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M. Ikeyama

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2007
[j1]
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Y. Miyagawa, M. Ikeyama, S. Miyagawa, M. Tanaka, H. Nakadate:
Plasma analysis for the plasma immersion ion implantation processing by a PIC-MCC simulation. Comput. Phys. Commun. 177(1-2): 84-87 (2007)

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