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@inproceedings{DBLP:conf/nems/AhmedSCM15,
  author       = {Sheikh Ziauddin Ahmed and
                  Mashiyat Sumaiya Shawkat and
                  Md. Iramul Hoque Chowdhury and
                  Sharif Mohammad Mominuzzaman},
  title        = {Current-voltage characteristics of ballistic schottky barrier {GNRFET}
                  and {CNTFET:} Effect of relative dielectric constant},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {384--387},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147449},
  doi          = {10.1109/NEMS.2015.7147449},
  timestamp    = {Wed, 16 Oct 2019 14:14:49 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/AhmedSCM15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AhmedSCM15a,
  author       = {Sheikh Ziauddin Ahmed and
                  Mashiyat Sumaiya Shawkat and
                  Md. Iramul Hoque Chowdhury and
                  Sharif Mohammad Mominuzzaman},
  title        = {Current-voltage characteristics of ballistic schottky barrier {GNRFET}
                  and {CNTFET:} Effect of gate oxide thickness},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {388--390},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147450},
  doi          = {10.1109/NEMS.2015.7147450},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/AhmedSCM15a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/AltinagacOGKT15,
  author       = {Emre Altinagac and
                  Safiye Selen Ozcan and
                  Yavuz Genc and
                  H{\"{u}}seyin Kizil and
                  Levent Trabzon},
  title        = {Biological particle manipulation: An example of Jurkat enrichment},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {25--27},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147348},
  doi          = {10.1109/NEMS.2015.7147348},
  timestamp    = {Thu, 14 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/AltinagacOGKT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ArevaloBCCIF15,
  author       = {Arpys Arevalo and
                  E. Byas and
                  David Conchouso and
                  David Castro and
                  Saad Ilyas and
                  Ian G. Foulds},
  title        = {A versatile multi-user polyimide surface micromachinning process for
                  {MEMS} applications},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {561--565},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147492},
  doi          = {10.1109/NEMS.2015.7147492},
  timestamp    = {Fri, 13 Oct 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ArevaloBCCIF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ArevaloCCJYF15,
  author       = {Arpys Arevalo and
                  David Conchouso and
                  David Castro and
                  Nizar Jaber and
                  Mohammad I. Younis and
                  Ian G. Foulds},
  title        = {Towards a digital sound reconstruction {MEMS} device: Characterization
                  of a single {PZT} based piezoelectric actuator},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {290--295},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147429},
  doi          = {10.1109/NEMS.2015.7147429},
  timestamp    = {Fri, 19 Jun 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ArevaloCCJYF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/BaoLZLL15,
  author       = {Lei Bao and
                  Bin Li and
                  Hang Zhou and
                  Hui Li and
                  Xiangxin Liu},
  title        = {Graphene oxide doped single-walled carbon nanotube thin film as back
                  electrode for CdTe solar cell},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {391--396},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147451},
  doi          = {10.1109/NEMS.2015.7147451},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/BaoLZLL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaithanatkunCS15,
  author       = {Natpasit Chaithanatkun and
                  Direklit Chantarawong and
                  Potiyan Songkeaw and
                  Korakot Onlaor and
                  Thutiyaporn Thiwawong and
                  Benchapol Tunhoo},
  title        = {Effect of ascorbic acid on structural properties of ZnO nanoparticles
                  prepared by precipitation process},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {145--148},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147396},
  doi          = {10.1109/NEMS.2015.7147396},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChaithanatkunCS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChaithanatkunCS15a,
  author       = {Natpasit Chaithanatkun and
                  Direklit Chantarawong and
                  Potiyan Songkeaw and
                  Korakot Onlaor and
                  Thutiyaporn Thiwawong and
                  Benchapol Tunhoo},
  title        = {Electrical bistable properties of ZnO nanoparticles thin film prepared
                  by electrostatic spray deposition technique},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {152--155},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147398},
  doi          = {10.1109/NEMS.2015.7147398},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChaithanatkunCS15a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChangYHLHLKHHS15,
  author       = {Chun{-}Ming Chang and
                  Chih{-}Sheng Yu and
                  Fan{-}Chun Hsieh and
                  Chun{-}Ting Lin and
                  Tsung{-}Tao Huang and
                  Ping{-}Hung Lin and
                  Jiann{-}Shiun Kao and
                  Chien{-}Nan Hsiao and
                  Ming{-}Hua Shiao},
  title        = {A parametric study of {ICP-RIE} etching on a lithium niobate substrate},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {485--486},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147473},
  doi          = {10.1109/NEMS.2015.7147473},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChangYHLHLKHHS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CheirsirikulJH15,
  author       = {S. Cheirsirikul and
                  S. Jesen and
                  C. Hruanun},
  title        = {The {MSM} diamond device for direct and indirect X-ray detection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {372--374},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147446},
  doi          = {10.1109/NEMS.2015.7147446},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/CheirsirikulJH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenC15,
  author       = {Shan Chen and
                  Ting{-}Hsuan Chen},
  title        = {AuNPs amplified magnetophoretic effect for colorimetric detection
                  of nucleic acid},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {357--360},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147443},
  doi          = {10.1109/NEMS.2015.7147443},
  timestamp    = {Sun, 04 Jun 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChenC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenCLY15,
  author       = {Kai Chen and
                  Tao Chen and
                  Huicong Liu and
                  Zhan Yang},
  title        = {A Pt/Au hybrid self-actuating nanorobot towards to durg delivery system},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {286--289},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147428},
  doi          = {10.1109/NEMS.2015.7147428},
  timestamp    = {Thu, 22 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChenCLY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenLKW15,
  author       = {J. J. Chen and
                  Yu{-}Cheng Lien and
                  C. L. Kuo and
                  Wen{-}Jong Wu},
  title        = {Self-powered wireless temperature sensor with piezoelectric energy
                  harvester fabricated with metal-MEMS process},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {619--622},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147506},
  doi          = {10.1109/NEMS.2015.7147506},
  timestamp    = {Thu, 10 Nov 2022 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ChenLKW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenPYJLW15,
  author       = {Y. C. Chen and
                  C. T. Pan and
                  T. L. Yang and
                  Shin{-}Pon Ju and
                  Y. R. Lin and
                  I. C. Wu},
  title        = {Study of freeform lens for UV-LEDs exposure system with reflector
                  for uniform irradiance},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {623--624},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147507},
  doi          = {10.1109/NEMS.2015.7147507},
  timestamp    = {Fri, 22 Nov 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ChenPYJLW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenYGXS15,
  author       = {Muyu Chen and
                  Huijun Yu and
                  Shuai Guo and
                  Run Xu and
                  Wenjiang Shen},
  title        = {An electromagnetically-driven {MEMS} micromirror for laser projection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {605--607},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147502},
  doi          = {10.1109/NEMS.2015.7147502},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChenYGXS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChenZW15,
  author       = {Jiangcheng Chen and
                  Xiaodong Zhang and
                  He Wang},
  title        = {Research on biomechanical model of muscle fiber based on four-state
                  operating mechanism of molecular motors},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {529--532},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147484},
  doi          = {10.1109/NEMS.2015.7147484},
  timestamp    = {Wed, 20 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChenZW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengCCL15,
  author       = {Ka Hing Cheng and
                  Ching{-}Hsiang Cheng and
                  Andy Kuo{-}An Chao and
                  Dennis Kwong Chun Lo},
  title        = {{LASER} light scribe and microwave annealing reduction of graphene
                  oxide for supercapacitor applications},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {380--383},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147448},
  doi          = {10.1109/NEMS.2015.7147448},
  timestamp    = {Thu, 15 Jun 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChengCCL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengPLLW15,
  author       = {Qijia Cheng and
                  Zhuoteng Peng and
                  Jie Lin and
                  Shanshan Li and
                  Fei Wang},
  title        = {Energy harvesting from human motion for wearable devices},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {409--412},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147455},
  doi          = {10.1109/NEMS.2015.7147455},
  timestamp    = {Wed, 11 Jul 2018 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChengPLLW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChengZLTL15,
  author       = {Rongjun Cheng and
                  Yulong Zhao and
                  Cun Li and
                  Bian Tian and
                  Bo Li},
  title        = {Research on slide-film damping effect to achieve a high-performance
                  resonant pressure senor},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {99--102},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147383},
  doi          = {10.1109/NEMS.2015.7147383},
  timestamp    = {Wed, 16 Mar 2022 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ChengZLTL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChiX15,
  author       = {Ziqiang Chi and
                  Qingsong Xu},
  title        = {Precision control of piezoelectric actuator using fuzzy feedback control
                  with inverse hysteresis compensation},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {219--224},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147414},
  doi          = {10.1109/NEMS.2015.7147414},
  timestamp    = {Sun, 02 Jun 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChiX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungCL15,
  author       = {Yung{-}Chiang Chung and
                  Yi{-}Sheng Chen and
                  Shih{-}Hao Lin},
  title        = {Effect of magnetic attraction on gene transfection of bacteria},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {126--127},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147390},
  doi          = {10.1109/NEMS.2015.7147390},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChungCL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ChungTL15,
  author       = {Yung{-}Chiang Chung and
                  Cheng{-}Wei Tsai and
                  Shih{-}Hao Lin},
  title        = {The relationship between stretching and force of dsDNA molecules at
                  various temperatures by using magnetic tweezers},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {124--125},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147389},
  doi          = {10.1109/NEMS.2015.7147389},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ChungTL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ConchousoACF15,
  author       = {David Conchouso and
                  Arpys Arevalo and
                  David Castro and
                  Ian G. Foulds},
  title        = {Out-of-plane platforms with bi-directional thermal bimorph actuation
                  for transducer applications},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {608--612},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147503},
  doi          = {10.1109/NEMS.2015.7147503},
  timestamp    = {Fri, 19 Jun 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ConchousoACF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/CuiLZHGH15,
  author       = {W. P. Cui and
                  G. D. Liu and
                  F. S. Zhang and
                  H. Hu and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {Silicon-silicon anodic bonding process with embedded glass},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {470--475},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147470},
  doi          = {10.1109/NEMS.2015.7147470},
  timestamp    = {Thu, 31 Aug 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/CuiLZHGH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaiLG15,
  author       = {Ximing Dai and
                  Wenzhong Lou and
                  Mingru Guo},
  title        = {Ultrasonic attenuation based high concentration micron particle measurement},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {197--200},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147409},
  doi          = {10.1109/NEMS.2015.7147409},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/DaiLG15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DaiLZH15,
  author       = {Wei Dai and
                  Jianjun Li and
                  Zhizhen Zheng and
                  Qiwen Huang},
  title        = {A micro scale oxidation film generated by gas discharge plasma at
                  atmosphere},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {143--144},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147395},
  doi          = {10.1109/NEMS.2015.7147395},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/DaiLZH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingFLG15,
  author       = {Xuran Ding and
                  Yue Feng and
                  Wenzhong Lou and
                  Yunlong Guo},
  title        = {Failure of a {MEMS} switch after environmental test},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {417--420},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147457},
  doi          = {10.1109/NEMS.2015.7147457},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/DingFLG15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DingZX15,
  author       = {Hong Ding and
                  Jiuxuan Zhao and
                  Jin Xie},
  title        = {A novel biaxial resonant micro accelerometer with microleverage mechanism},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {50--53},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147355},
  doi          = {10.1109/NEMS.2015.7147355},
  timestamp    = {Sun, 25 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/DingZX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DuLLW15,
  author       = {Xuemin Du and
                  Tengyue Li and
                  Lijun Li and
                  Tianzhun Wu},
  title        = {Rewritable hydrogel coatings using water as the ink},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {36--39},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147351},
  doi          = {10.1109/NEMS.2015.7147351},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/DuLLW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/DubourgZMC15,
  author       = {Georges Dubourg and
                  Cedo Zlebic and
                  Jovan Matovic and
                  Vesna Crnojevic{-}Bengin},
  title        = {One-step patterning of a flexible piezoresistive {MEMS} sensor by
                  3D direct laser writing},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {553--556},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147490},
  doi          = {10.1109/NEMS.2015.7147490},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/DubourgZMC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FanLDMY15,
  author       = {Gang Fan and
                  Dan{-}dan Liu and
                  Xianting Ding and
                  Zhi{-}jun Ma and
                  Jian Yang},
  title        = {Synthesis of scalable micro-droplets with heat-driven effect in flow-focusing
                  device},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {141--142},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147394},
  doi          = {10.1109/NEMS.2015.7147394},
  timestamp    = {Sat, 09 Apr 2022 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/FanLDMY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/FuYWHHZGLZ15,
  author       = {Fengshan Fu and
                  Fang Yang and
                  Wei Wang and
                  Xian Huang and
                  Jun He and
                  Li Zhang and
                  Taotao Guan and
                  Rui Li and
                  Dacheng Zhang},
  title        = {Discussion and analysis of Au/a-Si contact resistance in {MEMS/NEMS}
                  devices},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {593--596},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147499},
  doi          = {10.1109/NEMS.2015.7147499},
  timestamp    = {Thu, 09 Sep 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/FuYWHHZGLZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GongW15,
  author       = {Xu Gong and
                  Fei Wang},
  title        = {Line defect detection on 2D materials with micro four-point probe
                  measurement},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {589--592},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147498},
  doi          = {10.1109/NEMS.2015.7147498},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GongW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuanHLZYY15,
  author       = {Rui Guan and
                  Chunhua He and
                  Dachuan Liu and
                  Qiancheng Zhao and
                  Zhenchuan Yang and
                  Guizhen Yan},
  title        = {A temperature control system used for improving resonant frequency
                  drift of {MEMS} gyroscopes},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {397--400},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147452},
  doi          = {10.1109/NEMS.2015.7147452},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GuanHLZYY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuanYWHHZFLZ15,
  author       = {Taotao Guan and
                  Fang Yang and
                  Wei Wang and
                  Xian Huang and
                  Jun He and
                  Li Zhang and
                  Fengshan Fu and
                  Rui Li and
                  Dacheng Zhang},
  title        = {Investigation of stress rupture properties of micro beams using the
                  piezoresistive effect},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {537--540},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147486},
  doi          = {10.1109/NEMS.2015.7147486},
  timestamp    = {Thu, 09 Sep 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GuanYWHHZFLZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/GuoLD15,
  author       = {Yunlong Guo and
                  Wenzhong Lou and
                  Xuran Ding},
  title        = {Metal film bridge with TSV-based 3D wafer level packaging},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {430--434},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147460},
  doi          = {10.1109/NEMS.2015.7147460},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/GuoLD15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangBLWD15,
  author       = {Yulin Huang and
                  Jingfu Bao and
                  Xinyi Li and
                  Yiling Wang and
                  Yijia Du},
  title        = {A 4-bit switched-line phase shifter based on {MEMS} switches},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {405--408},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147454},
  doi          = {10.1109/NEMS.2015.7147454},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HuangBLWD15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangLSC15,
  author       = {Defa Huang and
                  Yan Li and
                  Wenjiang Shen and
                  Jinrong Cheng},
  title        = {Effect of {HTAC} on preparation of supercapacitors based on nanocomposites
                  of MnO2 : {HTAC} by direct electrodeposition},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {521--524},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147482},
  doi          = {10.1109/NEMS.2015.7147482},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HuangLSC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HuangWTC15,
  author       = {Tsung{-}Tao Huang and
                  Jun{-}Sheng Wang and
                  Yu{-}Hsiang Tang and
                  Chun{-}Ming Chang},
  title        = {Electrochemical real-time {DNA} amplification and detection on a microchip},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {132--135},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147392},
  doi          = {10.1109/NEMS.2015.7147392},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HuangWTC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/HungS15,
  author       = {C. Y. Hung and
                  C. K. Sung},
  title        = {Peeling condition analysis of biomimetic adhesive structure-A finite
                  element study},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {476--480},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147471},
  doi          = {10.1109/NEMS.2015.7147471},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/HungS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ImamAK15,
  author       = {Safayat{-}Al Imam and
                  Sharmin Abdhullah and
                  Nasheen Kalam},
  title        = {Parametric analysis of carbon nanotube field effect transistor under
                  non-ballistic regime considering different dielectric materials},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {318--322},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147435},
  doi          = {10.1109/NEMS.2015.7147435},
  timestamp    = {Thu, 14 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ImamAK15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JinGY15,
  author       = {X. B. Jin and
                  F. M. Guo and
                  F. Y. Yue},
  title        = {The charge character in the double-barrier quantum dots in well hybrid
                  structure},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {40--43},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147352},
  doi          = {10.1109/NEMS.2015.7147352},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/JinGY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JinLWWGD15,
  author       = {Xin Jin and
                  Wenzhong Lou and
                  Fufu Wang and
                  Dakui Wang and
                  Mingru Guo and
                  Ximing Dai},
  title        = {The {MEMS} experiment and numerical simulations based on the explosion
                  protection of micro-scale vehicles model},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {331--336},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147438},
  doi          = {10.1109/NEMS.2015.7147438},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/JinLWWGD15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JinMDM15,
  author       = {Xinhang Jin and
                  Binghe Ma and
                  Jinjun Deng and
                  Chengyu Ma},
  title        = {High temperature thin film thermocouples on different ceramic substrates},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {183--186},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147406},
  doi          = {10.1109/NEMS.2015.7147406},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/JinMDM15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/JunK15,
  author       = {Ki{-}Wha Jun and
                  Jung{-}Sik Kim},
  title        = {Silicon etching characteristics for the {TMAH} based solution with
                  additives},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {507--510},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147479},
  doi          = {10.1109/NEMS.2015.7147479},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/JunK15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangWLTH15,
  author       = {Dongyang Kang and
                  Wei Wang and
                  Juhyun Lee and
                  Yu{-}Chong Tai and
                  Tzung K. Hsiai},
  title        = {Measurement of viscosity of unadulterated human whole blood using
                  a capillary pressure-driven viscometer},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {1--4},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147343},
  doi          = {10.1109/NEMS.2015.7147343},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/KangWLTH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KangXX15,
  author       = {Shuai Kang and
                  Jianchun Xing and
                  Liqiang Xie},
  title        = {A novel passive {SAW} temperature sensor with anti-collision},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {635--638},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147510},
  doi          = {10.1109/NEMS.2015.7147510},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/KangXX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/KondoMLM15,
  author       = {Masahiro Kondo and
                  Hidetoshi Miyashita and
                  Sang{-}Seok Lee and
                  Nobuo Matsuoka},
  title        = {Tentative bonding effect for maintaining alignment accuracy in bonding
                  utilizing thick {SU8} as an adhesive material},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {487--490},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147474},
  doi          = {10.1109/NEMS.2015.7147474},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/KondoMLM15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LaiF15,
  author       = {Yi{-}Han Lai and
                  Shih{-}Kang Fan},
  title        = {Electromolding for 3D cell culture},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {268--271},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147424},
  doi          = {10.1109/NEMS.2015.7147424},
  timestamp    = {Thu, 15 Jun 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LaiF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LamCC15,
  author       = {Miu{-}Ling Lam and
                  Bin Chen and
                  Ting{-}Hsuan Chen},
  title        = {Optimized topographical labeling for identification of unknown nucleic
                  acids},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {205--208},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147411},
  doi          = {10.1109/NEMS.2015.7147411},
  timestamp    = {Tue, 27 Feb 2024 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/LamCC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLLSC15,
  author       = {Pengcheng Li and
                  Xiaoying Li and
                  Enfu Li and
                  Qiang Shen and
                  Honglong Chang},
  title        = {Design and fabrication of an in-plane {SOI} {MEMS} accelerometer with
                  a high yield rate},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {511--514},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147480},
  doi          = {10.1109/NEMS.2015.7147480},
  timestamp    = {Thu, 15 Jun 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiLLSC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLZSW15,
  author       = {Congming Li and
                  Yi Luo and
                  Chuanpeng Zhou and
                  Qing Shan and
                  Xiaodong Wang},
  title        = {Using peristaltic pump to charge micro heat pipe for high-power {LED}},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {164--167},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147401},
  doi          = {10.1109/NEMS.2015.7147401},
  timestamp    = {Fri, 24 Nov 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/LiLZSW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiLZWZK15,
  author       = {Lei Li and
                  Jie Li and
                  Zhao Zhao and
                  Han Wang and
                  Wei Zhang and
                  Jinsong Kan},
  title        = {A novel test method of low leakage rate of {MEMS} vacuum packaging},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {175--178},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147404},
  doi          = {10.1109/NEMS.2015.7147404},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiLZWZK15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiRVL15,
  author       = {Yan Li and
                  Willem Van Roy and
                  Philippe M. Vereecken and
                  Liesbet Lagae},
  title        = {An ELISA-based amperometric biosensor within a photo-patternable adhesive
                  microfluidic channel},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {76--81},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147377},
  doi          = {10.1109/NEMS.2015.7147377},
  timestamp    = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiRVL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiSC15,
  author       = {Y. R. Li and
                  C. C. Su and
                  S. H. Chang},
  title        = {Thermoelectric property of vertically aligned carbon nanotube carpets},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {310--313},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147433},
  doi          = {10.1109/NEMS.2015.7147433},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiSC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZH15,
  author       = {Xiuyuan Li and
                  Yulong Zhao and
                  Tengjiang Hu},
  title        = {Design of a novel electrothermal actuator for integrated {MEMS} safety-and-arming
                  devices},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {63--66},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147374},
  doi          = {10.1109/NEMS.2015.7147374},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiZH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZZW15,
  author       = {Yingxue Li and
                  Yulong Zhao and
                  Minghao Zhang and
                  Peng Wang},
  title        = {Design of a three-component force sensor based on {MEMS} strain gauges},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {597--601},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147500},
  doi          = {10.1109/NEMS.2015.7147500},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiZZW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiZZZGC15,
  author       = {Nannan Li and
                  Yangxi Zhang and
                  Ningli Zhu and
                  Yunhui Zhu and
                  Chengchen Gao and
                  Jing Chen},
  title        = {Low temperature multi-layer wafer level package for chip scale atomic
                  clock {(CSAC)}},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {481--484},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147472},
  doi          = {10.1109/NEMS.2015.7147472},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiZZZGC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiangLC15,
  author       = {B. T. Liang and
                  C. C. Lai and
                  Chen{-}Kuei Chung},
  title        = {Simulation and experiment of capillary driven passive planar baffle
                  micro-mixer},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {120--123},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147388},
  doi          = {10.1109/NEMS.2015.7147388},
  timestamp    = {Wed, 28 Oct 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/LiangLC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCCHTCYHH15,
  author       = {Yu{-}Hsin Lin and
                  Yuan{-}Chieh Cheng and
                  Nien{-}Nan Chu and
                  Wensyang Hsu and
                  Yu{-}Hsiang Tang and
                  Po{-}Li Chen and
                  Chih{-}Chung Yang and
                  Ming{-}Hua Hsiao and
                  Chien{-}Nan Hsiao},
  title        = {The study of compensative structure assisted convex and concave corner
                  structures etching by inductively coupled plasma-reactive ion etch
                  {(ICP-RIE)}},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {491--493},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147475},
  doi          = {10.1109/NEMS.2015.7147475},
  timestamp    = {Mon, 14 Sep 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LinCCHTCYHH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LinCWHSC15,
  author       = {Chun{-}Ting Lin and
                  Ching{-}Hao Chen and
                  Chien{-}Ting Wu and
                  Chien{-}Nan Hsiao and
                  Ming{-}Hua Shiao and
                  Mao{-}Nan Chang},
  title        = {A gold nano-dot modified silicon tip apex for scanning Kelvin probe
                  microscopy},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {613--616},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147504},
  doi          = {10.1109/NEMS.2015.7147504},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LinCWHSC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuCHZZGH15,
  author       = {Guandong Liu and
                  W. P. Cui and
                  H. Hu and
                  F. S. Zhang and
                  Yangxi Zhang and
                  Chengchen Gao and
                  Yilong Hao},
  title        = {High temperature pressure sensor using a thermostable electrode},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {201--204},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147410},
  doi          = {10.1109/NEMS.2015.7147410},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiuCHZZGH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuGLYWCS15,
  author       = {Huicong Liu and
                  Sudeep Gulda and
                  Chengkuo Lee and
                  Zhan Yang and
                  Pengbo Wang and
                  Tao Chen and
                  Lining Sun},
  title        = {ZnO-nanowires based power generation from low frequency vibration},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {225--228},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147415},
  doi          = {10.1109/NEMS.2015.7147415},
  timestamp    = {Thu, 22 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiuGLYWCS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuLXSJL15,
  author       = {Chunxiu Liu and
                  Nansen Lin and
                  Shengwei Xu and
                  Yilin Song and
                  Tingjun Jiang and
                  Juntao Liu},
  title        = {Characterization and classification of pyramidal cells and interneurons
                  in vitro cell network using extracellular recordings},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {168--171},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147402},
  doi          = {10.1109/NEMS.2015.7147402},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiuLXSJL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuNL15,
  author       = {Guangwu Liu and
                  Xingyuan Ni and
                  Yangang Liu},
  title        = {Synthesis and characterization of silica aerogel and its composite
                  materials},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {156--159},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147399},
  doi          = {10.1109/NEMS.2015.7147399},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiuNL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuWLWP15,
  author       = {Jie Liu and
                  Li Wen and
                  Han Li and
                  Hai Wang and
                  Jinlan Peng},
  title        = {Fabrication of thin-wall inverted pyramid hollow tips array and nano-aperture
                  for maskless nanoscaled plasma patterning},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {498--501},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147477},
  doi          = {10.1109/NEMS.2015.7147477},
  timestamp    = {Wed, 18 Jan 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/LiuWLWP15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LiuX15,
  author       = {Yilin Liu and
                  Qingsong Xu},
  title        = {Design of a novel integrated micromanipulator for cell gripping and
                  injection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {281--285},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147427},
  doi          = {10.1109/NEMS.2015.7147427},
  timestamp    = {Sun, 02 Jun 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LiuX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LongLC15,
  author       = {H. P. Long and
                  C. C. Lai and
                  Chen{-}Kuei Chung},
  title        = {Fabrication of microfluidic chip using foil-assisted {CO2} laser ablation
                  for suspended particles separation},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {259--262},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147422},
  doi          = {10.1109/NEMS.2015.7147422},
  timestamp    = {Wed, 28 Oct 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/LongLC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LothF15,
  author       = {Andreas Loth and
                  Ralf Forster},
  title        = {Microfluidic high speed pinch valve},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {9--14},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147345},
  doi          = {10.1109/NEMS.2015.7147345},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LothF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LouSYL15,
  author       = {Kevin Lou and
                  Gene Sheu and
                  Shao{-}Ming Yang and
                  Pradhana Jati Budhi Laksana},
  title        = {A study of thermoplastic properties of a novel photoresist},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {95--98},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147382},
  doi          = {10.1109/NEMS.2015.7147382},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LouSYL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuBLL15,
  author       = {Qianbo Lu and
                  Jian Bai and
                  Wenxiu Lian and
                  Shuqi Lou},
  title        = {A novel scheme design of a high-g optical {NEMS} accelerometer based
                  on a single chip grating with proper sensitivity and large bandwidth},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {248--253},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147420},
  doi          = {10.1109/NEMS.2015.7147420},
  timestamp    = {Sun, 25 Jul 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LuBLL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/LuLL15,
  author       = {Ming{-}Yu Lu and
                  Zhihong Li and
                  Gwo{-}Bin Lee},
  title        = {High-density distributed electrodes network for generation of murine
                  induced pluripotent stem cells},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {32--35},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147350},
  doi          = {10.1109/NEMS.2015.7147350},
  timestamp    = {Wed, 25 Sep 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/LuLL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaKPHTKT15,
  author       = {Zhipeng Ma and
                  Young{-}Joo Kim and
                  Seongsu Park and
                  Yoshikazu Hirai and
                  Toshiyuki Tsuchiya and
                  Do{-}Nyum Kim and
                  Osamu Tabata},
  title        = {Direct characterization of radial modulus of {DNA} nanotube by {AFM}
                  nanoindentation},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {581--584},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147496},
  doi          = {10.1109/NEMS.2015.7147496},
  timestamp    = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/MaKPHTKT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MaMDJ15,
  author       = {Chengyu Ma and
                  Binghe Ma and
                  Jinjun Deng and
                  Xinhang Jin},
  title        = {A study of directional {MEMS} dual-fences gauge},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {449--452},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147465},
  doi          = {10.1109/NEMS.2015.7147465},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/MaMDJ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ManiCC15,
  author       = {Karthick Mani and
                  Tsung{-}Chun Chang Chien and
                  Chia{-}Yuan Chen},
  title        = {Orientation control of zebrafish embryos using artificial cilia in
                  a 3D flow-through microchannel},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {15--19},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147346},
  doi          = {10.1109/NEMS.2015.7147346},
  timestamp    = {Mon, 15 Jun 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ManiCC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MiaoSCWHXX15,
  author       = {Jing Miao and
                  Wenjiang Shen and
                  Muyu Chen and
                  Hui Wang and
                  Changde He and
                  Chenyang Xue and
                  Jijun Xiong},
  title        = {Design and measurement of {MEMS} capacitive ultrasonic transducer},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {602--604},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147501},
  doi          = {10.1109/NEMS.2015.7147501},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/MiaoSCWHXX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/MoudgilS15,
  author       = {Akshay Moudgil and
                  Sundaram Swaminathan},
  title        = {{MEMS} based piezoelectric sensor system for virus detection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {337--342},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147439},
  doi          = {10.1109/NEMS.2015.7147439},
  timestamp    = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/MoudgilS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NiuZ15,
  author       = {Hang Niu and
                  Xiaodong Zhang},
  title        = {Design on a bending stress measurement system of micro-gear with fiber
                  Bragg grating},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {575--580},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147495},
  doi          = {10.1109/NEMS.2015.7147495},
  timestamp    = {Wed, 20 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/NiuZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/NyenkeD15,
  author       = {Chinwe Nyenke and
                  Lixin Dong},
  title        = {Sensing ambient oxygen using a W/CuxO/Cu memristor},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {254--258},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147421},
  doi          = {10.1109/NEMS.2015.7147421},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/NyenkeD15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PakdelMBG15,
  author       = {Amir Pakdel and
                  Takao Mori and
                  Yoshio Bando and
                  Dmitri Golberg},
  title        = {Interface engineering of bio-inspired Boron nitride nano-architectures
                  toward controllable hydrophobicity/hydrophilicity},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {90--91},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147380},
  doi          = {10.1109/NEMS.2015.7147380},
  timestamp    = {Sat, 30 Sep 2023 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/PakdelMBG15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ParkYJCG15,
  author       = {Jaehyun Park and
                  ChangKyu Yoon and
                  Qianru Jin and
                  Lei Chen and
                  David H. Gracias},
  title        = {Rolled-up nanoporous membranes by nanoimprint lithography and strain
                  engineering},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {233--237},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147417},
  doi          = {10.1109/NEMS.2015.7147417},
  timestamp    = {Sun, 25 Jul 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ParkYJCG15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PattanasakP15,
  author       = {Satjana Pattanasak and
                  Wibool Piyawattanametha},
  title        = {Light microendoscopy with {MEMS} technology},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {550--552},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147489},
  doi          = {10.1109/NEMS.2015.7147489},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/PattanasakP15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PengLDL15,
  author       = {Liu Peng and
                  Wenzhong Lou and
                  Ximing Dai and
                  Yufei Lu},
  title        = {Verification and test system technology for {CMOS-MEMS} switches},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {585--588},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147497},
  doi          = {10.1109/NEMS.2015.7147497},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/PengLDL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/PitchappaDHQWL15,
  author       = {Prakash Pitchappa and
                  Lokesh Dhakar and
                  Chongpei Ho and
                  You Qian and
                  Tao Wang and
                  Chengkuo Lee},
  title        = {Subwavelength {MEMS} cantilever array for dynamic manipulation of
                  terahertz waves},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {533--536},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147485},
  doi          = {10.1109/NEMS.2015.7147485},
  timestamp    = {Thu, 14 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/PitchappaDHQWL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QinSZLF15,
  author       = {Yanding Qin and
                  Mingzhu Sun and
                  Xin Zhao and
                  Xiang Li and
                  Xizeng Feng},
  title        = {A new method for characterizing the long-term behavior of zebrafish
                  from the trajectory},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {272--275},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147425},
  doi          = {10.1109/NEMS.2015.7147425},
  timestamp    = {Thu, 13 Jan 2022 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/QinSZLF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QinZW15,
  author       = {Yafei Qin and
                  Yulong Zhao and
                  Weizhong Wang},
  title        = {Development and characterization of three-axis micro-force sensor
                  series},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {103--106},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147384},
  doi          = {10.1109/NEMS.2015.7147384},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/QinZW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/QiuLZ15,
  author       = {Guangdong Qiu and
                  Zhijie Luo and
                  Guofu Zhou},
  title        = {Design of a wireless data transmission system and display terminal
                  based on {MEMS} sensors and Bluetooth 4.0},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {541--544},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147487},
  doi          = {10.1109/NEMS.2015.7147487},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/QiuLZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RMS15,
  author       = {Shyam Sumukh S. R and
                  Akshay Moudgil and
                  Sundaram Swaminathan},
  title        = {Modelling of Phosphorus and Gallium doped Nano-GNRFET based gas sensor},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {347--352},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147441},
  doi          = {10.1109/NEMS.2015.7147441},
  timestamp    = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/RMS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RaeiniKJ15,
  author       = {Amin Ghasemi Nejad Raeini and
                  Zoheir Kordrostami and
                  Mojtaba Javaheri},
  title        = {High on/off current ratio in {SB-CNTFET} based on tuning the gate
                  insulator parameters for different ambient temperatures},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {630--634},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147509},
  doi          = {10.1109/NEMS.2015.7147509},
  timestamp    = {Sun, 02 Oct 2022 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/RaeiniKJ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RiazLSFL15,
  author       = {K. Riaz and
                  S.{-}F. Leung and
                  H. Shagoshtasbi and
                  Zhiyong Fan and
                  Yi{-}Kuen Lee},
  title        = {Optimization of multiple-pulse ultra-low voltage Nanospike electroporation
                  chips using feedback system control for efficient delivery of molecules
                  to cancer cells},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {263--267},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147423},
  doi          = {10.1109/NEMS.2015.7147423},
  timestamp    = {Thu, 21 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/RiazLSFL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/RiusMTLP15,
  author       = {Gemma Rius and
                  Soichiro Matsui and
                  Masaki Tanemura and
                  Matteo Lorenzoni and
                  Francesc P{\'{e}}rez{-}Murano},
  title        = {Properties and applications of carbon nanofibers for atomic force
                  microscopy},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {571--574},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147494},
  doi          = {10.1109/NEMS.2015.7147494},
  timestamp    = {Sun, 02 Jun 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/RiusMTLP15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShagoshtasbiRLT15,
  author       = {H. Shagoshtasbi and
                  K. Riaz and
                  Yi{-}Kuen Lee and
                  K. Tse},
  title        = {Smartphone-based electroporator system for micro/nano electroporation
                  chips},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {72--75},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147376},
  doi          = {10.1109/NEMS.2015.7147376},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ShagoshtasbiRLT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShakilKB15,
  author       = {Shifur Rahman Shakil and
                  Saha Atanu Kumar and
                  Md. Belal Hossain Bhuian},
  title        = {Transition in electronic transport properties of graphene nanoribbon
                  due to the adsorption of atoms and molecules},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {375--379},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147447},
  doi          = {10.1109/NEMS.2015.7147447},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ShakilKB15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ShakilZPTKB15,
  author       = {Shifur Rahman Shakil and
                  Fatema Tuz Zohra and
                  Parna Pramanik and
                  Raihanul Islam Tushar and
                  Saha Atanu Kumar and
                  Md. Belal Hossain Bhuian},
  title        = {Vapor adsorption limitation of graphene nanoribbons in quasi conductance
                  increment: {A} {NEGF} approach},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {366--371},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147445},
  doi          = {10.1109/NEMS.2015.7147445},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ShakilZPTKB15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Shoval15,
  author       = {Shraga Shoval},
  title        = {A mini actuator driven by hydraulic power supply},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {361--365},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147444},
  doi          = {10.1109/NEMS.2015.7147444},
  timestamp    = {Tue, 19 Feb 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/Shoval15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuYXT15,
  author       = {Yufeng Su and
                  Zhitong Ye and
                  Zhiming Xiao and
                  Kenichi Takahata},
  title        = {Analytical and experimental study of micromachined graphite rotor
                  based on diamagnetic levitation},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {116--119},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147387},
  doi          = {10.1109/NEMS.2015.7147387},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/SuYXT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SuZHCJYZ15,
  author       = {Zong{-}Ming Su and
                  Xiao{-}Sheng Zhang and
                  Mengdi Han and
                  Xiao{-}Liang Cheng and
                  Xia Jiang and
                  Xiang{-}Zhi Yin and
                  Haixia Zhang},
  title        = {Honeycomb-patterned {PDMS} membrane based on nanosphere lithography},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {566--570},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147493},
  doi          = {10.1109/NEMS.2015.7147493},
  timestamp    = {Mon, 05 Feb 2024 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/SuZHCJYZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SunW15,
  author       = {Hao Sun and
                  Xiang Wang},
  title        = {Numerical simulation of nickel electroforming process influenced by
                  flow field},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {502--506},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147478},
  doi          = {10.1109/NEMS.2015.7147478},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/SunW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/SutthinetPLP15,
  author       = {Chalin Sutthinet and
                  Toempong Phetchakul and
                  Wittaya Luanatikomkul and
                  Amporn Poyai},
  title        = {Multi-sensor diode for magnetic field and photo detection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {179--182},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147405},
  doi          = {10.1109/NEMS.2015.7147405},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/SutthinetPLP15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TakebeHMLT15,
  author       = {Kozaburo Takebe and
                  Takaya Higashira and
                  Hidetoshi Miyashita and
                  Sang{-}Seok Lee and
                  Keisuke Takano},
  title        = {Characteristics of H-shaped fractal antenna having VOx absorber for
                  multi-band microbolometer},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {466--469},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147469},
  doi          = {10.1109/NEMS.2015.7147469},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TakebeHMLT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangLHWSY15,
  author       = {Yu{-}Hsiang Tang and
                  Yu{-}Hsin Lin and
                  Tsung{-}Tao Huang and
                  Jun{-}Sheng Wang and
                  Ming{-}Hua Shiao and
                  Chih{-}Sheng Yu},
  title        = {Investigation of fabricated Through Glass Via {(TGV)} process by inductively
                  coupled plasma reactive ion etching of quartz glass},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {401--404},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147453},
  doi          = {10.1109/NEMS.2015.7147453},
  timestamp    = {Mon, 14 Sep 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TangLHWSY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TangTBXMO15,
  author       = {L. C. Tang and
                  Qiulin Tan and
                  Aida Bao and
                  Jijun Xiong and
                  Haiyang Mao and
                  Wen Ou},
  title        = {Fabrication of transparent {SERS} devices for pesticide detection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {343--346},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147440},
  doi          = {10.1109/NEMS.2015.7147440},
  timestamp    = {Tue, 26 Jun 2018 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TangTBXMO15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TheTLKN15,
  author       = {Hai Le The and
                  Bao Quoc Ta and
                  Hoa Le{-}Thanh and
                  Frank Karlsen and
                  Trung Nguyen{-}Thoi},
  title        = {A novel design of passive split and recombination micromixer with
                  trapezoidal zigzag channels},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {28--31},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147349},
  doi          = {10.1109/NEMS.2015.7147349},
  timestamp    = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TheTLKN15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ThimmarajuY15,
  author       = {Thimmaraju and
                  Da{-}Jeng Yao},
  title        = {Analytical model for different geographic origin coffee beans aroma
                  analysis using {TD-GC-MS}},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {353--356},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147442},
  doi          = {10.1109/NEMS.2015.7147442},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ThimmarajuY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TianWZJS15,
  author       = {Bian Tian and
                  Peng Wang and
                  Yulong Zhao and
                  Zhuangde Jiang and
                  Bo Shen},
  title        = {Piezoresistive micro-accelerometer with supplement structure},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {107--110},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147385},
  doi          = {10.1109/NEMS.2015.7147385},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TianWZJS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TsaiSCCF15,
  author       = {Chieh{-}Wei Tsai and
                  Sheng{-}Chih Shen and
                  Shyang{-}Jye Chang and
                  Yi{-}Cheng Chen and
                  Mao{-}Ju Fang},
  title        = {A small elastic floating energy harvester for ocean ripple power using
                  knitted {PVDF} thin film},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {461--465},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147468},
  doi          = {10.1109/NEMS.2015.7147468},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TsaiSCCF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/TuC15,
  author       = {Kun{-}Tse Tu and
                  Chen{-}Kuei Chung},
  title        = {Fabrication of biodegradable polymer microneedle array via {CO2} laser
                  ablation},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {494--497},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147476},
  doi          = {10.1109/NEMS.2015.7147476},
  timestamp    = {Sun, 25 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/TuC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WanS15,
  author       = {Wenfeng Wan and
                  Yajing Shen},
  title        = {Patterning alginate hydrogel through optically induced electrodes},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {617--618},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147505},
  doi          = {10.1109/NEMS.2015.7147505},
  timestamp    = {Mon, 05 Jun 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WanS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WanX15,
  author       = {Sicong Wan and
                  Qingsong Xu},
  title        = {Design of a new rotational micropositioning mechanism driven by limited-angle
                  torque motor},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {209--213},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147412},
  doi          = {10.1109/NEMS.2015.7147412},
  timestamp    = {Sun, 02 Jun 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WanX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangCL15,
  author       = {Yu{-}Shiang Wang and
                  Chun{-}Yi Chen and
                  Che{-}Hsin Lin},
  title        = {Microchip based ion source powered by a lighter piezo-generator for
                  mass-spectrometry detection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {128--131},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147391},
  doi          = {10.1109/NEMS.2015.7147391},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangCL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangD15,
  author       = {Yong Wang and
                  Jiahao Deng},
  title        = {Research on calculation method of MEMS-based safety and arming system},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {453--456},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147466},
  doi          = {10.1109/NEMS.2015.7147466},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangD15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangJG15,
  author       = {M. J. Wang and
                  X. B. Jin and
                  F. M. Guo},
  title        = {Less than 10-13W weak light response for quantum dots photodetector
                  at room temprature},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {44--47},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147353},
  doi          = {10.1109/NEMS.2015.7147353},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangJG15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangKL15,
  author       = {Tao Wang and
                  Takeshi Kobayashi and
                  Chengkuo Lee},
  title        = {Broadband piezoelectric micromachined ultrasonic transducer (pMUT)
                  using mode-merged design},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {238--242},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147418},
  doi          = {10.1109/NEMS.2015.7147418},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangKL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangL15,
  author       = {Chih{-}Hung Wang and
                  Gwo{-}Bin Lee},
  title        = {Multiple influenza virulent diagnosis by utilizing a single-aptamer
                  based microfluidic system},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {20--24},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147347},
  doi          = {10.1109/NEMS.2015.7147347},
  timestamp    = {Wed, 25 Sep 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangL15a,
  author       = {Yifan Wang and
                  Zewen Liu},
  title        = {Realization of the microchannel with microisland arrays by one-step
                  silicon wet etching process},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {557--560},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147491},
  doi          = {10.1109/NEMS.2015.7147491},
  timestamp    = {Mon, 08 Mar 2021 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WangL15a.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLLWJLWGZ15,
  author       = {Fufu Wang and
                  Wenzhong Lou and
                  Fangyi Liu and
                  Dakui Wang and
                  Xin Jin and
                  Jun Lu and
                  Jian Wu and
                  Xuhong Guo and
                  Zhe Zhang},
  title        = {The calculation method of reliability based on {MEMS} Safety and Arming
                  device},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {426--429},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147459},
  doi          = {10.1109/NEMS.2015.7147459},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangLLWJLWGZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLPZKL15,
  author       = {Feng Wang and
                  Wenzhong Lou and
                  Liu Peng and
                  Zhiyi Zheng and
                  Pengfei Kang and
                  Jun Lu},
  title        = {Visualization of real-time logistics monitoring microsystem based
                  on {MEMS} sensors},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {438--440},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147462},
  doi          = {10.1109/NEMS.2015.7147462},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangLPZKL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLQZ15,
  author       = {Yaling Wang and
                  Zhijie Luo and
                  Guangdong Qiu and
                  Guofu Zhou},
  title        = {Design of Smart Watch system based on E-paper},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {327--330},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147437},
  doi          = {10.1109/NEMS.2015.7147437},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangLQZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLW15,
  author       = {Hai Wang and
                  Han Li and
                  Li Wen},
  title        = {One dimensional simulation of microscale {DBD} plasma},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {515--520},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147481},
  doi          = {10.1109/NEMS.2015.7147481},
  timestamp    = {Wed, 18 Jan 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WangLW15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLXLWJZX15,
  author       = {Fufu Wang and
                  Wenzhong Lou and
                  Yongjia Xiong and
                  Fangyi Liu and
                  Dakui Wang and
                  Xin Jin and
                  Mingrong Zhang and
                  Chenggang Xu},
  title        = {The parametric analysis of the centrifugal insurance mechanism in
                  {MEMS} safety and arming device},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {457--460},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147467},
  doi          = {10.1109/NEMS.2015.7147467},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangLXLWJZX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangLXWLJL15,
  author       = {Dakui Wang and
                  Wenzhong Lou and
                  Yongjia Xiong and
                  Fufu Wang and
                  Fangyi Liu and
                  Xin Jin and
                  Jun Lu},
  title        = {The effect of micro-spring stiffness changes on the typical {MEMS}
                  S{\&}A device},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {413--416},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147456},
  doi          = {10.1109/NEMS.2015.7147456},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WangLXWLJL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WangZTLL15,
  author       = {Peng Wang and
                  Yulong Zhao and
                  Bian Tian and
                  Yingxue Li and
                  Yan Liu},
  title        = {A {MEMS} accelerometer for spindle monitoring system},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {545--549},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147488},
  doi          = {10.1109/NEMS.2015.7147488},
  timestamp    = {Wed, 19 Feb 2020 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WangZTLL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiLL15,
  author       = {Fanan Wei and
                  Longhai Li and
                  Lianqing Liu},
  title        = {Facile synthesis of copper nanostructures through simple replacement
                  reaction},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {160--163},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147400},
  doi          = {10.1109/NEMS.2015.7147400},
  timestamp    = {Sun, 25 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/WeiLL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/WeiZLL15,
  author       = {Fanan Wei and
                  Peilin Zhou and
                  Guangyong Li and
                  Lianqing Liu},
  title        = {Finite element simulation of stress relaxation process in living cells},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {67--71},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147375},
  doi          = {10.1109/NEMS.2015.7147375},
  timestamp    = {Tue, 21 Mar 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/WeiZLL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XieJLT15,
  author       = {Shuangxi Xie and
                  Niandong Jiao and
                  Lianqing Liu and
                  Steve Tung},
  title        = {Fabrication of graphene interdigitated electrodes and all-carbon electronic
                  devices},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {314--317},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147434},
  doi          = {10.1109/NEMS.2015.7147434},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XieJLT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XingLX15,
  author       = {Jianchun Xing and
                  Weifeng Liu and
                  Liqiang Xie},
  title        = {A novel identification method of multiple {OFC} {SAW} sensor tags},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {187--192},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147407},
  doi          = {10.1109/NEMS.2015.7147407},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XingLX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/XuZZSZH15,
  author       = {Kaisi Xu and
                  Ningli Zhu and
                  Qingying Zhan and
                  Weiguo Su and
                  Wei Zhang and
                  Yilong Hao},
  title        = {Design and simulation of micro-platform for {MEMS} devices applied
                  in shock environment},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {445--448},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147464},
  doi          = {10.1109/NEMS.2015.7147464},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/XuZZSZH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YanWHZYY15,
  author       = {Ruixuan Yan and
                  Xianglei Wei and
                  Chunhua He and
                  Qiancheng Zhao and
                  Zhenchuan Yang and
                  Guizhen Yan},
  title        = {Research on the resonant frequency of {MEMS} gyroscopes under varying
                  tuning voltage},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {435--437},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147461},
  doi          = {10.1109/NEMS.2015.7147461},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YanWHZYY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangCLSY15,
  author       = {Chih{-}Chun Yang and
                  Kuo{-}Wei Chang and
                  Cheng{-}Hsien Liu and
                  Claire R. Shen and
                  Da{-}Jeng Yao},
  title        = {Using gradient micro-fluidics chips to optimize {BG-11} medium for
                  the growth of cyanobacteria Synechococcus elongatus {PCC7942}},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {136--140},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147393},
  doi          = {10.1109/NEMS.2015.7147393},
  timestamp    = {Wed, 01 Sep 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YangCLSY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangM15,
  author       = {Lung{-}Jieh Yang and
                  Suseendar Marimuthu},
  title        = {Acoustic comparison of {PET} and Latex wings for flapping micro-air-vehicles},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {172--174},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147403},
  doi          = {10.1109/NEMS.2015.7147403},
  timestamp    = {Mon, 05 Jun 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YangM15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangYWL15,
  author       = {Wenguang Yang and
                  Haibo Yu and
                  Yuechao Wang and
                  Lianqing Liu},
  title        = {Fabrication of microstructures using the DMD-based modulating projection
                  printing method},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {625--629},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147508},
  doi          = {10.1109/NEMS.2015.7147508},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YangYWL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YangZZL15,
  author       = {Mu Yang and
                  Yushi Zhang and
                  Hongze Zhang and
                  Zhihong Li},
  title        = {Characterization of {PEDOT:} {PSS} as a biocompatible conductive material},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {149--151},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147397},
  doi          = {10.1109/NEMS.2015.7147397},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YangZZL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YiZYBKF15,
  author       = {Ying Yi and
                  Amir Zaher and
                  Omar Yassine and
                  Ulrich Buttner and
                  J{\"{u}}rgen Kosel and
                  Ian G. Foulds},
  title        = {Electromagnetically powered electrolytic pump and thermo-responsive
                  valve for drug delivery},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {5--8},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147344},
  doi          = {10.1109/NEMS.2015.7147344},
  timestamp    = {Fri, 27 Dec 2019 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/YiZYBKF15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YouTHZYZY15,
  author       = {Jun You and
                  Dayu Tian and
                  Chunhua He and
                  Qiancheng Zhao and
                  Zhenchuan Yang and
                  Dacheng Zhang and
                  Guizhen Yan},
  title        = {A method to evaluate the influence of different substrate on stress
                  mismatch induced deformation in {MEMS} accelerometer},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {421--425},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147458},
  doi          = {10.1109/NEMS.2015.7147458},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/YouTHZYZY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/YuHJYZ15,
  author       = {Bocheng Yu and
                  Mengdi Han and
                  Xia Jiang and
                  Xiangzhi Yin and
                  Haixia Zhang},
  title        = {A novel discharge system based on jagged electrodes with controllable
                  spacing},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {525--528},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147483},
  doi          = {10.1109/NEMS.2015.7147483},
  timestamp    = {Mon, 05 Feb 2024 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/YuHJYZ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhanCLSLL15,
  author       = {Haoran Zhan and
                  Fansheng Cheng and
                  Ziyi Li and
                  Lei Shi and
                  Yu Liu and
                  Woon{-}Ming Lau},
  title        = {Fabrication of flexible and low-cost {SERS} substrate by using Archimedes'
                  Principle},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {48--49},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147354},
  doi          = {10.1109/NEMS.2015.7147354},
  timestamp    = {Thu, 18 Aug 2022 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhanCLSLL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangHLLZYY15,
  author       = {Jimeng Zhang and
                  Chunhua He and
                  Yuxian Liu and
                  Dachuan Liu and
                  Qiancheng Zhao and
                  Zhenchuan Yang and
                  Guizhen Yan},
  title        = {A novel scale factor calibration method for a {MEMS} gyroscope based
                  on virtual coriolis force},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {58--62},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147373},
  doi          = {10.1109/NEMS.2015.7147373},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangHLLZYY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangHZZYZY15,
  author       = {Pan Zhang and
                  Chunhua He and
                  Jimeng Zhang and
                  Qiancheng Zhao and
                  Zhenchuan Yang and
                  Dacheng Zhang and
                  Guizhen Yan},
  title        = {Investigation of reliability of {MEMS} gyroscopes under different
                  shock conditions},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {441--444},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147463},
  doi          = {10.1109/NEMS.2015.7147463},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangHZZYZY15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLLLH15,
  author       = {Yu Zhang and
                  Guiya Liu and
                  MinQuan Li and
                  Jun Luo and
                  Chengjun Huang},
  title        = {Simulation analysis of nanopore performance in single-nanoparticle
                  detection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {229--232},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147416},
  doi          = {10.1109/NEMS.2015.7147416},
  timestamp    = {Thu, 14 Oct 2021 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangLLLH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangLYWZL15,
  author       = {Lingqian Zhang and
                  Yaoping Liu and
                  Fang Yang and
                  Wei Wang and
                  Dacheng Zhang and
                  Zhihong Li},
  title        = {Parylene {C} autofluorescence for on-chip highest processing temperature
                  sensing},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {302--305},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147431},
  doi          = {10.1109/NEMS.2015.7147431},
  timestamp    = {Tue, 28 Feb 2023 00:00:00 +0100},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangLYWZL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangWRXJ15,
  author       = {Jingjing Zhang and
                  Xueyong Wei and
                  Juan Ren and
                  Xiangdong Xue and
                  Zhuangde Jiang},
  title        = {{SAW} assisted blood/plasma separation in microchannel with constriction-expansion
                  transition},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {86--89},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147379},
  doi          = {10.1109/NEMS.2015.7147379},
  timestamp    = {Thu, 15 Jun 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangWRXJ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangWXWL15,
  author       = {Chuang Zhang and
                  Wenxue Wang and
                  Ning Xi and
                  Yuechao Wang and
                  Lianqing Liu},
  title        = {Characterization and modeling of living cell based actuation for bio-syncretic
                  robot development},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {296--301},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147430},
  doi          = {10.1109/NEMS.2015.7147430},
  timestamp    = {Mon, 13 May 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangWXWL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangX15,
  author       = {Xiaozhi Zhang and
                  Qingsong Xu},
  title        = {Design of a new 5-DOF flexure-based nanopositioning stage},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {276--280},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147426},
  doi          = {10.1109/NEMS.2015.7147426},
  timestamp    = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhangXLLLSHT15,
  author       = {Xiaoxiao Zhang and
                  Lei Xu and
                  Juhyun Lee and
                  Rongsong Li and
                  Yang Liu and
                  Aubrey Shapero and
                  Tzung K. Hsiai and
                  Yu{-}Chong Tai},
  title        = {Flexible micro sensor for intravascular vulnerable plaque diagnostic
                  with electrical impedance spectroscopy},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {243--247},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147419},
  doi          = {10.1109/NEMS.2015.7147419},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhangXLLLSHT15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoDX15,
  author       = {Jiuxuan Zhao and
                  Hong Ding and
                  Jin Xie},
  title        = {Micromechanical resonant electrostatic charge sensor with micro-leverage
                  mechanisms},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {111--115},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147386},
  doi          = {10.1109/NEMS.2015.7147386},
  timestamp    = {Sun, 25 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhaoDX15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoLHFL15,
  author       = {Yulong Zhao and
                  Cun Li and
                  Mengmeng Hao and
                  Xiaole Fan and
                  Keyin Liu},
  title        = {Design and analysis of a micro pressure sensor with optical fiber},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {54--57},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147356},
  doi          = {10.1109/NEMS.2015.7147356},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhaoLHFL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoPWSWJ15,
  author       = {Yao Zhao and
                  Niancai Peng and
                  Xueyong Wei and
                  Manoj Sharma and
                  Jiuhong Wang and
                  Zhuangde Jiang},
  title        = {Mercaptopropionic acid capped ZnS: Mn/ZnS core/shell quantum dots
                  as fluorescence probe for folic acid detection},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {306--309},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147432},
  doi          = {10.1109/NEMS.2015.7147432},
  timestamp    = {Sat, 19 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhaoPWSWJ15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhaoZL15,
  author       = {You Zhao and
                  Yulong Zhao and
                  Songbo Liang},
  title        = {Design and fabrication of a triaxial cutting force dynamometer based
                  on {MEMS} technique},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {323--326},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147436},
  doi          = {10.1109/NEMS.2015.7147436},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhaoZL15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhongLJWSC15,
  author       = {Bowen Zhong and
                  Zongwei Li and
                  Ziqi Jin and
                  Zhenhua Wang and
                  Lining Sun and
                  Linsen Chen},
  title        = {Research on precision position technology in micro-operation robot
                  based on inertial stick-slip driving},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {214--218},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147413},
  doi          = {10.1109/NEMS.2015.7147413},
  timestamp    = {Sun, 25 Oct 2020 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhongLJWSC15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhouZGS15,
  author       = {Liang Zhou and
                  Guitao Zhang and
                  Richard Galos and
                  Yong Shi},
  title        = {Fabrication and characterization of Barium Titanate nanofibers},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {92--94},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147381},
  doi          = {10.1109/NEMS.2015.7147381},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhouZGS15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/Zhu15,
  author       = {Xiaolu Zhu},
  title        = {Electroosmotic flow assisted rotation of self-assembled microparticle
                  chains using optoelectronic tweezers},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {82--85},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147378},
  doi          = {10.1109/NEMS.2015.7147378},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/Zhu15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@inproceedings{DBLP:conf/nems/ZhuCQHH15,
  author       = {Yanqing Zhu and
                  Bei Chen and
                  Ming Qin and
                  Jian{-}Qiu Huang and
                  Qing{-}An Huang},
  title        = {A self-packaged self-heated thermal wind sensor with high reliability
                  and low power consumption},
  booktitle    = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  pages        = {193--196},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://doi.org/10.1109/NEMS.2015.7147408},
  doi          = {10.1109/NEMS.2015.7147408},
  timestamp    = {Wed, 17 May 2017 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/ZhuCQHH15.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
@proceedings{DBLP:conf/nems/2015,
  title        = {10th {IEEE} International Conference on Nano/Micro Engineered and
                  Molecular Systems, {NEMS} 2015, Xi'an, China, April 7-11, 2015},
  publisher    = {{IEEE}},
  year         = {2015},
  url          = {https://ieeexplore.ieee.org/xpl/conhome/7132046/proceeding},
  isbn         = {978-1-4673-6695-3},
  timestamp    = {Wed, 16 Oct 2019 01:00:00 +0200},
  biburl       = {https://dblp.org/rec/conf/nems/2015.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}
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