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Sungil Yun

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2020 – today

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2023
[j5]
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Matthew Tom, Henrik Wang, Feiyang Ou, Sungil Yun, Gerassimos Orkoulas, Panagiotis D. Christofides:
Computational fluid dynamics modeling of a discrete feed atomic layer deposition reactor: Application to reactor design and operation. Comput. Chem. Eng. 178: 108400 (2023)
2022
[j4]
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Sungil Yun, Matthew Tom, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides:
Multiscale computational fluid dynamics modeling of thermal atomic layer etching: Application to chamber configuration design. Comput. Chem. Eng. 161: 107757 (2022)
[j3]
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Sungil Yun, Matthew Tom, Gerassimos Orkoulas, Panagiotis D. Christofides:
Multiscale computational fluid dynamics modeling of spatial thermal atomic layer etching. Comput. Chem. Eng. 163: 107861 (2022)
[j2]
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Matthew Tom, Sungil Yun, Henrik Wang, Feiyang Ou, Gerassimos Orkoulas, Panagiotis D. Christofides:
Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor. Comput. Chem. Eng. 168: 108044 (2022)
2021
[j1]
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Sungil Yun, Yangyao Ding, Yichi Zhang, Panagiotis D. Christofides:
Integration of feedback control and run-to-run control for plasma enhanced atomic layer deposition of hafnium oxide thin films. Comput. Chem. Eng. 148: 107267 (2021)

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