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"SiGe BiCMOS Technology with Embedded Microchannels based on Cu Pillar PCB ..."
Emre Can Durmaz et al. (2023)
- Emre Can Durmaz, Carl Heine, Zhibo Cao, Jens Lehmann, Dietmar Kissinger, Matthias Wietstruck:
SiGe BiCMOS Technology with Embedded Microchannels based on Cu Pillar PCB Integration Enabling sub-THz Microfluidic Sensor Applications. 3DIC 2023: 1-4
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