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"Plasma analysis for the plasma immersion ion implantation processing by a ..."
Y. Miyagawa et al. (2007)
- Y. Miyagawa, M. Ikeyama, S. Miyagawa, M. Tanaka, H. Nakadate:
Plasma analysis for the plasma immersion ion implantation processing by a PIC-MCC simulation. Comput. Phys. Commun. 177(1-2): 84-87 (2007)
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