"A fast manufacturability aware Optical Proximity Correction (OPC) ..."

Ahmed Awad, Atsushi Takahashi, Chikaaki Kodama (2016)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2021-08-09

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Ahmed Awad, Atsushi Takahashi, Chikaaki Kodama:
A fast manufacturability aware Optical Proximity Correction (OPC) algorithm with adaptive wafer image estimation. DATE 2016: 49-54

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