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Sassan Roham

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2024
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Zeqing Jin, Dahyun Daniel Lim, Xueying Zhao, Meenakshi Mamunuru, Sassan Roham, Grace X. Gu:
Machine learning enabled optimization of showerhead design for semiconductor deposition process. J. Intell. Manuf. 35(2): 925-935 (2024)

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