"Ultra-High Density Deep Trench Capacitor (DTC) for 3DIC Integration."

H. L. Cheng et al. (2024)

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DOI: 10.1109/3DIC63395.2024.10830236

access: closed

type: Conference or Workshop Paper

metadata version: 2025-07-21

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H. L. Cheng, J. Y. Lin, T. C. Hsu, Eva Su, S. M. Wu, Y. C. Chang, T. H. Chien, C. Y. Peng, J. H. Yang, Felix Tsui, Shih-Fen Huang:
Ultra-High Density Deep Trench Capacitor (DTC) for 3DIC Integration. 3DIC 2024: 1-3

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