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@inproceedings{DBLP:conf/elinfocom/ShinOLH23,
  author       = {Taesoo Shin and
                  Seulgi Ok and
                  Kibum Lee and
                  Sungwook Hwang},
  title        = {Automation methodology of local defocus monitoring on fixed chips
                  in semiconductor fabrication},
  booktitle    = {International Conference on Electronics, Information, and Communication,
                  {ICEIC} 2023, Singapore, February 5-8, 2023},
  pages        = {1--3},
  publisher    = {{IEEE}},
  year         = {2023},
  url          = {https://doi.org/10.1109/ICEIC57457.2023.10049963},
  doi          = {10.1109/ICEIC57457.2023.10049963},
  timestamp    = {Tue, 21 Mar 2023 16:00:01 +0100},
  biburl       = {https://dblp.org/rec/conf/elinfocom/ShinOLH23.bib},
  bibsource    = {dblp computer science bibliography, https://dblp.org}
}

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