJ13,
  author    = {Y. Du and
               J. Bao and
               Z. He and
               J. Jiang},
  title     = {A X-band switched-line 5-bit phase shifter with {RF} {MEMS} multithrow
               switches},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {296--299},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559735},
  doi       = {10.1109/NEMS.2013.6559735},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DuBHJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FanLF13,
  author    = {Yiqiang Fan and
               Huawei Li and
               Ian G. Foulds},
  title     = {Integrated lenses in polystyrene microfluidic devices},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {108--111},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559692},
  doi       = {10.1109/NEMS.2013.6559692},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FanLF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FanLYF13,
  author    = {Yiqiang Fan and
               Huawei Li and
               Ying Yi and
               Ian G. Foulds},
  title     = {Low-cost rapid prototyping of flexible plastic paper based microfluidic
               devices},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {175--178},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559708},
  doi       = {10.1109/NEMS.2013.6559708},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FanLYF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FengYSWC13,
  author    = {Jin{-}yang Feng and
               Xiongying Ye and
               Yuan{-}fang Shang and
               Kang Wu and
               Feng Chen},
  title     = {Integrated dual grating polymer microbeams for bio-chemical sensing
               in liquid environment},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1204--1207},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559935},
  doi       = {10.1109/NEMS.2013.6559935},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FengYSWC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FuMLLLRFZL13,
  author    = {Jilan Fu and
               Lixin Mo and
               Yaling Li and
               Weiwei Li and
               Wenbo Li and
               Jun Ran and
               Xinming Fan and
               Xizhe Zhao and
               Luhai Li},
  title     = {Highly conductive nanosilver ink treated at mild temperatures by reducing
               the amount of {PVP}},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {619--622},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559806},
  doi       = {10.1109/NEMS.2013.6559806},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FuMLLLRFZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FufuWYY13,
  author    = {Wang Fufu and
               Lou Wenzhong and
               Fu Yue and
               Wang Ying},
  title     = {Parametric research of {MEMS} safety and arming system},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {767--770},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559841},
  doi       = {10.1109/NEMS.2013.6559841},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FufuWYY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GaoDLLW13,
  author    = {Anran Gao and
               Pengfei Dai and
               Na Lu and
               Tie Li and
               Yuelin Wang},
  title     = {Optimization of silicon nanowire based field-effect pH sensor with
               back gate control},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {116--119},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559694},
  doi       = {10.1109/NEMS.2013.6559694},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GaoDLLW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GhadamiSML13,
  author    = {M. Ghadami and
               H. Shagoshtasbi and
               M. J. Mahjoob and
               Y.{-}K. Lee},
  title     = {Comparative study of {PID} control and model predictive control for
               a microfluidic electroporation system},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {895--898},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559867},
  doi       = {10.1109/NEMS.2013.6559867},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GhadamiSML13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GiffneyYAZ13,
  author    = {Tim Giffney and
               Miao Yu and
               Kean C. Aw and
               Haixia Zhang},
  title     = {Contactless {RF} {MEMS} switch using {PZT} actuation},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {861--864},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559860},
  doi       = {10.1109/NEMS.2013.6559860},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GiffneyYAZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuCG13,
  author    = {C. Gu and
               S. Chen and
               X. Guo},
  title     = {Transparent elastic capacitive pressure sensors based on silver nanowire
               electrodes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1183--1185},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559930},
  doi       = {10.1109/NEMS.2013.6559930},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuCG13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuoDWQKY13,
  author    = {X. B. Guo and
               Jian{-}Ning Ding and
               S. Y. Wang and
               J. H. Qiu and
               Bao Kan and
               Ning{-}Yi Yuan},
  title     = {Mechanical durability of micro-nano structures surface of black silicon
               produced by femtosecond laser},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1218--1221},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559938},
  doi       = {10.1109/NEMS.2013.6559938},
  timestamp = {Fri, 06 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/GuoDWQKY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HaiHXZL13,
  author    = {Wang Hai and
               Li Han and
               Zhou Xuan and
               Wang Zhan and
               Wen Li},
  title     = {{SF6} plasma etching and profile evolution of silicon in microplasma
               reactor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1210--1213},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559936},
  doi       = {10.1109/NEMS.2013.6559936},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HaiHXZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HalimKP13,
  author    = {M. A. Halim and
               Sungwon Khym and
               J. Y. Park},
  title     = {Impact based frequency increased piezoelectric vibration energy harvester
               for human motion related environments},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {949--952},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559879},
  doi       = {10.1109/NEMS.2013.6559879},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HalimKP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HanCLZZ13,
  author    = {Mengdi Han and
               Yi Chiang Chan and
               Wen Liu and
               Shouhe Zhang and
               Haixia Zhang},
  title     = {Low frequency {PVDF} piezoelectric energy harvester with combined
               d31 and d33 operating modes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {440--443},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559767},
  doi       = {10.1109/NEMS.2013.6559767},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HanCLZZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeYRBMF13,
  author    = {Tina He and
               Rui Yang and
               Srihari Rajgopal and
               Swarup Bhunia and
               Mehran Mehregany and
               Philip X.{-}L. Feng},
  title     = {Dual-gate silicon carbide (SiC) lateral nanoelectromechanical switches},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {554--557},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559791},
  doi       = {10.1109/NEMS.2013.6559791},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HeYRBMF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeZZLWLWS13,
  author    = {Guangqi He and
               Gaofeng Zheng and
               Jianyi Zheng and
               Yihong Lin and
               Jin Wei and
               Haiyan Liu and
               Bin Wang and
               Daoheng Sun},
  title     = {Micro/nano structure written via sheath gas assisted {EHD} jet},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {625--628},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559807},
  doi       = {10.1109/NEMS.2013.6559807},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HeZZLWLWS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiehLSL13,
  author    = {J. C. Hsieh and
               J. L. Lin and
               S. C. Shen and
               David T. W. Lin},
  title     = {The study of the enhancement of micro-vibration-induced harvester
               based on vapor impacting},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {195--198},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559713},
  doi       = {10.1109/NEMS.2013.6559713},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiehLSL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiehT13,
  author    = {Hsin{-}Yi Hsieh and
               Fan{-}Gang Tseng},
  title     = {Dual faced {SERS} nanoparticles equipped with tri-functions for target
               drug delivering into single cell},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {141--144},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559700},
  doi       = {10.1109/NEMS.2013.6559700},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiehT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsuL13,
  author    = {Ming{-}Chang Hsu and
               Gwo{-}Bin Lee},
  title     = {A new carbon nanotube-based hot-film sensor assembled by optically-induced
               dielectrophoresis},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {171--174},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559707},
  doi       = {10.1109/NEMS.2013.6559707},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsuL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuCHHCXW13,
  author    = {Songqi Hu and
               Hongjuan Cui and
               Kun He and
               Zhanqiang Hou and
               Peng Chen and
               Dingbang Xiao and
               Xuezhong Wu},
  title     = {A method of structural trimming to reduce mode coupling error for
               micro-gyroscopes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {805--808},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559847},
  doi       = {10.1109/NEMS.2013.6559847},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuCHHCXW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuHC13,
  author    = {Yuh{-}Chung Hu and
               Cheng{-}Tao Ho and
               Pei{-}Zen Chang},
  title     = {Flexible proximity key-panel},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {606--609},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559804},
  doi       = {10.1109/NEMS.2013.6559804},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuHC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuHZC13,
  author    = {Jia Hu and
               Shuwei He and
               Yiming Zhang and
               Jing Chen},
  title     = {In-situ measurement of ion angular distribution in bulk titanium {DRIE}
               for modeling the etch profile},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {332--335},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559744},
  doi       = {10.1109/NEMS.2013.6559744},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuHZC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuXS13,
  author    = {Xiaohui Hu and
               Xiao Xie and
               Litao Sun},
  title     = {The effect of out-of-plane strain on the electronic properties of
               zigzag graphene nanoribbons},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {747--750},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559836},
  doi       = {10.1109/NEMS.2013.6559836},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuXS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangC13,
  author    = {Jheng{-}Jhih Huang and
               Chin{-}Tai Chen},
  title     = {Microelectroforming of a nickel nozzle plate featured with anti-stiction
               for a piezoelectric atomizer},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {490--493},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559777},
  doi       = {10.1109/NEMS.2013.6559777},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangCFGH13,
  author    = {Cheng{-}Yeh Huang and
               Min{-}Yu Chiang and
               Shih{-}Kang Fan and
               Amir M. Ghaemmaghami and
               Wensyang Hsu},
  title     = {Label-free separation and sorting of human monocytes and T-cells by
               electrowetting and dielectrophoresis},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {873--876},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559863},
  doi       = {10.1109/NEMS.2013.6559863},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangCFGH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangJF13,
  author    = {Yu{-}Che Huang and
               Ben{-}Hwa Jang and
               Weileun Fang},
  title     = {Micromachined inductor integrated with a patterned soft magnetic thin
               film},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1096--1099},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559913},
  doi       = {10.1109/NEMS.2013.6559913},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangJF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangSS13,
  author    = {Jen{-}Wei Huang and
               Tsung{-}Sheng Sheu and
               Jin{-}Cherng Shyu},
  title     = {The photodiodes based on thin film organic electronic device},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1068--1071},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559906},
  doi       = {10.1109/NEMS.2013.6559906},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangSS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangTC13,
  author    = {Hsiang{-}Pi Huang and
               Tzung{-}Wei Tsai and
               Chin{-}Tai Chen},
  title     = {Formation and release of micro objects self-assembled from photocurable
               liquid by molding and inkjet printing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {478--481},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559774},
  doi       = {10.1109/NEMS.2013.6559774},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangTC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangY13,
  author    = {Jin Huang and
               Yan Yang},
  title     = {Micro-chain model of Magnetorheological fluids between two parallel
               disks},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1285--1288},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559952},
  doi       = {10.1109/NEMS.2013.6559952},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangYSS13,
  author    = {Mao{-}Jung Huang and
               Chii{-}Rong Yang and
               Chien{-}Ying Su and
               Ming{-}Hua Shiao},
  title     = {Fabrication of silicon nanopillars array for developing PCs sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {237--241},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559723},
  doi       = {10.1109/NEMS.2013.6559723},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangYSS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangYZHFWZ13,
  author    = {Xian Huang and
               Fang Yang and
               Danqi Zhao and
               Jun He and
               Xuejiao Fan and
               Wei Wang and
               Dacheng Zhang},
  title     = {Effect of phosphorus doping on the performance of Au/Si inter-diffusion},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {542--545},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559788},
  doi       = {10.1109/NEMS.2013.6559788},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangYZHFWZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/IsozakiKMS13,
  author    = {Akihiro Isozaki and
               Tetsuo Kan and
               Kiyoshi Matsumoto and
               Isao Shimoyama},
  title     = {Measurement method of light transmittance of layered metal-dielectric
               metamaterial},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {151--154},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559702},
  doi       = {10.1109/NEMS.2013.6559702},
  timestamp = {Sat, 05 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/IsozakiKMS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Jacot-Descombes13,
  author    = {Lo{\"{\i}}c Jacot{-}Descombes and
               Maurizio R. Gullo and
               Victor J. Cadarso and
               Massimo Mastrangeli and
               Juergen Brugger},
  title     = {Polymeric hemispherical pico-liter micro cups fabricated by inkjet
               printing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1119--1122},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559918},
  doi       = {10.1109/NEMS.2013.6559918},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Jacot-Descombes13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JeongKKC13,
  author    = {Jinwoo Jeong and
               Sehwan Kim and
               Jinseok Kim and
               Kukjin Chun},
  title     = {Implantable CNT-based sensor for chondroitin sulfate proteoglycans
               detection of glial scar after spinal cord injury},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1190--1193},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559932},
  doi       = {10.1109/NEMS.2013.6559932},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JeongKKC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiYS13,
  author    = {Jing Ji and
               Kuibo Yin and
               Litao Sun},
  title     = {Controllable preparation and characterization of graphene-based cobalt
               oxide nanocomposites},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {990--993},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559888},
  doi       = {10.1109/NEMS.2013.6559888},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiYS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangCLZ13,
  author    = {Leyue Jiang and
               Yongyao Cai and
               Haidong Liu and
               Yang Zhao},
  title     = {A micromachined monolithic 3 axis accelerometer based on convection
               heat transfer},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {248--251},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559725},
  doi       = {10.1109/NEMS.2013.6559725},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiangCLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangLXSLSC13,
  author    = {Tingjun Jiang and
               Chunxiu Liu and
               Shengwei Xu and
               Yilin Song and
               Nansen Lin and
               Wentao Shi and
               Xinxia Cai},
  title     = {A novel planar microelectrode array fabricated for brain slice electrophysiology},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {436--439},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559766},
  doi       = {10.1109/NEMS.2013.6559766},
  timestamp = {Sat, 05 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiangLXSLSC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KaliangC13,
  author    = {J. Kaliang and
               Sutichai Chaisitsak},
  title     = {Spray deposited CuInS2/TiO2 thin film solar cells},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1100--1103},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559914},
  doi       = {10.1109/NEMS.2013.6559914},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KaliangC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangTCL13,
  author    = {Chung{-}Hao Kang and
               Shih{-}Hsiang Tai and
               Sheng{-}Chung Chen and
               David T. W. Lin},
  title     = {Optimization of the micro channel ladder shape heat sink},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {389--392},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559757},
  doi       = {10.1109/NEMS.2013.6559757},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KangTCL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimLS13,
  author    = {Bonghwan Kim and
               Ki Sung Lee and
               M. A. Shannon},
  title     = {An electrostatically driven peristaltic micropump with an indium tin
               oxide electrode},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {927--930},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559875},
  doi       = {10.1109/NEMS.2013.6559875},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KimLS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimLSST13,
  author    = {Justin Young{-}Hyun Kim and
               Yang Liu and
               N. Scianmarello and
               P. Satsanarukkit and
               Yu{-}Chong Tai},
  title     = {Ice Fishing Micro channels with sub-micron pores},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1080--1083},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559909},
  doi       = {10.1109/NEMS.2013.6559909},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KimLSST13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KozukaWICM13,
  author    = {K. Kozuka and
               Dong F. Wang and
               Tsuyoshi Ikehara and
               Keisuke Chatani and
               Ryutaro Maeda},
  title     = {Mode localization in coupled AlN/SCS cantilevers for highly sensitive
               resonating flow meter},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1198--1201},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559934},
  doi       = {10.1109/NEMS.2013.6559934},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KozukaWICM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KumarBSM13,
  author    = {Deepan Kishore Kumar and
               Anomitra Banerjee and
               Sundaram Swaminathan and
               Mustafa Mahesri},
  title     = {{MEMS} modeling of the Posterior Semicircular Canal for treating Benign
               Paroxysmal Positional Vertigo},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {689--692},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559823},
  doi       = {10.1109/NEMS.2013.6559823},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KumarBSM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KuoLY13,
  author    = {Jui{-}Chang Kuo and
               Chong{-}Shuo Li and
               Yao{-}Joe Yang},
  title     = {Suspended magnetic polymer structures fabricated with exposure dose
               control},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {779--782},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559844},
  doi       = {10.1109/NEMS.2013.6559844},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KuoLY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LebalHDPKDRA13,
  author    = {Naima Lebal and
               Hamida Hallil and
               Corinne Dejous and
               Bernard Plano and
               A. Krstulja and
               Rapha{\"{e}}l Del{\'{e}}p{\'{e}}e and
               Dominique Rebi{\`{e}}re and
               Luigi A. Agrofoglio},
  title     = {Association of a Love wave sensor to thin film molecularly imprinted
               polymers for nucleosides analogs detection},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {550--553},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559790},
  doi       = {10.1109/NEMS.2013.6559790},
  timestamp = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LebalHDPKDRA13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeHHF13,
  author    = {Chih{-}Chun Lee and
               Yu{-}Che Huang and
               Wen{-}Hsiung Hsiao and
               Weileun Fang},
  title     = {Design and implementation of an on-chip polymer micro ball bearing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {221--224},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559719},
  doi       = {10.1109/NEMS.2013.6559719},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeHHF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeJCKKKC13,
  author    = {Byeungleul Lee and
               Jinwoo Jeong and
               Chan{-}Seob Cho and
               Jinseok Kim and
               Bonghwan Kim and
               Hyeon Cheol Kim and
               Kukjin Chun},
  title     = {Cantilever arrayed blood pressure sensor for arterial applanation
               tonometry},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {907--910},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559870},
  doi       = {10.1109/NEMS.2013.6559870},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeJCKKKC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeSCL13,
  author    = {Chi{-}Yuan Lee and
               Chia{-}Chieh Shen and
               Yu{-}Ming Chang and
               Fan{-}Hsuan Liu},
  title     = {Measurement of internal temperature, flow and pressure in micro-methanol-reformer
               using multifunction micro-sensors},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {104--107},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559691},
  doi       = {10.1109/NEMS.2013.6559691},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeSCL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LegrainJBKAT13,
  author    = {Antoine Legrain and
               T. G. Janson and
               J. W. Berenschot and
               Gijs J. M. Krijnen and
               Leon Abelmann and
               N. R. Tas},
  title     = {Controllable elastocapillary folding of silicon nitride 3D structures
               by through-wafer filling},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {538--541},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559787},
  doi       = {10.1109/NEMS.2013.6559787},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LegrainJBKAT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Li13,
  author    = {Sheng{-}Shian Li},
  title     = {Advances of {CMOS-MEMS} technology for resonator applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {520--523},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559783},
  doi       = {10.1109/NEMS.2013.6559783},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Li13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiC13,
  author    = {Nannan Li and
               Jing Chen},
  title     = {Characterization of fluid resistance in nanostructured TiO2 {(NST)}
               film},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {203--206},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559715},
  doi       = {10.1109/NEMS.2013.6559715},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiFYF13,
  author    = {Huawei Li and
               Yiqiang Fan and
               Ying Yi and
               Ian G. Foulds},
  title     = {Surface tension-induced high aspect-ratio {PDMS} micropillars with
               concave and convex lens tips},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {187--190},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559711},
  doi       = {10.1109/NEMS.2013.6559711},
  timestamp = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LiFYF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiK13,
  author    = {Bo{-}Shiun Li and
               Ju{-}Nan Kuo},
  title     = {A compact disk {(CD)} microfluidic platform for rapid separation and
               mixing of blood plasma},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {462--465},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559770},
  doi       = {10.1109/NEMS.2013.6559770},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLPZGZY13,
  author    = {Yang Li and
               Xiuhan Li and
               Fei Peng and
               Hanru Zhang and
               Wei Guo and
               Wangqiang Zhu and
               Tianyang Yang},
  title     = {Wireless energy transfer system based on high {Q} flexible planar-Litz
               {MEMS} coils},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {837--840},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559855},
  doi       = {10.1109/NEMS.2013.6559855},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiLPZGZY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLWYH13,
  author    = {Lei Li and
               ShuangYing Lei and
               Ruoyu Wang and
               Hong Yu and
               Qing{-}An Huang},
  title     = {First-principles study on the electro-mechanical coupling of the Si/Ge
               core-shell nanowires},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {833--836},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559854},
  doi       = {10.1109/NEMS.2013.6559854},
  timestamp = {Mon, 30 Mar 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiLWYH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiMXJ13,
  author    = {Xin Li and
               Jing Ma and
               Hai{-}bo Xu and
               Zhi{-}chao Jia},
  title     = {Application of micromachined quartz tuning fork resonator for temperature
               sensing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {759--762},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559839},
  doi       = {10.1109/NEMS.2013.6559839},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiMXJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiNBM13,
  author    = {Yongli Li and
               Quang Trong Nguyen and
               C. L. Buquet and
               S. Marais},
  title     = {Analysis of water sorption in sulfonated polyimide membranes- Effect
               of the membrane nanostructure},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1275--1278},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559950},
  doi       = {10.1109/NEMS.2013.6559950},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiNBM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiPZ13,
  author    = {Pei Li and
               Long{-}Fa Pan and
               Hans Zappe},
  title     = {A two-dimensional silicon-on-glass actuator with dispensed polymer
               microlens},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {199--202},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559714},
  doi       = {10.1109/NEMS.2013.6559714},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiPZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiSBTX13,
  author    = {Yang Li and
               Jizhou Sun and
               Chao Bian and
               Jianhua Tong and
               Shanhong Xia},
  title     = {A micro electrochemical sensor with porous copper-clusters for total
               nitrogen determination in freshwaters},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {76--79},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559686},
  doi       = {10.1109/NEMS.2013.6559686},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiSBTX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiTDLTL13,
  author    = {Longhai Li and
               Xiaojun Tian and
               Zaili Dong and
               Lianqing Liu and
               Osamu Tabata and
               Wen Jung Li},
  title     = {Manipulation of {DNA} origami nanotubes in liquid using a programmable
               tapping mode {AFM}},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {56--59},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559681},
  doi       = {10.1109/NEMS.2013.6559681},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiTDLTL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiW13,
  author    = {C. W. Li and
               Gou{-}Jen Wang},
  title     = {A material and surface morphology independent micro environment "niche"
               for tissue engineering},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {92--97},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559689},
  doi       = {10.1109/NEMS.2013.6559689},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiWS13,
  author    = {Xiangpeng Li and
               Jianjun Wang and
               Dong Sun},
  title     = {Coalition transportation of cells with optical tweezers},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1151--1154},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559925},
  doi       = {10.1109/NEMS.2013.6559925},
  timestamp = {Mon, 08 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiWS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiWYWWL13,
  author    = {Hui Li and
               Wei Wang and
               Huaiqiang Yu and
               Renxin Wang and
               Zewen Wei and
               Zhihong Li},
  title     = {Fabrication of silica opal array with high mechanical strength},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {673--676},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559819},
  doi       = {10.1109/NEMS.2013.6559819},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiWYWWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiWZYHYL13,
  author    = {Wenbin Li and
               Cheng Wang and
               Wei Zhang and
               Weixiang Ye and
               Shun Huang and
               Zhao Yue and
               Guohua Liu},
  title     = {Fabrication of stable silver nanoparticles through a green approach},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1307--1310},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559955},
  doi       = {10.1109/NEMS.2013.6559955},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiWZYHYL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiYCLWY13,
  author    = {Minglin Li and
               Wei Ye and
               Yue Chen and
               Xue{-}Hui Lin and
               Weidong Wang and
               Xiao{-}xiang Yang},
  title     = {Effect of the chemisorbed molecular structure on the frequency of
               carbon nanotube resonators: Molecular dynamics simulations},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1299--1302},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559954},
  doi       = {10.1109/NEMS.2013.6559954},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiYCLWY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZLL13,
  author    = {Ling Li and
               Chenxu Zhao and
               Mengwei Li and
               Zewen Liu},
  title     = {Symmetric toggle structured {MEMS} linear variable capacitor with
               large tunning ratio},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1266--1269},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559948},
  doi       = {10.1109/NEMS.2013.6559948},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZLL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZWCWS13,
  author    = {Sisi Li and
               Gaofeng Zheng and
               Xiang Wang and
               Yong Chen and
               Dezhi Wu and
               Daoheng Sun},
  title     = {Improved electrical conductivity of {PANI/PEO} polymer via electrospinning
               and its application as {NH3} gas sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {891--894},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559866},
  doi       = {10.1109/NEMS.2013.6559866},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZWCWS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZYWZJ13,
  author    = {Zhikang Li and
               Libo Zhao and
               Zhiying Ye and
               Hongyan Wang and
               Yulong Zhao and
               Zhuangde Jiang},
  title     = {Capacitive micromachined ultrasonic transducer as a resonant temperature
               sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1092--1095},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559912},
  doi       = {10.1109/NEMS.2013.6559912},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiZYWZJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LianQWWL13,
  author    = {Kun Lian and
               Yadong Qi and
               Qinglin Wu and
               Xiaopeng Wang and
               Weifeng Li},
  title     = {Special properties of new type carbon-copper core-shell nanoparticles
               composite material fabricated using biomass as template},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {213--216},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559717},
  doi       = {10.1109/NEMS.2013.6559717},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LianQWWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiangCZS13,
  author    = {Jinxing Liang and
               Sujin Cui and
               Liyuan Zhang and
               Ancheng Shao},
  title     = {Realization of quartz {MEMS} accelerometer based on flip chip process},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1194--1197},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559933},
  doi       = {10.1109/NEMS.2013.6559933},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiangCZS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiangLLDLLZ13,
  author    = {Wenfeng Liang and
               Bin Liu and
               Lianqing Liu and
               Zaili Dong and
               Gwo{-}Bin Lee and
               Wen Jung Li and
               Weijing Zhang},
  title     = {Dynamic separation of b-lymphoma cells from red blood cells using
               optically-induced electrokinetics},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1253--1256},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559946},
  doi       = {10.1109/NEMS.2013.6559946},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiangLLDLLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiangWLW13,
  author    = {Chen Liang and
               Wenrong Wang and
               Tie Li and
               Yuelin Wang},
  title     = {Hydrogen etching effect on single-crystal graphene domains},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {697--700},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559825},
  doi       = {10.1109/NEMS.2013.6559825},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiangWLW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiaoLTWX13,
  author    = {Wenjun Liao and
               Wenjing Liu and
               Yongming Tang and
               Baobing Wang and
               Huikai Xie},
  title     = {Tip-tilt-piston piezoelectric micromirror with folded {PZT} unimorph
               actuators},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {969--972},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559884},
  doi       = {10.1109/NEMS.2013.6559884},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiaoLTWX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiimatainenSZ13,
  author    = {Ville Liimatainen and
               Veikko Sariola and
               Quan Zhou},
  title     = {Undercut edges for robust capillary self-alignment in hybrid microassembly},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1088--1091},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559911},
  doi       = {10.1109/NEMS.2013.6559911},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiimatainenSZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LimL13,
  author    = {Chun Yee Lim and
               Yee Cheong Lam},
  title     = {Simulation of impingement and spreading of micro-droplet on non-homogeneous
               solid surface},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {356--359},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559750},
  doi       = {10.1109/NEMS.2013.6559750},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LimL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCHC13,
  author    = {Cheng{-}Yi Lin and
               Chia{-}Yun Chen and
               Ya{-}Ting Hu and
               Chia{-}Yuan Chen},
  title     = {Fluid dynamics analysis of magnetically actuated ciliated nano/micro
               structures for flow mixing and propulsion applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {590--593},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559800},
  doi       = {10.1109/NEMS.2013.6559800},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinCHC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCWPT13,
  author    = {Yu{-}Nan Lin and
               Peng{-}Chun Chen and
               Ren{-}Guei Wu and
               Li{-}Chern Pan and
               Fan{-}Gang Tseng},
  title     = {Micro diffuser-type movement inversion sorter for high-efficient sperm
               sorting},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1058--1061},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559904},
  doi       = {10.1109/NEMS.2013.6559904},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinCWPT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinKZYHNPYS13,
  author    = {Qiao Lin and
               Jinho Kim and
               Jing Zhu and
               Jaeyoung Yang and
               John Hilton and
               ThaiHuu Nguyen and
               Renjun Pei and
               Kyung{-}Ae Yang and
               Milan N. Stojanovic},
  title     = {Integrating aptamers and microfluidics for biological manipulation
               and sensing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1245--1248},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559944},
  doi       = {10.1109/NEMS.2013.6559944},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinKZYHNPYS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinLLC13,
  author    = {S. L. Lin and
               C. C. Lin and
               D. Y. Lin and
               C. S. Chuang},
  title     = {Laser additive manufacturing technology in titanium 64 implant of
               microstructure fabrication and analysis},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {594--597},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559801},
  doi       = {10.1109/NEMS.2013.6559801},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinLLC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinLLC13a,
  author    = {S. L. Lin and
               C. C. Lin and
               D. Y. Lin and
               C. S. Chuang},
  title     = {Fabrication and analysis of three-dimensional object using layerwise
               manufacturing technology},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {763--766},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559840},
  doi       = {10.1109/NEMS.2013.6559840},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinLLC13a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LingCJLCLWLL13,
  author    = {N. P. Ling and
               K. H. Chou and
               C. T. Jhou and
               M. H. Lai and
               T. C. Chen and
               C. H. Lai and
               L. W. Wang and
               Gwo{-}Bin Vincent Lee and
               M. C. M. Lee},
  title     = {Observation of strong transverse magneto-optical Kerr effect on surface
               plasmonic gratings},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {653--656},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559814},
  doi       = {10.1109/NEMS.2013.6559814},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LingCJLCLWLL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCYL13,
  author    = {Kun Liu and
               Yitong Cao and
               Huaiqiang Yu and
               Zhihong Li},
  title     = {A microactuator for magnetic field control device with large shifting
               range},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {528--531},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559785},
  doi       = {10.1109/NEMS.2013.6559785},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuCYL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuDX13,
  author    = {Xifeng Liu and
               Hanpeng Dong and
               Shanhong Xia},
  title     = {Micromachined catalytic combustion hydrogen gas sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {282--285},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559732},
  doi       = {10.1109/NEMS.2013.6559732},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuDX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuHLYY13,
  author    = {Yuxian Liu and
               Chunhua He and
               Dachuan Liu and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {Digital closed-loop driver design of micromechanical gyroscopes based
               on coordinated rotation digital computer algorithm},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1145--1148},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559924},
  doi       = {10.1109/NEMS.2013.6559924},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuHLYY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuL13,
  author    = {Chung{-}Hsien Liu and
               Gwo{-}Bin Lee},
  title     = {A new micropump using amplified deformation of resilient membranes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {167--170},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559706},
  doi       = {10.1109/NEMS.2013.6559706},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLHMZWL13,
  author    = {Chengmei Liu and
               Wenbo Li and
               Lu Han and
               Lixin Mo and
               Yuxia Zhao and
               Yan Wei and
               Luhai Li},
  title     = {Synthesis and size control of nano/submicron copper particles by feeding
               strategies},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {718--721},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559829},
  doi       = {10.1109/NEMS.2013.6559829},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuLHMZWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuPLLKHW13,
  author    = {Z. H. Liu and
               C. T. Pan and
               L. W. Lin and
               H. W. Li and
               C. A. Ke and
               J. C. Huang and
               P. S. Wang},
  title     = {Mechanical properties of piezoelectric {PVDF/MWCNT} fibers prepared
               by flat/hollow cylindrical near-field electrospinning process},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {707--710},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559827},
  doi       = {10.1109/NEMS.2013.6559827},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuPLLKHW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuTW13,
  author    = {Wenjing Liu and
               Yongming Tang and
               Baoping Wang},
  title     = {Reliability evaluation of micromirror of double S-shaped unimorph
               piezoelectric actuator with probabilistic approach},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {813--816},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559849},
  doi       = {10.1109/NEMS.2013.6559849},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuTW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuWHLWZZS13,
  author    = {Haiyan Liu and
               Xiang Wang and
               Guangqi He and
               Yihong Lin and
               Jin Wei and
               Jianyi Zheng and
               Gaofeng Zheng and
               Daoheng Sun},
  title     = {Electrospun nickel oxide nanofibers for gas sensor application},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {377--380},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559755},
  doi       = {10.1109/NEMS.2013.6559755},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuWHLWZZS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuYF13,
  author    = {Huilan Liu and
               Heming Yao and
               Lishuang Feng},
  title     = {A nanometer-resolution displacement measurement system based on laser
               feedback interferometry},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1295--1298},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559953},
  doi       = {10.1109/NEMS.2013.6559953},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuYF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuZ13,
  author    = {Hongwei Liu and
               Xin Zhao},
  title     = {Numerical simulation on pattern formation by vascular mesenchymal
               cells based on the exogenous source of activator},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {566--569},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559794},
  doi       = {10.1109/NEMS.2013.6559794},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuZHZ13,
  author    = {Xiaowei Liu and
               He Zhang and
               Xiaowei Han and
               Lin Zhao},
  title     = {Simulation of backward facing step flow at the outlet of micro-channel
               and optimal design of amperometric detection chip},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {578--581},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559797},
  doi       = {10.1109/NEMS.2013.6559797},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuZHZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuZYCHFLSB13,
  author    = {Keyin Liu and
               Yulong Zhao and
               Qing Yang and
               Feng Chen and
               Shengguan He and
               Xiaole Fan and
               Lei Li and
               Chao Shan and
               Hao Bian},
  title     = {Fabrication of three-dimensional metallic microcomponents in fused
               silica by a femtosecond laser {\&} micromoulding {(FLM)} method},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {677--680},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559820},
  doi       = {10.1109/NEMS.2013.6559820},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuZYCHFLSB13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LouLG13,
  author    = {Wenzhong Lou and
               Peng Liu and
               Mingru Guo},
  title     = {Algorithm analysis of {PHM} for sensitive cargo transportation},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {751--754},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559837},
  doi       = {10.1109/NEMS.2013.6559837},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LouLG13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuSZTWIM13,
  author    = {Jian Lu and
               Takahisa Sagawa and
               Lulu Zhang and
               Hideki Takagi and
               Dong F. Wang and
               Toshihiro Itoh and
               Ryutaro Maeda},
  title     = {Piezoelectric {MEMS} devices and its application as bio-chemical sensors},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {163--166},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559705},
  doi       = {10.1109/NEMS.2013.6559705},
  timestamp = {Fri, 27 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LuSZTWIM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuoYWZ13,
  author    = {Yi Luo and
               Xianglong Yin and
               Xiaodong Wang and
               Zongbo Zhang},
  title     = {Study of polymeric {MEMS} micro-pump actuated by {PZT} bimorph},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {225--228},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559720},
  doi       = {10.1109/NEMS.2013.6559720},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LuoYWZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaLSSNZL13,
  author    = {W. Ma and
               D. Liu and
               H. Shagoshtasbi and
               A. Shukla and
               E. S. Nugroho and
               Yitshak Zohar and
               Yi{-}Kuen Lee},
  title     = {Experimental and theoretical study of hydrodynamic cell lysing of
               cancer cells in a high-throughput Circular Multi-Channel Microfiltration
               device},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {412--415},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559761},
  doi       = {10.1109/NEMS.2013.6559761},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MaLSSNZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaSCW13,
  author    = {X. Y. Ma and
               G. C. Sun and
               Y. F. Chen and
               W. G. Wu},
  title     = {Resistive switching model for Electrolyte-Oxide-Semiconductor {(EOS)}
               structure},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {546--549},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559789},
  doi       = {10.1109/NEMS.2013.6559789},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MaSCW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaoFZYQY13,
  author    = {Xu Mao and
               Zhiqiang Fang and
               Zhe Zhang and
               Jinling Yan and
               Zhimei Qi and
               Fuhua Yang},
  title     = {Sn-rich Au-Sn hermetic packaging at wafer level and its application
               in {SPR} sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {244--247},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559724},
  doi       = {10.1109/NEMS.2013.6559724},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MaoFZYQY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MengTPZ13,
  author    = {Bo Meng and
               Wei Tang and
               Xuhua Peng and
               Haixia Zhang},
  title     = {Silicon carbide capacitive pressure sensors with arrayed sensing membranes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {899--902},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559868},
  doi       = {10.1109/NEMS.2013.6559868},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MengTPZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NakaharaSMSOS13,
  author    = {Asahi Nakahara and
               Yoshitaka Shirasaki and
               Jun Mizuno and
               Tetsushi Sekiguchi and
               Osamu Ohara and
               Shuichi Shoji},
  title     = {{PDMS-CYTOP} hybrid structure microwell array chip for total internal
               reflection fluorescence microscopy},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {743--746},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559835},
  doi       = {10.1109/NEMS.2013.6559835},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NakaharaSMSOS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiuZTG13,
  author    = {Zhe Niu and
               Y. L. Zhao and
               B. Tian and
               F. F. Guo},
  title     = {Comparative study of a high pressure sensor with rectangular diaphragm},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {661--664},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559816},
  doi       = {10.1109/NEMS.2013.6559816},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NiuZTG13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OuyangWZWL13,
  author    = {Wei Ouyang and
               Wei Wang and
               Haixia Zhang and
               Wengang Wu and
               Zhihong Li},
  title     = {Effects of crystal defects on the electrokinetics of nanofluidic crystal},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1186--1189},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559931},
  doi       = {10.1109/NEMS.2013.6559931},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/OuyangWZWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PangZR13,
  author    = {Bo Pang and
               Zhaohua Zhang and
               Tianling Ren},
  title     = {Simulation and design of micro pressure sensors applied to measure
               the intracranial pressure},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {120--123},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559695},
  doi       = {10.1109/NEMS.2013.6559695},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PangZR13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PeterFQFAS13,
  author    = {N. J. Peter and
               M. Frensemeier and
               E. Qin and
               C. P. Frick and
               Eduard Arzt and
               A. S. Schneider},
  title     = {Indentation-induced two-way shape-memory effect in NiTi},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1131--1134},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559921},
  doi       = {10.1109/NEMS.2013.6559921},
  timestamp = {Mon, 11 Nov 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/PeterFQFAS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PuJC13,
  author    = {Huayan Pu and
               Wenchuan Jia and
               Xuedong Chen},
  title     = {Sliding mode control with adaptive feedforward compensator for ultra-precision
               active vibration isolation},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {316--319},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559740},
  doi       = {10.1109/NEMS.2013.6559740},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PuJC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RenFL13,
  author    = {Xiaoyuan Ren and
               Lishuang Feng and
               Zhili Lin},
  title     = {Bend waveguide with broad bandwidth and high transmission efficiency
               based on air-hole photonic crystal},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {300--303},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559736},
  doi       = {10.1109/NEMS.2013.6559736},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RenFL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RenLZM13,
  author    = {Mingyuan Ren and
               Xiaowei Liu and
               Wen Zuo and
               Zhigang Mao},
  title     = {Analysis of electromechanical interface model for liquid floated micro-gyroscope},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {799--802},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559846},
  doi       = {10.1109/NEMS.2013.6559846},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RenLZM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RothCLW13,
  author    = {R. Roth and
               Keith Cobry and
               G. Lenk and
               Peter Woias},
  title     = {Micro process engineering of freestanding silicon fluidic channels
               with integrated platinum thermistors for obtaining heat transfer correlations},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {879--882},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559864},
  doi       = {10.1109/NEMS.2013.6559864},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RothCLW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SantagataAVSZS13,
  author    = {F. Santagata and
               G. Almanno and
               Sten Vollebregt and
               C. Silvestri and
               G. Q. Zhang and
               Pasqualina M. Sarro},
  title     = {Carbon Nanotube based heat-sink for solid state lighting},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1214--1217},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559937},
  doi       = {10.1109/NEMS.2013.6559937},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SantagataAVSZS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SantraCAGWT13,
  author    = {Tuhin Subhra Santra and
               C. Chiu and
               Nishant Agarwal and
               Aswin Ganatathi and
               Pen{-}Cheng Wang and
               Fan{-}Gang Tseng},
  title     = {Nanofocused electric field for localized single cell nanoelectroporation
               with membrane reversibility},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {961--964},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559882},
  doi       = {10.1109/NEMS.2013.6559882},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SantraCAGWT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiC13,
  author    = {Xiaomei Shi and
               Ching{-}Hsiang Cheng},
  title     = {Artificial hair cell sensors using liquid metal alloy as piezoresistors},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {978--981},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559886},
  doi       = {10.1109/NEMS.2013.6559886},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShiC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiHZZW13,
  author    = {Zheng Shi and
               Shumin He and
               Hongbo Zhu and
               Miao Zhang and
               Yongjin Wang},
  title     = {Freestanding Whispering-Gallery Mode microdisk resonator},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {364--367},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559752},
  doi       = {10.1109/NEMS.2013.6559752},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShiHZZW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiLZZCT13,
  author    = {Yating Shi and
               Shiyuan Liu and
               Jinlong Zhu and
               Chuanwei Zhang and
               Xiuguo Chen and
               Zirong Tang},
  title     = {Optimal design of periodic nanostructures formed in solar cells as
               an antireflective layer},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {524--527},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559784},
  doi       = {10.1109/NEMS.2013.6559784},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShiLZZCT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SlaughterX13,
  author    = {Gymama E. Slaughter and
               Yi Xin},
  title     = {Sol-gel fiber-optic absorbance sensor for groundwater contaminants},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {88--91},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559688},
  doi       = {10.1109/NEMS.2013.6559688},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SlaughterX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SoonSTL13,
  author    = {Bo Woon Soon and
               N. Singh and
               J. M. Tsai and
               Chengkuo Lee},
  title     = {A bi-stable silicon nanofin nanoelectromechanical switch based on
               van der Waals force for non-volatile memory applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {562--565},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559793},
  doi       = {10.1109/NEMS.2013.6559793},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SoonSTL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SoulimanePBJBDP13,
  author    = {Sofiane Soulimane and
               Arnaud Pouydebasque and
               S{\'{e}}bastien Bolis and
               Fabrice Jacquet and
               Claudine Bridoux and
               Florian Dupont and
               Christophe Poulain and
               St{\'{e}}phane Moreau and
               Stephane Fanget},
  title     = {A new experimental methodology using point deflection to quantify
               residual stress of thin polymer membrane materials in {MEMS} devices},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {486--489},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559776},
  doi       = {10.1109/NEMS.2013.6559776},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SoulimanePBJBDP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/StammTJZ13,
  author    = {Matthew T. Stamm and
               Andrew S. Trickey{-}Glassman and
               Linan Jiang and
               Yitshak Zohar},
  title     = {Quantitative characterization of specific targeting of tumor cells
               by antibody-functionalized particles},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1108--1111},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559916},
  doi       = {10.1109/NEMS.2013.6559916},
  timestamp = {Thu, 07 Nov 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/StammTJZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuXWCH13,
  author    = {Jianbin Su and
               Dingbang Xiao and
               Xuezhong Wu and
               Zhihua Chen and
               Zhanqiang Hou},
  title     = {Close-loop self-compensation of the coupling error for silicon micromachined
               gyroscope},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1010--1013},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559893},
  doi       = {10.1109/NEMS.2013.6559893},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SuXWCH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuhJP13,
  author    = {Kahp Y. Suh and
               Noo Li Jeon and
               Changhyun Pang},
  title     = {Wearable skin sensor using programmable interlocking of nanofibers},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {132--135},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559698},
  doi       = {10.1109/NEMS.2013.6559698},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SuhJP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunXXXS13,
  author    = {Jun Sun and
               Tao Xu and
               Feng Xu and
               Xiao Xie and
               Litao Sun},
  title     = {Graphene as dry adhesive interacting with semiconductor substrates},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {915--918},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559872},
  doi       = {10.1109/NEMS.2013.6559872},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunXXXS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunZLLZ13,
  author    = {Xuming Sun and
               Yang Zheng and
               Zhongliang Li and
               Xiuhan Li and
               Haixia Zhang},
  title     = {High-Q polyimide-based spiral inductors with magnetic core for {RF}
               telemetry applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {685--688},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559822},
  doi       = {10.1109/NEMS.2013.6559822},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunZLLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TakahashiFUY13,
  author    = {R. Takahashi and
               Takao Fukuoka and
               Yuichi Utsumi and
               Akinobu Yamaguchi},
  title     = {Microfluidic devices with three-dimensional gold nanostructure for
               surface enhanced Raman scattering},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {722--725},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559830},
  doi       = {10.1109/NEMS.2013.6559830},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TakahashiFUY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangCZCFG13,
  author    = {Wei Tang and
               Y. Chen and
               Jiaqing Zhao and
               S. Chen and
               L. Feng and
               X. Guo},
  title     = {Inkjet printing narrow fine Ag lines on surface modified polymeric
               films},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1171--1174},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559929},
  doi       = {10.1109/NEMS.2013.6559929},
  timestamp = {Tue, 31 Mar 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TangCZCFG13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangLYS13,
  author    = {Yu{-}Hsiang Tang and
               Yu{-}Hsin Lin and
               Jr{-}Jung Yang and
               Ming{-}Hua Shiao},
  title     = {Fabrication of membrane-typed metal mould with microstructures and
               application for roller imprinting},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {68--71},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559684},
  doi       = {10.1109/NEMS.2013.6559684},
  timestamp = {Mon, 14 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TangLYS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsengHHY13,
  author    = {Hsin{-}Yao Tseng and
               Yu{-}Hsuan Huang and
               Hong{-}Yuan Huang and
               Da{-}Jeng Yao},
  title     = {Oviduct -mimetic chip for sperm separation and oocyte manipulation
               to enhance the probability of fertilization for oligozoospermia patient},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {602--605},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559803},
  doi       = {10.1109/NEMS.2013.6559803},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TsengHHY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsumoriHKOM13,
  author    = {Fujio Tsumori and
               Kenji Hatama and
               Hyungoo Kang and
               Toshiko Osada and
               Hideshi Miura},
  title     = {Magneto-FEM analysis for micro actuator using array of magnetic elements},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {845--848},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559857},
  doi       = {10.1109/NEMS.2013.6559857},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TsumoriHKOM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WanBYXZWXS13,
  author    = {Shu Wan and
               Hengchang Bi and
               Kuibo Yin and
               Xiao Xie and
               Yilong Zhou and
               Neng Wan and
               Feng Xu and
               Litao Sun},
  title     = {Low temperature casting of graphene into various 3-D shapes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {730--733},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559832},
  doi       = {10.1109/NEMS.2013.6559832},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WanBYXZWXS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCTTZ13,
  author    = {Ning Wang and
               Ngai Yui Chan and
               Chap Hang To and
               Furui Tan and
               Xuming Zhang},
  title     = {Photocatalytic microreactors for water purification: Selective control
               of oxidation pathways},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {368--371},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559753},
  doi       = {10.1109/NEMS.2013.6559753},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangCTTZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCYLZ13,
  author    = {Qingyi Wang and
               Weiping Chen and
               Liang Yin and
               Xiaowei Liu and
               He Zhang},
  title     = {An interface {ASIC} of quartz vibratory gyroscope with 0.8{\textdegree}/hour
               root Allan variance},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {498--501},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559779},
  doi       = {10.1109/NEMS.2013.6559779},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangCYLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangDYCZK13,
  author    = {X. Q. Wang and
               J. N. Ding and
               N. Y. Yuan and
               G. G. Cheng and
               Y. Y. Zhu and
               B. Kan},
  title     = {Mechanical property of nanoscale ZnO/Al2O3 multilayers: An investigation
               by nano-indentation},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1222--1225},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559939},
  doi       = {10.1109/NEMS.2013.6559939},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangDYCZK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangH13,
  author    = {Fei Wang and
               Ole Hansen},
  title     = {Inorganic electret with enhanced charge stability for energy harvesting},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {207--210},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559716},
  doi       = {10.1109/NEMS.2013.6559716},
  timestamp = {Thu, 18 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHHK13,
  author    = {Yu{-}Lin Wang and
               Chih{-}Cheng Huang and
               You{-}Ren Hsu and
               Yen{-}Wen Kang},
  title     = {Identification of ligand-receptor binding affinity using AlGaN/GaN
               high electron mobility transistors and binding-site models},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {532--537},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559786},
  doi       = {10.1109/NEMS.2013.6559786},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangHHK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHLZS13,
  author    = {Xiang Wang and
               Guangqi He and
               Haiyan Liu and
               Gaofeng Zheng and
               Daoheng Sun},
  title     = {Fabrication and morphological control of electrospun ethyl cellulose
               nanofibers},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {324--327},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559742},
  doi       = {10.1109/NEMS.2013.6559742},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangHLZS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHT13,
  author    = {Yi{-}Ta Wang and
               Cheng Jen Ho and
               Hsien{-}Lung Tsai},
  title     = {Effect of In addition on mechanical properties of Sn-9Zn-In/Cu solder},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1038--1041},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559900},
  doi       = {10.1109/NEMS.2013.6559900},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangHT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLLYLW13,
  author    = {Wenrong Wang and
               Chen Liang and
               Tie Li and
               Heng Yang and
               Na Lu and
               Yuelin Wang},
  title     = {Graphene films synthesized on electroplated Cu by chemical vapor deposition},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {112--115},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559693},
  doi       = {10.1109/NEMS.2013.6559693},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLLYLW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLSJ13,
  author    = {Hairong Wang and
               Peng Li and
               Guoliang Sun and
               Zhuangde Jiang},
  title     = {Influence of substrate surface roughness on the properties of a planar-type
               {CO2} sensor using evaporated Li3PO4 film},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {385--388},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559756},
  doi       = {10.1109/NEMS.2013.6559756},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLSJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLZ13,
  author    = {Shuaimin Wang and
               Peng Liu and
               Jinwen Zhang},
  title     = {Simulation of threshold voltage adjustment by B\({}^{\mbox{+}}\) implantation
               for pMOS-RADFET application},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {262--265},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559728},
  doi       = {10.1109/NEMS.2013.6559728},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLZW13,
  author    = {Ying Wang and
               Wenzhong Lou and
               Yue Zhao and
               Fufu Wang},
  title     = {High impact-induced failure of a novel solid {MEMS} switch},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {755--758},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559838},
  doi       = {10.1109/NEMS.2013.6559838},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLZW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangRARMPKMFTNK13,
  author    = {Zhi Wang and
               Johannes Ruhhammer and
               Shyam Adhikari and
               Raimar Rostek and
               Dominik Moser and
               Oliver Paul and
               Danny Kojda and
               Ruediger Mitdank and
               Saskia F. Fischer and
               William Toellner and
               Kornelius Nielsch and
               Michael Kroener and
               Peter Woias},
  title     = {Thermoelectric Properties Investigation of Single nanowires by utilizing
               a Thermoelectric Nanowire Characterization Platform},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {738--741},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559834},
  doi       = {10.1109/NEMS.2013.6559834},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangRARMPKMFTNK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangSKJSGE13,
  author    = {Li Wang and
               H. Schift and
               P. M. Kristiansen and
               K. Jefimovs and
               H. H. Solak and
               J. Gobrecht and
               Y. Ekinci},
  title     = {Bilayer wire-grid polarizers for {DUV} to {IR} fabricated using {EUV}
               interference and nanoimprint lithography},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1232--1235},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559941},
  doi       = {10.1109/NEMS.2013.6559941},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangSKJSGE13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangTTLLTHWC13,
  author    = {Hsi{-}Kai Wang and
               Cheng{-}Han Tsai and
               Chung{-}Tao Tang and
               Pi{-}Chun Li and
               Jiun{-}Shyang Leou and
               Yin{-}Liang Tang and
               Hsyue{-}Jen Hsieh and
               Han{-}Chung Wu and
               Chao{-}Min Cheng},
  title     = {Monitoring the disease activity via the antibody-antigen recognition
               in paper},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {229--232},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559721},
  doi       = {10.1109/NEMS.2013.6559721},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangTTLLTHWC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangTWYJ13,
  author    = {Peiquan Wang and
               Dayu Tian and
               Shaonan Wang and
               Min Yu and
               Yufeng Jin},
  title     = {Research on the structure of ultrathin Si {PIN} detector},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {629--632},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559808},
  doi       = {10.1109/NEMS.2013.6559808},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangTWYJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangXCHWS13,
  author    = {Xinghua Wang and
               Dingbang Xiao and
               Zhihua Chen and
               Zhanqiang Hou and
               Xuezhong Wu and
               Jianbin Su},
  title     = {Micro-fabricated polymeric thermal actuators array for rectifying
               the deformation of {MEMS} substrate},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1046--1049},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559902},
  doi       = {10.1109/NEMS.2013.6559902},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangXCHWS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZL13,
  author    = {Tiancong Wang and
               Xinyi Zhang and
               Zhihong Li},
  title     = {Simulation on heat transfer of the Light Switchable Microelectrode
               Array for retinal prosthesis},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {286--289},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559733},
  doi       = {10.1109/NEMS.2013.6559733},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZL13a,
  author    = {Weidong Wang and
               Yongjie Zhan and
               Minglin Li},
  title     = {Molecular dynamics simulation of nanoindentation for single-layer
               rectangular graphene film},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1240--1243},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559943},
  doi       = {10.1109/NEMS.2013.6559943},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangZL13a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WasistoMSWUSP13,
  author    = {Hutomo Suryo Wasisto and
               S. Merzsch and
               A. Stranz and
               A. Waag and
               E. Uhde and
               T. Salthammer and
               Erwin Peiner},
  title     = {Silicon nanowire resonators for aerosol nanoparticle mass sensing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {506--509},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559781},
  doi       = {10.1109/NEMS.2013.6559781},
  timestamp = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WasistoMSWUSP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiXZCWZ13,
  author    = {Liping Wei and
               Chenyang Xue and
               Junbin Zang and
               Danfeng Cui and
               Yonghua Wang and
               Wendong Zhang},
  title     = {Analysis of second-order radial mode dips in racetrack optical ring
               resonator based on {SOI} rib waveguide},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {633--636},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559809},
  doi       = {10.1109/NEMS.2013.6559809},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeiXZCWZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiZ13,
  author    = {Shuhua Wei and
               Jing Zhang},
  title     = {Research on programmable capillary-force self-assembly nanofabrication},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {574--577},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559796},
  doi       = {10.1109/NEMS.2013.6559796},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeiZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WenWCT13,
  author    = {Po{-}Chao Wen and
               Jen{-}Kuei Wu and
               Hwan{-}You Chang and
               Fan{-}Gang Tseng},
  title     = {CNTs gated nanofluidic system for single bacterium detection by GNPs-based
               redox signal amplification},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {290--293},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559734},
  doi       = {10.1109/NEMS.2013.6559734},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WenWCT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WenzhongXR13,
  author    = {Lou Wenzhong and
               Ding Xuran and
               Hong Rongsen},
  title     = {A multi-channel test system for calibration of {MEMS} barometric pressure
               sensors},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {516--519},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559782},
  doi       = {10.1109/NEMS.2013.6559782},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WenzhongXR13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuBMRSL13,
  author    = {Hsin{-}Jui Wu and
               Tamara Basta and
               Mary Morphew and
               D. C. Rees and
               Michael H. B. Stowell and
               Y. C. Lee},
  title     = {Microfluidic device for super-fast evaluation of membrane protein
               crystallization},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {84--87},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559687},
  doi       = {10.1109/NEMS.2013.6559687},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuBMRSL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuBTAZB13,
  author    = {Songmei Wu and
               M.{-}O. Bammatter and
               Wei Tang and
               V. Auzelyte and
               Haixia Zhang and
               Juergen Brugger},
  title     = {High aspect ratio etching of nanopores in {PECVD} SiC through {AAO}
               mask},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {986--989},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559887},
  doi       = {10.1109/NEMS.2013.6559887},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuBTAZB13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuCC13,
  author    = {Xinzhou Wu and
               Zheng Chen and
               Zheng Cui},
  title     = {Low temperature synthesis of cubic BaTiO3 nanoparticles},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {399--402},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559759},
  doi       = {10.1109/NEMS.2013.6559759},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuCC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuLJXYZY13,
  author    = {Ting{-}Ting Wu and
               Jing{-}Quan Liu and
               Shui{-}Dong Jiang and
               Bin Xu and
               Bin Yang and
               Hongying Zhu and
               Chunsheng Yang},
  title     = {Electrical properties of micro-heaters using sputtered NiCr thin film},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {466--469},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559771},
  doi       = {10.1109/NEMS.2013.6559771},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuLJXYZY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuLTW13,
  author    = {Jau{-}Yi Wu and
               Ching{-}Wen Li and
               Ching{-}Hsiu Tsai and
               Gou{-}Jen Wang},
  title     = {Synthesis of antibacterial TiO2/PLGA composite biofilms},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {98--103},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559690},
  doi       = {10.1109/NEMS.2013.6559690},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuLTW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuWBBR13,
  author    = {Songmei Wu and
               Fabien Wildhaber and
               Arnaud Bertsch and
               Juergen Brugger and
               Philippe Renaud},
  title     = {Al2O3/W hetero-structured nanopore membranes: From native to tunable
               nanofluidic diodes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {998--1001},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559890},
  doi       = {10.1109/NEMS.2013.6559890},
  timestamp = {Tue, 19 May 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuWBBR13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuXXZKDF13,
  author    = {Shaohua Wu and
               Li Xiao and
               Yundong Xuan and
               Zhan Zhao and
               Deyi Kong and
               Lidong Du and
               Zhen Fang},
  title     = {Research about top electrode improvement of ZnO nanowires array nanogenerator},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1084--1087},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559910},
  doi       = {10.1109/NEMS.2013.6559910},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuXXZKDF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuZYLL13,
  author    = {Mengxi Wu and
               Deyao Zhao and
               Hao Yan and
               Zicai Liang and
               Zhihong Li},
  title     = {A symmetrical hyperbolic formatted microchip for rapid optimization
               of electroporation},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {312--315},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559739},
  doi       = {10.1109/NEMS.2013.6559739},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuZYLL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaMLMZLF13,
  author    = {Y. Y. Xia and
               J. L. Mu and
               X. Leng and
               Y. C. Ma and
               M. W. Zhao and
               X. D. Liu and
               J. X. Fang},
  title     = {Theoretical investigation of quasiparticle band structures and optical
               spectra of large-diameter semiconducting single-walled carbon nanotubes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {64--67},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559683},
  doi       = {10.1109/NEMS.2013.6559683},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiaMLMZLF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaYWLK13,
  author    = {Dunzhu Xia and
               Cheng Yu and
               Shourong Wang and
               Hongsheng Li and
               Lun Kong},
  title     = {Structure design and simulation of micro dynamically tuned gyroscope
               with three equilibrium rings},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {965--968},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559883},
  doi       = {10.1109/NEMS.2013.6559883},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiaYWLK13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiangWZYJTXTKL13,
  author    = {Zhuolin Xiang and
               Hao Wang and
               Songsong Zhang and
               Shih{-}Cheng Yen and
               Minkyu Je and
               Wei Mong Tsang and
               Yong Ping Xu and
               Nitish V. Thakor and
               Dim{-}Lee Kwong and
               Chengkuo Lee},
  title     = {Development of flexible neural probes using SU-8/parylene},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1076--1079},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559908},
  doi       = {10.1109/NEMS.2013.6559908},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiangWZYJTXTKL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiaoZDWL13,
  author    = {Li Xiao and
               Zhan Zhao and
               Lidong Du and
               Shaohua Wu and
               Qimin Liu},
  title     = {Annealing effect on the stability of platinum thin films covered by
               SiO2 or SiNx layer},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {352--355},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559749},
  doi       = {10.1109/NEMS.2013.6559749},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiaoZDWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XieJWCC13,
  author    = {Bo Xie and
               Hailong Jiao and
               Junbo Wang and
               Deyong Chen and
               Jian Chen},
  title     = {An electrostatically-driven and capacitively-sensed differential lateral
               resonant pressure microsensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1271--1274},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559949},
  doi       = {10.1109/NEMS.2013.6559949},
  timestamp = {Wed, 29 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/XieJWCC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XieSY13,
  author    = {Jianbing Xie and
               Meng Song and
               Weizheng Yuan},
  title     = {A high sensitivity micromachined accelerometer with an enhanced inertial
               mass {SOI} {MEMS} process},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {336--339},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559745},
  doi       = {10.1109/NEMS.2013.6559745},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XieSY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XinWXHHC13,
  author    = {Yu Xin and
               Xuezhong Wu and
               Dingbang Xiao and
               Zhanqiang Hou and
               Kun He and
               Zhihua Chen},
  title     = {A micromachined gyroscope with an effective stress-released frame},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {994--997},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559889},
  doi       = {10.1109/NEMS.2013.6559889},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XinWXHHC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XingZP13,
  author    = {Siyuan Xing and
               Siwei Zhao and
               Tingrui Pan},
  title     = {Print-to-Print: {A} facile flexible multi-object patterning process
               using superhydrophobic films},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {145--148},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559701},
  doi       = {10.1109/NEMS.2013.6559701},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XingZP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XinmingLWWJJXL13,
  author    = {Fan Xinming and
               Mo Lixin and
               Li Wenbo and
               Li Weiwei and
               Ran Jun and
               Fu Jilan and
               Zhao Xizhe and
               Li Luhai},
  title     = {Synthesis of nano-copper particles for conductive ink in gravure printing},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {775--778},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559843},
  doi       = {10.1109/NEMS.2013.6559843},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XinmingLWWJJXL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiongWZ13,
  author    = {Zuoping Xiong and
               Xuewen Wang and
               Ting Zhang},
  title     = {Fabrication of highly transparent ultrathin films based on reduced
               graphene oxide},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {693--696},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559824},
  doi       = {10.1109/NEMS.2013.6559824},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiongWZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuLWYSJC13,
  author    = {Shengwei Xu and
               Nansen Lin and
               Dalei Wang and
               Wenjing Yu and
               Wentao Shi and
               Tingjun Jiang and
               Xinxia Cai},
  title     = {A Dual Mode Neural Signal Recording System for synchronous neuroeletrical
               and neurochemical detection},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {470--473},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559772},
  doi       = {10.1109/NEMS.2013.6559772},
  timestamp = {Sat, 05 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuLWYSJC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuSXLLT13,
  author    = {Liangliang Xu and
               Tielin Shi and
               Shuang Xi and
               Hu Long and
               Shiyuan Liu and
               Zirong Tang},
  title     = {Metal-catalyst free integration of SiO2 nanowires into carbon {MEMS}},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {734--737},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559833},
  doi       = {10.1109/NEMS.2013.6559833},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuSXLLT13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuTHTKOM13,
  author    = {Yang Xu and
               Fujio Tsumori and
               Seiya Hashimoto and
               Masashi Takahashi and
               Hyungoo Kang and
               Toshiko Osada and
               Hideshi Miura},
  title     = {Improvement of Solid Oxide Fuel Cell by imprinted patterns on eelectrolyte},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {887--890},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559865},
  doi       = {10.1109/NEMS.2013.6559865},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuTHTKOM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuTL13,
  author    = {Zhoulong Xu and
               Bo Tao and
               Zunxu Liu},
  title     = {Mechanical stability analysis of organic thin film transistors considering
               interfacial delamination},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {973--977},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559885},
  doi       = {10.1109/NEMS.2013.6559885},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuTL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuW0FMJ13,
  author    = {Yichao Xu and
               Guanjiang Wang and
               Xin Sun and
               Runiu Fang and
               Min Miao and
               Yufeng Jin},
  title     = {In-line testing of blind TSVs for 3D {IC} integration and {M/NEMS}
               packaging},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {233--236},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559722},
  doi       = {10.1109/NEMS.2013.6559722},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuW0FMJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuXS13,
  author    = {Tao Xu and
               Xiao Xie and
               Litao Sun},
  title     = {Fabrication of nanopores using electron beam},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {637--640},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559810},
  doi       = {10.1109/NEMS.2013.6559810},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuXS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuZDSY13,
  author    = {Huiming Xu and
               Hong Zhang and
               Zhiqiang Deng and
               Haisheng San and
               Yuxi Yu},
  title     = {Fabrication of silicon piezoresistive pressure sensor using a reliable
               wet etching process},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {424--427},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559763},
  doi       = {10.1109/NEMS.2013.6559763},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuZDSY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuanDZ13,
  author    = {L. Xuan and
               H. Dong and
               C. Zhuo},
  title     = {Compact multi-layer magnetic shields for chip-scale atomic devices},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {649--652},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559813},
  doi       = {10.1109/NEMS.2013.6559813},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuanDZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XueWLWCZ13,
  author    = {Chenyang Xue and
               Jingxue Wang and
               Chao Liu and
               Yonghua Wang and
               Danfeng Cui and
               Wendong Zhang},
  title     = {Research on optical biological sensor used as quantitative analysis
               of glucose},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {953--956},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559880},
  doi       = {10.1109/NEMS.2013.6559880},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XueWLWCZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YamamotoSO13,
  author    = {R. Yamamoto and
               K. Sueyoshi and
               Koji Otsuka},
  title     = {Functional {SU-8-PET} composite microchip including Au microdot array
               fabricated by low temperature polymer bonding},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {418--421},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559762},
  doi       = {10.1109/NEMS.2013.6559762},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YamamotoSO13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanGW13,
  author    = {Y. Yan and
               Dan Guo and
               S. Z. Wen},
  title     = {Dynamic behaviors of microdroplets in convergent microchannels under
               the effect of dielectrophoresis},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {60--63},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559682},
  doi       = {10.1109/NEMS.2013.6559682},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YanGW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanWMZXZ13,
  author    = {Shubin Yan and
               Xiao{-}Qian Wang and
               Kezhen Ma and
               An{-}fu Zhang and
               Chenyang Xue and
               Wendong Zhang},
  title     = {Fabrication and analysis optical microsphere cavity based on high
               {Q} erbium-doped},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {957--960},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559881},
  doi       = {10.1109/NEMS.2013.6559881},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YanWMZXZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangCJCS13,
  author    = {K.{-}S. Yang and
               Y.{-}C. Cheng and
               M.{-}S. Jeng and
               K.{-}H. Chien and
               J.{-}C. Shyu},
  title     = {An experimental investigation of micro pulsating heat pipes},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {869--872},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559862},
  doi       = {10.1109/NEMS.2013.6559862},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangCJCS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangD13,
  author    = {Ming{-}Zhi Yang and
               Ching{-}Liang Dai},
  title     = {Fabrication of an ammonia microsensor based on zinc oxide},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {270--273},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559730},
  doi       = {10.1109/NEMS.2013.6559730},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangD13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangH13,
  author    = {Yan Yang and
               Jin Huang},
  title     = {3D visualization of the microscopic characteristic in Magnetorheological
               fluids},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1014--1017},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559894},
  doi       = {10.1109/NEMS.2013.6559894},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangLGFH13,
  author    = {Shanglin Yang and
               Shibin Liu and
               Bo Guo and
               Wenguang Feng and
               Xiaowei Hou},
  title     = {Soft magnetic properties of Ni81Fe19 film with different substrates
               used for micro-fluxgate},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1026--1029},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559897},
  doi       = {10.1109/NEMS.2013.6559897},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangLGFH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangLLH13,
  author    = {Lung{-}Jieh Yang and
               Chieh{-}Wen Lu and
               Jia{-}Chi Liang and
               Hsieh{-}Cheng Han},
  title     = {Dynamic cell attachment of HepG2 in a microchannel},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {52--55},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559680},
  doi       = {10.1109/NEMS.2013.6559680},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangLLH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangLWZHSHC13,
  author    = {Liang Yang and
               Jiawen Li and
               Jinli Wang and
               Chenchu Zhang and
               Yanlei Hu and
               Yahui Su and
               Wenhao Huang and
               Jiaru Chu},
  title     = {Three dimensional micro-mechanical and micro-optical devices fabricated
               by holographic two-photon lithography},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {641--644},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559811},
  doi       = {10.1109/NEMS.2013.6559811},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangLWZHSHC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangLZ13,
  author    = {Tianyang Yang and
               Xiuhan Li and
               Wangqiang Zhu},
  title     = {A tunable metamaterial absorber employing {MEMS} actuators in THz
               regime},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {829--832},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559853},
  doi       = {10.1109/NEMS.2013.6559853},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangSY13,
  author    = {Chung{-}Yao Yang and
               Chun{-}Yen Sung and
               J. Andrew Yeh},
  title     = {Nanotextured chitosan surfaces for studying cell behaviors},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {183--186},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559710},
  doi       = {10.1109/NEMS.2013.6559710},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangSY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YinLP13,
  author    = {J. L. Yin and
               Y. J. Lee and
               J. Y. Park},
  title     = {Fabrication and characterization of micro-structured supercapacitor
               with nickel on porous copper},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {919--922},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559873},
  doi       = {10.1109/NEMS.2013.6559873},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YinLP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YooLAC13,
  author    = {Hyung Jung Yoo and
               Sangmin Lee and
               Jae Hyun Ahn and
               Dong{-}Il Dan Cho},
  title     = {Drug-loaded cubic micro-chamber made of a biodegradable polymer for
               bacteria-based drug delivery},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1141--1144},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559923},
  doi       = {10.1109/NEMS.2013.6559923},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YooLAC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YoonCP13,
  author    = {M. K. Yoon and
               S. J. Cheon and
               J. Y. Park},
  title     = {Micro-fabricated multi-resonant capacitive switch for {UWB} applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {726--729},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559831},
  doi       = {10.1109/NEMS.2013.6559831},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YoonCP13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuGAZ13,
  author    = {Miao Yu and
               Tim Giffney and
               Kean C. Aw and
               Haixia Zhang},
  title     = {Effect of {RF} sputtering parameters on {PZT} crystal growth},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {821--824},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559851},
  doi       = {10.1109/NEMS.2013.6559851},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuGAZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuLCSCMWKL13,
  author    = {Jerry Yu and
               Y. Liu and
               F. X. Cai and
               Mahnaz Shafiei and
               Gang Chen and
               Nunzio Motta and
               Wojtek Wlodarski and
               Kourosh Kalantar{-}Zadeh and
               P. T. Lai},
  title     = {A comparison study on hydrogen sensing performance of Pt/MoO3 nanoplatelets
               coated with a thin layer of Ta2O5 or La2O3},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {191--194},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559712},
  doi       = {10.1109/NEMS.2013.6559712},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuLCSCMWKL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuZZZW13,
  author    = {Qinglong Yu and
               Changsheng Zhang and
               Hongbo Zhu and
               Miao Zhang and
               Yongjin Wang},
  title     = {Focusing reflector and lens with non-periodic phase-matched subwavelength
               high contrast grating},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {252--255},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559726},
  doi       = {10.1109/NEMS.2013.6559726},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuZZZW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuanGZSXGZTZW13,
  author    = {Lifang Yuan and
               Zhaoyun Guan and
               Weiji Zhang and
               Yuji Suzuki and
               Rong Xiang and
               Xuchun Gui and
               Yuan Zhu and
               Zikang Tang and
               Liang Zhang and
               Tianzhun Wu},
  title     = {Facile and versatile replication of high-performance superlyophobic
               surfaces on curable substrates using elastomer molds},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {809--812},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559848},
  doi       = {10.1109/NEMS.2013.6559848},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuanGZSXGZTZW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangCCLZ13,
  author    = {Zuojun Zhang and
               Li Chen and
               Gang Chen and
               Chunhong Lai and
               Hui Zhou},
  title     = {Silver nanoparticles aggregate on passivated copper foil for Surface-enhanced
               Raman scattering},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {502--505},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559780},
  doi       = {10.1109/NEMS.2013.6559780},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangCCLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangCLZL13,
  author    = {Haifeng Zhang and
               Nan Chen and
               Xiaowei Liu and
               Xiaoshu Zhang and
               Hai Li},
  title     = {An optimized geometry model for the micro-machined liquid-suspended
               rotor gyroscope},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1042--1045},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559901},
  doi       = {10.1109/NEMS.2013.6559901},
  timestamp = {Thu, 23 Jul 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangCLZL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangCPZ13,
  author    = {Xiao{-}Sheng Zhang and
               Shi{-}Gan Chu and
               N. Peter and
               Haixia Zhang},
  title     = {Fabrication of tunable wetting {PDMS} membrane by nanostructuring
               and plasma treatment},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {159--162},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559704},
  doi       = {10.1109/NEMS.2013.6559704},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangCPZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangCWZW13,
  author    = {R. Zhang and
               G. B. Cai and
               Z. Q. Wang and
               L. R. Zhao and
               W. G. Wu},
  title     = {Ultrasensitive mass detection using dual-microcantilevers coupled
               by cruciform overhang},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {320--323},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559741},
  doi       = {10.1109/NEMS.2013.6559741},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangCWZW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangDZF13,
  author    = {Mengying Zhang and
               Lidong Du and
               Zhan Zhao and
               Zhen Fang},
  title     = {Low-stress packaging for a {MEMS} atmosphere pressure sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {665--668},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559817},
  doi       = {10.1109/NEMS.2013.6559817},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangDZF13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangGHZ13,
  author    = {Shouhe Zhang and
               Yongji Gao and
               Mengdi Han and
               Haixia Zhang},
  title     = {Growth of arrayed ZnO nanowires using a solution method},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {598--601},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559802},
  doi       = {10.1109/NEMS.2013.6559802},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangGHZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangHH13,
  author    = {Cong Zhang and
               Jian{-}Qiu Huang and
               Qing{-}An Huang},
  title     = {Design of LC-type passive wireless multi-parameter sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {256--259},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559727},
  doi       = {10.1109/NEMS.2013.6559727},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangHH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangL13,
  author    = {Hongze Zhang and
               Zhihong Li},
  title     = {Fabrication and thermal stability characterization of Ru electrode
               used for high power contact {RF} {MEMS} switch},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {340--343},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559746},
  doi       = {10.1109/NEMS.2013.6559746},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangL13a,
  author    = {Hanru Zhang and
               Xiuhan Li},
  title     = {A high power supply rejection radio voltage reference for energy harvesters},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {825--828},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559852},
  doi       = {10.1109/NEMS.2013.6559852},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangL13a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLTKRYZY13,
  author    = {Chuan Zhang and
               Jing{-}Quan Liu and
               Hongchang Tian and
               Xiaoyang Kang and
               Yue{-}Feng Rui and
               Bin Yang and
               Hongying Zhu and
               Chunsheng Yang},
  title     = {Control of swimming in crucian carp: Stimulation of the brain using
               an implantable wire electrode},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {360--363},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559751},
  doi       = {10.1109/NEMS.2013.6559751},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangLTKRYZY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLTM13,
  author    = {Lulu Zhang and
               Jian Lu and
               Hideki Takagi and
               Ryutaro Maeda},
  title     = {Mechanical characterization of nanowires by planar vibration sensor},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {124--127},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559696},
  doi       = {10.1109/NEMS.2013.6559696},
  timestamp = {Fri, 27 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangLTM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLZW13,
  author    = {Haifeng Zhang and
               Xiaowei Liu and
               Xiaoshu Zhang and
               Rui Weng},
  title     = {Design of detection electrode on contactless conductivity detection
               in capillary electrophoresis microchip},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1104--1107},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559915},
  doi       = {10.1109/NEMS.2013.6559915},
  timestamp = {Thu, 23 Jul 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangLZW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangTASNN13,
  author    = {Chuhang Zhang and
               Hironori Tsunoyama and
               Hiroki Akatsuka and
               Hiroki Sekiya and
               Tomomi Nagase and
               Atsushi Nakajima},
  title     = {Development of cluster ion source based on modulated pulse power magnetron
               sputtering technique},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {428--431},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559764},
  doi       = {10.1109/NEMS.2013.6559764},
  timestamp = {Wed, 01 Jul 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangTASNN13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangXLCGH13,
  author    = {Qiang Zhang and
               Chenyang Xue and
               Junyang Li and
               Xiujian Chou and
               Libo Gao and
               Zhenyin Hai},
  title     = {Synthesis of superparamagetic iron oxide nanoparticles in carbon reduction
               method},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {586--589},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559799},
  doi       = {10.1109/NEMS.2013.6559799},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangXLCGH13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangXLSSY13,
  author    = {Hong Zhang and
               Huiming Xu and
               Yan Li and
               Zijun Song and
               Haisheng San and
               Yuxi Yu},
  title     = {A Si-Glass based pressure sensor with a single piezoresistive element
               for harsh environment applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {348--351},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559748},
  doi       = {10.1109/NEMS.2013.6559748},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangXLSSY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangZJXZWL13,
  author    = {Guiming Zhang and
               Libo Zhao and
               Zhuangde Jiang and
               Longqi Xu and
               Yulong Zhao and
               Xiaopo Wang and
               Zhigang Liu},
  title     = {Magnetically actuated resonant piezoresistive microcantilever operating
               in fluid for dc current measurement},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {482--485},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559775},
  doi       = {10.1109/NEMS.2013.6559775},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangZJXZWL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoCLLDHCWLWC13,
  author    = {Yang Zhao and
               Deyong Chen and
               Hao Li and
               Yana Luo and
               Bin Deng and
               Song{-}Bin Huang and
               Tzu{-}Keng Chiu and
               Min{-}Hsien Wu and
               Rong Long and
               Junbo Wang and
               Jian Chen},
  title     = {A microfluidic system enabling continuous characterization of single-cell
               specific membrane capacitance and cytoplasm conductivity},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {344--347},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559747},
  doi       = {10.1109/NEMS.2013.6559747},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoCLLDHCWLWC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLLLM13,
  author    = {Yue Zhao and
               Kang Li and
               Wenzhong Lou and
               Dongguang Li and
               Zhihui Miao},
  title     = {Study of {ASIC} self-destruction technology based on {MEMS} initiator},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {851--854},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559858},
  doi       = {10.1109/NEMS.2013.6559858},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoLLLM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLSWXW13,
  author    = {Lurui Zhao and
               Can Li and
               Didi She and
               Zhiqiang Wang and
               Jun Xu and
               Wengang Wu},
  title     = {Fabrication of anisotropic nanomaterial by precise and large-area
               nanowire operation with focused-ion-beam},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {855--858},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559859},
  doi       = {10.1109/NEMS.2013.6559859},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoLSWXW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLYL13,
  author    = {Chenxu Zhao and
               Mengwei Li and
               Ming Yin and
               Zewen Liu},
  title     = {Micro-Raman spectroscopy analysis of residual stress in polysilicon
               {MEMS} resonators},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {570--573},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559795},
  doi       = {10.1109/NEMS.2013.6559795},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoLYL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoMLLFFRLHL13,
  author    = {Fuyan Zhao and
               Lixin Mo and
               Weiwei Li and
               Wenbo Li and
               Jilan Fu and
               Xinming Fan and
               Jun Ran and
               Wei Liu and
               Yuqun Hou and
               Luhai Li},
  title     = {Gravure fabrication and stability study of {RFID} antenna},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {865--868},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559861},
  doi       = {10.1109/NEMS.2013.6559861},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoMLLFFRLHL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoWWZYWMLY13,
  author    = {Le Zhao and
               Zuobin Wang and
               Dapeng Wang and
               Ziang Zhang and
               Y. Yu and
               Zhankun Weng and
               Carsten Maple and
               Dayou Li and
               Yong Yue},
  title     = {Silicon wafer modification by laser interference},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1236--1239},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559942},
  doi       = {10.1109/NEMS.2013.6559942},
  timestamp = {Wed, 30 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoWWZYWMLY13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhengSLLZ13,
  author    = {Yang Zheng and
               Xuming Sun and
               Zhongliang Li and
               Xiuhan Li and
               Haixia Zhang},
  title     = {Flexible {MEMS} inductors based on Parylene-FeNi Compound Substrate
               for wireless power transmission system},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1002--1005},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559891},
  doi       = {10.1109/NEMS.2013.6559891},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhengSLLZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouBXS13,
  author    = {Yilong Zhou and
               Hengchang Bi and
               Xiao Xie and
               Litao Sun},
  title     = {Fabrication of graphene based electrothermal cantilever actuator},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {911--914},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559871},
  doi       = {10.1109/NEMS.2013.6559871},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhouBXS13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouSC13,
  author    = {L. Zhou and
               W. M. Su and
               Z. Cui},
  title     = {Tunneling effect on enhanced {OLED} performance using Al2O3 buffer
               layer},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {407--411},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559760},
  doi       = {10.1109/NEMS.2013.6559760},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhouSC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouZXWDHWC13,
  author    = {Shuai Zhou and
               Bingchen Zhang and
               Shengwei Xu and
               Mixia Wang and
               Bowei Dai and
               Wen Hong and
               Yirong Wu and
               Xinxia Cai},
  title     = {Compressive sensing of neural action potentials using nano platinum
               black modified microelectrode array},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {432--435},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559765},
  doi       = {10.1109/NEMS.2013.6559765},
  timestamp = {Sat, 05 Sep 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhouZXWDHWC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuDM13,
  author    = {Li Zhu and
               Ruchira Dharmasena and
               Shamus McNamara},
  title     = {{MOS} tunneling strain sensor using an {AC} measurement technique},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1159--1162},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559927},
  doi       = {10.1109/NEMS.2013.6559927},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuDM13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuPZW13,
  author    = {Lun Zhu and
               Zhaoyang Pi and
               Wei Zhang and
               Dongping Wu},
  title     = {Simulation analysis of transient piezoelectric properties of PvDF
               structure for energy conversion applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1030--1033},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559898},
  doi       = {10.1109/NEMS.2013.6559898},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuPZW13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuQC13,
  author    = {Rong Zhu and
               Rui{-}Yi Que and
               Zhe Cao},
  title     = {Micro thermal flow sensors/systems on flexible {PCB} and extensive
               applications},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {179--182},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559709},
  doi       = {10.1109/NEMS.2013.6559709},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuQC13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuSJLBL13,
  author    = {Jing Zhu and
               Junyi Shang and
               Yuan Jia and
               Kun Liu and
               D. Brenner and
               Qiao Lin},
  title     = {Physical modulation based cell manipulation in microfluidic devices},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1226--1229},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559940},
  doi       = {10.1109/NEMS.2013.6559940},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuSJLBL13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuWXWPWZ0YCMJ13,
  author    = {Zhiyuan Zhu and
               Shaonan Wang and
               Yichao Xu and
               Guanjiang Wang and
               Yudan Pi and
               Peiquan Wang and
               Yunhui Zhu and
               Xin Sun and
               Min Yu and
               Jing Chen and
               Min Miao and
               Yufeng Jin},
  title     = {Investigations of silicon wafer bonding using thin Al and Sn films
               for heterogeneous integration},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {155--158},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559703},
  doi       = {10.1109/NEMS.2013.6559703},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuWXWPWZ0YCMJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuZHZ13,
  author    = {Fu{-}Yun Zhu and
               Xiao{-}Sheng Zhang and
               Wei Hu and
               Haixia Zhang},
  title     = {Controllable formation and optical characterization of silicon nanocone-forest
               using {SF6/C4F8} in cyclic etching-passivation process},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1034--1037},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559899},
  doi       = {10.1109/NEMS.2013.6559899},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuZHZ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuangPPOJ13,
  author    = {Guisheng Zhuang and
               Nicklas N. Poulsen and
               Nickolaj J. Petersen and
               Jesper {\O}stergaard and
               Henrik Jensen},
  title     = {A capillary-based microfluidic device incorporating optical fibers
               for flow induced dispersion analysis},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {1054--1057},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559903},
  doi       = {10.1109/NEMS.2013.6559903},
  timestamp = {Fri, 10 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuangPPOJ13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuoDX13,
  author    = {C. Zhuo and
               H. Dong and
               L. Xuan},
  title     = {Three dimensional compensation spherical coils for compact atomic
               magnetometers},
  booktitle = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  pages     = {657--660},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://doi.org/10.1109/NEMS.2013.6559815},
  doi       = {10.1109/NEMS.2013.6559815},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuoDX13.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/nems/2013,
  title     = {8th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2013, Suzhou, China, April 7-10, 2013},
  publisher = {{IEEE}},
  year      = {2013},
  url       = {https://ieeexplore.ieee.org/xpl/conhome/6556708/proceeding},
  timestamp = {Wed, 16 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/2013.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AartsWS12,
  author    = {M. Aarts and
               J. Wei and
               P. M. Sarro},
  title     = {Silicon-Polymer Electro-thermal bimorph actuators with SiC bottom-layer
               for large out-of-plane motion and improved power efficiency},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {253--256},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196768},
  doi       = {10.1109/NEMS.2012.6196768},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AartsWS12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AfsharFVSKS12,
  author    = {Maziar Afshar and
               Dara Feili and
               Henning Voellm and
               Martin Straub and
               Karsten Koenig and
               Helmut Seidel},
  title     = {Nanoscale laser writing of Indium-Tin-Oxide nanowires},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {441--444},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196813},
  doi       = {10.1109/NEMS.2012.6196813},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AfsharFVSKS12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AkazawaOSK12,
  author    = {Akira Akazawa and
               Kanji Okamoto and
               Atsushi Syunori and
               Satoshi Konishi},
  title     = {Various carbon composite pyrolyzed polymers and their electrical characterization},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {266--269},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196771},
  doi       = {10.1109/NEMS.2012.6196771},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AkazawaOSK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AtthiBMJHP12,
  author    = {N. Atthi and
               S. Boonruang and
               W. Mohammed and
               Wutthinan Jeamsaksiri and
               C. Hruanun and
               A. Poyai},
  title     = {Design and fabrication of diffractive phase element for minimizing
               the focusing spot size beyond diffraction limit},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {372--375},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196796},
  doi       = {10.1109/NEMS.2012.6196796},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/AtthiBMJHP12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BaoNYKF12,
  author    = {Jingjing Bao and
               Masahiro Nakajima and
               Zhan Yang and
               Masaru Kojima and
               Toshio Fukuda},
  title     = {Catalytic Nano-mobile Robot with finely designed geometry},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {368--371},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196795},
  doi       = {10.1109/NEMS.2012.6196795},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BaoNYKF12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BerciouxM12,
  author    = {Dario Bercioux and
               Leonhard Mayrhofer},
  title     = {Pseudo-spin filter in metallic single-walled carbon nanotubes},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {294--297},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196778},
  doi       = {10.1109/NEMS.2012.6196778},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BerciouxM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BiWCL12,
  author    = {Xiao{-}Peng Bi and
               Nathan L. Ward and
               Brian P. Crum and
               Wen Li},
  title     = {Plasma-treated switchable wettability of parylene-C surface},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {222--225},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196761},
  doi       = {10.1109/NEMS.2012.6196761},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BiWCL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BurouniSSAT12,
  author    = {Narges Burouni and
               Edin Sarajlic and
               Martin Siekman and
               Leon Abelmann and
               Niels Tas},
  title     = {Pyramidal nanowire tip for atomic force microscopy and thermal imaging},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {86--89},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196729},
  doi       = {10.1109/NEMS.2012.6196729},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BurouniSSAT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangCLHWWL12,
  author    = {Kow{-}Ming Chang and
               Chu{-}Feng Chen and
               Chiung{-}Hui Lai and
               Cheng{-}Ting Hsieh and
               Chin{-}Ning Wu and
               Yu{-}Bin Wang and
               Chung{-}Hsien Liu},
  title     = {Sensitivity enhancement in {SGOI} nanowire biosensor fabricated by
               top surface passivation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {579--582},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196842},
  doi       = {10.1109/NEMS.2012.6196842},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangCLHWWL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangCLWHWL12,
  author    = {Kow{-}Ming Chang and
               Chu{-}Feng Chen and
               Chiung{-}Hui Lai and
               Chin{-}Ning Wu and
               Cheng{-}Ting Hsieh and
               Yu{-}Bin Wang and
               Chung{-}Hsien Liu},
  title     = {Effect of oxidation on {SGOI} nanowire biosensor fabrication using
               Ge condensation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {708--711},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196873},
  doi       = {10.1109/NEMS.2012.6196873},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangCLWHWL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangKT12,
  author    = {Jay Han{-}Chieh Chang and
               Dongyang Kang and
               Yu{-}Chong Tai},
  title     = {Dry mechanical liftoff technology for metallization on parylene-C
               using {SU-8}},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {286--289},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196776},
  doi       = {10.1109/NEMS.2012.6196776},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangKT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangLHCYPSL12,
  author    = {Kuo{-}Wei Chang and
               Chia{-}Tung Lee and
               Punde Tushar Harishchandra and
               Hung{-}Po Chen and
               Ting{-}Ru Yueh and
               Srinivasu Valagerahally Puttaswamy and
               Shilpa Sivashankar and
               Cheng{-}Hsien Liu},
  title     = {3D biomimetic chip integrated with microvascular system for studying
               the liver specific functions},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {218--221},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196760},
  doi       = {10.1109/NEMS.2012.6196760},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangLHCYPSL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangLK12,
  author    = {Y. J. Chang and
               D. Y. Liu and
               C. L. Kuo},
  title     = {Nano-scale mechanical relays fabricated by nanoimprint technology},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {45--48},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196719},
  doi       = {10.1109/NEMS.2012.6196719},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangLK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangYWLJCL12,
  author    = {Wen{-}Hsin Chang and
               Sung{-}Yi Yang and
               Chih{-}Hung Wang and
               Ping{-}Chen Li and
               Fuh{-}Jyh Jan and
               Tzong{-}Yueh Chen and
               Gwo{-}Bin Lee},
  title     = {An optical diagnostic system using isothermal amplification technique
               for Phalaenopsis orchids},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {204--207},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196757},
  doi       = {10.1109/NEMS.2012.6196757},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangYWLJCL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaoLC12,
  author    = {Tzu{-}Yuan Chao and
               Jian{-}Ruei Lin and
               Y. T. Cheng},
  title     = {CoNiMnP-AAO hard magnetic nanocomposite film for {MEMS} applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {351--354},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196791},
  doi       = {10.1109/NEMS.2012.6196791},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChaoLC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChataniWIM12,
  author    = {Keisuke Chatani and
               Dong F. Wang and
               Tsuyoshi Ikehara and
               Ryutaro Maeda},
  title     = {Vibration mode localization in coupled beam-shaped resonator array},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {69--72},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196725},
  doi       = {10.1109/NEMS.2012.6196725},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChataniWIM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChauOLLLL12,
  author    = {Long{-}Ho Chau and
               Mengxing Ouyang and
               Wenfeng Liang and
               Gwo{-}Bin Lee and
               Wen Jung Li and
               Wing Keung Liu},
  title     = {Inducing self-rotation of Melan-a cells by {ODEP}},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {195--199},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196755},
  doi       = {10.1109/NEMS.2012.6196755},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChauOLLLL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CheirsirikulJh12,
  author    = {S. Cheirsirikul and
               S. Jesen and
               C. Hruanun},
  title     = {The vertical {MSM} diamond X-ray detector},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {587--590},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196844},
  doi       = {10.1109/NEMS.2012.6196844},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CheirsirikulJh12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCCCC12,
  author    = {Y. C. Chen and
               Chia Wei Chu and
               Tzu{-}Yuan Chao and
               Y. T. Cheng and
               Chih Chen},
  title     = {The electromigration investigation of Cu-Ni nanocomposites},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {515--518},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196828},
  doi       = {10.1109/NEMS.2012.6196828},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCCCC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCGF12,
  author    = {Chang{-}An Chen and
               Chiun{-}Hsun Chen and
               Amir M. Ghaemmaghami and
               Shih{-}Kang Fan},
  title     = {Separation of dendritic and {T} cells using electrowetting and dielectrophoresis},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {183--186},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196752},
  doi       = {10.1109/NEMS.2012.6196752},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCGF12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCW12,
  author    = {Kuan{-}Yu Chen and
               Kuang{-}En Chen and
               Kerwin Wang},
  title     = {A flexible evaporation micropump with precision flow rate control
               for micro-fluidic systems},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {653--656},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196860},
  doi       = {10.1109/NEMS.2012.6196860},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCZ12,
  author    = {C. C. Chen and
               Y. Y. Chang and
               J. Zhang},
  title     = {A SWNTs thin film solar microcell prepared by simple solution-evaporation
               method},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {519--522},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196829},
  doi       = {10.1109/NEMS.2012.6196829},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenDKL12,
  author    = {Yu{-}Shih Chen and
               Tzu{-}Hsuan Dai and
               Ling{-}Yi Ke and
               Cheng{-}Hsien Liu},
  title     = {Microfluidic circulatory system for the raise of liver urea assay},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {533--536},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196832},
  doi       = {10.1109/NEMS.2012.6196832},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenDKL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenKKLTL12,
  author    = {Yu{-}Shih Chen and
               Zong{-}Keng Kuo and
               Ling{-}Yi Ke and
               Chiou{-}Wen Lin and
               Hsiang{-}Wen Tseng and
               Cheng{-}Hsien Liu},
  title     = {Difference proportional cell contact platform for 3D hepatocyte culture},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {191--194},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196754},
  doi       = {10.1109/NEMS.2012.6196754},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenKKLTL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenSSCLL12,
  author    = {P. L. Chen and
               James Su and
               M. H. Shiao and
               M. N. Chang and
               C. H. Lee and
               Chee Wee Liu},
  title     = {Scanning electron beam induced deposition for conductive tip modification},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {553--556},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196836},
  doi       = {10.1109/NEMS.2012.6196836},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenSSCLL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenW12,
  author    = {Yu{-}Shan Chen and
               Gou{-}Jen Wang},
  title     = {A high sensitivity and low-cost polycarbonate (PC)-based biosensor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {392--397},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196801},
  doi       = {10.1109/NEMS.2012.6196801},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenYHFFT12,
  author    = {Y. Chen and
               W. Yang and
               Y. Huang and
               C. Fu and
               Ya. Fu and
               S. Tang},
  title     = {Engineering a biomimetic villus array for in vitro 3-dimensional culture
               of intestinal epithelial cells},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {230--233},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196763},
  doi       = {10.1109/NEMS.2012.6196763},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenYHFFT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengCS12,
  author    = {M. C. Cheng and
               L. K. Chen and
               C. K. Sung},
  title     = {Fabrication of controllable profile microlens array by nanoimprinting
               process},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {542--546},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196834},
  doi       = {10.1109/NEMS.2012.6196834},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengCS12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengLW12,
  author    = {Chao{-}Yu Cheng and
               Yan{-}Bo Lin and
               Kerwin Wang},
  title     = {Using a canny-edge-detection based method to characterize in-plane
               micro-actuators},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {729--732},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196878},
  doi       = {10.1109/NEMS.2012.6196878},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengLW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChiangF12,
  author    = {Min{-}Yu Chiang and
               Shih{-}Kang Fan},
  title     = {Electric manipulations of hydrogel on a digital microfluidic platform},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {407--410},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196805},
  doi       = {10.1109/NEMS.2012.6196805},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChiangF12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChiouCLH12,
  author    = {Jin{-}Chern Chiou and
               Lei{-}Chun Chou and
               You{-}Liang Lai and
               Sheng{-}Chieh Huang},
  title     = {Thermal switch and variable capacitance designed for micro electrostatic
               converter by using {CMOS} {MEMS} process},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {733--737},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196879},
  doi       = {10.1109/NEMS.2012.6196879},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChiouCLH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuangHZT12,
  author    = {Y. C. Chuang and
               H. Y. Hsieh and
               Quanshui Zheng and
               Fan{-}Gang Tseng},
  title     = {Spontaneous motion of a water droplet on hydrophilic and curvature
               gradient conical-shaped surfaces},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {403--406},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196804},
  doi       = {10.1109/NEMS.2012.6196804},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChuangHZT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuangW12,
  author    = {Jun{-}Fu Chuang and
               Kerwin Wang},
  title     = {A multi-view reflective three-dimensional display},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {384--387},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196799},
  doi       = {10.1109/NEMS.2012.6196799},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChuangW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungWCL12,
  author    = {H. Y. Chung and
               C. Y. Wu and
               C. H. Chen and
               Y. C. Lee},
  title     = {Arrayed metallic micro/nano particles for localized surface plasmon
               resonance based on metal contact transfer lithography},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {339--342},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196788},
  doi       = {10.1109/NEMS.2012.6196788},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungWCL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuoHF12,
  author    = {Tsung{-}Min Chuo and
               Wensyang Hsu and
               Shih{-}Kang Fan},
  title     = {Development of microbead-based affinity biosensor by insulator-based
               dielectrophoresis},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {187--190},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196753},
  doi       = {10.1109/NEMS.2012.6196753},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChuoHF12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiZZ12,
  author    = {Zheng Cui and
               Jianwen Zhao and
               Ting Zhang},
  title     = {Printed carbon nanotube devices and their applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196705},
  doi       = {10.1109/NEMS.2012.6196705},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CuiZZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaleRPHK12,
  author    = {Carl Dale and
               S. Rana and
               R. H. Page and
               John Hedley and
               Neil Keegan},
  title     = {The facile transferral of graphene onto interdigitated electrodes
               for sensing applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {627--630},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196854},
  doi       = {10.1109/NEMS.2012.6196854},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DaleRPHK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DewantoCCHGH12,
  author    = {Raden Dewanto and
               Tao Chen and
               Rebecca Cheung and
               Zhongxu Hu and
               Barry J. Gallacher and
               John Hedley},
  title     = {Reliability prediction of 3C-SiC cantilever beams using dynamic Raman
               spectroscopy},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {270--273},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196772},
  doi       = {10.1109/NEMS.2012.6196772},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DewantoCCHGH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DewantoDHKGH12,
  author    = {Raden Dewanto and
               Carl Dale and
               Zhongxu Hu and
               Neil Keegan and
               Barry J. Gallacher and
               John Hedley},
  title     = {Characterization of strain fields in graphene films},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {15--18},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196712},
  doi       = {10.1109/NEMS.2012.6196712},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DewantoDHKGH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GeLLYY12,
  author    = {Fei Ge and
               Dachuan Liu and
               Longtao Lin and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {Fast self-resonant startup procedure for digital {MEMS} gyroscope
               system},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {669--672},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196864},
  doi       = {10.1109/NEMS.2012.6196864},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GeLLYY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuL12,
  author    = {Zhipeng Gu and
               Jong{-}Leng Liow},
  title     = {Micro-droplet formation with non-Newtonian solutions in microfluidic
               T-junctions with different inlet angles},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {423--428},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196809},
  doi       = {10.1109/NEMS.2012.6196809},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HagiwaraIKA12,
  author    = {Masaya Hagiwara and
               Akihiko Ichikawa and
               Tomohiro Kawahara and
               Fumihito Arai},
  title     = {High speed enucleation of oocyte using magnetically actuated microrobot
               on a chip},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {364--367},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196794},
  doi       = {10.1109/NEMS.2012.6196794},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HagiwaraIKA12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeZCYY12,
  author    = {Chunhua He and
               Qiancheng Zhao and
               Jian Cui and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {A research of the bandwidth of a mode-matching {MEMS} vibratory gyroscope},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {738--741},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196880},
  doi       = {10.1109/NEMS.2012.6196880},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HeZCYY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HibbertBT12,
  author    = {Orain Hibbert and
               Taylor Busch and
               Steve Tung},
  title     = {A pyrex nanochannel device fabricated by {AFM} nanolithography},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {90--94},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196730},
  doi       = {10.1109/NEMS.2012.6196730},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HibbertBT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HoshinoM12,
  author    = {Takayuki Hoshino and
               Keisuke Morishima},
  title     = {Closed-looped nano stimulation microscope for living cell membrane},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {82--85},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196728},
  doi       = {10.1109/NEMS.2012.6196728},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HoshinoM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiehHYWXLT12,
  author    = {Hsin{-}Yi Hsieh and
               Tsu{-}Wei Huang and
               Chung{-}Shi Yang and
               Pen{-}Cheng Wang and
               Jian{-}Long Xiao and
               Chau{-}Hwang Lee and
               Fan{-}Gang Tseng},
  title     = {Gold-coated polystyrene bead array and the investigation of their
               plasmon coupling abilities},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {322--325},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196784},
  doi       = {10.1109/NEMS.2012.6196784},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiehHYWXLT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiehL12,
  author    = {Yi{-}Ta Hsieh and
               Yung{-}Chun Lee},
  title     = {Metal contact printing photolithography for fabricating sub-micrometer
               patterned sapphire substrates in light-emitting diodes},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {40--44},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196718},
  doi       = {10.1109/NEMS.2012.6196718},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiehL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangCWC12,
  author    = {Shih{-}Hao Huang and
               Hsiao{-}Tzu Chu and
               Chih{-}Wei Wu and
               Yun{-}Yu Chuang},
  title     = {Light-addressable electrochemical micropatterning of cell-encapsulated
               alginate hydrogels for cell-based microarray},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {141--145},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196742},
  doi       = {10.1109/NEMS.2012.6196742},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangCWC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangHC12,
  author    = {Guo{-}Wei Huang and
               Tzu{-}Yi Hung and
               Chin{-}Tai Chen},
  title     = {Design, simulation, and verification of fluidic light-guide chips
               with various geometries of micro polymer channels},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {179--182},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196751},
  doi       = {10.1109/NEMS.2012.6196751},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangHC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangTL12,
  author    = {Kuo{-}Feng Huang and
               Sung{-}Wen Tsai and
               Yung{-}Chun Lee},
  title     = {Fabrication metal roller mold with sub-micrometer feature size based
               on contact printing photolithography},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {31--35},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196716},
  doi       = {10.1109/NEMS.2012.6196716},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangTL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HungCHTYLL12,
  author    = {Lien{-}Yu Hung and
               Fong{-}Yu Cheng and
               Chih{-}Chia Huang and
               Yi{-}Che Tsai and
               Chen{-}Sheng Yeh and
               Huan{-}Yao Lei and
               Gwo{-}Bin Lee},
  title     = {Microfluidic system for rapid detection of influenza infection by
               utilizing magnetic MnFe2O4 nanoparticle-based immunoassay},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {200--203},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196756},
  doi       = {10.1109/NEMS.2012.6196756},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HungCHTYLL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HungTLC12,
  author    = {Kuo{-}Yung Hung and
               Yi{-}Wei Tsai and
               Chun{-}Fu Lee and
               Yi{-}Hao Chu},
  title     = {Integration the back-side inclined exposure technology to fabricate
               the 45{\textdegree} k-type prism with nanometer roughness},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {120--124},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196737},
  doi       = {10.1109/NEMS.2012.6196737},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HungTLC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/IshinabeKWIM12,
  author    = {Haruki Ishinabe and
               Takeshi Kobayashi and
               Dong F. Wang and
               Toshihiro Itoh and
               Ryutaro Maeda},
  title     = {Characterization of super-harmonic effect using piezoelectric film
               cantilever with a proof mass in the point},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {615--618},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196851},
  doi       = {10.1109/NEMS.2012.6196851},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/IshinabeKWIM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/IshizawaANUU12,
  author    = {M. Ishizawa and
               T. Azeta and
               H. Nose and
               Y. Ukita and
               Y. Utsumi},
  title     = {Three-dimensional lab-on-a-CD with enzyme-linked immunosorbent assay},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {213--217},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196759},
  doi       = {10.1109/NEMS.2012.6196759},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/IshizawaANUU12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ItohWINM12,
  author    = {Takumi Itoh and
               Dong F. Wang and
               Tsuyoshi Ikehara and
               Mamoru Nakajima and
               Ryutaro Maeda},
  title     = {Effect of nonlinear vibration on double region of synchronized frequency
               responses in mechanically coupled beam-shaped oscillator system},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {95--98},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196731},
  doi       = {10.1109/NEMS.2012.6196731},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ItohWINM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiaMFGHJ12,
  author    = {Songtao Jia and
               Min Miao and
               Runiu Fang and
               Shichao Guo and
               Duwei Hu and
               Yufeng Jin},
  title     = {A 3D micro-channel cooling system embedded in {LTCC} packaging substrate},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {649--652},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196859},
  doi       = {10.1109/NEMS.2012.6196859},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiaMFGHJ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangDZXLWS12,
  author    = {Yiwen Jiang and
               Xiaohui Du and
               Zhan Zhan and
               Bulei Xu and
               Wenlong Lv and
               Lingyun Wang and
               Daoheng Sun},
  title     = {Design and simulation of fully-symmetrical resonant pressure sensor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {702--707},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196872},
  doi       = {10.1109/NEMS.2012.6196872},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiangDZXLWS12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangCKT12,
  author    = {Dongyang Kang and
               Jay Han{-}Chieh Chang and
               Justin Young{-}Hyun Kim and
               Yu{-}Chong Tai},
  title     = {In situ heating to improve adhesion for parylene-on-parylene deposition},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {226--229},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196762},
  doi       = {10.1109/NEMS.2012.6196762},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KangCKT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KauzlaricLHEGSK12,
  author    = {David Kauzlaric and
               Orly Liba and
               Yael Hanein and
               Pep Espa{\~{n}}ol and
               Andreas Greiner and
               Sauro Succi and
               Jan G. Korvink},
  title     = {Top-down vs. bottom-up coarse-graining of graphene and CNTs for nanodevice
               simulation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {298--303},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196779},
  doi       = {10.1109/NEMS.2012.6196779},
  timestamp = {Thu, 28 Nov 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/KauzlaricLHEGSK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KeCLL12,
  author    = {Ling{-}Yi Ke and
               Yu{-}Shih Chen and
               Jing Liu and
               Cheng{-}Hsien Liu},
  title     = {Cryogenic frozen device for hepatocyte culture and responses},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {154--157},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196745},
  doi       = {10.1109/NEMS.2012.6196745},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KeCLL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KeKCTL12,
  author    = {Ling{-}Yi Ke and
               Zong{-}Keng Kuo and
               Yu{-}Shih Chen and
               Hsiang{-}Wen Tseng and
               Cheng{-}Hsien Liu},
  title     = {PEGDA-based photocrosslinking platform for real time cell trapping},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {166--169},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196748},
  doi       = {10.1109/NEMS.2012.6196748},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KeKCTL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KeeganHHSWGM12,
  author    = {Neil Keegan and
               John Hedley and
               Zhongxu Hu and
               Julia Spoors and
               W. Waugh and
               Barry J. Gallacher and
               Calum McNeil},
  title     = {Piezoelectrically actuated Circular Diaphragm Resonator mass sensors},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {73--77},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196726},
  doi       = {10.1109/NEMS.2012.6196726},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KeeganHHSWGM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KumagaiOKY12,
  author    = {Shinya Kumagai and
               Naofumi Okamoto and
               Mime Kobayashi and
               Ichiro Yamashita},
  title     = {A carbon nanotube network conjugated by semiconductor nanoparticles
               with defined nanometer-scaled gaps},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {78--81},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196727},
  doi       = {10.1109/NEMS.2012.6196727},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KumagaiOKY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KuoL12,
  author    = {Ju{-}Nan Kuo and
               Yi{-}Kai Lin},
  title     = {Capillary kinetics of water in hydrophilic microscope coverslip nanochannels},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {636--639},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196856},
  doi       = {10.1109/NEMS.2012.6196856},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KuoL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KuzuyaYYSYXAOK12,
  author    = {Akinori Kuzuya and
               Takahiro Yamazaki and
               Kohei Yasuda and
               Yusuke Sakai and
               Yusei Yamanaka and
               Yan Xu and
               Yuichiro Aiba and
               Yuichi Ohya and
               Makoto Komiyama},
  title     = {Nanomechanical {DNA} origami devices as versatile molecular sensors},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {318--321},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196783},
  doi       = {10.1109/NEMS.2012.6196783},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KuzuyaYYSYXAOK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LaiL12,
  author    = {Yiu Wai Lai and
               Joshua E.{-}Y. Lee},
  title     = {In situ study of thermal deformation of metal resistive heater on
               silicon nitride membrane by digital holographic microscopy},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {557--561},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196837},
  doi       = {10.1109/NEMS.2012.6196837},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LaiL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LanglahPA12,
  author    = {N. Langlah and
               S. Pinsuwan and
               T. Amnuaikit},
  title     = {Preparation and physicochemical study of liposomes containing nicotinamide},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {537--541},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196833},
  doi       = {10.1109/NEMS.2012.6196833},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LanglahPA12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Lee12,
  author    = {Jeong{-}Soo Lee},
  title     = {Sensing and noise characteristics of si-nanowire ion-sensitive-field-effect-transistors
               for future biosensor applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196706},
  doi       = {10.1109/NEMS.2012.6196706},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Lee12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeCTL12,
  author    = {Ho{-}Cheng Lee and
               Tzu{-}Heng Chen and
               Wei{-}Lung Tseng and
               Che{-}Hsin Lin},
  title     = {Novel core etching technique on synthesized gold nanoparticles for
               colorimetric detection of dopamine biosample},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {665--668},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196863},
  doi       = {10.1109/NEMS.2012.6196863},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeCTL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeHCWT12,
  author    = {Tung{-}Yuan Lee and
               Tsung{-}Cheng Ho and
               Chia{-}Jung Chang and
               Pen{-}Cheng Wang and
               Fan{-}Gang Tseng},
  title     = {Proton exchange membranes based on aryl epoxy resin for fuel cells
               operated at elevated temperatures},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {453--456},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196816},
  doi       = {10.1109/NEMS.2012.6196816},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeHCWT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLLTCC12,
  author    = {Chi{-}Yuan Lee and
               Shuo{-}Jen Lee and
               Yu{-}Ming Lee and
               Ming{-}Shao Tang and
               Pei{-}Chi Chen and
               Yu{-}Ming Chang},
  title     = {In situ monitoring of temperature using flexible micro temperature
               sensors inside polymer lithium-ion battery},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {698--701},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196871},
  doi       = {10.1109/NEMS.2012.6196871},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeLLTCC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeYLCC12,
  author    = {Chi{-}Yuan Lee and
               Tachung Yang and
               Yu{-}Ming Lee and
               Tzu{-}Hao Chien and
               Yen{-}Tin Cheng},
  title     = {Integrated flexible micro pressure, temperature and flow sensors for
               use in pemfc},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {575--578},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196841},
  doi       = {10.1109/NEMS.2012.6196841},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeYLCC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Lei12,
  author    = {Kin Fong Lei},
  title     = {Automated immunoassay system based on the colorimetric detection},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {208--212},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196758},
  doi       = {10.1109/NEMS.2012.6196758},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Lei12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiAYZ12,
  author    = {Dan Li and
               Aziz Abdulagatov and
               Fang Yang and
               D. C. Zhang},
  title     = {Atomic layer deposited protective coatings for integrated {MEMS} flow
               sensor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {747--750},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196882},
  doi       = {10.1109/NEMS.2012.6196882},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiAYZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiCWW12,
  author    = {Ching{-}Wen Li and
               Jau{-}Liang Chen and
               Chia{-}Ching Wu and
               Gou{-}Jen Wang},
  title     = {The optimal vibrational shear stress for bovine endothelial cell proliferation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {716--720},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196875},
  doi       = {10.1109/NEMS.2012.6196875},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiCWW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiGWTH12,
  author    = {Can Li and
               L. Guo and
               W. G. Wu and
               X. S. Tang and
               F. Y. Huang},
  title     = {Fabrication and analysis of integrated {MEMS} pyramidal horn antenna
               for terahertz applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {611--614},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196850},
  doi       = {10.1109/NEMS.2012.6196850},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiGWTH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiITSM12,
  author    = {L. Li and
               K. Ishii and
               Y. Tsutsui and
               Shuichi Shoji and
               Jun Mizuno},
  title     = {Development of roll press {UV} imprint process for replication of
               micro lens array on the large and thin quartz substrate},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {27--30},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196715},
  doi       = {10.1109/NEMS.2012.6196715},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiITSM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLPTHMSC12,
  author    = {C. C. Li and
               Z. H. Liu and
               C. T. Pan and
               J. K. Tseng and
               H. L. Huang and
               S. W. Mao and
               S. C. Shen and
               S. J. Chang},
  title     = {Study of thin film adhesion properties of multilayer flexible electronics
               composites},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {725--728},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196877},
  doi       = {10.1109/NEMS.2012.6196877},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiLPTHMSC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiTCW12,
  author    = {Yu{-}Ting Li and
               Yen{-}Lin Tzeng and
               Chih{-}Ming Chao and
               Kerwin Wang},
  title     = {Electrode design optimization of a {CMOS} fringing-field capacitive
               sensor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {603--606},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196848},
  doi       = {10.1109/NEMS.2012.6196848},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiTCW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiWSWK12,
  author    = {Siwei Li and
               Xiaohong Wang and
               Caiwei Shen and
               Jian'gan Wang and
               Feiyu Kang},
  title     = {A study of nano-structured manganese dioxides and their composites
               as electrode materials for micro supercapacitors},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {347--350},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196790},
  doi       = {10.1109/NEMS.2012.6196790},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiWSWK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCCL12,
  author    = {Keng{-}Ren Lin and
               Cheng{-}Hung Chiang and
               Chih{-}Han Chang and
               Che{-}Hsin Lin},
  title     = {Development of a novel force sensor system built with an industrial
               multilayer ceramic capacitor {(MLCC)}},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {487--490},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196823},
  doi       = {10.1109/NEMS.2012.6196823},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinCCL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCL12,
  author    = {Ran Lin and
               Donald C. Chang and
               Yi{-}Kuen Lee},
  title     = {The effect of Cytochalasin {D} on F-Actin behavior of single-cell
               electroendocytosis using multi-chamber micro cell chip},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {150--153},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196744},
  doi       = {10.1109/NEMS.2012.6196744},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinCL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinWSH12,
  author    = {Y. H. Lin and
               C. J. Weng and
               C. Y. Su and
               W. Hsu},
  title     = {Fabrication of deep lateral single-crystal-silicon blaze micro-grating
               by Inductively-Coupled-Plasma Reactive Ion Etch},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {689--692},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196869},
  doi       = {10.1109/NEMS.2012.6196869},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinWSH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinZCT12,
  author    = {Jeffrey Chun{-}Hui Lin and
               Yu Zhao and
               Po{-}Jui Chen and
               Yu{-}Chong Tai},
  title     = {High quality factor parylene-based intraocular pressure sensor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {137--140},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196741},
  doi       = {10.1109/NEMS.2012.6196741},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinZCT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinZL12,
  author    = {Chen Lin and
               Dacheng Zhang and
               Xiaodi Liu},
  title     = {A study of tin oxide thin film gas sensors with high oxygen vacancies},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {693--697},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196870},
  doi       = {10.1109/NEMS.2012.6196870},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LinZL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LindvallSY12,
  author    = {N. Lindvall and
               J. Sun and
               August Yurgens},
  title     = {Transfer-free fabrication of suspended graphene grown by chemical
               vapor deposition},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {19--22},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196713},
  doi       = {10.1109/NEMS.2012.6196713},
  timestamp = {Mon, 11 Nov 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/LindvallSY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCYW12,
  author    = {Chung{-}You Liu and
               Jun{-}Fu Chuang and
               Ting{-}Chieh Yu and
               Kerwin Wang},
  title     = {Use bionic microlens array and {CMOS} image sensor for three-dimensional
               motion detection},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {388--391},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196800},
  doi       = {10.1109/NEMS.2012.6196800},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuCYW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuJWD12,
  author    = {Zenglei Liu and
               Niandong Jiao and
               Zhidong Wang and
               Zaili Dong},
  title     = {Analysis on 3-Dimensional spatial electric field of {AFM} based anodic
               oxidation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {547--552},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196835},
  doi       = {10.1109/NEMS.2012.6196835},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuJWD12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuWZWL12,
  author    = {Yaoping Liu and
               Wei Wang and
               Haixia Alice Zhang and
               Wengang Wu and
               Zhihong Li},
  title     = {A facile nanowire fabrication approach based on edge lithography},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {49--52},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196720},
  doi       = {10.1109/NEMS.2012.6196720},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuWZWL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuYNNU12,
  author    = {Jian{-}Qin Liu and
               Teruya Yamanishi and
               Haruhiko Nishimura and
               Sou Nobukawa and
               Hiroaki Umehara},
  title     = {On sustaining robustness of molecular pathway circuits of the {HSR}
               network of E. coli under spatial configuration},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {496--501},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196825},
  doi       = {10.1109/NEMS.2012.6196825},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LiuYNNU12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LoffelmannMK12,
  author    = {Ute Loffelmann and
               Dario Mager and
               Jan G. Korvink},
  title     = {Conductive and transparent gel microstructures fabricated by inkjet
               printing of ionic liquid based fluids},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {312--317},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196782},
  doi       = {10.1109/NEMS.2012.6196782},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LoffelmannMK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LorwongtragoolSTK12,
  author    = {Panida Lorwongtragool and
               Thara Seesaard and
               Chadarpon Tongta and
               Teerakiat Kerdcharoen},
  title     = {Portable e-nose based on polymer/CNT sensor array for protein-based
               detection},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {1--6},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196709},
  doi       = {10.1109/NEMS.2012.6196709},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LorwongtragoolSTK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LouZPLKL12,
  author    = {Liang Lou and
               Songsong Zhang and
               Woo{-}Tae Park and
               Lishiah Lim and
               Dim{-}Lee Kwong and
               Chengkuo Lee},
  title     = {Characterization of a multi-layered {MEMS} pressure sensor using piezoresistive
               silicon nanowire within large measurable strain range},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {99--103},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196732},
  doi       = {10.1109/NEMS.2012.6196732},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LouZPLKL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaedaMYD12,
  author    = {Etsuo Maeda and
               Takanori Matsuki and
               Ichiro Yamada and
               Jean{-}Jacques Delaunay},
  title     = {Electric field design of metallic sub-wavelength hole arrays for optical
               permittivity sensing},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {331--334},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196786},
  doi       = {10.1109/NEMS.2012.6196786},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MaedaMYD12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MeierBWK12,
  author    = {Robert Ch. Meier and
               Vlad Badilita and
               Ulrike Wallrabe and
               Jan G. Korvink},
  title     = {Processing of 3D multilevel {SU-8} fluidic network assisted by PerMX
               dry-photoresist lamination},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {308--311},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196781},
  doi       = {10.1109/NEMS.2012.6196781},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MeierBWK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MengTWZ12,
  author    = {B. Meng and
               W. Tang and
               Z. R. Wang and
               H. X. Zhang},
  title     = {An optimized fabrication of high yield CMOS-compatible silicon carbide
               capacitive pressure sensors},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {721--724},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196876},
  doi       = {10.1109/NEMS.2012.6196876},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MengTWZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MiaoZLZ12,
  author    = {X. S. Miao and
               B. J. Zeng and
               Z. Li and
               W. L. Zhou},
  title     = {Nanopatterning by phase change nanolithography},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196708},
  doi       = {10.1109/NEMS.2012.6196708},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/MiaoZLZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NguyenK12,
  author    = {Tuan Anh Nguyen and
               Satoshi Konishi},
  title     = {Effective force generation for {ECLIA} composed of Si bone structure
               and conductive polymer flexible slider},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {595--598},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196846},
  doi       = {10.1109/NEMS.2012.6196846},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/NguyenK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OblioscaTHLW12,
  author    = {Judy M. Obliosca and
               Fan{-}Gang Tseng and
               Ching{-}Mao Huang and
               Leu{-}Wei Lo and
               Pen{-}Cheng Wang},
  title     = {Ligand-exchange of TOPO-capped CdSe quantum dots with quinuclidines},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {343--346},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196789},
  doi       = {10.1109/NEMS.2012.6196789},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/OblioscaTHLW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OhataNHWM12,
  author    = {Tatsuhiko Ohata and
               Yasuhisa Naitoh and
               Masayo Horikawa and
               Dong F. Wang and
               Ryutaro Maeda},
  title     = {Fabrication of nanogap electrode using electromigration method during
               metal deposition},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {290--293},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196777},
  doi       = {10.1109/NEMS.2012.6196777},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/OhataNHWM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OuLPLCL12,
  author    = {Z. Y. Ou and
               Z. H. Liu and
               C. T. Pan and
               L. W. Lin and
               Y. J. Chen and
               H. W. Lai},
  title     = {Study on piezoelectric properties of near-field electrospinning {PVDF/MWCNT}
               nano-fiber},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {125--128},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196738},
  doi       = {10.1109/NEMS.2012.6196738},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/OuLPLCL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/OuyangLWL12,
  author    = {Mengxing Ouyang and
               Wen Jung Li and
               Ka Wai Wong and
               Wing Keung Liu},
  title     = {Investigation of electrical properties of DNA-attached carbon nano-particles
               for biological applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {429--432},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196810},
  doi       = {10.1109/NEMS.2012.6196810},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/OuyangLWL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PengXYZTFLRZ12,
  author    = {Pinggang Peng and
               Dan Xie and
               Yi Yang and
               Changjian Zhou and
               He Tian and
               Tingting Feng and
               Xiao Li and
               Tianling Ren and
               Hongwei Zhu},
  title     = {Multilayer graphene growth by a metal-catalyzed crystallization of
               diamond-like carbon},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {7--10},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196710},
  doi       = {10.1109/NEMS.2012.6196710},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PengXYZTFLRZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PhatthanakunDPSPC12,
  author    = {R. Phatthanakun and
               P. Deekla and
               W. Pummara and
               C. Sriphung and
               C. Pantong and
               N. Chomnawang},
  title     = {Design and fabrication of thin-film aluminum microheater and nickel
               temperature sensor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {112--115},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196735},
  doi       = {10.1109/NEMS.2012.6196735},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PhatthanakunDPSPC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PhetchakulLYP12,
  author    = {Toempong Phetchakul and
               Wittaya Luanatikomkul and
               Wittawat Yamwong and
               Amporn Poyai},
  title     = {The study of forward and reverse schottky junction for dual magnetodiode},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {599--602},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196847},
  doi       = {10.1109/NEMS.2012.6196847},
  timestamp = {Wed, 13 Nov 2019 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/PhetchakulLYP12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PuttaswamyYSCHL12,
  author    = {Srinivasu Valagerahally Puttaswamy and
               Shih{-}Mo Yang and
               Shilpa Sivashankar and
               Kuo{-}Wei Chang and
               Long Hsu and
               Cheng{-}Hsien Liu},
  title     = {Experimental investigation of bulk response of cells on optoelectronic
               dielectrophoresis chip},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {162--165},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196747},
  doi       = {10.1109/NEMS.2012.6196747},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/PuttaswamyYSCHL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RooijGALMPSSY12,
  author    = {Nico F. de Rooij and
               Sebastian Gautsch and
               Terunobu Akiyama and
               Fr{\'{e}}d{\'{e}}ric Loizeau and
               G. Mileti and
               Yves Petremand and
               U. Staufer and
               Rahel Straessle and
               Genki Yoshikawa},
  title     = {{NEMS} based tools for nanoscience and atomic clocks},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196702},
  doi       = {10.1109/NEMS.2012.6196702},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/RooijGALMPSSY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Rothemund12,
  author    = {Paul W. K. Rothemund},
  title     = {Beyond Watson and Crick: Programming {DNA} self-assembly for nanofabrication},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196703},
  doi       = {10.1109/NEMS.2012.6196703},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Rothemund12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SagawaWLM12,
  author    = {Takahisa Sagawa and
               Dong F. Wang and
               Jian Lu and
               Ryutaro Maeda},
  title     = {Effect of geometrical design of support on frequency shift and energy
               loss of piezoelectric ring resonator applicable to liquid circumstance},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {591--594},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196845},
  doi       = {10.1109/NEMS.2012.6196845},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SagawaWLM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SakumaSA12,
  author    = {Shinya Sakuma and
               Masakuni Sugita and
               Fumihito Arai},
  title     = {Hybrid mask lithography for fabrication of micro-pattern with nano-pillars},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {53--56},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196721},
  doi       = {10.1109/NEMS.2012.6196721},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SakumaSA12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SatsanarukkitLT12,
  author    = {Penvipha Satsanarukkit and
               Hsiwen Lo and
               Yu Chong Tai},
  title     = {A free-standing and flexible parylene {PCR} device},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {146--149},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196743},
  doi       = {10.1109/NEMS.2012.6196743},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SatsanarukkitLT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SemenenkoLASR12,
  author    = {Vyacheslav Semenenko and
               Vladimir Leiman and
               Aleksey V. Arsenin and
               Yury V. Stebunov and
               Victor Ryzhii},
  title     = {Excitation of mechanical oscillations in double-carbon-nanotube system
               by terahertz radiation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {631--635},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196855},
  doi       = {10.1109/NEMS.2012.6196855},
  timestamp = {Tue, 14 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/SemenenkoLASR12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShenTF12,
  author    = {Yan{-}Ting Shen and
               Ling{-}Pin Tsai and
               Shih{-}Kang Fan},
  title     = {Microbubble and microplasma manipulations for gas analyses},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {411--414},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196806},
  doi       = {10.1109/NEMS.2012.6196806},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShenTF12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SheuSHP12,
  author    = {T. S. Sheu and
               J. C. Shyu and
               J. W. Hsiao and
               Y. C. Pan},
  title     = {Effect of coating organic film on dropwise condensation in microgrooves
               with nanostructure surface},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {661--664},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196862},
  doi       = {10.1109/NEMS.2012.6196862},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SheuSHP12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiCCWZ12,
  author    = {Xiaomei Shi and
               Ching{-}Hsiang Cheng and
               Chen Chao and
               Like Wang and
               Yongping Zheng},
  title     = {A piezoresistive normal and shear force sensor using liquid metal
               alloy as gauge material},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {483--486},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196822},
  doi       = {10.1109/NEMS.2012.6196822},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShiCCWZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShiCP12,
  author    = {Xiaomei Shi and
               Ching{-}Hsiang Cheng and
               Jue Peng},
  title     = {A novel stretchable {CMUT} array using liquid-metal electrodes on
               a {PDMS} substrate},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {104--107},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196733},
  doi       = {10.1109/NEMS.2012.6196733},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShiCP12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShihLLP12,
  author    = {Ching{-}Jui Shih and
               Wei{-}Chih Lin and
               Chao{-}Sung Lin and
               Yung{-}Ning Pan},
  title     = {Surface-modified diamond embedded in nickel matrix composite for intrinsic
               polishing application},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {681--684},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196867},
  doi       = {10.1109/NEMS.2012.6196867},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShihLLP12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShyuDYW12,
  author    = {Jin{-}Cherng Shyu and
               Sin{-}Min Dai and
               Kai{-}Shing Yang and
               Chi{-}Chuan Wang},
  title     = {A visualization study of venting gas via hydrophobic nanoporous membrane},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {640--643},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196857},
  doi       = {10.1109/NEMS.2012.6196857},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShyuDYW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShyuHSAH12,
  author    = {J. C. Shyu and
               C. L. Huang and
               T. S. Sheu and
               H. Ay and
               J. W. Huang},
  title     = {A study of hydrogen peroxide microfluidic fuel cells},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {529--532},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196831},
  doi       = {10.1109/NEMS.2012.6196831},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ShyuHSAH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SingalSM12,
  author    = {Vikas Singal and
               Sami Smaili and
               Yehia Massoud},
  title     = {Implementation of a subwavelength Bragg reflector for Terahertz applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {491--495},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196824},
  doi       = {10.1109/NEMS.2012.6196824},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SingalSM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SingalSM12a,
  author    = {Vikas Singal and
               Sami Smaili and
               Yehia Massoud},
  title     = {On the design of subwavelength waveguiding structures for terahertz
               Applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {506--510},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196827},
  doi       = {10.1109/NEMS.2012.6196827},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SingalSM12a.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SivashankarPLYCYL12,
  author    = {Shilpa Sivashankar and
               Srinivasu Valagerahally Puttaswamy and
               Hui{-}Ling Lin and
               Shih{-}Mo Yang and
               Hung{-}Po Chen and
               Chau{-}Ting Yeh and
               Cheng{-}Hsien Liu},
  title     = {3D microstructure integrated bioreactor system for transgenic mice
               thick liver tissue culture},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {158--161},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196746},
  doi       = {10.1109/NEMS.2012.6196746},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SivashankarPLYCYL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SmailiSM12,
  author    = {Sami Smaili and
               Vikas Singal and
               Yehia Massoud},
  title     = {On the effect of width of metallic armchair graphene nanoribbons in
               plasmonic waveguide applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {623--626},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196853},
  doi       = {10.1109/NEMS.2012.6196853},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SmailiSM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/StebunovALSR12,
  author    = {Yury V. Stebunov and
               Aleksey V. Arsenin and
               Vladimir Leiman and
               Vyacheslav Semenenko and
               Victor Ryzhii},
  title     = {Graphene nanoribbon based {AM} demodulator of terahertz radiation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {742--746},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196881},
  doi       = {10.1109/NEMS.2012.6196881},
  timestamp = {Tue, 14 Jan 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/StebunovALSR12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/StrlesM12,
  author    = {Drago Strle and
               Bogdan Stefane and
               Igor Musevic},
  title     = {Detecting vapor traces of explosives using a self-assembled mono layer
               on a surface-modified {MEMS} capacitor and {CMOS} electronics},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {61--64},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196723},
  doi       = {10.1109/NEMS.2012.6196723},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/StrlesM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Sun12,
  author    = {Litao Sun},
  title     = {Atomic resolution nanofabrication and dynamic characterization},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196707},
  doi       = {10.1109/NEMS.2012.6196707},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Sun12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunLCTY12,
  author    = {Jie Sun and
               Niclas Lindvall and
               Matthew T. Cole and
               Kenneth B. K. Teo and
               August Yurgens},
  title     = {Chemical vapor deposition of nanocrystalline graphene directly on
               arbitrary high-temperature insulating substrates},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {11--14},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196711},
  doi       = {10.1109/NEMS.2012.6196711},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunLCTY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunMTCW12,
  author    = {G. C. Sun and
               X. Y. Ma and
               A. S. Tang and
               Y. F. Chen and
               W. G. Wu},
  title     = {Switching characteristic model and biochemical application analysis
               for electrolyte-oxide-semiconductor structure diodes},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {644--648},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196858},
  doi       = {10.1109/NEMS.2012.6196858},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunMTCW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunZLYYLZ12,
  author    = {Xuming Sun and
               Yang Zheng and
               Zhongliang Li and
               Miao Yu and
               Quan Yuan and
               Xiuhan Li and
               Haixia Zhang},
  title     = {Design and fabrication of flexible parylene-based inductors with electroplated
               NiFe magnetic core for wireless power transmission system},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {238--242},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196765},
  doi       = {10.1109/NEMS.2012.6196765},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/SunZLYYLZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Tabata12,
  author    = {Osamu Tabata},
  title     = {Welcome message},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196694},
  doi       = {10.1109/NEMS.2012.6196694},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Tabata12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TaolZZQWS12,
  author    = {Wei Tao and
               Wenlong Lv and
               Zhan Zhan and
               Wenjia Zuo and
               Xiaochun Qiu and
               Lingyun Wang and
               Daoheng Sun},
  title     = {Comparison of glass etching properties between HCl and {HNO3} solution},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {562--566},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196838},
  doi       = {10.1109/NEMS.2012.6196838},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TaolZZQWS12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TehPE12,
  author    = {Kwok Siong Teh and
               Joachim Pedersen and
               Heather Esposito},
  title     = {Rapid thermal plasma deposition of transparent nanocrystalline ZnO
               thin films and the effects of annealing},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {261--265},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196770},
  doi       = {10.1109/NEMS.2012.6196770},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TehPE12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TehraniM12,
  author    = {Ali Tehrani and
               Ali Moosavi},
  title     = {Investigation of particle dispersion and deposition in a channel with
               elliptic obstructions using lattice Boltzmann method},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {523--528},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196830},
  doi       = {10.1109/NEMS.2012.6196830},
  timestamp = {Tue, 03 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/TehraniM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ThomasLP12,
  author    = {Nicole Thomas and
               Ilkka L{\"{a}}hdesm{\"{a}}ki and
               Babak A. Parviz},
  title     = {An electro-enzymatic flexible molecular lactate sensor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {398--402},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196802},
  doi       = {10.1109/NEMS.2012.6196802},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ThomasLP12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TuL12,
  author    = {Cheng Tu and
               Joshua E.{-}Y. Lee},
  title     = {Study on thermoelastic dissipation in bulk mode resonators with etch
               holes},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {478--482},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196821},
  doi       = {10.1109/NEMS.2012.6196821},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TuL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TzengW12,
  author    = {Yen{-}Lin Tzeng and
               Kerwin Wang},
  title     = {Electrical performance of micro-assembled beads under different temperatures
               and loadings},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {433--436},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196811},
  doi       = {10.1109/NEMS.2012.6196811},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/TzengW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangDSZZS12,
  author    = {Lingyun Wang and
               Xiaohui Du and
               Yuanzhe Su and
               Zhan Zhan and
               Wenjia Zuo and
               Daoheng Sun},
  title     = {Application of nonlinear driving in frequency matching of tunneling
               gyroscope},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {571--574},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196840},
  doi       = {10.1109/NEMS.2012.6196840},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangDSZZS12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHC12,
  author    = {Hsun{-}You Wang and
               Cheng Huang and
               Chin{-}Tai Chen},
  title     = {Specific design and implementation of a piezoelectric droplet actuator
               for evaporative cooling of free space},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {419--422},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196808},
  doi       = {10.1109/NEMS.2012.6196808},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangHC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHPHT12,
  author    = {Hsueh{-}Sheng Wang and
               Kuo{-}Yang Huang and
               Hsien{-}Chih Peng and
               Yuh{-}Jeen Huang and
               Fan{-}Gang Tseng},
  title     = {A high efficient {POM} micro-methanol reformer},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {449--452},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196815},
  doi       = {10.1109/NEMS.2012.6196815},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangHPHT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangHPL12,
  author    = {Nan Wang and
               Fu{-}Li Hsiao and
               Moorthi Palaniapan and
               Chengkuo Lee},
  title     = {Development of microfabricated phononic crystal resonators based on
               two-dimensional silicon slab},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {326--330},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196785},
  doi       = {10.1109/NEMS.2012.6196785},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangHPL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangL12,
  author    = {Wentao Wang and
               Yi{-}Kuen Lee},
  title     = {Unified theory to evaluate the effect of concentration difference
               and Peclet number on electroosmotic mobility error of micro electroosmotic
               flow},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {170--174},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196749},
  doi       = {10.1109/NEMS.2012.6196749},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLLW12,
  author    = {Sho{-}Fu Wang and
               Yen{-}Ting Lin and
               Yan{-}Bo Lin and
               Kerwin Wang},
  title     = {An adhesion strength measurement method for particle transfer and
               assembly in dry environment},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {355--358},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196792},
  doi       = {10.1109/NEMS.2012.6196792},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLLW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLW12,
  author    = {Wenrong Wang and
               Tie Li and
               Yuelin Wang},
  title     = {Photovoltaic response of N-doped graphene-based photodetector},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {23--26},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196714},
  doi       = {10.1109/NEMS.2012.6196714},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangLW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangQ12,
  author    = {Zhe Wang and
               Xian Qin},
  title     = {The manufacture of micropillars with high depth-to-width ratio, and
               the comparison between two typical materials},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {677--680},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196866},
  doi       = {10.1109/NEMS.2012.6196866},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangQ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangTF12,
  author    = {Gary Wang and
               Daniel Teng and
               Shih{-}Kang Fan},
  title     = {Three-dimensional digital microfluidics and applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {415--418},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196807},
  doi       = {10.1109/NEMS.2012.6196807},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangTF12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangTFLSW12,
  author    = {Y. F. Wang and
               Y. Tian and
               K. J. Feng and
               C. Li and
               D. D. She and
               W. G. Wu},
  title     = {Vertical deposition of nanospheres on the open sidewalls of silicon
               pillars},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {437--440},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196812},
  doi       = {10.1109/NEMS.2012.6196812},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangTFLSW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangYKKE12,
  author    = {Nan Wang and
               Shinya Yoshida and
               Masafumi Kumano and
               Yusuke Kawai and
               Masayoshi Esashi},
  title     = {Fabrication of high-aspect-ratio {PZT} structure by nanocomposite
               sol-gel method for laterally-driven piezoelectric {MEMS} switch},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {247--252},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196767},
  doi       = {10.1109/NEMS.2012.6196767},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangYKKE12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangYWL12,
  author    = {Shuo Wang and
               Huaiqiang Yu and
               Wei Wang and
               Zhihong Li},
  title     = {Nanofluidic device with self-assembled nafion membrane utilizing capillary
               valve},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {657--660},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196861},
  doi       = {10.1109/NEMS.2012.6196861},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangYWL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangYY12,
  author    = {Jiankun Wang and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {A silicon-on-glass Z-axis accelerometer with vertical sensing comb
               capacitors},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {583--586},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196843},
  doi       = {10.1109/NEMS.2012.6196843},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangYY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZZSL12,
  author    = {Yiliao Wang and
               Xin Zhao and
               Qili Zhao and
               Mingzhu Sun and
               Guizhang Lu},
  title     = {Automatic somatic cell operating process for nuclear transplantation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {359--363},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196793},
  doi       = {10.1109/NEMS.2012.6196793},
  timestamp = {Fri, 05 Jun 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WangZZSL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WardMSCKZML12,
  author    = {Nathan L. Ward and
               Xiaoyi Mu and
               Gustavo Serrano and
               Elizabeth Covington and
               Cagliyan Kurdak and
               Edward T. Zellers and
               Andrew J. Mason and
               Wen Li},
  title     = {Adaptable chip-level microfluidic packaging for a micro-scale gas
               chromatograph},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {57--60},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196722},
  doi       = {10.1109/NEMS.2012.6196722},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WardMSCKZML12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiHCH12,
  author    = {M. C. Wei and
               K. Y. Hung and
               Y. J. Chuang and
               S. H. Huang},
  title     = {The chromatic dispersion module with large chromatic focal shift},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {380--383},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196798},
  doi       = {10.1109/NEMS.2012.6196798},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeiHCH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeissGLK12,
  author    = {Dennis Weiss and
               Andreas Greiner and
               Jan Lienemann and
               Jan G. Korvink},
  title     = {Electrowetting droplets investigated with smoothed particle hydrodynamics
               and moving least squares},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {304--307},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196780},
  doi       = {10.1109/NEMS.2012.6196780},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WeissGLK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WenF12,
  author    = {Jung{-}Hung Wen and
               Weileun Fang},
  title     = {Micro device array design and fabrication in monolithic {MEMS} SoC},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {116--119},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196736},
  doi       = {10.1109/NEMS.2012.6196736},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WenF12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Wong12,
  author    = {C. P. Wong},
  title     = {Recent advances on nano-materials for advanced packaging applications},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196704},
  doi       = {10.1109/NEMS.2012.6196704},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Wong12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuSPLCYL12,
  author    = {Chen{-}Wei Wu and
               Shilpa Sivashankar and
               Srinivasu Valagerahally Puttaswamy and
               Hui{-}Ling Lin and
               Kuo{-}Wei Chang and
               Chau{-}Ting Yeh and
               Cheng{-}Hsien Liu},
  title     = {In-vitro transgenic mice liver tissue culture via hydrodynamic flow
               perfusion bioreactor},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {133--136},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196740},
  doi       = {10.1109/NEMS.2012.6196740},
  timestamp = {Tue, 21 Apr 2020 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuSPLCYL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WuXXMWJ12,
  author    = {Guoqiang Wu and
               Dehui Xu and
               Bin Xiong and
               Yinglei Ma and
               Yuelin Wang and
               Errong Jing},
  title     = {Analysis of air damping in micromachined resonators},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {469--472},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196819},
  doi       = {10.1109/NEMS.2012.6196819},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/WuXXMWJ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XiongYZSYXLZ12,
  author    = {Jijun Xiong and
               Yingzhan Yan and
               Chang{-}Ling Zou and
               Fang{-}Wen Sun and
               Shubin Yan and
               Chenyang Xue and
               Jun Liu and
               Wendong Zhang},
  title     = {A stable frequency references platform based on packaged microsphere-taper
               coupling system},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {335--338},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196787},
  doi       = {10.1109/NEMS.2012.6196787},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XiongYZSYXLZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuL12,
  author    = {Yuanjie Xu and
               Joshua E.{-}Y. Lee},
  title     = {Evidence on the impact of T-shaped tether variations on {Q} factor
               of bulk-mode square-plate resonators},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {463--468},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196818},
  doi       = {10.1109/NEMS.2012.6196818},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuLGW12,
  author    = {Lei Xu and
               Tie Li and
               Xiuli Gao and
               Yuelin Wang},
  title     = {A high heating efficiency two-beam microhotplate for catalytic gas
               sensors},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {65--68},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196724},
  doi       = {10.1109/NEMS.2012.6196724},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuLGW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuLWLZZS12,
  author    = {Bulei Xu and
               Wenlong Lv and
               Xiang Wang and
               Tingping Lei and
               Gaofeng Zheng and
               Yang Zhao and
               Daoheng Sun},
  title     = {Conductive micro silver wires via aerosol deposition},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {282--285},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196775},
  doi       = {10.1109/NEMS.2012.6196775},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuLWLZZS12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuLZW12,
  author    = {G. Q. Xu and
               J. Lv and
               Z. X. Zheng and
               Y. C. Wu},
  title     = {Polypyrrole (PPy) nanowire arrays entrapped with glucose oxidase biosensor
               for glucose detection},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {511--514},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196803},
  doi       = {10.1109/NEMS.2012.6196803},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuLZW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuXWMWJ12,
  author    = {Dehui Xu and
               Bin Xiong and
               Guoqiang Wu and
               Yinglei Ma and
               Yuelin Wang and
               Errong Jing},
  title     = {Characterization of wafer-level XeF2 Gas-phase Isotropic Etching For
               {MEMS} Processing},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {274--277},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196773},
  doi       = {10.1109/NEMS.2012.6196773},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuXWMWJ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuZL12,
  author    = {Yuanjie Xu and
               Haoshen Zhu and
               Joshua E.{-}Y. Lee},
  title     = {Benchmarking the passive differential input technique to shielded
               {GSG} probes},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {473--477},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196820},
  doi       = {10.1109/NEMS.2012.6196820},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/XuZL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YamanishiKSOA12,
  author    = {Yoko Yamanishi and
               Hiroki Kuriki and
               Shinya Sakuma and
               Kazuhisa Onda and
               Fumihito Arai},
  title     = {Local ablation by micro-electric knife},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {129--132},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196739},
  doi       = {10.1109/NEMS.2012.6196739},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YamanishiKSOA12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanL12,
  author    = {Jhih{-}Nan Yan and
               Yung{-}Chun Lee},
  title     = {Fabrication of metal embedded photo-mask for sub-micrometer scaled
               photolithography and patterning sapphire substrate},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {36--39},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196717},
  doi       = {10.1109/NEMS.2012.6196717},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YanL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanYZLXLZX12,
  author    = {Shubin Yan and
               Yingzhan Yan and
               Yu Guang Zhang and
               Li Wang and
               Chenyang Xue and
               Jun Liu and
               Wendong Zhang and
               Jijun Xiong},
  title     = {High-Q maintenance of microcavity by using a sealed and packaged structure},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {619--622},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196852},
  doi       = {10.1109/NEMS.2012.6196852},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YanYZLXLZX12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangC12,
  author    = {Lung{-}Jieh Yang and
               Bo{-}Hong Chen},
  title     = {Blood vessels by fractal gelatin},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {175--178},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196750},
  doi       = {10.1109/NEMS.2012.6196750},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangW12,
  author    = {Lung{-}Jieh Yang and
               Tsan{-}Hsiang Wang},
  title     = {Design of a small wankel engine},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {243--246},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196766},
  doi       = {10.1109/NEMS.2012.6196766},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YangW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuJLW12,
  author    = {Xiao Yu and
               Qinhua Jin and
               Tie Li and
               Yuelin Wang},
  title     = {Precise width control of single crystalline silicon nano-wall structure
               based on wet etching process on {(111)} wafer},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {278--281},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196774},
  doi       = {10.1109/NEMS.2012.6196774},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuJLW12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuanWCMC12,
  author    = {Zhen Yuan and
               Li Wen and
               Leili Cheng and
               Jianqiang Ma and
               Jiaru Chu},
  title     = {Fabrication and Performance Optimization of the Microplasma Reactor
               with Composite Dielectrics},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {685--688},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196868},
  doi       = {10.1109/NEMS.2012.6196868},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/YuanWCMC12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhanK12,
  author    = {Yu{-}Hui Zhan and
               Ju{-}Nan Kuo},
  title     = {Dimensions and capillary effects of microfluidic channel for blood
               plasma separation},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {607--610},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196849},
  doi       = {10.1109/NEMS.2012.6196849},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhanK12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangWZG12,
  author    = {Jiangang Zhang and
               Zhengwei Wu and
               Zhan Zhao and
               Xin Guan},
  title     = {Miniature pyranometer with asteroid shape thermopile},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {108--111},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196734},
  doi       = {10.1109/NEMS.2012.6196734},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangWZG12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangZZ12,
  author    = {Xiao{-}Sheng Zhang and
               Fu{-}Yun Zhu and
               Haixia Zhang},
  title     = {Formation and interaction of micro/nano multi-scale structures},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {445--448},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196814},
  doi       = {10.1109/NEMS.2012.6196814},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhangZZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLL12,
  author    = {Yue Zhao and
               Wenzhong Lou and
               Dongguang Li},
  title     = {Study of a novel bi-stable and easy integrated {MEMS} {ETBS}},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {257--260},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196769},
  doi       = {10.1109/NEMS.2012.6196769},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoLL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoNYT12,
  author    = {Y. Zhao and
               M. Nandra and
               C. Yu and
               Y. Tai},
  title     = {Reduction of {AC} resistance in {MEMS} intraocular foil coils using
               microfabricated planar Litz structure},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {234--237},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196764},
  doi       = {10.1109/NEMS.2012.6196764},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoNYT12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoZM12,
  author    = {Wenhao Zhao and
               Wenli Zhou and
               Xiangshui Miao},
  title     = {Numerical simulation of {CZTS} thin film solar cell},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {502--505},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196826},
  doi       = {10.1109/NEMS.2012.6196826},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhaoZM12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhengSCSMH12,
  author    = {Cheng Zheng and
               Ling V. Sun and
               Xi Chen and
               Yan Shen and
               Peng Mao and
               Min Han},
  title     = {Enhancing light output of GaN-based light-emitting diodes with nanoparticle-assembled
               on-top layers},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {376--379},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196797},
  doi       = {10.1109/NEMS.2012.6196797},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhengSCSMH12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouSGYY12,
  author    = {Kailong Zhou and
               Lina Sun and
               Fei Ge and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {A capacitive readout circuit with {DC} sensing method for micromachined
               gyroscopes},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {712--715},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196874},
  doi       = {10.1109/NEMS.2012.6196874},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhouSGYY12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuDZZZZ12,
  author    = {Fu{-}Yun Zhu and
               Qian{-}Li Di and
               Xing{-}Juan Zeng and
               Xiao{-}Sheng Zhang and
               Xin Zhao and
               Haixia Zhang},
  title     = {Surface analysis and process optimization of black silicon},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {567--570},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196839},
  doi       = {10.1109/NEMS.2012.6196839},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuDZZZZ12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuTL12,
  author    = {Haoshen Zhu and
               Cheng Tu and
               Joshua E.{-}Y. Lee},
  title     = {Material nonlinearity limits on a Lam{\'{e}}-mode single crystal
               bulk resonator},
  booktitle = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  pages     = {457--462},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://doi.org/10.1109/NEMS.2012.6196817},
  doi       = {10.1109/NEMS.2012.6196817},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ZhuTL12.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/nems/2012,
  title     = {7th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2012, Kyoto, Japan, March 5-8, 2012},
  publisher = {{IEEE}},
  year      = {2012},
  url       = {https://ieeexplore.ieee.org/xpl/conhome/6189421/proceeding},
  isbn      = {978-1-4673-1122-9},
  timestamp = {Wed, 16 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/2012.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BurouniBET11,
  author    = {Narges Burouni and
               Erwin Berenschot and
               Miko Elwenspoek and
               Niels Tas},
  title     = {Dimensional control in corner lithography for wafer-scale fabrication
               of nano-apertures},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {940--943},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017509},
  doi       = {10.1109/NEMS.2011.6017509},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/BurouniBET11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Chaisitsak11,
  author    = {Sutichai Chaisitsak},
  title     = {F-doped nanocrystalline SnO2 thin films for liquid petroleum gas {(LPG)}
               sensors},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {262--266},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017344},
  doi       = {10.1109/NEMS.2011.6017344},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Chaisitsak11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangFSXY11,
  author    = {Honglong Chang and
               Qianyan Fu and
               Qiang Shen and
               Jianbing Xie and
               Weizheng Yuan},
  title     = {An integrated reduced micromachined inertial measurement unit for
               land vehicle navigation},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {201--204},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017329},
  doi       = {10.1109/NEMS.2011.6017329},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangFSXY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangLC11,
  author    = {Wen{-}Teng Chang and
               Ming{-}Feng Li and
               Chii{-}Wen Chen},
  title     = {Lateral growth of self-assembled carbon nanotube as tunable rectifier},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {748--751},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017462},
  doi       = {10.1109/NEMS.2011.6017462},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangLC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangSC11,
  author    = {C. K. Chang and
               T. R. Shih and
               C. K. Chung},
  title     = {Design and fabrication of an advanced rhombic micromixer with branch
               channels},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {245--248},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017340},
  doi       = {10.1109/NEMS.2011.6017340},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangSC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangWT11,
  author    = {Chia{-}Jung Chang and
               Pen{-}Cheng Wang and
               Fan{-}Gang Tseng},
  title     = {Control single dsDNA molecule stretching and transportation by using
               virtual nanopore trapper},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {772--775},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017468},
  doi       = {10.1109/NEMS.2011.6017468},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChangWT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaoLC11,
  author    = {Tzu{-}Yuan Chao and
               Kuei{-}Shu Li and
               Y. T. Cheng},
  title     = {{SU-8} flexible ribbon cable for biomedical microsystem interconnection},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {622--625},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017432},
  doi       = {10.1109/NEMS.2011.6017432},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChaoLC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaoLY11,
  author    = {Kuo{-}Sheng Chao and
               Tsung{-}Yu Lin and
               Ruey{-}Jen Yang},
  title     = {Two optofluidic devices for the refractive index measurement of fluids},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {381--384},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017372},
  doi       = {10.1109/NEMS.2011.6017372},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChaoLY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaoW11,
  author    = {Chih{-}Ming Chao and
               Kerwin Wang},
  title     = {Surface modifications for iron oxide nanoparticle assembly},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {740--743},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017460},
  doi       = {10.1109/NEMS.2011.6017460},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChaoW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CheWN11,
  author    = {Zhizhao Che and
               Teck Neng Wong and
               Nam{-}Trung Nguyen},
  title     = {Analytical model of plug flow in microchannels},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {905--908},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017500},
  doi       = {10.1109/NEMS.2011.6017500},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CheWN11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CheirsirikulJH11,
  author    = {S. Cheirsirikul and
               S. Jesen and
               C. Hruanun},
  title     = {{MSM} Diamond {UV} detector},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {414--416},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017380},
  doi       = {10.1109/NEMS.2011.6017380},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CheirsirikulJH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCC11,
  author    = {Chien{-}Jing Chen and
               Jia{-}Shiang Chen and
               Yu{-}Bin Chen},
  title     = {Reflectance from slit arrays at magnetic polariton},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {589--592},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017424},
  doi       = {10.1109/NEMS.2011.6017424},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCCTY11,
  author    = {Wen{-}Ling Chen and
               Yi{-}Shan Chung and
               Yu{-}Wei Chiou and
               Ming{-}Jer Tang and
               Ming{-}Long Yeh},
  title     = {Adhesion strengths of normal epithelial cells and epithelial mesenchymal
               transition cells by using single-cell force spectroscopy},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {499--502},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017402},
  doi       = {10.1109/NEMS.2011.6017402},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenCCTY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenHLTWY11,
  author    = {Wen{-}Chi Chen and
               Chin{-}Ho Hsieh and
               Chia{-}Hui Li and
               Yu{-}Chieh Tseng and
               Kuo{-}Ming Wang and
               Ming{-}Long Yeh},
  title     = {The migration of cancer and normal cells in response to the surface
               topography and rigidity},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {483--486},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017398},
  doi       = {10.1109/NEMS.2011.6017398},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenHLTWY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenHMW11,
  author    = {Guan{-}Ming Chen and
               I{-}Yu Huang and
               Ling{-}Yu Ma and
               Ting{-}Ee Wu},
  title     = {Development of a novel transparent micro-thermoelectric generator
               for solar energy conversion},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {976--979},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017518},
  doi       = {10.1109/NEMS.2011.6017518},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenHMW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenL11,
  author    = {Lei{-}Guang Chen and
               M. S.{-}C. Lu},
  title     = {Class-based {CMOS} capacitive sensors for dopamine detection},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {821--824},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017480},
  doi       = {10.1109/NEMS.2011.6017480},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenLS11,
  author    = {Chen{-}Chia Chen and
               Shan{-}Yu Lin and
               Jeng{-}Tzong Sheu},
  title     = {Using impedance biosensors to distinguish the {PC12} cells adhesion
               and differentiation},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {813--816},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017478},
  doi       = {10.1109/NEMS.2011.6017478},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenLS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenLZM11,
  author    = {Xiuguo Chen and
               Shiyuan Liu and
               Chuanwei Zhang and
               Yuan Ma},
  title     = {Zernike representation of angle-resolved Mueller matrix for dimensional
               analysis of nanoscale structures},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {507--510},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017404},
  doi       = {10.1109/NEMS.2011.6017404},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenLZM11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenY11,
  author    = {Tsung{-}Chia Chen and
               Jiun{-}Ming Ye},
  title     = {A micro-stamping process analysis of metallic bipolar plates channel},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {597--602},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017426},
  doi       = {10.1109/NEMS.2011.6017426},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChenY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengS11,
  author    = {Ming{-}Chieh Cheng and
               Cheng{-}Kuo Sung},
  title     = {Fabrication sub-10nm metallic gratings with carbon nanotube - {A}
               study by molecular dynamics simulation method},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {901--904},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017499},
  doi       = {10.1109/NEMS.2011.6017499},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengZ11,
  author    = {Shuying Cheng and
               Hong Zhang},
  title     = {Influence of thickness on structural and optical properties of evaporated
               SnS films},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {154--157},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017318},
  doi       = {10.1109/NEMS.2011.6017318},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChengZ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChienPCL11,
  author    = {Liang{-}Ju Chien and
               Jia{-}Cheng Pan and
               Chi{-}Han Chiou and
               Lung Lin},
  title     = {Characterizations of micro-particles trapping and separation in an
               electrodeless dielectrophoresis},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {843--846},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017485},
  doi       = {10.1109/NEMS.2011.6017485},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChienPCL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChoiJPPSP11,
  author    = {Eunpyo Choi and
               Indong Jun and
               Kyung Min Park and
               Ki Dong Park and
               Heungsoo Shin and
               Jungyul Park},
  title     = {Controllable in-situ hydrogels membrane formation using microfluidics},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {441--444},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017387},
  doi       = {10.1109/NEMS.2011.6017387},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChoiJPPSP11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChouC11,
  author    = {Chih{-}Wei Chou and
               Ko{-}Hsin Chang},
  title     = {Rapid synthesis and catalytic application of biocompatible HA-Au nanoparticles},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {1008--1011},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017526},
  doi       = {10.1109/NEMS.2011.6017526},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChouC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChouH11,
  author    = {Chih Wei Chou and
               Hui{-}Hsuan Hsieh},
  title     = {Synthesis of nature polymer supported Au, Ag and Au-Ag nanoparticles
               in aqueous medium and catalytic activity towards 4-nitrophenol reduction},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {984--987},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017520},
  doi       = {10.1109/NEMS.2011.6017520},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChouH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChouLHCC11,
  author    = {Po{-}Chien Chou and
               Yu{-}Cheng Lin and
               Kuan{-}Chou Hou and
               Stone Cheng and
               Jin{-}Chern Chiou},
  title     = {A miniaturized suspension structure for precise flying height positioning
               measurement using a swing arm actuator with {HOE} module sensor},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {342--346},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017363},
  doi       = {10.1109/NEMS.2011.6017363},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChouLHCC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChouLJTLHC11,
  author    = {Lei{-}Chun Chou and
               You{-}Liang Lai and
               Ying{-}Zong Juang and
               Chun{-}Yin Tsai and
               Chun{-}Ying Lin and
               Sheng{-}Chieh Huang and
               Jin{-}Chern Chiou},
  title     = {A novel thermal switch design by using {CMOS} {MEMS} fabrication process},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {213--216},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017332},
  doi       = {10.1109/NEMS.2011.6017332},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChouLJTLHC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuangH11,
  author    = {Cheng{-}Hsin Chuang and
               Ching{-}Hsun Hung},
  title     = {{AFM} manipulation of nanoparticles based on dielectrophoresis},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {923--927},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017504},
  doi       = {10.1109/NEMS.2011.6017504},
  timestamp = {Fri, 27 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChuangH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChuangHWL11,
  author    = {Cheng{-}Hsin Chuang and
               Yao{-}Wei Huang and
               Hsun{-}Pei Wu and
               Shiou{-}Yuh Lin},
  title     = {Microfluidic device for manipulations of {PMMA} nanoparticles based
               on dielectrophoresis},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {1012--1015},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017527},
  doi       = {10.1109/NEMS.2011.6017527},
  timestamp = {Fri, 27 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/ChuangHWL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungCFST11,
  author    = {Yung{-}Chiang Chung and
               Po{-}Wen Chen and
               Chao{-}Ming Fu and
               Fong{-}Jian Sie and
               Cheng{-}Wei Tsai},
  title     = {Particles sorting in micro-channel system utilizing magnetic tweezers
               and optical tweezers},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {756--759},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017464},
  doi       = {10.1109/NEMS.2011.6017464},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungCFST11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungCW11,
  author    = {Shu{-}Ru Chung and
               Hong{-}Shou Chen and
               Kuan{-}Wen Wang},
  title     = {Emission properties of white light of nanocrystals},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {445--448},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017388},
  doi       = {10.1109/NEMS.2011.6017388},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungCW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungHLLCCWCCCKC11,
  author    = {Chung{-}Jen Chung and
               Po{-}Tsung Hsieh and
               Jen{-}Fin Lin and
               Cheng{-}Hsiang Lin and
               Kuo{-}Chih Chiu and
               Shean{-}Jen Chen and
               Ching{-}Liang Wei and
               Wei{-}Tsai Chang and
               Cheng{-}Ting Chen and
               Ying{-}Chung Chen and
               Kuo{-}Sheng Kao and
               Chien{-}Chuan Cheng},
  title     = {Investigation of acoustic properties and Raman scattering of AlN films
               for biosensor application},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {618--621},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017431},
  doi       = {10.1109/NEMS.2011.6017431},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungHLLCCWCCCKC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungWLCHL11,
  author    = {Chung{-}Jen Chung and
               Bo{-}Hsiung Wu and
               Jen{-}Fin Lin and
               Shu{-}Fen Chuang and
               Chang{-}Fu Han and
               Wang{-}Long Li},
  title     = {Nano-structure and nano-mechanical properties of human teeth},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {593--596},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017425},
  doi       = {10.1109/NEMS.2011.6017425},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/ChungWLCHL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CiouLM11,
  author    = {J. L. Ciou and
               J. H. Liu and
               H. Y. Miao},
  title     = {A study on the properties of photoconductivity and photo voltage of
               buckpaper},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {109--112},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017307},
  doi       = {10.1109/NEMS.2011.6017307},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CiouLM11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiGYHY11,
  author    = {Jian Cui and
               Zhongyang Guo and
               Zhenchuan Yang and
               Yilong Hao and
               Guizhen Yan},
  title     = {Improvement of transient response for drive loop of microgyroscope
               using 2-DOF {PID} controller},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {281--284},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017348},
  doi       = {10.1109/NEMS.2011.6017348},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/CuiGYHY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DengCLZL11,
  author    = {Peigang Deng and
               Donald C. Chang and
               Yi{-}Kuen Lee and
               Junwei Zhou and
               Gang Li},
  title     = {{DNA} transfection of bone marrow mesenchymal stem cells using micro
               electroporation chips},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {96--99},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017304},
  doi       = {10.1109/NEMS.2011.6017304},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DengCLZL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DengW11,
  author    = {Peigang Deng and
               Ping Wang},
  title     = {Switching characteristics of a thermally-stable metal contact {RF}
               {MEMS} switch},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {285--288},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017349},
  doi       = {10.1109/NEMS.2011.6017349},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DengW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DengYLSM11,
  author    = {Jinjun Deng and
               Weizheng Yuan and
               Jian Luo and
               Dandong Shen and
               Binghe Ma},
  title     = {Design and fabrication of a Piezoelectric Micro Synthetic Jet Actuator},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {301--304},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017353},
  doi       = {10.1109/NEMS.2011.6017353},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DengYLSM11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DevanLLPM11,
  author    = {Rupesh S. Devan and
               Ching{-}Ling Lin and
               Jin{-}Han Lin and
               Ranjit R. Patil and
               Yuan{-}Ron Ma},
  title     = {Effective photoluminescence in a large-area array of Ta2O5 nanodots
               {(PL} of Ta2O5 nanodots)},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {462--465},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017393},
  doi       = {10.1109/NEMS.2011.6017393},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DevanLLPM11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DiDCCZWL11,
  author    = {Di Di and
               Peitao Dong and
               Jian Chen and
               Jiao Chen and
               Zelong Zhou and
               Xuezhong Wu and
               Shengyi Li},
  title     = {Inexpensive and fast fabrication of ordered gold nanocone arrays},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {555--558},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017416},
  doi       = {10.1109/NEMS.2011.6017416},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DiDCCZWL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DongWCM11,
  author    = {Zhuxin Dong and
               Uchechukwu C. Wejinya and
               Siva Naga Sandeep Chalamalasetty and
               M. R. Margis},
  title     = {Atomic force microscopy based nano manipulation towards {CNT-ISFET}
               pH sensing system},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {100--104},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017305},
  doi       = {10.1109/NEMS.2011.6017305},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DongWCM11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuWHT11,
  author    = {Jun Du and
               Zhengying Wei and
               Wei He and
               Yiping Tang},
  title     = {Numerical analysis of impact of imprinting pressure on profile shape
               and mold deformation in {UV-NIL}},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {792--795},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017473},
  doi       = {10.1109/NEMS.2011.6017473},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DuWHT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuZFXXGZ11,
  author    = {Lidong Du and
               Zhan Zhao and
               Zhen Fang and
               Jing Xu and
               Li Xiao and
               Daoqu Geng and
               Junjuan Zhao},
  title     = {Wireless networks wind sensor based on micro wind velocity chip and
               electronic compass},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {859--862},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017489},
  doi       = {10.1109/NEMS.2011.6017489},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/DuZFXXGZ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FangZZDXGS11,
  author    = {Zhen Fang and
               Zhan Zhao and
               Jiangang Zhang and
               Lidong Du and
               Jing Xu and
               Daoqu Geng and
               Yaohong Shi},
  title     = {A new integrated temperature and humidity},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {788--791},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017472},
  doi       = {10.1109/NEMS.2011.6017472},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FangZZDXGS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FengHS11,
  author    = {Sheng{-}Yuan Feng and
               Hsin{-}Ta Hsieh and
               Guo{-}Dung John Su},
  title     = {A method to fabricate micro lens array with different diameters},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {309--312},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017355},
  doi       = {10.1109/NEMS.2011.6017355},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FengHS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FengL11,
  author    = {Guo{-}Hua Feng and
               Zhi{-}Dian Lin},
  title     = {Development of PZT-based ultrasonic concave diaphragm transducer with
               engineerable acoustic beam focal range},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {162--165},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017320},
  doi       = {10.1109/NEMS.2011.6017320},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FengL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FengY11,
  author    = {Guo{-}Hua Feng and
               Shu{-}Xiang Yang},
  title     = {Frequency controlled ultrasonic microfluidic chip for rapid particle
               manipulation},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {355--358},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017366},
  doi       = {10.1109/NEMS.2011.6017366},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/FengY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GanJMS11,
  author    = {Hua Gan and
               Yufeng Jin and
               Min Miao and
               Xin Sun},
  title     = {A novel {LTCC} capacitive accelerometer embedded in {LTCC} packaging
               substrate},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {796--799},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017474},
  doi       = {10.1109/NEMS.2011.6017474},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GanJMS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GaoLL11,
  author    = {Anran Gao and
               Tie Li and
               Xiang Liu},
  title     = {Study of droplets motion on a chip driven by thermal gradient},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {241--244},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017339},
  doi       = {10.1109/NEMS.2011.6017339},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GaoLL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GaoZSZ11,
  author    = {Tian{-}Le Gao and
               Xiao{-}Sheng Zhang and
               Guang{-}Yi Sun and
               Haixia Zhang},
  title     = {Fabrication of superhydrophobic wide-band "Black Silicon" by deep
               reactive ion etching},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {209--212},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017331},
  doi       = {10.1109/NEMS.2011.6017331},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GaoZSZ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GengZJWL11,
  author    = {Zhaoxin Geng and
               Lingqian Zhang and
               Yanrui Ju and
               Wei Wang and
               Zhihong Li},
  title     = {Fabrication of reusable whole {PDMS} biochip for mesenchymal stem
               cell separation and enrichment},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {5--8},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017281},
  doi       = {10.1109/NEMS.2011.6017281},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GengZJWL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuillonSMNPV11,
  author    = {Samuel Guillon and
               Daisuke Saya and
               Laurent Mazenq and
               Liviu Nicu and
               Sorin Perisanu and
               Pascal Vincent},
  title     = {Fabrication and characterization of 100-nm wide silicon nanocantilevers
               using top-down approach},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {258--261},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017343},
  doi       = {10.1109/NEMS.2011.6017343},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/GuillonSMNPV11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HeZCLSH11,
  author    = {Longbing He and
               Cheng Zheng and
               Xi Chen and
               Yuanjun Liu and
               Fengqi Song and
               Min Han},
  title     = {An investigation of the plasmon enhanced/quenched molecular fluorescence
               based on multi-graded silver nanoparticle array substrates},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {776--779},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017469},
  doi       = {10.1109/NEMS.2011.6017469},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HeZCLSH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HiraiNMSTT11,
  author    = {Yoshikazu Hirai and
               Yusuke Nakai and
               Yoshihide Makino and
               Koji Sugano and
               Toshiyuki Tsuchiya and
               Osamu Tabata},
  title     = {Epoxy-based permeable membrane fabrication for 3D microfluidic device},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {184--187},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017325},
  doi       = {10.1109/NEMS.2011.6017325},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HiraiNMSTT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HoCWT11,
  author    = {Tsung{-}Cheng Ho and
               Chia{-}Jung Chang and
               Pen{-}Cheng Wang and
               Fan{-}Gang Tseng},
  title     = {Thermally stable sulfonated nanoporous aryl epoxy resin as proton
               exchange membranes at elevated temperatures},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {855--858},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017488},
  doi       = {10.1109/NEMS.2011.6017488},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HoCWT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HoGL11,
  author    = {Yi{-}Ping Ho and
               Chris Grigsby and
               Kam W. Leong},
  title     = {Unexpected properties of polymeric DNA-nanocomplexes synthesized in
               picoliter droplets},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {41--44},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017290},
  doi       = {10.1109/NEMS.2011.6017290},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HoGL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HoKC11,
  author    = {Ming{-}Chun Ho and
               Yu{-}Chi Kang and
               Rongshun Chen},
  title     = {Driving and controller design of digital microdroplet},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {547--550},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017414},
  doi       = {10.1109/NEMS.2011.6017414},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HoKC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HoT11,
  author    = {C. Y. Ho and
               Y. H. Tsai},
  title     = {Thermal characteristics of Fe powders with micro-and nano-sized particles},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {615--617},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017430},
  doi       = {10.1109/NEMS.2011.6017430},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HoT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HoTW11,
  author    = {Ching{-}Yen Ho and
               Yu{-}Hsiang Tsai and
               Mao{-}Yu Wen},
  title     = {Scattering of laser irradiating on nanoscale rectangular groove},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {453--457},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017390},
  doi       = {10.1109/NEMS.2011.6017390},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HoTW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HoW11,
  author    = {Ching{-}Yen Ho and
               Mao{-}Yu Wen},
  title     = {Ultrashort-pulse laser microablation of aluminum oxide ceramics},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {495--498},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017401},
  doi       = {10.1109/NEMS.2011.6017401},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HoW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HongGYY11,
  author    = {Peizhen Hong and
               Zhongyang Guo and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {A method to reduce notching effect on the anchors of a micro-gyroscope},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {338--341},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017362},
  doi       = {10.1109/NEMS.2011.6017362},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HongGYY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HouCLCHS11,
  author    = {Kuan{-}Chou Hou and
               Chih{-}Wei Chang and
               Chun{-}Ying Lin and
               Jin{-}Chern Chiou and
               Yu{-}Hsing Huang and
               Fu{-}Zen Shaw},
  title     = {Development of brain focal cooling measurement for induced epilepsy},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {603--606},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017427},
  doi       = {10.1109/NEMS.2011.6017427},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HouCLCHS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HouXWDNZZ11,
  author    = {Zhanqiang Hou and
               Dingbang Xiao and
               Xuezhong Wu and
               Peitao Dong and
               Zhengyi Niu and
               Zelong Zhou and
               Xu Zhang},
  title     = {Effect of parasitic resistance on a {MEMS} vibratory gyroscopes due
               to temperature fluctuations},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {293--296},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017351},
  doi       = {10.1109/NEMS.2011.6017351},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HouXWDNZZ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiehCLLL11,
  author    = {Yi{-}Ta Hsieh and
               Wei{-}Ru Chen and
               An{-}Ru Lin and
               Yung{-}Chun Lee and
               Hung{-}Yi Lin},
  title     = {Fabrication of sub-micrometer surface structures on sapphire substrate
               for GaN-based light-emitting diodes by metal contact printing method},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {703--706},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017451},
  doi       = {10.1109/NEMS.2011.6017451},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiehCLLL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiehLHLTJLL11,
  author    = {Chen{-}Hsin Hsieh and
               Hung{-}Yin Lin and
               Chun{-}Yueh Huang and
               Chien{-}Fu Lin and
               Hann{-}Huei Tsai and
               Ying{-}Zong Juang and
               Bin{-}Da Liu and
               Mei{-}Hwa Lee},
  title     = {A microfluidic and potentiostatic sensor integrated with neopterin-imprinted
               poly(ethylene-co-vinyl alcohol) based electrode},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {711--714},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017453},
  doi       = {10.1109/NEMS.2011.6017453},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiehLHLTJLL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsiehLLTJHLL11,
  author    = {Chen{-}Hsin Hsieh and
               Hung{-}Yin Lin and
               Chien{-}Fu Lin and
               Hann{-}Huei Tsai and
               Ying{-}Zong Juang and
               Chun{-}Yueh Huang and
               Bin{-}Da Liu and
               Mei{-}Hwa Lee},
  title     = {A microfluidic and potentiostatic sensor integrated with neopterin-imprinted
               poly(ethylene-c0-vinyl alcohol) based electrode},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {575--578},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017421},
  doi       = {10.1109/NEMS.2011.6017421},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsiehLLTJHLL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsuKHLH11,
  author    = {Chia{-}Wei Hsu and
               Chia{-}Hao Kuo and
               Hsing{-}Hui Hsu and
               Horng{-}Chih Lin and
               Tiao{-}Yuan Huang},
  title     = {Fabrication and characterization of a novel suspended-nanowire-channel
               thin-film transistor with nanometer air gap},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {313--316},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017356},
  doi       = {10.1109/NEMS.2011.6017356},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsuKHLH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsuLLHCHYLL11,
  author    = {Ruo{-}Chi Hsu and
               Ming{-}Yang Lin and
               Kang{-}Yi Lien and
               Lien{-}Yu Hung and
               Fong{-}Yu Cheng and
               Chih{-}Chia Huang and
               Chen{-}Sheng Yeh and
               Huan{-}Yao Lei and
               Gwo{-}Bin Lee},
  title     = {Tunable magnetic alginate microbeads by using a spotting-based alginate
               microbead generator and Its applications for immunoassay-based diagnosis},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {117--120},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017309},
  doi       = {10.1109/NEMS.2011.6017309},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsuLLHCHYLL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HsuLT11,
  author    = {Yu{-}Hsiang Hsu and
               Peiran Lu and
               W. C. Tang},
  title     = {Microplatforms for avian malaria studies},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {347--350},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017364},
  doi       = {10.1109/NEMS.2011.6017364},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HsuLT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuGZCH11,
  author    = {Qifang Hu and
               Chengchen Gao and
               Yangxi Zhang and
               Jian Cui and
               Yilong Hao},
  title     = {Design of a novel low cross-axis sensitivity micro-gravity sandwich
               capacitance accelerometer},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {642--645},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017437},
  doi       = {10.1109/NEMS.2011.6017437},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuGZCH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangC11,
  author    = {Ching{-}Pei Huang and
               Rongshun Chen},
  title     = {Integration and implementation of {CMOS-MEMS} accelerometer and capacitive
               sensing circuits},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {543--546},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017413},
  doi       = {10.1109/NEMS.2011.6017413},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangCC11,
  author    = {Jung{-}Tang Huang and
               Kai{-}Si Chen and
               Chu{-}Che Chien},
  title     = {A differential capacitive sensing circuit for micro-machined omnidirectional
               microphone},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {948--951},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017511},
  doi       = {10.1109/NEMS.2011.6017511},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangCC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLCCSYCL11,
  author    = {Mao{-}Jung Huang and
               Chun{-}Ting Lin and
               Chun{-}Ming Chang and
               Nien{-}Nan Chu and
               Ming{-}Hua Shiao and
               Chii{-}Rong Yang and
               Yuang{-}Cherng Chiou and
               Rong{-}Tsong Lee},
  title     = {Silicon nano-column fabricated by catalytic etching for electrode
               of fuel cell},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {305--308},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017354},
  doi       = {10.1109/NEMS.2011.6017354},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangLCCSYCL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLCCWC11,
  author    = {Kuan{-}Rong Huang and
               Zhan{-}Yi Liao and
               Jeng{-}Shian Chang and
               Sheng D. Chao and
               Kuang{-}Chong Wu and
               Shyh{-}Haur Chen},
  title     = {Reduced dimensional analysis on dynamic characteristics of microcantilever
               beams in the fluid environment and application to atomic force microscopy},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {471--474},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017395},
  doi       = {10.1109/NEMS.2011.6017395},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangLCCWC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLHLLH11,
  author    = {J. J. Huang and
               Y. J. Lo and
               C. M. Hsieh and
               U. Lei and
               C. I. Li and
               C. W. Huang},
  title     = {An electro-thermal micro mixer},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {919--922},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017503},
  doi       = {10.1109/NEMS.2011.6017503},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangLHLLH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLY11,
  author    = {Hen{-}Wei Huang and
               Hsin{-}Hung Liao and
               Yao{-}Joe Yang},
  title     = {Characterization of an 2x2 {SCB} optical switch integrated with {VOA}},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {607--610},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017428},
  doi       = {10.1109/NEMS.2011.6017428},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangLY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangM11,
  author    = {Yue Huang and
               Andrew J. Mason},
  title     = {Lab-on-CMOS: Integrating microfluidics and electrochemical sensor
               on {CMOS}},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {690--693},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017448},
  doi       = {10.1109/NEMS.2011.6017448},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangM11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangSESWLSTT11,
  author    = {Chunmei Huang and
               Takahiro Saeki and
               Masayuki Endo and
               Hiroshi Sugiyama and
               Chen{-}Hsun Weng and
               Gwo{-}Bin Lee and
               Koji Sugano and
               Toshiyuki Tsuchiya and
               Osamu Tabata},
  title     = {Configurable assembly of {DNA} origami on {MEMS} by microfluidic device},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {197--200},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017328},
  doi       = {10.1109/NEMS.2011.6017328},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangSESWLSTT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangWJ11,
  author    = {Ching{-}Te Huang and
               Cheng{-}Hsin Weng and
               Chun{-}Ping Jen},
  title     = {Three-dimensional cellular focusing utilizing negative dielectrophoretic
               force generated by dual-planar electrodes},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {68--70},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017297},
  doi       = {10.1109/NEMS.2011.6017297},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangWJ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangWWLL11,
  author    = {Song{-}Bin Huang and
               Min{-}Hsien Wu and
               Shih{-}Siou Wang and
               Chun Che Lin and
               Gwo{-}Bin Lee},
  title     = {A high-throughput perfusion-based micro three-dimensional cell culture
               platform},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {57--60},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017294},
  doi       = {10.1109/NEMS.2011.6017294},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangWWLL11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangZWS11,
  author    = {Yongfang Huang and
               Gaofeng Zheng and
               Xiang Wang and
               Daoheng Sun},
  title     = {Fabrication of micro/nanometer-channel by Near-Field ElectroSpinning},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {877--880},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017493},
  doi       = {10.1109/NEMS.2011.6017493},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/HuangZWS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/IsagawaKWIM11,
  author    = {Kohei Isagawa and
               Takeshi Kobayashi and
               Dong F. Wang and
               Toshihiro Itoh and
               Ryutaro Maeda},
  title     = {Development of a {MEMS} {DC} electric current sensor applicable to
               two-wire electrical appliance cord},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {932--935},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017507},
  doi       = {10.1109/NEMS.2011.6017507},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/IsagawaKWIM11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/IshikawaSTIS11,
  author    = {Kazuki Ishikawa and
               Takeshi Saito and
               Kazuhiro Takahashi and
               Makoto Ishida and
               Kazuaki Sawada},
  title     = {A lamination micromixier using silicon {DRIE} technology},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {650--653},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017439},
  doi       = {10.1109/NEMS.2011.6017439},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/IshikawaSTIS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JiangZLYY11,
  author    = {Senlin Jiang and
               Dacheng Zhang and
               Longtao Lin and
               Zhenchuan Yang and
               Guizhen Yan},
  title     = {Fabrication and testing of a novel silicon probe for micromachined
               surface profilers},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {406--409},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017378},
  doi       = {10.1109/NEMS.2011.6017378},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JiangZLYY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JunkinW11,
  author    = {Michael Junkin and
               Pak Kin Wong},
  title     = {Plasma lithography for probing collective cell behaviors},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {105--108},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017306},
  doi       = {10.1109/NEMS.2011.6017306},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/JunkinW11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangYBG11,
  author    = {Qingsheng Kang and
               John T. W. Yeow and
               Rob Barnett and
               X. Gao},
  title     = {Design and evaluation of quantum dot sensors for making superficial
               x-ray energy radiation measurements},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {138--141},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017314},
  doi       = {10.1109/NEMS.2011.6017314},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KangYBG11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KaoYY11,
  author    = {A.{-}Fu Kao and
               Lung{-}Jieh Yang and
               F. Yeh},
  title     = {Fractal grooves applied to passive micro-mixers},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {142--145},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017315},
  doi       = {10.1109/NEMS.2011.6017315},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KaoYY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KimJCLK11,
  author    = {Jung{-}Min Kim and
               Sandeep Kumar Jha and
               Rohit Chand and
               Dong{-}Hoon Lee and
               Yong{-}Sang Kim},
  title     = {Flexible pentacene thin film transistors as {DNA} hybridization sensor},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {421--424},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017382},
  doi       = {10.1109/NEMS.2011.6017382},
  timestamp = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KimJCLK11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KongJJSLC11,
  author    = {Dae Young Kong and
               S. H. Jung and
               J. H. Jo and
               Changtaeg Seo and
               Jonghyan Lee and
               Chan Seob Cho},
  title     = {Enhancement of optical properties using bridge type electrodes for
               high efficiency photovoltaic cell},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {225--228},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017335},
  doi       = {10.1109/NEMS.2011.6017335},
  timestamp = {Thu, 26 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/KongJJSLC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KongKSLCK11,
  author    = {Dae Young Kong and
               S. W. Kim and
               Changtaeg Seo and
               Jonghyan Lee and
               Chan Seob Cho and
               B. H. Kim},
  title     = {Fabrications of a continuous-flow PCR-chip using dry film resist},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {487--490},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017399},
  doi       = {10.1109/NEMS.2011.6017399},
  timestamp = {Thu, 26 Mar 2020 00:00:00 +0100},
  biburl    = {https://dblp.org/rec/conf/nems/KongKSLCK11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KshirsagarDG11,
  author    = {A. Kshirsagar and
               S. P. Duttagupta and
               S. A. Gangal},
  title     = {Optimization and fabrication of low stress-low temperature silicon
               oxide cantilevers},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {466--470},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017394},
  doi       = {10.1109/NEMS.2011.6017394},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KshirsagarDG11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KuLY11,
  author    = {Che{-}Ming Ku and
               Hsin{-}Hung Liao and
               Yao{-}Joe Yang},
  title     = {MEMS-based buoyancy and propelling mechanisms for a micro-submarine},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {744--747},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017461},
  doi       = {10.1109/NEMS.2011.6017461},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KuLY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KuoC11,
  author    = {Wen{-}Cheng Kuo and
               Cheng{-}Wei Chen},
  title     = {Novel fabrication method for high-aspect-ratio suspended parylene
               structures},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {585--588},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017423},
  doi       = {10.1109/NEMS.2011.6017423},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KuoC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KuwabaraNZS11,
  author    = {Y. Kuwabara and
               S. Nishimura and
               R. Zaharuddin and
               J. Shirakashi},
  title     = {Investigation of electromigration in micrometer-scale metal wires
               by in-situ optical microscopy},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {681--684},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017446},
  doi       = {10.1109/NEMS.2011.6017446},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/KuwabaraNZS11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Lai11,
  author    = {Yunfeng Lai},
  title     = {MgO nanowires synthesized at lower temperatures by metal organic chemical
               vapor deposition},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {913--918},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017502},
  doi       = {10.1109/NEMS.2011.6017502},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/Lai11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LanCLJ11,
  author    = {Kung{-}Chieh Lan and
               Ming{-}Kun Chen and
               Chia{-}Feng Liu and
               Ling{-}Sheng Jang},
  title     = {Manipulation and impedance measurement of single Hela cells based
               on the dieletrophoresis microwell},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {79--83},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017300},
  doi       = {10.1109/NEMS.2011.6017300},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LanCLJ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LanY11,
  author    = {Yi{-}Chung Lan and
               Yao{-}Joe Yang},
  title     = {Dielectrophoresis assembly of multiwall carbon nanotubes for creating
               cylindrical clusters},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {817--820},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017479},
  doi       = {10.1109/NEMS.2011.6017479},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LanY11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LangXLLFZ11,
  author    = {Leijie Lang and
               Yu Xia and
               Xiuhan Li and
               Yu Liu and
               Dong{-}Ming Fang and
               Haixia Zhang},
  title     = {Fabrication and characteristics of tunable band pass filter using
               MetalMumps technology},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {249--253},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017341},
  doi       = {10.1109/NEMS.2011.6017341},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LangXLLFZ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeCC11,
  author    = {Chi{-}Yuan Lee and
               Yu{-}Ming Chang and
               Chi{-}Chung Chang},
  title     = {Fabrication of temperature and carbon monoxide micro-sensors in a
               micro-reformer},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {150--153},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017317},
  doi       = {10.1109/NEMS.2011.6017317},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeCC11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLFT11,
  author    = {Ho{-}Cheng Lee and
               Che{-}Hsin Lin and
               Lung{-}Ming Fu and
               Chien{-}Hsiung Tsai},
  title     = {Three-dimensional focusing for microflow cytometer with sequence micro-weir
               structures},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {698--702},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017450},
  doi       = {10.1109/NEMS.2011.6017450},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeLFT11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeLHTLLCCJ11,
  author    = {Chi{-}Yuan Lee and
               Shuo{-}Jen Lee and
               Chien{-}Te Hsieh and
               Ming{-}Shao Tang and
               Jia{-}Yi Lin and
               Yi{-}Man Lo and
               Pei{-}Chi Chen and
               Dar{-}Yuan Chang and
               Ruey{-}Shin Juang},
  title     = {In situ monitoring of voltage and temperature in lithium batteries},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {237--240},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017338},
  doi       = {10.1109/NEMS.2011.6017338},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeLHTLLCCJ11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LeeMDRH11,
  author    = {Shih{-}Wei Lee and
               M. Muoth and
               L. Durrer and
               Cosmin Roman and
               Christofer Hierold},
  title     = {Integration of clamped-clamped suspended single-walled carbon nanotubes
               into {SOI} {MEMS}},
  booktitle = {6th {IEEE} International Conference on Nano/Micro Engineered and Molecular
               Systems, {NEMS} 2011, Kaohsiung, Taiwan, February 20-23, 2011},
  pages     = {37--40},
  publisher = {{IEEE}},
  year      = {2011},
  url       = {https://doi.org/10.1109/NEMS.2011.6017289},
  doi       = {10.1109/NEMS.2011.6017289},
  timestamp = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl    = {https://dblp.org/rec/conf/nems/LeeMDRH11.bib},
  bibsource = {dblp computer science bibliography, https://dblp.org}
}
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