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P. Z. Hong

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2010 – 2019

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2011
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Lina Sun, Liang Qian, P. Z. Hong, Guizhen Yan, Zhenchuan Yang:
Post CMOS integration of high aspect ratio SOI MEMS devices. NEMS 2011: 166-169
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Liang Qian, P. Z. Hong, Lina Sun, Zhenchuan Yang, Guizhen Yan:
CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructures. NEMS 2011: 397-400

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