"Hidden Markov model-based predictive maintenance in semiconductor ..."

Jakob Kinghorst et al. (2017)

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DOI: 10.1109/COASE.2017.8256274

access: closed

type: Conference or Workshop Paper

metadata version: 2018-01-22

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Jakob Kinghorst, Omid Geramifard, Ming Luo, Hian-Leng Chan, Khoo Yong, Jens Folmer, Minjie Zou, Birgit Vogel-Heuser:
Hidden Markov model-based predictive maintenance in semiconductor manufacturing: A genetic algorithm approach. CASE 2017: 1260-1267

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