"Grid-based Self-Aligned Quadruple Patterning aware two dimensional routing ..."

Takeshi Ihara et al. (2016)

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DOI: —

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type: Conference or Workshop Paper

metadata version: 2021-08-09

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Takeshi Ihara, Toshiyuki Hongo, Atsushi Takahashi, Chikaaki Kodama:
Grid-based Self-Aligned Quadruple Patterning aware two dimensional routing pattern. DATE 2016: 241-244

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