"Robust tracking control of a novel piezodriven monolithic flexure-hinge stage."

Yi-Cheng Huang, Chih-Hao Cheng (2004)

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DOI: 10.1109/CCA.2004.1387497

access: closed

type: Conference or Workshop Paper

metadata version: 2025-01-14

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Yi-Cheng Huang, Chih-Hao Cheng:
Robust tracking control of a novel piezodriven monolithic flexure-hinge stage. CCA 2004: 977-982

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