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Kenji Harafuji

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1990 – 1999

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1993
[j1]
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Kenji Harafuji, Akio Misaka, Noboru Nomura, Masahiro Kawamoto, Hirohiko Yamashita:
A novel hierarchical approach for proximity effect correction in electron beam lithography. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 12(10): 1508-1514 (1993)

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