"3D-integration of silicon devices: A key technology for sophisticated ..."

Armin Klumpp, Peter Ramm, Robert Wieland (2010)

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DOI: 10.1109/DATE.2010.5457085

access: closed

type: Conference or Workshop Paper

metadata version: 2017-05-23

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Armin Klumpp, Peter Ramm, Robert Wieland:
3D-integration of silicon devices: A key technology for sophisticated products. DATE 2010: 1678-1683

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