"Novel methodology for 3D MEMS-IC design and co-simulation on MEMS ..."

Tomasz Bieniek et al. (2014)

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DOI: 10.1109/3DIC.2014.7152184

access: closed

type: Conference or Workshop Paper

metadata version: 2019-10-19

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Tomasz Bieniek, Grzegorz Janczyk, Magdalena Ekwinska, T. Budzynski, Piotr Gluszko, Piotr Grabiec, Andrzej Kociubinski:
Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example. 3DIC 2014: 1-5

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