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A. Brennecke

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2013
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N. Ferreira, A. Brennecke, Andreas Dietzel, Stephanus Büttgenbach, Thomas Krah, David Metz, Karin Kniel, Frank Härtig:
Reducing the probe ball diameters of 3D silicon-based microprobes for dimensional metrology. ICST 2013: 301-306

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